TW202129215A - Vapor chamber - Google Patents

Abstract

This invention provides a vapor chamber that has excellent heat dissipation performance and resistance to pressure from an external environment and in which the flow of a working fluid is made smoother. The vapor chamber comprises: a container in which a hollow section is formed by one plate-shaped body thermally connected to a heat-emitting body and another plate-shaped body opposing the one plate-shaped body; a working fluid enclosed in the hollow section; and a wick structure that is housed in the hollow section and is a separate entity from the container. The container is provided with a recess in the outer surface of the other plate-shaped body, and the recess serves as a support that protrudes from the inner surface of the other plate-shaped body toward the one plate-shaped body. The angle formed by the inner surface of the other plate-shaped body and the support at a rise base section where the support starts to rise from the inner surface of the other plate-shaped body is an obtuse angle.

Description

Steam room

The present invention relates to a vapor chamber that has excellent resistance to pressure from the external environment and excellent heat dissipation characteristics, and the fluidity of the operating fluid is smoothed.

It is mounted on the electric. Electronic components such as semiconductor elements in electronic devices have increased heat generation due to high-functionality and high-density mounting. In recent years, their cooling has become more important. In addition, heating elements such as electronic parts are sometimes arranged in small spaces due to the miniaturization of electronic devices. A vapor chamber (flat heat pipe) is sometimes used to cool heating elements such as electronic parts arranged in a narrow space. In addition, from the viewpoint of miniaturization and weight reduction of the steam chamber, the thickness of the container of the steam chamber is required to be thinner.

The inside of the container is pressure-reduced. Therefore, when the thickness of the container is reduced, the container may be deformed due to atmospheric pressure or load. When the container is deformed, the flow characteristics of the actuating fluid decrease, and the heat dissipation characteristics of the vapor chamber sometimes decrease. Here, in the container of the vapor chamber, in order to maintain the internal space of the container, a support part may be provided.

The prior art in which a support part is provided inside the container is proposed, for example, a pillar that supports the container from the inside, an actuating fluid enclosed in the inner space of the container, and a wick arranged in the inner space of the container, so that there is a container, and It is arranged in the inner space of the container, and at least a part of the main inner surface of the container is exposed to the vapor chamber of the inner space of the container (Patent Document 1).

However, in Patent Document 1, etc., in the conventional steam chamber, the shape of the support portion is a quadrangular shape when viewed from the side. Therefore, in the previous vapor chamber, the ascending base of the container from the supporting part is at right angles to the inner surface of the container. When the included angle becomes a right angle, at the rising base of the support part, that is, the boundary part between the support part and the inner surface of the container, it becomes easier to store the liquid phase operating fluid, and the liquid phase operating fluid sometimes cannot flow back smoothly. To the heated side of the container. In addition, the side surface of the supporting part exposed to the internal space of the container cannot contribute to the heat dissipation of the vapor chamber, so there is room for improvement in the heat dissipation characteristics of the vapor chamber. [Patent Literature]

[Patent Document 1] Japanese Patent Application Publication No. 2018-189349

In view of the above situation, the purpose of the present invention is to provide a vapor chamber with excellent resistance to pressure from the external environment and excellent heat dissipation characteristics, and smooth flow of the operating fluid.

The gist of the structure of the present invention is as follows. [1] A steam chamber, which includes: The container has a cavity formed by thermally connecting a plate-shaped body of one of the heating elements and a plate-shaped body of the other opposite to the plate-shaped body of the one; The actuating fluid is enclosed in the cavity; and The wick structure is a different entity from the container contained in the cavity, The container is provided with a concave portion on the outer surface of the other plate-shaped body, and has a supporting portion protruding from the inner surface of the other plate-shaped body toward the plate-shaped body of the one; The angle between the concave portion in the ascending base from the inner surface of the other plate-shaped body of the concave portion and the inner surface of the other plate-shaped body is an obtuse angle. [2] As in the steam chamber of [1], the area in the extending direction of the plate-shaped body of the other of the support portion decreases as the ascending base portion goes to the tip portion of the support portion. [3] The steam chamber as in [1] or [2], wherein the side surface of the support part exposed to the cavity part has a curved surface. [4] The vapor chamber of any one of [1] to [3], wherein the tip portion of the support portion has a flat portion, and the flat portion is connected with the wick structure. [5] In the steam chamber of any one of [1] to [4], the included angle is 91° to 150°. [6] As in the vapor chamber of any one of [1] to [5], the area of the rising base of the support portion of the tip portion of the support portion is different from the extension direction of the plate-shaped body of the other The area ratio is 1.1 to 10. [7] Such as the steam chamber of any one of [1] to [6], wherein the supporting portion is provided with a plurality of plate-shaped bodies of the other, and the predetermined supporting portion is adjacent to the predetermined supporting portion The two other supporting parts of the supporting part are arranged in a triangle. [8] The vapor chamber of any one of [1] to [7], wherein the wick structure system is a metal mesh member. [9] As in the vapor chamber of any one of [1] to [8], the peripheral edge of the plate-shaped body of the one and the peripheral edge of the plate-shaped body of the other are made by optical fiber laser It is welded and joined to form a container. [10] As in the steam chamber of any one of [1] to [9], the thickness of the plate-shaped body of the one is thicker than the thickness of the plate-shaped body of the other. [11] As in the steam chamber of any one of [1] to [9], the thickness of the plate-shaped body of the one is thinner than the thickness of the plate-shaped body of the other. [12] The steam chamber of any one of [1] to [11], wherein the container has a curved portion in the thickness direction of the container.

In the above aspect, in the container, the plate-shaped body thermally connected to one of the heating elements is mainly used as a heating surface, and the plate-shaped body of the other is opposite to the plate-shaped body of one. The main function of the system is as a heat dissipation surface.

