JP2021072296A - Processing apparatus - Google Patents

Abstract

To provide a highly efficient processing apparatus capable of irradiating an adhesive tape included in a frame unit with ultraviolet rays in a transport path.SOLUTION: A processing apparatus includes a cassette mount table for mounting thereon a cassette for accommodating a plurality of frame units each including an annular frame having an opening, an ultraviolet curable adhesive tape attached to one surface of the annular frame so as to block the opening, and a workpiece which is attached to and supported by the adhesive tape inside the opening, a chuck table for holding the frame unit, a transport unit for transporting the frame unit, a processing unit for processing the workpiece contained in the frame unit held by the chuck table, and a light source unit that overlaps a transport path of the frame unit transported by the transporting unit and extends along a direction intersecting the transport path. The light source unit includes a plurality of ultraviolet LEDs arranged along the direction intersecting the transport path with a length exceeding a width of the workpiece.SELECTED DRAWING: Figure 1

Description

The present invention relates to a processing apparatus for processing an workpiece supported by an ultraviolet curable adhesive tape attached to the annular frame so as to close the opening of the annular frame.

In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, first, a plurality of intersecting scheduled division lines are set on the surface of a work piece such as a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area partitioned by the planned division line.

After that, an ultraviolet curable adhesive tape is attached so as to close the opening of the annular frame, and the adhesive tape is attached to the work piece inside the opening. , To form an integrated frame unit. Then, the work piece included in the frame unit is processed and divided along the planned division line (street). Then, individual device chips are formed, and these are supported by the adhesive tape.

The UV-curable adhesive tape exerts a strong adhesive force while processing the workpiece and sufficiently holds the workpiece. Then, after the processing of the workpiece is completed, the adhesive tape is irradiated with ultraviolet rays to be cured so that the workpiece can be easily peeled off, and the adhesive strength is reduced. As described above, since the ultraviolet curable adhesive tape can reduce its adhesive strength only by irradiating it with ultraviolet rays, it is better to use the ultraviolet curable adhesive tape for the frame unit. However, conventionally, the process of irradiating the adhesive tape with ultraviolet rays has been carried out by a dedicated ultraviolet irradiation device, and it has been troublesome to carry the adhesive tape.

Therefore, an efficient processing device incorporating an ultraviolet irradiation unit in addition to the processing unit for processing the workpiece is used (see, for example, Patent Document 1). The ultraviolet irradiation unit is arranged at the lower part of an elevating and lowering cassette mounting table on which a cassette containing a plurality of frame units is placed. In the processing apparatus, the work piece is processed by the processing unit, then the frame unit is conveyed to the ultraviolet irradiation unit, and the adhesive tape is irradiated with ultraviolet rays by the ultraviolet irradiation unit.

By the way, before processing the work piece, the shape of the work piece and the position of the work piece in the frame unit are precisely detected, and the work piece is efficiently based on the detected shape and position of the work piece. A processing apparatus for performing processing is known (see Patent Document 2).

The processing apparatus includes a linear infrared light source arranged below the transport path of the frame unit so as to cross the transport path, and a camera arranged above the infrared light source. Then, the frame unit transported on the transport path is irradiated with infrared rays from the infrared light source, and the infrared rays transmitted through the frame unit are photographed by the camera. Then, since the infrared rays are blocked by the work piece, the shadow of the work piece appears in the captured image. Then, the shape of the workpiece and the position of the contour can be detected from the shadow reflected in the captured image.

JP-A-2017-188548 Japanese Unexamined Patent Publication No. 2006-214896

In recent years, before processing a work piece contained in a frame unit, a region of the adhesive tape attached to the work piece is irradiated with weak ultraviolet rays, and the hardness of the adhesive tape is appropriately increased in the region. The method of making it is being considered. If the hardness of the adhesive tape is appropriately increased before processing the work piece, for example, it is called chipping formed on the back surface of the work piece when the work piece is processed along the planned division line. Chips can be reduced.

However, in the above-mentioned processing apparatus including the ultraviolet irradiation unit, it is troublesome to convey the frame unit to the ultraviolet irradiation unit before and after processing and to irradiate the frame unit with ultraviolet rays. In addition, the time required for transporting the frame unit is increased, so that the processing efficiency is lowered.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a highly efficient processing apparatus capable of irradiating the adhesive tape contained in the frame unit with ultraviolet rays in the transport path of the frame unit. Is.

According to one aspect of the present invention, an annular frame having an opening, an ultraviolet curable adhesive tape attached to one surface of the annular frame so as to close the opening, and an adhesive tape attached to the adhesive tape inside the opening. A cassette mount on which cassettes accommodating a plurality of frame units including a supported workpiece and a plurality of frame units are placed, a chuck table holding the frame units, and the cassette mounted on the cassette mount. And the transfer unit that conveys the frame unit between the chuck table, the processing unit that processes the workpiece contained in the frame unit held by the chuck table, and the transfer unit. A light source unit that overlaps the transport path of the frame unit and extends along a direction intersecting the transport path, and the light source unit has a length exceeding the width of the workpiece and the transport path. Provided is a processing apparatus comprising a plurality of ultraviolet light LEDs arranged along the intersecting directions.

Preferably, a camera that is arranged facing the light source unit across the transport path and captures the workpiece included in the frame unit and the contour position of the workpiece included in the frame unit are positioned. The contour detection unit further includes a contour detection unit for detecting, and the contour detection unit captures the light emitted from the light source unit transmitted through the frame unit transported on the transport path by the transport unit with the camera. The position of the contour of the work piece is detected from the obtained captured image.

More preferably, it further includes a control unit that controls the transport unit, the light source unit, the camera, and the contour detection unit, and the light source unit has a length exceeding the width of the workpiece. Further including a plurality of non-ultraviolet light LEDs arranged along the direction intersecting the transport path and emitting non-ultraviolet light, the control unit has a condition registration unit in which processing conditions of the frame unit are registered. When the processing conditions include a function of reading the processing conditions of the frame unit registered in the condition registration unit and a process of irradiating the adhesive tape with ultraviolet rays before processing the work piece with the processing unit. The ultraviolet light LED is operated to irradiate the adhesive tape with ultraviolet rays, and the camera is made to image the ultraviolet rays transmitted through the frame unit, and the position of the outline of the work piece is based on the obtained image. When the processing conditions do not include the function of causing the contour detection unit to detect the above and the process of irradiating the adhesive tape with ultraviolet rays before processing the work piece with the processing unit, the non-ultraviolet LED is activated. The frame unit is irradiated with the non-ultraviolet light, the non-ultraviolet light transmitted through the frame unit is imaged by the camera, and the position of the contour of the workpiece is detected based on the obtained image. It has a function to make the unit detect it.

Then, preferably, the light source unit lights one or more ultraviolet LEDs located in a region of the plurality of ultraviolet LEDs that overlaps with the workpiece included in the frame unit conveyed by the transfer unit. ..

The processing apparatus according to one aspect of the present invention includes a light source unit that overlaps the transport path of the frame unit and extends in a direction that intersects the transport path, and the light source unit includes a plurality of ultraviolet LEDs. Therefore, when the frame unit is conveyed from the cassette mounted on the cassette mounting table to the chuck table, the light source unit can irradiate the frame unit with ultraviolet rays. Further, the frame unit can be irradiated with ultraviolet rays by the light source unit when it is conveyed to the cassette after the processing of the workpiece is completed.

That is, in the processing apparatus according to one aspect of the present invention, instead of the ultraviolet irradiation unit arranged below the cassette mounting table, a light source unit including a plurality of ultraviolet LEDs is arranged in a region overlapping the transport path. .. Therefore, it is not necessary to transport the frame unit to a specific place in order to irradiate the frame unit with ultraviolet rays.

In the transport path, a camera that captures light transmitted through the frame unit to detect the position of the shape and contour of the workpiece and a light source that emits the light may be arranged. Here, the transport path is designed to be as short as possible in order to shorten the transport time of the frame unit and improve the machining efficiency of the workpiece, and to reduce the size and space of the machining apparatus. .. Therefore, there is a possibility that a region in which the light source unit that emits ultraviolet rays can be arranged in addition to the light source that emits light transmitted through the frame unit cannot be secured.

However, in the processing apparatus according to the present embodiment, since the light source unit includes a plurality of ultraviolet light LEDs, other LEDs that emit light for imaging the frame unit can be arranged between the ultraviolet light LEDs. It is also possible to image the frame unit using the ultraviolet rays emitted by the ultraviolet LED. That is, since the light source unit also functions as a light source that emits light transmitted through the frame unit, the light source unit can be arranged without lengthening the transport path even in a processing device that images the frame unit on the transport path. ..

Therefore, according to one aspect of the present invention, there is provided a highly efficient processing apparatus capable of irradiating the adhesive tape contained in the frame unit with ultraviolet rays in the transport path of the frame unit.

It is a perspective view which shows typically the processing apparatus. It is a perspective view which shows typically the frame unit and the light source unit which are carried on the transport path by the transport unit. It is sectional drawing which shows typically the state which the frame unit is carried out from a cassette, and the work object is image | photographed with a camera. 4 (A), 4 (C), and 4 (E) are top views schematically showing the positional relationship between the frame unit conveyed from the cassette and the light source unit, and FIGS. 4 (B) and 4 (B). 4 (D) and 4 (F) are front views schematically showing a captured image in which a shadow of a work piece is captured. 5 (A), 5 (C), and 5 (E) are top views schematically showing the positional relationship between the frame unit conveyed from the cassette and the light source unit, and FIGS. 5 (B) and 5 (B). 5 (D) and 5 (F) are front views schematically showing a captured image in which a shadow of a work piece is captured. FIG. 6 (A) is a bottom view schematically showing an operating ultraviolet light LED among the ultraviolet light LEDs included in the light source unit overlapping the end portion of the work piece, and FIG. 6 (B) is a bottom view schematically showing the working ultraviolet light LED. It is a bottom view which shows typically the working ultraviolet light LED among the ultraviolet light LEDs included in the light source unit which overlaps with the central part of.

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a frame unit including a work piece processed by the processing apparatus according to the present embodiment will be described. FIG. 2 includes a perspective view schematically showing the frame unit 11.

The frame unit 11 has an annular frame 9 made of metal or the like having an opening 9a, an ultraviolet curable adhesive tape 7 attached to one surface of the annular frame 9 so as to close the opening 9a, and an adhesive inside the opening 9a. The work piece 1 attached to and supported by the tape 7 is included. The adhesive tape 7 is, for example, a tape called a dicing tape. The workpiece 1 before and after processing is supported by the adhesive tape 7.

The workpiece 1 is, for example, a wafer made of a material such as silicon, SiC (silicon carbide), or other semiconductor, or a disk-shaped substrate made of a material such as sapphire, glass, or quartz. As shown in FIG. 1, a plurality of scheduled division lines 3 intersecting each other are set on the surface 1a of the workpiece 1.

A device 5 such as an IC (Integrated circuit) or an LED (Light emitting diode) is formed in each area partitioned by the planned division line 3. When the workpiece 1 is divided along the planned division line 3, a plurality of device chips including the device 5 are formed. The individual device chips formed are supported by the adhesive tape 7. Then, the device chip is peeled off from the adhesive tape 7 and finally mounted on a predetermined mounting target.

The ultraviolet curable adhesive tape 7 includes, for example, a base material made of epoxy resin, acrylic resin, synthetic rubber, polyimide, etc. (not shown) and an adhesive layer containing the ultraviolet curable resin on the base material (not shown). And, including. While the adhesive layer exerts a strong adhesive force against the workpiece 1, it is cured when irradiated with ultraviolet rays (ultraviolet light) and the adhesive force is lowered. Then, when the adhesive tape 7 attached to the workpiece 1 is peeled off, the adhesive tape 7 is irradiated with ultraviolet rays to reduce the adhesive strength of the adhesive layer.

An annular frame 9 made of metal or the like is attached to the outer peripheral portion of the adhesive tape 7. In the frame unit 11, the workpiece 1 is attached and supported on the adhesive tape 7 inside the opening 9a of the annular frame 9. The workpiece 1 is carried into the processing apparatus in the state of the frame unit 11 integrated with the adhesive tape 7 and the annular frame 9, and is processed by the processing unit of the processing apparatus.

When the frame unit 11 is transported, a cassette 13 (see FIG. 1) capable of accommodating a plurality of frame units 11 is used. The cassette 13 containing the plurality of frame units 11 is transported to the processing apparatus, the frame unit 11 is carried out from the cassette 13, and the workpiece 1 is processed by the processing apparatus.

Next, each component of the processing apparatus according to the present embodiment will be described. FIG. 1 is a perspective view schematically showing the processing apparatus 2. The processing device 2 shown in FIG. 1 is a cutting device that cuts and divides the workpiece 1 with an annular cutting blade 44. Hereinafter, the processing device 2 will be described by taking the case where the processing device 2 according to the present embodiment is a cutting device as an example, but the processing device 2 according to the present embodiment is not limited to the cutting device. For example, it may be a laser processing device that laser-processes the work piece 1, a grinding device that grinds the work piece 1, or a polishing device that grinds the work piece 1.