In addition, in this patent specification, the "inner surface of the other plate-shaped body" and "the outer surface of the other plate-shaped body" do not include the part that becomes the support portion. Therefore, in the above aspect, the supporting portion is integrated with the other plate-shaped body. In addition, the support part is viewed from the inside of the container and rises from the inner surface of the plate-shaped body of the other, thereby becoming protruding from the inner surface of the plate-shaped body of the other to the direction of the plate-shaped body of the other. Convex.

Furthermore, in the above aspect, the angle between the supporting portion in the ascending base portion corresponding to the inner surface of the other plate-shaped body of the other one of the supporting portions and the inner surface of the plate-shaped body of the other is an obtuse angle. , The angle between the outer surface of the recess provided on the outer surface of the other plate-shaped body and the outer surface of the other plate-shaped body is an acute angle. Moreover, in the specification of this patent, the so-called "angle" means the "angle" in the side view of the thickness direction of the container. [Invention Effect]

When according to the aspect of the present invention, the angle between the supporting part in the ascending base from the plate-shaped body of the other supporting part and the plate-shaped body of the other is an obtuse angle, thereby preventing the liquid phase The operating fluid is stored in the boundary part between the support part and the flat part of the other plate-shaped body. Therefore, the working fluid in the liquid phase can flow back smoothly from the plate-shaped body of the other to the plate-shaped body as one of the heating surfaces of the container. Furthermore, when according to the aspect of the present invention, the angle between the outer surface of the concave portion provided on the outer surface of the other plate-shaped body and the outer surface of the other plate-shaped body becomes an acute angle, thereby , The inflow of gas into the recess is smoothed, the condensation characteristics of the working fluid in the gas phase are improved, and the heat dissipation characteristics of the vapor chamber are improved.

According to the aspect of the present invention, the container is provided with a recess on the outer surface of the other plate-shaped body, and has a protrusion from the inner surface of the other plate-shaped body toward the plate-shaped body of one. The supporting part of the container, thereby, the surface area of the outer surface of the heat dissipation surface side of the container is increased, and the heat dissipation characteristics of the vapor chamber are improved. Moreover, when in accordance with the aspect of the present invention, by having the above-mentioned supporting part, the resistance to the pressure from the external environment can be contributed to the container.

According to the aspect of the present invention, the area in the extending direction of the other plate-shaped body of the support portion is reduced from the ascending base to the tip portion, thereby exposing the support portion to the hollow portion The side part of the steam chamber also greatly contributes to heat dissipation, so the heat dissipation characteristics of the vapor chamber are further improved.

When in accordance with the aspect of the present invention, the side surface of the supporting portion exposed to the cavity has a curved surface, whereby the liquid-phase operating flow system is transferred to the side surface of the supporting portion, which can flow back from the heat dissipation surface of the container more smoothly To the heated side.

According to the aspect of the present invention, the tip portion of the support portion has a flat portion, and the flat portion is in contact with the wick structure, whereby the support portion plays a role in the plate-shaped body of one of the wick structure. The function of pushing on the inner surface. Therefore, the wick structure system is stably fixed on the inner surface of one plate-shaped body, so that the liquid phase operating fluid can be stably supplied to the heating surface of the container.

When according to the aspect of the present invention, by the angle between 91° and 150°, it is possible to improve the prevention of working fluid in the liquid phase at the boundary between the support part and the flat part of the other plate-shaped body in a well-balanced manner. The storage and the resistance of the container to the pressure from the external environment.

When according to the aspect of the present invention, the ratio of the area of the rising base of the support portion to the area of the tip portion of the support portion is 1.1 or more and 10 or less, which can improve the prevention between the support portion and the other in a well-balanced manner. The storage of the liquid phase operating fluid in the boundary part of the flat part of the plate-shaped body, and the resistance of the container to the pressure from the external environment.

When according to the aspect of the present invention, the plurality of supporting parts are arranged in a triangular configuration, thereby, the resistance of the container to the pressure from the external environment can be further improved, and the pressure of the container from the external environment can not be damaged. Tolerably, reduce the number of supporting parts.

When according to the aspect of the present invention, the plate-shaped body of one and the plate-shaped system of the other are joined by optical fiber laser, thereby improving the bonding strength between the plate-shaped body of one and the plate-shaped body of the other , It can contribute excellent sealing performance to the container, and can prevent the heat load of one plate-shaped body and the other plate-shaped body to the container when joining, so it can contribute excellent mechanical strength to the container.

Hereinafter, the steam chamber of the first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a side sectional view of a steam chamber according to the first embodiment of the present invention. Fig. 2 is a plan view of the steam chamber of the first embodiment of the present invention.

As shown in Figures 1 and 2, the steam chamber 1 of the first embodiment of the present invention has: a container 10 with two opposing plate-shaped bodies, that is, a plate-shaped body 11 overlapping one and opposing one The other of the plate-shaped body 11 is the plate-shaped body 12, and the cavity 13 is formed in a plan view (from the vertical direction with respect to the plane of the steam chamber 1, that is, from the thickness method relative to the steam chamber 1 (In terms of parallel directions, visually recognized), it is a plane with a predetermined shape; and the working fluid (not shown) is enclosed in the cavity 13. In addition, in the cavity 13, a wick structure 15 having a capillary structure is housed. In addition, the space between the inner surface of the other plate-shaped body 12 and the wick structure 15 forms a vapor flow path 18 through which a gaseous operating fluid flows. The top-view shape of the container 10 is not particularly limited, but the steam chamber 1 is a quadrangular shape for convenience of description. In addition, the flat container 10 extends along the same plane.