As shown in FIG. 1, an opening 4a is formed on the upper surface of the corner portion of the base 4 of the processing apparatus 2, and the cassette mounting base 6 on which the cassette 13 is placed is housed in the opening 4a. The cassette mounting table 6 can be raised and lowered in the vertical direction (Z-axis direction) by an elevating mechanism (not shown). FIG. 3 includes a cross-sectional view schematically showing the cassette 13 and the cassette mounting table 6. The cassette 13 has a box-shaped housing in which a carry-in / out port 13b into which the frame unit 11 is carried in / out is formed on the front surface.

A plurality of support frames 13a projecting inside the housing are formed on the inner walls 13c on both side surfaces connected to the carry-in / out port 13b of the housing of the cassette 13. FIG. 3 shows one of the support frames 13a. The plurality of support frames 13a are formed at height positions corresponding to both inner walls 13c of the cassette 13. The frame unit 11 is mounted on a pair of corresponding support frames 13a formed on both inner walls 13c and housed in the cassette 13.

As shown in FIG. 1, a long opening 4b is formed on the side of the opening 4a in the X-axis direction (front-rear direction, machining feed direction). A ball screw type X-axis moving mechanism (machining feed unit) (not shown) and a dust-proof / drip-proof cover 8 that covers the upper part of the X-axis moving mechanism are arranged in the opening 4b. The X-axis moving mechanism includes an X-axis moving table 10, and moves the X-axis moving table 10 in the X-axis direction.

A chuck table (holding table) 12 for sucking and holding the frame unit 11 is provided on the X-axis moving table 10. The chuck table 12 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction, cutting feed direction). Further, the chuck table 12 moves in the X-axis direction by the X-axis moving mechanism described above (machining feed).

The upper surface of the chuck table 12 is a holding surface 12a for holding the frame unit 11. The holding surface 12a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 12. Further, around the chuck table 12, four clamps 12b for fixing the annular frame 9 included in the frame unit 11 from all sides are provided.

Above the opening 4b, a pair of guide rails (temporary placement areas) 16 are provided which are approached and separated while maintaining a state parallel to the Y-axis direction (horizontal direction, indexing feed direction). Each of the pair of guide rails 16 has a support surface for supporting the annular frame 9 from below and a side surface substantially perpendicular to the support surface, and the annular frame 9 included in the frame unit 11 drawn out from the cassette 13 is X-axis. It is sandwiched in the direction and adjusted to the specified position.

Above the base 4, a gate-shaped first support structure 18 is arranged so as to straddle the opening 4b. A first Y-axis rail 20 along the Y-axis direction is fixed to the front surface (the surface on the guide rail 16 side) of the first support structure 18, and a first Y-axis rail 20 is fixed to the first Y-axis rail 20. The transport unit 22 of the above is slidably connected. The first transfer unit 22 includes a first moving mechanism 24 and a first holding mechanism 26 supported by the first moving mechanism 24.

The first holding mechanism 26, for example, contacts the upper surface of the annular frame 9 to attract and hold the annular frame 9, raises and lowers the annular frame 9 by the first moving mechanism 24, and moves along the first Y-axis rail 20. Move in the Y-axis direction. The first transport unit 22 further includes a gripping mechanism 28 for gripping the annular frame 9. The gripping mechanism 28 is fixed to the tip of the first holding mechanism 26 on the opening 4a side in the Y-axis direction.

For example, if the annular frame 9 is gripped by the gripping mechanism 28 and the first holding mechanism 26 is moved in the Y-axis direction, the frame unit 11 in the cassette 13 can be pulled out to the pair of guide rails 16. Alternatively, the frame units 11 on the pair of guide rails 16 can be inserted into the cassette 13. After aligning the positions of the annular frame 9 included in the frame unit 11 with the pair of guide rails 16, the first holding mechanism 26 attracts and holds the annular frame 9 to move the frame unit 11 to the chuck table 12. And carry it in.

Further, on the front surface of the first support structure 18, a second Y-axis rail 30 along the Y-axis direction is fixed above the first Y-axis rail 20. A second transport unit 32 is slidably connected to the second Y-axis rail 30. The second transfer unit 32 includes a second moving mechanism 34 and a second holding mechanism 36 supported by the second moving mechanism 34.

The second holding mechanism 36, for example, contacts the upper surface of the annular frame 9 to attract and hold the annular frame 9, raises and lowers the annular frame 9 by the second moving mechanism 34, and Y along the second Y-axis rail 30. Move in the axial direction.

For example, the chuck table 12 on which the frame unit 11 including the processed workpiece 1 is placed is positioned below the pair of guide rails 16. Then, with the pair of guide rails 16 separated from each other, the second holding mechanism 36 is brought into contact with the upper surface of the annular frame 9 included in the frame unit 11, and the annular frame 9 is attracted by the second holding mechanism 36. To do. After that, the frame unit 11 is pulled up by the second transport unit 32 and moved in the Y-axis direction. Then, the frame unit 11 can be conveyed to the cleaning unit 48 described later.

Then, the frame unit 11 cleaned by the cleaning unit 48 is transported on the pair of guide rails 16 by the first transport unit 22 or the second transport unit 32. Next, when the annular frame 9 included in the frame unit 11 is gripped by the gripping mechanism 28 of the first transport unit 22 and the first holding mechanism 26 is moved in the Y-axis direction, the frame unit 11 is accommodated in the cassette 13. it can.

In this way, in the processing device 2, the frame unit 11 is transported by the transport units such as the first transport unit 22 and the second transport unit 32. The frame unit 11 is conveyed by a path from the cassette 13 to the chuck table 12, a path from the chuck table 12 to the cleaning unit 48, and a path from the cleaning unit 48 to the cassette 13. That is, these routes serve as transport routes for the frame unit 11.

A gate-shaped second support structure 38 is arranged behind the first support structure 18 on the base 4. Two sets of cutting units (machining units) are placed on the front surface of the second support structure 38 (the surface on the side of the first support structure 18) via a Y-axis Z-axis movement mechanism (indexing feed unit, cutting feed unit) 40, respectively. ) 42 is provided. Each cutting unit 42 moves in the Y-axis direction (index feed) and moves in the Z-axis direction (cut feed) by the corresponding Y-axis Z-axis movement mechanism 40.

Each cutting unit 42 includes a spindle (not shown) having a rotation axis that is substantially parallel to the Y-axis direction. An annular cutting blade 44 is mounted on one end side of each spindle. A rotary drive source (not shown) such as a motor is connected to the other end side of each spindle. Further, a nozzle for supplying a cutting liquid such as pure water to the workpiece 1 and the cutting blade 44 is arranged near the cutting blade 44.