One of the plate-shaped bodies 11 is in the shape of a flat plate. The other plate-shaped body 12 is plate-shaped, but the portion after removing the peripheral edge portion 20 of the other plate-shaped body 12 is plastically deformed in a convex shape. The other part of the plate-shaped body 12 that protrudes outward and plastically deforms in a convex shape is the convex part 14 of the container 10, and the inside of the convex part 14 becomes the cavity 13. The cavity 13 is a sealed space, and is decompressed by air extraction.

The wick structure 15 is a different entity from the container 10, that is, it is a different member from the container 10. In the vapor chamber 1, the wick structure 15 and the container 10 are not joined. The wick structure 15 extends in a flat shape along the plane of the flat container 10. In the steam chamber 1, the wick structure 15 is attached to the inner surface 21 of one plate-shaped body 11 and extends in a state of surface contact with the inner surface 21. The inner surface 21 of the plate-shaped body 11 is a smooth surface. Therefore, the inner surface 21 of one plate-shaped body 11 does not function as a wick structure. The wick structure 15 extends over the entire inner surface 21 of the one plate-shaped body 11. In addition, the space formed between the inner surface 22 of the other plate-shaped body 12 and the first wick structure 15 serves as the vapor flow path 18 through which the working fluid mainly in the gas phase flows.

If the wick structure 15 is a member that generates capillary force, it is not particularly limited. For example, a metal mesh member may be mentioned. The material of the mesh member may, for example, be metals such as copper, copper alloy, aluminum, aluminum alloy, and stainless steel. In addition, the wick structure 15 is a mesh member made of metal, and examples thereof include sintered bodies of metal powders such as copper and copper alloys, and sintered bodies of short metal fibers of copper and copper alloys. In addition, in the vapor chamber 1, a metal mesh member is used for the wick structure 15.

The thickness of the wick structure 15 can be appropriately selected according to the use condition of the steam chamber 1, but, for example, 0.1 mm to 0.2 mm can be mentioned. The thickness of the wick structure 15 can be, for example, a mesh member of a desired thickness can be laid in a plane shape, or a plurality of mesh members can be stacked, or a mesh member can be bent as needed, and the mesh members can be overlapped in the thickness direction. , To adjust. In addition, in the steam chamber 1, the entire inner surface 21 of the plate-shaped body 11 stretches one piece, and one mesh member is laid in a flat shape.

As shown in FIG. 1, the inner surface 22 of the other plate-shaped body 12 is a flat surface. In addition, the inner surface 22 of the other plate-shaped body 12 is a smooth surface. Therefore, the inner surface 22 of the other plate-shaped body 12 does not function as a wick structure. A support portion 17 is provided on the inner surface 22 side of the plate-shaped body 12 corresponding to the other direction of the cavity portion 13. The supporting portion 17 is viewed from the inside of the container 10, rising from the inner surface 22 of the plate-shaped body 12 of the other to the direction of the inner surface 21 of the plate-shaped body 11 of one, whereby it becomes from the other The inner surface 22 of the plate-shaped body 12 of one is a convex portion protruding in the direction of the inner surface 21 of the plate-shaped body 11 of one. In the container 10 of the steam chamber 1, a plurality of supporting parts 27, 27, 27 are provided. . . . In the container 10 of the steam chamber 1, the outer surface 24 of the other plate-shaped body 12 is a flat surface. A plurality of recesses 27, 27, 27 are provided on the outer surface 24 side of the other plate-shaped body 12. . . , Thereby, the supporting portion 17 is formed.

The supporting portion 17 has a function of maintaining the internal space of the container 10 that is decompressed, that is, maintaining the cavity 13. The supporting portion 17 extends from the inner surface 22 of the other plate-shaped body 12 toward the one plate-shaped body 11.

The angle θ1 between the supporting portion 17 in the ascending base 30 starting from the inner surface 22 of the other plate-shaped body 12 of the other supporting portion 17 and the inner surface 22 of the other plate-shaped body 12 is an obtuse angle, that is, It becomes more than 90° and less than 180°. In addition, the angle θ2 between the outer surface 28 of the recess 27 provided on the outer surface 24 of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is an acute angle, that is, becomes more than 0. ° and less than 90 °.

The top view shape of the support portion 17, that is, the top view shape of the recess 27 is not particularly limited, and examples include polygons such as a circle, an ellipse, a quadrangle, and a pentagon. As shown in FIG. 2, in the steam chamber 1, it becomes a circular shape. Moreover, as shown in FIG. 1, the area in the extending direction of the plate-shaped body 14 of the other support portion 17 decreases as the rising base 30 of the support portion 17 moves to the tip portion 31 of the support portion 17. Corresponding to the above aspect, in FIG. 1, the width of the support portion 17 is gradually narrowed as the ascending base portion 30 of the self-supporting portion 17 moves to the tip portion 31 of the support portion 17.

In the steam chamber 1, the included angle θ1 is along the circumferential direction of the support portion 17, and is roughly uniform. In addition, the included angle θ2 is along the circumferential direction of the concave portion 27 and is approximately uniform.

The side surface portion 32 of the support portion 17 is exposed to the cavity portion 13. The surface of the side portion 32 of the support portion 17 is a smooth surface. The shape of the side surface portion 32 of the support portion 17 in a side view is not particularly limited, and examples thereof include a linear shape, a shape having a curved portion, and an arc shape. In the steam chamber 1, the side surface 32 of the support portion 17 has a side view shape that is arc-shaped. Therefore, the side surface 32 of the support portion 17 exposed to the cavity 13 has a curved surface, and the entire side surface 32 is a curved surface.

In the steam chamber 1, in the ascending base 30 of the support portion 17 starting from the inner surface 22 of the other plate-shaped body 12, the angle θ1 between the support portion 17 and the inner surface of the other plate-shaped body 12 is set The obtuse angle can prevent the liquid phase of the working fluid from being stored in the boundary part between the support part 17 and the inner surface 22 of the other plate-shaped body 12 as a flat part. Therefore, the working fluid in the liquid phase can flow back smoothly from the plate-shaped body 12 which serves as the other heat-radiating surface of the container 10 to the plate-shaped body 11 which serves as one of the heat-receiving surfaces of the container 10. In addition, in the steam chamber 1, the outer surface 28 of the recessed portion 27 provided on the outer surface 24 of the other plate-shaped body 12 forms an acute angle θ2 with the outer surface 24 of the other plate-shaped body 12 As a result, the inflow of gas into the recessed portion 27 is smoothed, so as to improve the condensation characteristics of the working fluid in the gas phase, thereby improving the heat dissipation characteristics of the vapor chamber 1.

In addition, in the steam chamber 1, in the container 10, a recess 27 is provided on the outer surface 24 of the other plate-shaped body 12, and a recessed portion 27 is formed from the inner surface 22 of the other plate-shaped body 12. The support portion 17 protruding in the direction of the plate-shaped body 11 increases the surface area of the outer surface of the container 10 on the side of the heat dissipation surface. Therefore, in the vapor chamber 1, the heat dissipation characteristics are improved. In addition, the steam chamber 1 is provided with a supporting portion 17 so as to contribute resistance to pressure from the external environment to the container 10.

In addition, the area in the extending direction of the plate-shaped body 12 of the other support portion 17 is reduced from the ascending base portion 30 to the tip portion 31, thereby exposing to the side portion of the support portion 17 of the hollow portion 13 32. It can also contribute a lot to the heat dissipation, so the heat dissipation characteristics of the steam chamber 1 are further improved.

In addition, the side surface portion 32 of the support portion 17 exposed to the cavity 13 has a curved surface, whereby the liquid-phase operating flow system is transmitted on the side surface portion 32 of the support portion 17, from the heat dissipation surface of the container 10 to the heating surface, that is , From the plate-shaped body 12 of the other to the direction of the plate-shaped body 11 of the other, it can flow back more smoothly.

As shown in FIG. 1, the tip portion 31 of the support portion 17 is a flat portion, and the flat portion of the tip portion 31 is in contact with the wick structure 15. Therefore, the support portion 17 also exerts a function of pressing the wick structure 15 toward the inner surface 21 of one plate-like body 11, thereby fixing it to the inner surface 21 of the one plate-like body 11. From the above, it can be seen that the wick structure 15 is stably fixed to the inner surface 1 of one plate-shaped body 11. Therefore, it is possible to stably supply the liquid phase operating fluid to the heating surface of the container 10, and it can be reliably prevented Dry out. Furthermore, in the steam chamber 1, the tip portion 31 of the support portion 17 is not in contact with the inner surface 21 of the plate-shaped body 11 of one of the containers 10.

In the vapor chamber 1, the space between the support portion 17 and the support portion 17 becomes the vapor flow path 18 through which the working fluid in the gas phase flows. The height of the support portion 17 is appropriately selected corresponding to the thickness of the steam chamber 1, the thickness of one plate 11 and the other plate 12, and the thickness of the wick structure 15, for example, 0.1 mm～0.8mm.

If the angle θ1 between the support portion 17 in the ascending base 30 starting from the inner surface 22 of the other plate-shaped body 12 and the inner surface 22 of the other plate-shaped body 12 is an obtuse angle, it is not particularly limited. However, the lower limit is to prevent the liquid phase of the operating fluid from being stored at the boundary between the support portion 17 and the inner surface 22 of the other plate-shaped body 12, which does improve the resistance of the container to the pressure from the external environment. From the point of view of sex, it is best to be 91°. From the point of view that it does not impair the resistance of the container to pressure from the external environment and does prevent the storage of the liquid phase of the actuating fluid, it is better to be 105°. From the standpoint of preventing the storage of the active fluid in the liquid phase more reliably, 115° is particularly preferable. In addition, the upper limit of the included angle θ1 is based on the point that it does not damage the resistance of the container to the pressure from the external environment, and more reliably prevents the storage of the liquid phase operating fluid, it is best to be 150°, which is self-sustaining. To prevent the storage of the actuating fluid in the liquid phase, and to obtain the resistance to the pressure of the external environment, it is better if it is 140°, since it does improve the resistance to the pressure of the external environment. From the point of view of sex, 135° is particularly good.

The angle θ2 between the outer surface 28 of the concave portion 27 on the outer surface 24 side of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 is a self-balanced way to improve the gas flow to the concave portion 27 For the smoothness of inflow and the resistance of the container 10 to the pressure from the external environment, it is best to be 30° or more and 89° or less, 40° or more and 75° or less is better, 45° or more and 65° The following is particularly good.

In the steam chamber 1, the ratio of the area of the rising base portion 30 of the support portion 17 of the tip portion 31 of the support portion 17 to the area in the extending direction of the other plate-shaped body 12 exceeds 1.0. The ratio of the area is self-balanced to improve the resistance of the container 10 to prevent the liquid-phase operating fluid from being stored in the boundary portion between the support portion 17 and the inner surface 22 of the other plate-shaped body 12, and the pressure of the container 10 from the external environment From the viewpoint of receptivity, it is better to be 11 or more and 10 or less, more preferably 2.0 or more and 8.0 or less, and more preferably 3.0 or more and 6.0 or less.