While supplying cutting fluid from this nozzle, the machined object 1 is machined (cut) by cutting the rotated cutting blade 44 into the workpiece 1 included in the frame unit 11 held by the chuck table 12. it can. An imaging unit (camera) 46 for imaging the workpiece 1 and the like held on the chuck table 12 is provided at a position adjacent to the cutting unit 42. The image pickup unit 46 also moves in the Y-axis direction and also moves in the Z-axis direction by the Y-axis Z-axis movement mechanism 40.

A cleaning unit 48 is arranged in the opening 4c formed on the side opposite to the opening 4a with respect to the opening 4b. The cleaning unit 48 includes a spinner table 52 that sucks and holds the frame unit 11 in a tubular cleaning space provided in the opening 4c. A rotation drive source (not shown) for rotating the spinner table 52 at a predetermined speed is connected to the lower portion of the spinner table 52.

Above the spinner table 52, a cleaning fluid (typically, a mixed fluid in which water and air are mixed) is injected toward the workpiece 1 contained in the frame unit 11 held by the spinner table 52. The injection nozzle 50 to be used is arranged. The workpiece 1 can be cleaned by rotating the spinner table 52 holding the frame unit 11 and injecting a cleaning fluid from the injection nozzle 50. After that, the frame unit 11 is housed in the cassette 13 as described above.

In order to easily pick up the chip formed from the workpiece 1 or the workpiece 1, the adhesive strength of the ultraviolet curable adhesive tape 7 is reduced on the frame unit 11 including the processed workpiece 1. Ultraviolet rays are irradiated. Irradiation of the frame unit 11 with ultraviolet rays is performed, for example, by an ultraviolet irradiation device provided outside the processing device 2. In this case, the frame unit 11 housed in the cassette 13 is conveyed to the ultraviolet irradiation device, and the frame unit 11 is irradiated with ultraviolet rays in the ultraviolet irradiation device.

However, it is not efficient to prepare an ultraviolet irradiation device only for irradiating the frame unit 11 with ultraviolet rays and to carry the frame unit 11 into and out of the ultraviolet irradiation device. Therefore, there is known a processing device 2 in which an ultraviolet irradiation unit having a carry-in / out port on the side is provided inside the cassette mounting table 6. In this case, the frame unit 11 is carried into the ultraviolet irradiation unit, irradiation of ultraviolet rays is performed inside the ultraviolet irradiation unit, and the frame unit 11 is conveyed from the ultraviolet irradiation unit to the cassette 13.

In recent years, before processing the workpiece 1 included in the frame unit 11, a region of the adhesive tape 7 attached to the workpiece 1 is irradiated with weak ultraviolet rays, and the hardness of the adhesive tape 7 in the region is irradiated. Is being investigated as a method for moderately increasing the amount of UV light. If the hardness of the adhesive tape 7 is appropriately increased in advance, for example, chipping called chipping formed on the back surface 1b of the workpiece 1 when the workpiece 1 is processed along the scheduled division line 3 is reduced. it can.

However, in a processing apparatus provided with an ultraviolet irradiation unit, it is still troublesome to convey the frame unit 11 to the ultraviolet irradiation unit before and after processing and to irradiate the frame unit 11 with ultraviolet rays. In addition, the time required for transporting the frame unit 11 increases, so that the processing efficiency decreases.

Therefore, in the processing apparatus 2 according to the present embodiment, the light source unit 54 capable of irradiating ultraviolet rays is arranged in a region overlapping the transport path of the frame unit 11. Then, in the processing apparatus 2, the frame unit 11 in the process of transportation can be irradiated with ultraviolet rays. FIG. 1 shows a light source unit 54 arranged in a region sandwiched between the openings 4a and 4b on the upper surface of the base 4 of the processing apparatus 2. However, the position of the light source unit 54 is not limited to this.

The light source unit 54 has a strip-like shape that extends long along the direction intersecting the transport path (X-axis direction) and has a short length in the direction along the transport path (Y-axis direction). FIG. 2 includes a perspective view schematically showing the light source unit 54, and FIG. 3 includes a cross-sectional view schematically showing the light source unit 54. The light source unit 54 has an LED holder 58 along a direction (Y-axis direction) intersecting the transport path.

The light source unit 54 includes a plurality of ultraviolet light LEDs 62 arranged along a direction (Y-axis direction) intersecting the transport path with a length exceeding the width of the workpiece 1 on the upper surface of the LED holder 58. Therefore, the LED holder 58 also has a length exceeding the width of the workpiece 1. The LED holder 58 is housed in a space formed inside the light source unit 54, for example, and faces the transport path of the frame unit 11. The space is protected by, for example, a protective cover 64 that transmits light such as ultraviolet rays.

The ultraviolet light LED 62 has a function of emitting light having a wavelength in the ultraviolet region (ultraviolet light, ultraviolet light). The LED holder 58 accommodates a plurality of wirings (not shown) connected to each of the plurality of ultraviolet light LEDs 62. The plurality of wirings serve as paths for supplying electric power to the respective ultraviolet light LEDs 62. The plurality of wires are connected to a dimmer or a power source that can be independently controlled so that the plurality of ultraviolet light LEDs 62 can be independently switched on and off and the intensity of the emitted ultraviolet rays can be controlled. ..

2 and 3 schematically show a frame unit 11 that is gripped by the gripping mechanism 28 of the first transport unit 22 and pulled out from the cassette 13. When the ultraviolet light LED 62 of the light source unit 54 is operated when the frame unit 11 is pulled out from the cassette 13, the adhesive tape 7 included in the frame unit 11 can be irradiated with ultraviolet rays from below.

At this time, the frame unit 11 is irradiated with ultraviolet rays having an intensity capable of appropriately curing the adhesive tape 7 while leaving the adhesive force required for processing the workpiece 1 on the adhesive tape 7. In the processing apparatus 2 according to the present embodiment, since the light source unit 54 including the plurality of ultraviolet light LEDs 62 is arranged in the area overlapping the transport path of the frame unit 11, ultraviolet rays are transmitted to the frame unit 11 while the frame unit 11 is transported. Can be irradiated.

Here, the light source unit 54 can irradiate only a specific irradiation target region of the frame unit 11 with ultraviolet rays by individually controlling each ultraviolet light LED 62. For example, when the adhesive tape 7 in the region overlapping the workpiece 1 is appropriately cured, it is not desired to reduce the adhesive strength of the adhesive tape 7 in the region overlapping the annular frame 9. Therefore, when the frame unit 11 passes through the region overlapping the light source unit 54, only the ultraviolet light LED 62 overlapping the workpiece 1 at that time is operated.

Since the ultraviolet light LED 62 that overlaps with the work piece 1 increases or decreases as the frame unit 11 moves, the ultraviolet light LED 62 that overlaps with the work piece 1 is newly operated, while the ultraviolet light LED 62 that does not overlap with the work piece 1 is operated. Stop the operation of. 6 (A) and 6 (B) are bottom views schematically showing the light source unit 54 and the frame unit 11. In FIGS. 6 (A) and 6 (B), the ones that cannot be directly seen from below are shown by broken lines, and the ultraviolet light LED 62a that is not operated and the ultraviolet light LED 62b that is operated are schematically shown.

FIG. 6A schematically shows the positional relationship between the light source unit 54 and the workpiece 1 at the time when they start to overlap. At this point, the ultraviolet light LED 62 near the center of the light source unit 54 is operated. FIG. 6B schematically shows the positional relationship between the light source unit 54 and the workpiece 1 at the time when they overlap with each other to the maximum extent. At this point, more UV light LEDs 62 are activated. In this way, it is preferable that the ultraviolet light LED 62 to be operated is determined according to the positional relationship between the light source unit 54 and the workpiece 1.

That is, preferably, the light source unit 54 lights one or more ultraviolet light LEDs 62 located in an area overlapping the work piece 1 included in the frame unit 11 conveyed by the transfer unit among the plurality of ultraviolet light LEDs 62.

Further, when the frame unit 11 including the processed object 1 is housed in the cassette 13, the frame unit 11 passes through the region overlapping with the light source unit 54 again. At this time, in order to make it possible to easily peel off the chip formed from the workpiece 1 and the workpiece 1 from the adhesive tape 7, the light source unit 54 may be operated to irradiate the frame unit 11 with ultraviolet rays.

In this case, in order to surely reduce the adhesive strength of the adhesive tape 7, it is preferable to irradiate the frame unit 11 with ultraviolet rays with higher strength. Here, all the ultraviolet light LEDs 62 may be operated in order to irradiate the frame unit 11 with ultraviolet rays with higher intensity. However, even in this case, if it is not desired to reduce the adhesive strength of the adhesive tape 7 in the region overlapping with the annular frame 9, it is not necessary to make all the ultraviolet light LEDs 62.

Further, when the adhesive tape 7 is irradiated with ultraviolet rays before the processing of the workpiece 1, when the adhesive tape 7 is irradiated after the processing of the workpiece 1, the adhesive tape 7 is irradiated before the processing of the workpiece 1. It is not necessary to irradiate ultraviolet rays with the same intensity as when not irradiating. When the work piece 1 is irradiated with ultraviolet rays before being processed, the deterioration of the adhesive tape 7 has progressed to some extent. Therefore, when the adhesive tape 7 is irradiated with ultraviolet rays after processing, the adhesive tape 7 has a strength considering the progress of the deterioration. Should be irradiated with ultraviolet rays.

When irradiating the frame unit 11 with ultraviolet rays, the frame unit 11 may be continuously irradiated with ultraviolet rays while being moved without stopping. In this case, even if the irradiation with ultraviolet rays is performed, the time required for the frame unit 11 carried out from the cassette 13 and processed to be accommodated in the cassette 13 again does not substantially increase. Therefore, the irradiation of ultraviolet rays can be carried out extremely efficiently. However, when irradiating with ultraviolet rays, the moving speed of the frame unit 11 may be reduced for reasons such as controlling the irradiation intensity of ultraviolet rays.

Further, when the frame unit 11 is irradiated with ultraviolet rays, the frame unit 11 may be repeatedly moved and stopped, and the ultraviolet rays may be irradiated each time the frame unit 11 is stopped. When the frame unit 11 is stopped when the frame unit 11 is irradiated with ultraviolet rays, the irradiation target area of the frame unit 11 can be irradiated with ultraviolet rays with a predetermined intensity and with higher accuracy.

Here, in the processing apparatus 2 according to the present embodiment, the workpiece 1 included in the frame unit 11 passing through the region overlapping the light source unit 54 is imaged by a camera to detect the position of the contour of the workpiece 1. May be good. If the position of the contour of the workpiece 1 can be detected, the shape of the frame unit 11 and the position in the frame unit 11 can be detected. Then, in the processing apparatus 2, since the chuck table 12 and the cutting unit 42 can be operated based on the acquired information, the workpiece 1 can be processed with high accuracy.

As shown in FIGS. 1, 2, and 3, the processing apparatus 2 according to the present embodiment includes a camera 56 facing the light source unit 54 with the transport path of the frame unit 11 in between. The camera 56 can form an captured image by capturing the light emitted from the light source unit 54 and transmitted through the frame unit 11. For example, in the camera 56, an image sensor having sensitivity to light having a wavelength in the ultraviolet region is used so that the ultraviolet rays transmitted through the frame unit 11 can be detected. The image sensor may have sensitivity to light having a wavelength other than the ultraviolet region.

Each figure shows a case where the light source unit 54 is arranged below the transport path and the camera 56 is arranged above the transport path. However, the processing apparatus 2 according to the present embodiment is not limited to this, and the light source unit 54 may be arranged above the transport path, and the camera 56 may be arranged below the transport path.

When the frame unit 11 is irradiated with ultraviolet rays by the light source unit 54, the ultraviolet rays are absorbed by the adhesive tape 7 and are attenuated while being transmitted through the adhesive tape 7 in the region where the workpiece 1 of the frame unit 11 does not exist. On the other hand, in the region where the work piece 1 exists, when the work piece 1 is made of a material that does not transmit ultraviolet rays, the ultraviolet rays that have passed through the adhesive tape 7 are blocked by the work piece 1.

Therefore, when the ultraviolet rays transmitted through the frame unit 11 are imaged by the camera 56, an captured image in which the workpiece 1 appears as a shadow can be obtained. Then, the position of the contour of the workpiece 1 included in the frame unit 11 can be detected from the captured image, and the shape of the workpiece 1 and the position of the workpiece 1 in the frame unit 11 can be detected.

As shown in FIG. 2, the camera 56 may be movable along a direction (Y-axis direction) intersecting the transport path. For example, the processing device 2 may include a moving mechanism (not shown) that moves the camera 56 in a direction intersecting the transport path. In this case, by repeating the imaging while moving the camera 56, the imaging can be performed in the entire region overlapping the light source unit 54 of the frame unit 11.