As shown in FIG. 2, a plurality of support parts 17, 17, 17 are arranged in parallel in the container 10. . . . Plural support parts 17,17,17. . . The arrangement relationship is not particularly limited. However, in the steam chamber 1, the predetermined support portion 17 and the two other support portions 17 (17'), 17 (17') adjacent to the predetermined support portion 17, Tie into a triangle configuration. Plural support parts 17,17,17. . . It is arranged in a triangular configuration, thereby, the resistance of the container 10 to the pressure from the external environment can be improved, and the resistance of the container 10 to the pressure from the external environment can be reduced, and the setting of the supporting part 17 can be reduced. quantity. Also, plural support parts 17,17,17. . . The triangular arrangement can reduce the number of support portions 17 provided. Therefore, the vapor flow path 18 can be ensured more reliably, and the flow characteristics of the working fluid in the gas phase can be improved more reliably.

The method of forming the support portion 17 as the recessed portion 27 provided on the outer surface 24 side of the other plate-shaped body 12 may, for example, be a method of punching the other plate-shaped body 12 to provide the recessed portion 27 . In this case, the supporting portion 17 is integrally formed with the other plate-shaped body 12, and the material of the supporting portion 17 is the same as the material of the other plate-shaped body 12.

The material of the container 10 may, for example, be copper, aluminum, stainless steel, titanium, copper alloys, aluminum alloys, titanium alloys, and the like. These may be used alone, or two or more of them may be used in combination. The thickness of the steam chamber 1 can be, for example, 0.3 mm to 1.0 mm. The thickness of the plate-shaped body 11 of one and the thickness of the plate-shaped body 12 of the other may be the same or different. In the steam chamber 1, the thickness of the plate-shaped body 11 of one is the same as that of the plate-shaped body of the other. The thickness of the body 12 becomes the same. In the steam chamber 1, the thickness of one plate-like body 11 is approximately uniform across the entire plate-like body 11 of one stretch. In addition, the thickness of the plate-shaped body 12 of the other is approximately uniform across the entire plate-shaped body 12 of the other. The thickness of the one plate-shaped body 11 and the other plate-shaped body 12 may be 0.1 mm, for example.

Furthermore, in a state where the peripheral edge portion 40 of one plate-like body 11 is in surface contact with the peripheral edge portion 20 of the other plate-like body 12, the entire circumference of the peripheral edge portion 20 and the peripheral edge portion 40 are stretched to join, thereby , The container 10 as a closed container is formed, and the cavity 13 is sealed. The method of joining the peripheral portion 20 and the peripheral portion 40 is not particularly limited, and examples include diffusion bonding, pewter welding, laser welding by optical fiber lasers, ultrasonic welding, friction welding, pressure welding, etc. . Among them, the bonding strength between the plate-shaped body 11 of one and the plate-shaped body 12 of the other is improved, which can contribute to the excellent sealing performance of the container 10, and also prevent the contact between the plate-shaped body 11 of one and the other The heat load of the container 10 when the plate-shaped body 12 is joined can thereby contribute excellent mechanical strength to the container 10. From the point of view of preventing thermal deformation of the container 10, it is better to use optical fiber laser welding. . In addition, the bonding width may, for example, be 0.3 mm to 2.5 mm.

In addition, the actuating fluid enclosed in the cavity 13 can be appropriately selected according to the suitability of the material of the container 10, for example, water, or alternatives to Freon, fluorocarbons, cyclopentane, and ethylene glycol. , These and water mixtures, etc.

Next, the operation of the steam chamber 1 of the first embodiment of the present invention will be described with reference to FIG. 1. In the container 10, the heating element 100 is thermally connected to the outer surface 23 of one plate-shaped body 11, the plate-shaped body 11 of one acts as a heating surface, and the outer surface of the plate-shaped body 11 of the other Among 23, the part in contact with the heating element 100 functions as a heat receiving part. When the vapor chamber 1 is heated from the heating element 100 by the heating part, the working fluid of the liquid phase enclosed in the cavity 13 changes phase from the liquid phase to the gas phase by the heating part, and the gas phase after the phase change The operating fluid circulates in the steam flow path 18 to move from the heat receiving part of the steam chamber 1 to the main heat dissipation surface (that is, the other plate-shaped body 12). The working fluid in the gas phase after moving from the heat receiving part to the main heat dissipation surface uses the heat dissipation surface to dissipate the latent heat, and the phase changes from the gas phase to the liquid phase. At this time, a concave portion 27 is formed on the outer surface of the heat dissipation surface side of the container 10, and the surface area of the outer surface on the heat dissipation surface side is increased. In addition, the gas flows into the concave portion 27 to dissipate heat from the heat dissipation surface, that is, the gaseous phase. The condensation of the operating fluid is promoted. Furthermore, the side surface portion 32 of the support portion 17 exposed to the cavity 13 also contributes significantly to the heat dissipation, thereby promoting the heat dissipation system of the heat dissipation surface. The latent heat released by the heat dissipation surface is further released to the external environment of the steam chamber 1. The actuating fluid, which undergoes a phase change from the gaseous phase to the liquid phase by the heat-dissipating surface, passes through the side part 32 of the support part 17, or drips from the heat-dissipating surface, and flows back to the heat-receiving surface (that is, the plate-shaped body 11 of one). ). The working fluid in the liquid phase that has returned to the heated surface of the container 10 is transported to the heated part by the capillary force of the wick structure 15.

In addition, the vapor chamber 1 can be operated by natural air cooling without using a cooling air supply device such as a blower (that is, forced air cooling).

Next, the steam chamber according to the second embodiment of the present invention will be explained. The steam chamber of the second embodiment example has the same main parts as the steam chamber of the first embodiment. Therefore, the same reference numerals are used to describe the structural elements that are the same as the steam chamber of the first embodiment. 3 is a side sectional view of the steam chamber of the second embodiment of the present invention.

In the steam chamber 1 of the first embodiment, the side surface 32 of the support portion 17 has an arc shape in a side view. However, instead of this, as shown in FIG. 3, it is shown in the steam chamber of the second embodiment. In 2, the side surface 32 of the support portion 17 has a linear shape in a side view. In addition, in the steam chamber 2, as in the steam chamber 1 of the first embodiment, the tip portion 31 of the support portion 17 is a flat portion, and the flat portion of the tip portion 31 is in contact with the wick structure 15.

In the steam chamber 2, the area in the extending direction of the plate-shaped body 14 of the other support portion 17 decreases as the base portion 30 rises from the support portion 17 toward the tip portion 31 of the support portion 17. Corresponding to the above-mentioned aspect, in FIG. 3, as the ascending base 30 of the self-supporting portion 17 moves to the tip portion 31 of the supporting portion 17, the supporting portion 17 gradually narrows, and the lateral cross-section of the supporting portion 17 is trapezoidal.

In the steam chamber 2, the plan view shape of the support portion 17, that is, the plan view shape of the recessed portion 27, is quadrangular.

In the steam chamber 2, as in the steam chamber 1 of the first embodiment, the area of the rising base 30 of the support portion 17 of the tip portion 31 of the support portion 17 is different from the extension direction of the plate-shaped body 12 of the other The ratio of this area exceeds 1.0. The ratio of the area is self-balanced to improve the resistance of the container 10 to prevent the liquid-phase operating fluid from being stored at the boundary portion between the support portion 17 and the inner surface 22 of the other plate-shaped body 12, and the pressure of the container 10 from the external environment. In terms of receptivity, it is best to be 1.1 or more and 10 or less, more preferably 2.0 or more and 8.0 or less, and more preferably 3.0 or more and 6.0 or less.

In the steam chamber 2, as in the steam chamber 1 of the first embodiment, in the rising base 30 of the support part 17 from the inner surface 22 of the other plate-shaped body 12, the support part 17 and the other The angle θ1 between the inner surface of the plate-shaped body 12 of one is an obtuse angle, which can prevent the boundary between the support portion 17 and the inner surface 22 of the plate-shaped body 12 of the other as a flat portion from storing liquid-phase operating fluid . Therefore, the working fluid in the liquid phase is the plate-like body 12 that can act as the heat-radiating surface of the container 10 to the plate-like body 11 that serves as the heat-receiving surface of the container 10, smoothly地Reflux. In addition, in the steam chamber 2, the outer surface 28 of the recess 27 provided on the outer surface 24 of the other plate-shaped body 12 and the outer surface 24 of the other plate-shaped body 12 form an angle θ2 as With the acute angle, the inflow of gas into the recessed portion 27 is smoothed, and the condensation characteristics of the working fluid in the gas phase are improved, and further, the heat dissipation characteristics of the vapor chamber 2 are improved.

In addition, in the steam chamber 2, as in the steam chamber 1 of the first embodiment, by providing a recess 27 on the outer surface 24 of the other plate-shaped body 12, the container 10 is formed with the other The inner surface 22 of the plate-shaped body 12 and the support portion 17 protruding in the direction of one of the plate-shaped bodies 11, thereby increasing the surface area of the outer surface of the container 10 on the side of the heat dissipation surface. Therefore, the vapor chamber 2 also improves the heat dissipation characteristics. In addition, the steam chamber 2 also has a support portion 17, thereby contributing to the container 10 resistance to pressure from the external environment.

Next, the steam chamber of the third embodiment of the present invention will be described. The steam chamber of the third embodiment is the same as the steam chambers of the first and second embodiments. Therefore, the same structural elements as the steam chambers of the first and second embodiments are used. The number is to illustrate. 4 is a side sectional view of the steam chamber of the third embodiment of the present invention.

In the steam chambers 1 and 2 of the first and second embodiments, the thickness of one plate-like body 11 and the thickness of the other plate-like body 12 are the same, but instead of this, as shown in FIG. 4 It is shown that in the steam chamber 3 of the third embodiment, the thickness of the other plate-shaped body 12 becomes thicker than the thickness of the one plate-shaped body 11. The thickness of the plate-shaped body 11 of one is the whole of the plate-shaped body 11 of one stretch, and is roughly uniform. In addition, the thickness of the other plate-shaped body 12 extends over the whole of the other plate-shaped body 12, and is roughly uniform. In addition, in the steam chamber 3, similarly to the steam chambers 1, 2, by providing a recess 27 on the outer surface 24 of the other plate-shaped body 12, the container 10 is formed with a plate-shaped body 12 from the other. The inner surface 22 of the support portion 17 protrudes toward the direction of the plate-shaped body 11 of one.

The thickness of one plate-shaped body 11 is not particularly limited, but, for example, 0.08 mm. The thickness of the other plate-shaped body 12 is not particularly limited, but it can be, for example, 0.12 mm. The thickness of the steam chamber 3 can be, for example, 0.3 mm to 1.0 mm. In addition, in the steam chamber 3, a heating element 100 is also thermally connected to one of the plate-shaped bodies 11.

In the vapor chamber 3, there is a support portion 17 formed by providing a recessed portion 27 on the outer surface 24 of the other plate-shaped body 12, thereby contributing the resistance to pressure from the external environment to the container 10 Moreover, the plate-shaped body 12 having the other of the supporting parts 17 is thickened, whereby the resistance of the container 10 to the pressure from the external environment is further improved, and the excellent mechanical strength can be further contributed to Container 10. Therefore, even if a load is applied to the container 10 due to the installation of the steam chamber 3 or the conditions of use, the container 10 can be more reliably prevented from warping.

Next, the steam chamber of the fourth embodiment of the present invention will be described. The steam chamber of the fourth embodiment is the same as the steam chamber of the first to third embodiments. Therefore, the same structural elements as the steam chamber of the first to third embodiments are used. The number is to illustrate. 5 is a side sectional view of the steam chamber of the fourth embodiment of the present invention.