As schematically shown in FIG. 3, the processing apparatus 2 according to the present embodiment includes a contour detecting unit 70 which is connected to the camera 56 and detects the position of the contour of the workpiece 1 included in the frame unit 11. Then, the contour detection unit 70 captures the light emitted from the light source unit 54 transmitted through the frame unit 11 conveyed on the transport path with the camera 56, and the contour of the workpiece 1 is obtained from the captured image obtained. It has a function to detect the position. The function of the contour detection unit 70 may be realized by the control unit 72 described later.

The process in which the contour detection unit 70 detects the position of the contour of the workpiece 1 from the captured image will be described in detail. 4 (A), 4 (C), 4 (E), 5 (A), 5 (C), and 5 (E) show a frame unit from the cassette 13 to the pair of guide rails 16. The state in which 11 is carried out is shown step by step.

These figures illustrate the inside of the cassette 13, the light source unit 54, the pair of guide rails 16, and the gripping mechanism 28 provided at the end of the first holding mechanism 26 of the first transport unit 22. It is a top view which shows. In these figures, the top plate of the cassette 13, the support frame 13a, the camera 56, the cassette mounting stand 6, the openings 4a and 4b, the dust-proof and drip-proof cover 8, and the like are omitted.

As shown in these figures, the frame unit 11 including the annular frame 9 gripped by the gripping mechanism 28 of the first transport unit 22 overlaps with the light source unit 54 in the process of being carried out from the cassette 13. Then, the frame unit 11 is conveyed to the pair of guide rails 16 while the region overlapping the light source unit 54 changes.

FIG. 4A schematically shows a frame unit 11 that is pulled out from the cassette 13 and begins to overlap with the light source unit 54. When the ultraviolet light LED 62 of the light source unit 54 is operated in this state, some ultraviolet rays pass through the frame unit 11. When the transmitted ultraviolet rays are imaged by the camera 56, the captured image 66a schematically shown in FIG. 4B is obtained. FIG. 4B is a front view schematically showing the captured image 66a.

In the captured image 66a, a region that does not transmit ultraviolet rays is reflected as a shadow 68a. The shadow 68a indicates a region of the frame unit 11 in which the workpiece 1 exists. Although the shadow of the annular frame 9 is omitted in the captured image 66a for convenience of explanation, the shadow of the annular frame 9 may be reflected in the captured image 66a.

FIG. 4C schematically shows a frame unit 11 in a state of being further pulled out from the cassette 13 from the state of FIG. 4A. When the frame unit 11 moves, the region overlapping the light source unit 54 of the frame unit 11 changes. FIG. 4D schematically shows an image captured image 66b obtained by capturing an ultraviolet ray emitted from the light source unit 54 and transmitted through the frame unit 11 with the camera 56 in the positional relationship shown in FIG. 4C. There is. In the captured image 66b, the region where the workpiece 1 exists is reflected as a shadow 68b.

Similarly, FIGS. 4 (F), 5 (B), 5 (D), and 5 (F) show FIGS. 4 (E), 5 (A), and 5 (C), respectively. And the captured images 66c, 66d, 66e, 66f obtained in the positional relationship shown in FIG. 5 (E) are schematically shown. In each of the captured images 66c, 66d, 66e, 66f, the region where the workpiece 1 exists is reflected as shadows 68c, 68d, 68e, 68f.

The contour detection unit 70 detects the position of the contour of the workpiece 1 by combining the obtained captured images 66a, 66b, 66c, 66d, 66e, 66f, for example. In this way, when the camera 56 is operated while the light source unit 54 irradiates the frame unit 11 with ultraviolet rays, the position of the contour of the workpiece 1 on the frame unit 11 can be detected while the adhesive tape 7 is appropriately cured.

When the position of the contour of the workpiece 1 is detected while appropriately reducing the adhesive strength of the region attached to the workpiece 1 of the adhesive tape 7, FIGS. 6 (A) and 6 (B) show. As shown, only the ultraviolet light LED 62 that overlaps the workpiece 1 may be operated. However, in this case, the amount of ultraviolet rays transmitted through the region of the frame unit 11 that does not overlap with the workpiece 1 is insufficient, the shadow of the workpiece 1 is not clear in the obtained captured image, and the camera 56 is processed. It may be difficult to detect the contour of the object 1.

Therefore, in addition to the ultraviolet light LED 62 that overlaps the work piece 1, the ultraviolet light LED 62 that does not overlap the work piece 1 and does not overlap the annular frame 9 of the frame unit 11 may be operated. For example, the ultraviolet light LED 62 adjacent to the ultraviolet light LED 62 that overlaps the workpiece 1 is operated. In this case, in the captured image obtained by using the camera 56, the region that does not overlap with the workpiece 1 is clearly and brightly captured, so that the contour of the workpiece 1 can be clearly detected.

Depending on the processing conditions performed by the processing apparatus 2 on the work piece 1 included in the frame unit 11, the frame unit 11 may not be irradiated with ultraviolet rays before the work piece 1 is machined. In this case, the frame unit 11 is not irradiated with ultraviolet rays, and even if the camera 56 is operated, the ultraviolet rays cannot be detected. Therefore, the contour detection unit 70 cannot detect the position of the contour of the workpiece 1.

Therefore, the light source unit 54 may be provided with a non-ultraviolet light LED 60 that irradiates the frame unit 11 with light so that the position of the contour of the workpiece 1 can be detected even when the frame unit 11 is not irradiated with ultraviolet rays. In this case, as shown in FIG. 2, a plurality of non-ultraviolet light LEDs 60 are provided on the upper surface of the LED holder 58.

The non-ultraviolet light LED 60 is arranged along a direction (Y-axis direction) intersecting the transport path with a length exceeding the width of the workpiece 1. For example, as shown in FIG. 2, each non-ultraviolet light LED 60 is arranged adjacent to each ultraviolet light LED 62 in the Y-axis direction. Alternatively, each non-ultraviolet light LED 60 may be arranged between the respective ultraviolet light LEDs 62. That is, the non-ultraviolet light LED 60 and the ultraviolet light LED 62 may be arranged alternately along the direction intersecting the transport path (Y-axis direction).

The non-ultraviolet light LED 60 is an LED having a function of emitting light in a wavelength region other than ultraviolet rays, and is, for example, a visible light LED that emits light having a wavelength in the visible light region (visible light) or light having a wavelength in the infrared region. It is an infrared light LED that emits (infrared rays). The plurality of non-ultraviolet light LEDs 60 may be connected to different wirings, may be independently switched on and off, and may be capable of independently controlling the intensity of emitted light. Alternatively, the plurality of non-ultraviolet light LEDs 60 may be turned on and off as a unit.

When the adhesive tape 7 is not irradiated with ultraviolet rays before the workpiece 1 is processed by the cutting unit (processing unit) 42, the non-ultraviolet light LED 60 is operated instead of the ultraviolet light LED 62 to irradiate the frame unit 11 with non-ultraviolet light. Let me. Then, the non-ultraviolet light transmitted through the frame unit 11 is imaged by the camera 56 to obtain an captured image. In the captured image, the region where the workpiece 1 exists is reflected as a shadow. Therefore, the contour detection unit 70 can detect the position of the contour of the workpiece 1 on the frame unit 11 based on the captured image.

When the work piece 1 is imaged with non-ultraviolet light, it is not necessary to operate all the non-ultraviolet light LEDs 60, and only the non-ultraviolet light LED 60 overlapping the work piece 1 may be operated. Further, in addition to the non-ultraviolet light LED 60 that overlaps with the workpiece 1, the non-ultraviolet LED 60 adjacent to the non-ultraviolet LED 60 that overlaps with the workpiece 1 may be operated.

As described above, in the processing apparatus 2 according to the present embodiment, when the process of irradiating the processed object 1 with ultraviolet rays is performed before the processing, the ultraviolet rays emitted from the ultraviolet light LED 62 are imaged by the camera 56 and covered. The position of the contour of the work piece 1 can be detected. Further, even when the process is not performed, the contour of the workpiece 1 can be detected by capturing the non-ultraviolet light emitted from the non-ultraviolet light LED 60 with the camera 56.

Further, in the processing apparatus 2 according to the present embodiment, the ultraviolet light LED 62 and the non-ultraviolet light LED 60 may be operated at the same time. For example, even when the process of irradiating the frame unit 11 with ultraviolet rays is performed in advance, the contrast of the captured image obtained even if the intensity of the irradiated ultraviolet rays is low and the ultraviolet rays transmitted through the frame unit 11 are imaged by the camera 56. May not reach the required level.

In this case, the ultraviolet light LED 62 is operated to irradiate the frame unit 11 with ultraviolet rays to carry out the process, and the non-ultraviolet light LED 60 is operated to irradiate the frame unit 11 with non-ultraviolet light. Then, when the non-ultraviolet light transmitted through the frame unit 11 is imaged by the camera 56, an image image having a sufficient level of contrast that can be used to detect the position of the contour of the workpiece 1 can be obtained.

The region of the frame unit 11 irradiated with ultraviolet rays and the region irradiated with non-ultraviolet light may be the same, correspond to each other, or may be completely different. The ultraviolet light LED 62 to be operated may be selected so that the irradiation of ultraviolet rays is most efficient for the purpose of irradiating the frame unit 11 with ultraviolet rays. Further, the non-ultraviolet light LED 60 to be operated may be selected so that the position of the contour of the workpiece 1 can be detected most efficiently. Then, the ultraviolet light LED 62 to be operated and the non-ultraviolet light LED 60 may be determined independently of each other.

In this way, the operation of the light source unit 54 can be changed according to the processing conditions performed on the frame unit 11 in the processing apparatus 2. Then, the processing apparatus 2 according to the present embodiment may have a function of determining the content of the operation of the light source unit 54 based on the processing conditions performed on the frame unit 11. Further, the processing apparatus 2 may correct the operation content of the light source unit 54 at any time based on the captured image obtained by repeatedly imaging the workpiece 1 with the camera 56.

For example, if it is found that the ultraviolet light LED 62 that does not overlap with the workpiece 1 is operated based on the captured image obtained at a certain time, the light source unit is prevented from operating the unnecessary ultraviolet light LED 62. The content of the operation of 54 is corrected. Further, when it is found that the necessary ultraviolet light LED 62 is not operating based on the captured image obtained at a certain time, the operation content of the light source unit 54 is corrected so as to operate the necessary ultraviolet light LED 62. .. In this way, the content of the operation of the light source unit 54 can be corrected even while the irradiation of ultraviolet rays is performed.

As shown in FIG. 1, the processing apparatus 2 includes a control unit 72 that controls each component. The control unit 72 controls, for example, a transport unit such as the first transport unit 22 and the second transport unit 32, a light source unit 54, a camera 56, and a contour detection unit 70.

The control unit 72 is, for example, a processor capable of processing data, and is a processing device having a circuit configured to execute a function represented by a computer program. The control unit 72 includes a microprocessor, a CPU (Central Processing Unit), and the like as a processor, and the program is stored in a storage device such as a hard disk drive and a flash memory. Then, the software such as the program and the processing device (hardware resource) function as a concrete means in collaboration with each other.

The control unit 72 has a condition registration unit 74 in which the processing conditions of the frame unit 11 are registered. In the condition registration unit 74, for example, the processing conditions to be performed by the processing apparatus 2 are registered in advance in each frame unit 11 housed in the cassette 13. The processing conditions registered in the condition registration unit 74 include all or part of the conditions such as transport, processing, cleaning, and ultraviolet irradiation performed on the frame unit 11 by the processing apparatus 2.

For example, the condition registration unit 74 registers the rotation speed, cutting depth, feed rate, and the like of the cutting blade 44 as machining conditions for machining performed by the cutting unit (machining unit) 42. Further, as the cleaning conditions performed by the cleaning unit 48, the rotation speed of the spinner table 52, the injection amount of the cleaning liquid injected from the injection nozzle 50, and the like are registered. Further, in the condition registration unit 74, the necessity of irradiating the frame unit 11 with ultraviolet rays before and after processing the workpiece 1 with the cutting unit 42 and the irradiation conditions of ultraviolet rays are registered as processing conditions.

The control unit 72 has a function of reading the processing conditions of the frame unit 11 registered in the condition registration unit 74, and is it necessary to irradiate the frame unit 11 carried out from the cassette 13 with ultraviolet rays based on the processing conditions? Judge whether or not. Then, if necessary, the light source unit 54 is controlled to irradiate the frame unit 11 transported on the transport path with ultraviolet rays.

For example, when the processing conditions include a process of irradiating the adhesive tape 7 with ultraviolet rays before processing the workpiece 1 by the cutting unit (processing unit) 42, the control unit 72 uses the ultraviolet light LED 62 of the light source unit 54. It is operated to irradiate the adhesive tape 7 with ultraviolet rays. In this case, the contour of the workpiece 1 can be detected by capturing the ultraviolet rays transmitted through the frame unit 11 with the camera 56.