In the steam chambers 1 and 2 of the first and second embodiments, the thickness of one plate-shaped body 11 and the thickness of the other plate-shaped body 12 are the same, but instead of this, as shown in FIG. 5 It is shown that in the steam chamber 4 of the fourth embodiment, the thickness of the plate-shaped body 11 of one is thicker than the thickness of the plate-shaped body 12 of the other. The thickness of the plate-shaped body 11 of one is the whole of the plate-shaped body 11 of one stretch, and is roughly uniform. In addition, the thickness of the other plate-shaped body 12 extends over the whole of the other plate-shaped body 12, and is roughly uniform. In addition, in the steam chamber 4, similarly to the steam chambers 1, 2, a recess 27 is provided on the outer surface 24 of the other plate-shaped body 12, and the container 10 is formed with a plate-shaped body from the other. The inner surface 22 of 12 is a support portion 17 protruding toward one of the plate-shaped bodies 11.

The thickness of one plate-shaped body 11 is not particularly limited, but, for example, 0.12 mm can be mentioned. The thickness of the other plate-shaped body 12 is not particularly limited, but, for example, 0.08 mm. The thickness of the steam chamber 4 may, for example, be 0.3 mm to 1.0 mm. In addition, in the steam chamber 4, a heating element 100 is thermally connected to one plate-shaped body 11.

In the vapor chamber 4, there is a support portion 17 formed by providing a recessed portion 27 on the outer surface 24 of the other plate-shaped body 12, thereby contributing the resistance to pressure from the external environment to the container 10 , The plate-like body 11 of one is thickened, whereby the mechanical strength of the plate-like body 11 of the one is improved, and the deformation of the plate-like body 11 such as bending or strain can be prevented. Therefore, in the vapor chamber 4, the container 10 continues to have resistance to pressure from the external environment, and the contact between the heating element 100 and the container 10 is improved, thereby contributing excellent thermal connectivity to the heating element 100.

Next, the steam chamber of the fifth embodiment of the present invention will be described. The steam chamber of the fifth embodiment is the same as the steam chamber of the first to fourth embodiments. Therefore, the same structural elements as the steam chamber of the first to fourth embodiments are used. The number is to illustrate. 6 is a side sectional view of the steam chamber of the fifth embodiment of the present invention.

In the vapor chambers 1, 2, 2, and 4 of the first to fourth embodiments, the flat container 10 extends along the same plane, but instead of this, as shown in FIG. 6, in the fifth embodiment In the steam chamber 5 of the example, the flat container 10 does not extend along the same plane, but has a curved portion 50. The curved portion 50 of the container 10 is a portion that is curved in the thickness direction of the container 10.

As shown in the steam chamber 5, in the steam chamber of the present invention having a support portion 17 formed by a recessed portion 27 on the outer surface 24 of the other plate-shaped body 12, it can be used in accordance with the conditions of use, etc. A curved portion 50 is formed in the thickness direction of the container 10. That is, in the steam chamber 5, it can be mounted on a machine having a curved part. In the steam chamber 5, even if the curved portion 50 is formed in the container 10, the support portion 17 is provided to prevent the container 10 in the curved portion 50 from buckling. Therefore, the hollow portion 13 can be maintained in the curved portion 50. As a result, the entire container 10 having the curved portion 50 can be stretched, and the cavity portion 13 can be maintained.

The method of forming the curved portion 50 is not particularly limited. However, for example, a method of mounting the container 10 on a mold to form the curved portion 50, a method of processing the container 10 by a bending machine to form the curved portion 50, and so on.

Next, other embodiments of the steam chamber of the present invention will be described. In the steam chamber of each of the above-mentioned embodiments, the wick structure 15 is the entire inner surface 21 of the plate-shaped body 11 that stretches, and a mesh member is laid flat. Instead of this, in the heat-receiving part of the plate-shaped body 11 to which one of the heating elements 100 is thermally connected, the wick structure 15 may be a state in which a plurality of mesh members are stacked. In this case, the wick structure 15 may be a mesh member in a part other than the heat receiving part. That is, the thickness of the wick structure 15 in the heat receiving part may be thicker than the thickness of the wick structure 15 in a part other than the heat receiving part. In the heated part of one plate-shaped body 11, a plurality of mesh members are overlapped, whereby the capillary force of the wick structure 15 in the heated part and the retention of the liquid phase of the working fluid are further improved, and the It surely prevents drying out in the heated part.

An oxide film may be further formed on the inner surface of the container 10 of the vapor chamber in each of the above-mentioned embodiments. The composition of the oxide film may be, for example, the metal oxide used in the container 10. In addition, the structure of the oxide film may, for example, be crystalline and amorphous. An oxide film is formed on the inner surface of the container 10, thereby preventing corrosion of the inner surface of the container 10 and improving the durability of the container 10.

In the steam chamber of each of the above embodiments, the surface of the side surface 32 of the support portion 17 is a smooth surface. However, instead of this, the surface of the side surface 32 may have a structure having capillary force. With the capillary force on the surface of the side portion 32, the liquid-phase operating flow system can flow back from the heat-radiating surface to the heated surface of the container 10 more smoothly. The structure having capillary force includes, for example, a sintered body layer of metal powder formed on the surface of the side surface 32, a plurality of fine grooves formed on the surface of the side surface 32, and the like.

In the vapor chamber of each of the above embodiments, the wick structure 15 is a plate-like body 11 that is not joined to one of the container 10, but instead of this, the wick structure 15 may be the same as the plate of one of the container 10 The bodies 11 are joined together. The wick structure 15 is joined to the plate-shaped body 11 of one of the containers 10, for example, the wick structure 15 is a sintered body of metal powder or a sintered body of short metal fibers, and a sintered body of the metal powder , The sintering system of the metal short fiber is provided on the inner surface 21 of the plate-shaped body 11 of one. In the above aspect, the liquid-phase active flow system can obtain heat from the heating part more reliably.