The control unit 72 acquires the captured image by imaging the ultraviolet rays transmitted through the frame unit 11 with the camera 56, and detects the position of the contour of the workpiece 1 with the contour detecting unit 70 based on the obtained captured image. Let me. After that, the frame unit 11 is conveyed to the chuck table 12, and the relative positions of the cutting unit 42 and the chuck table 12 and the orientation of the chuck table 12 are controlled based on the detected contour positions of the workpiece 1.

Further, when the processing of irradiating the adhesive tape 7 with ultraviolet rays before processing the workpiece 1 by the cutting unit (processing unit) 42 is not included in the processing conditions, the control unit 72 is the ultraviolet light LED 62 of the light source unit 54. Does not work. In this case, the non-ultraviolet light LED 60 is operated to irradiate the frame unit 11 with non-ultraviolet light. Then, the camera 56 is made to image the non-ultraviolet light transmitted through the frame unit 11, and the contour detection unit 70 is made to detect the position of the contour of the workpiece 1 based on the obtained captured image.

That is, the control unit 72 determines whether or not the non-ultraviolet light LED 60 and the ultraviolet light LED 62 need to be operated according to the contents of the processing conditions registered in the condition registration unit 74. In particular, when the frame unit 11 is imaged by the camera 56, the non-ultraviolet light LED 60 is not operated when the image can be sufficiently performed by the ultraviolet rays emitted by the ultraviolet light LED 62. Therefore, when the frame unit 11 is imaged, the light source unit 54 can be operated with the minimum necessary electric power, and the frame unit 11 can be processed with high efficiency.

As described above, the present embodiment provides a highly efficient processing device 2 capable of irradiating the adhesive tape 7 included in the frame unit 11 with ultraviolet rays in the transport path of the frame unit 11.

If a light source that emits non-ultraviolet light for imaging the frame unit 11 with the camera 56 is provided in a region overlapping the transport path separately from the light source unit 54, the transport path is provided in order to secure an area for arranging the light source. I have to design it for a long time. In this case, the transport time of the frame unit 11 increases, and the efficiency of machining performed by the machining apparatus 2 decreases. On the other hand, in the processing apparatus 2 according to the present embodiment, since the light source unit 54 plays the role of the light source, the light source is unnecessary and it is not necessary to lengthen the transport path.

The present invention is not limited to the description of the above-described embodiment, and can be implemented with various modifications. For example, in the above embodiment, the case where the camera 56 that images the frame unit 11 includes an image sensor having sensitivity to both ultraviolet rays and non-ultraviolet light has been described, but one aspect of the present invention is not limited to this.

That is, the processing device 2 provides a camera including an image sensor having sensitivity to ultraviolet rays and a camera including an image sensor having sensitivity to non-ultraviolet light in a region overlapping the transport path of the frame unit 11 so as to be adjacent to each other. You may. In this case, the control unit 72 determines the camera to be used for imaging based on the wavelength of the light emitted to the frame unit 11 when imaging the frame unit 11.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as they do not deviate from the scope of the object of the present invention.

1 Work piece 1a Front side 1b Back side 3 Scheduled division line 5 Device 7 Adhesive tape 9 Circular frame 9a Opening 11 Frame unit 13 Cassette 13a Support frame 13b Carry-in / out entrance 13c Inner wall 2 Processing device 4 Base 4a, 4b, 4c Opening 6 Cassette mounting Stand 8 Dust-proof and drip-proof cover 10 X-axis moving table 12 Chuck table 12a Holding surface 12b Clamp 16 Guide rail 18,38 Support structure 20,30 Y-axis rail 22,32 Conveying unit 24,34 Moving mechanism 26,36 Holding mechanism 28 Gripping Mechanism 40 Y-axis Z-axis movement mechanism 42 Cutting unit (machining unit)
44 Cutting blade 46 Imaging unit (camera)
48 Cleaning unit 50 Injection nozzle 52 Spinner table 54 Light source unit 56 Camera 58 LED holder 60 Non-ultraviolet LED
62, 62a, 62b UV LED
64 Protective cover 66a, 66b, 66c, 66d, 66e, 66f Captured image 68b, 68c, 68d, 68e, 68f Shadow 70 Contour detection unit 72 Control unit 74 Condition registration unit

Claims (4)

An annular frame having an opening, an ultraviolet curable adhesive tape attached to one surface of the annular frame so as to close the opening, and a workpiece attached to and supported by the adhesive tape inside the opening. A cassette mount on which cassettes accommodating a plurality of frame units including each of the above are mounted, and
A chuck table for holding the frame unit and
A transport unit that transports the frame unit between the cassette mounted on the cassette mounting table and the chuck table.
A processing unit for processing the work piece contained in the frame unit held by the chuck table, and a processing unit for processing the work piece.
A light source unit that overlaps the transport path of the frame unit transported by the transport unit and extends along a direction intersecting the transport path is provided.
The light source unit is a processing apparatus including a plurality of ultraviolet light LEDs arranged along the direction intersecting the transport path with a length exceeding the width of the workpiece. The processing apparatus according to claim 1.
A camera that is arranged facing the light source unit with the transport path in between and captures the work piece contained in the frame unit.
A contour detection unit for detecting the position of the contour of the workpiece included in the frame unit is further provided.
The contour detection unit captures the light emitted from the light source unit transmitted through the frame unit conveyed on the transfer path by the transfer unit with the camera, and obtains the image to be processed. A processing device characterized by detecting the position of a contour. The processing apparatus according to claim 2.
A control unit for controlling the transport unit, the light source unit, the camera, and the contour detection unit is further provided.
The light source unit further includes a plurality of non-ultraviolet light emitting non-ultraviolet LEDs arranged along the direction intersecting the transport path with a length exceeding the width of the workpiece.
The control unit is
It has a condition registration unit in which the processing conditions of the frame unit are registered.
A function to read out the processing conditions of the frame unit registered in the condition registration unit, and
When the processing conditions include a process of irradiating the adhesive tape with ultraviolet rays before processing the workpiece with the processing unit, the ultraviolet light LED is operated to irradiate the adhesive tape with ultraviolet rays and the frame. A function of causing the camera to image the ultraviolet rays transmitted through the unit and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image.
If the processing of irradiating the adhesive tape with ultraviolet rays before processing the workpiece with the processing unit is not included in the processing conditions, the non-ultraviolet LED is operated to irradiate the frame unit with the non-ultraviolet light. A function of causing the camera to image the non-ultraviolet light transmitted through the frame unit and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image.
A processing device characterized by being provided with. The light source unit is characterized in that, among the plurality of ultraviolet light LEDs, one or more ultraviolet light LEDs located in an area overlapping the workpiece included in the frame unit conveyed by the transfer unit is turned on. The processing apparatus according to any one of claims 1 to 3.

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