In the vapor chamber of each of the above-mentioned embodiments, the tip 31 of the support 17 is in contact with the wick structure 15, but instead of this, the tip 31 of the support 17 may be one that is in contact with the container 10. The inner surface 21 of the plate-shaped body 11. In this case, on the inner surface 21 of one plate-shaped body 11 and around the tip 31 of the support portion 17, there is a wick structure such as a sintered body of metal powder or a sintered body of short metal fibers. 15. The tip portion 31 of the support portion 17 is in contact with the inner surface 21 of the plate-shaped body 11 of one of the containers 10, thereby, the resistance of the container 10 to the pressure from the external environment is further improved.

In the vapor chamber of each of the above embodiments, the tip portion 31 of the support portion 17 is in contact with the wick structure 15, but instead of this, a plurality of support portions 17, 17, 17. . . Among them, the tip portion 31 of a part of the support portion 17 is in contact with the wick structure 15, and the tip portion 31 of the other support portion 17 is in contact with the inner surface 21 of the plate-shaped body 11 of one of the containers 10. . In this case, for example, in the heat-receiving portion of the plate-shaped body 11, the tip portion 31 of the support portion 17 is in contact with the wick structure 15 in the area other than the heat-receiving portion of the plate-shaped body 11 The tip portion 31 of the support portion 17 may also contact the inner surface 21 of one of the plate-shaped bodies 11. In the above aspect, the liquid-phase active flow system more reliably continuously obtains heat from the heating part, and the resistance of the vessel 10 to the pressure from the external environment is improved. [Possibility of Industrial Utilization]

The vapor chamber of the present invention has excellent resistance to pressure from the external environment and excellent heat dissipation characteristics, and the circulation of the operating fluid is smoothed. Therefore, it can be used in a wide range of fields, such as cooling and carrying information terminals or In the field of highly functionalized electronic devices such as personal computers, such as 2-in-1 tablet computers, the use value is very high.

1,2,3,4,5: steam chamber 10: container 11: The plate-like body of one 12: The plate of the other 13: Cavity 15: Wick structure 17: Support 18: Vapor flow path 27: recess 30: ascending base

[Figure 1] is a side sectional view of the steam chamber of the first embodiment of the present invention. [Figure 2] is a plan view of the steam chamber of the first embodiment of the present invention. [Fig. 3] is a side sectional view of the steam chamber of the second embodiment of the present invention. [Fig. 4] is a side sectional view of the steam chamber of the third embodiment of the present invention. [Fig. 5] is a side sectional view of the steam chamber of the fourth embodiment of the present invention. [Fig. 6] is a side sectional view of the steam chamber of the fifth embodiment of the present invention.

1: Steam room

10: container

11: The plate-like body of one

12: The plate of the other

13: Cavity

14: Convex

15: Wick structure

17: Support

18: Vapor flow path

20: Peripheral

21: inner surface

22: inner surface

23: Outer surface

24: Outer surface

27: recess

28: Outer surface

30: ascending base

31: Tip

32: Side

40: Peripheral

100: heating element

θ1: included angle

θ2: included angle

Claims (9)

A steam chamber, which includes: The container has a cavity formed by thermally connecting a plate-shaped body of one of the heating elements and a plate-shaped body of the other opposite to the plate-shaped body of the one; The actuating fluid is enclosed in the cavity; and The wick structure is contained in the cavity and is a different entity from the container, The container is provided with a concave portion on the outer surface of the other plate-shaped body, and has a supporting portion protruding from the inner surface of the other plate-shaped body toward the plate-shaped body of the one; The angle between the concave portion in the ascending base from the inner surface of the other plate-shaped body of the concave portion and the inner surface of the other plate-shaped body is between 91° and 150° and is set at The angle between the outer surface of the recess on the outer surface side of the other plate-shaped body and the outer surface of the other plate-shaped body is 45° or more and 65° or less, As the recessed portion protrudes from the ascending base toward the direction of the plate-shaped body of the one, the side view width becomes narrower, The ratio of the area in the extending direction of the other plate-shaped body of the rising base of the recessed portion of the tip portion of the recess to the area in the extending direction of the plate-shaped body of the other is 3.0 or more and 6.0 or less, The top view shape of the support part is circular or ellipse, and the side view shape of the side part of the support part is arc shape. Such as the steam chamber of claim 1, wherein the side part of the support part exposed to the cavity part has a curved surface. The vapor chamber of claim 1 or 2, wherein the tip portion of the support portion has a flat portion, and the flat portion is connected to the wick structure. The steam chamber of any one of claims 1 to 3, wherein the supporting portion is provided with a plurality of plate-shaped bodies of the other, the predetermined supporting portion and the two adjacent to the predetermined supporting portion The other supporting parts are arranged in a triangle. The vapor chamber of any one of claims 1 to 4, wherein the wick structure system is a metal mesh member. The vapor chamber of any one of claims 1 to 5, wherein the peripheral edge portion of the plate-shaped body of the one and the peripheral edge portion of the plate-shaped body of the other are welded by optical fiber laser welding. Join to form a container. The steam chamber of any one of claims 1 to 6, wherein the thickness of the plate-shaped body of the one is thicker than the thickness of the plate-shaped body of the other. The steam chamber of any one of claims 1 to 6, wherein the thickness of the plate-shaped body of the one is thinner than the thickness of the plate-shaped body of the other. According to the steam chamber of any one of claims 1 to 8, the container has a curved portion in the thickness direction of the container.

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