JP7358014B2 - processing equipment - Google Patents

Description

The present invention relates to a processing apparatus for processing a workpiece supported by an ultraviolet curing adhesive tape attached to an annular frame so as to close an opening in the annular frame.

In the manufacturing process of device chips used in electronic equipment such as mobile phones and personal computers, first, a plurality of intersecting dividing lines are set on the surface of a workpiece such as a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations) are formed in each area partitioned by the planned dividing line.

After that, an ultraviolet curable adhesive tape is pasted to cover the opening of the annular frame, and the adhesive tape is pasted to the workpiece inside the opening, and the workpiece, the adhesive tape, and the annular frame are connected to each other. , form an integrated frame unit. Then, the workpiece included in the frame unit is processed and divided along the dividing line (street). Individual device chips are then formed and supported on the adhesive tape.

Ultraviolet curable adhesive tapes exhibit strong adhesive force and sufficiently hold the workpiece while the workpiece is being processed. After the processing of the workpiece is completed, the adhesive tape is irradiated with ultraviolet rays to harden and reduce its adhesive strength so that the workpiece can be easily peeled off. In this way, the adhesive strength of UV-curable adhesive tapes can be reduced simply by irradiating them with UV rays, so using UV-curable adhesive tapes for the frame unit provides good workability. However, conventionally, the process of irradiating the adhesive tape with ultraviolet rays was carried out using a dedicated ultraviolet irradiation device, which required time and effort for transportation.

Therefore, an efficient processing device is used that includes a built-in ultraviolet irradiation unit in addition to a processing unit that processes the workpiece (see, for example, Patent Document 1). The ultraviolet irradiation unit is arranged at the lower part of a movable cassette mounting table on which a cassette containing a plurality of frame units is mounted. In this processing apparatus, a workpiece is processed in a processing unit, and then the frame unit is transported to an ultraviolet irradiation unit, and the adhesive tape is irradiated with ultraviolet rays in the ultraviolet irradiation unit.

By the way, before machining a workpiece, the shape of the workpiece and the position of the workpiece in the frame unit are precisely detected, and the machine is efficiently processed based on the detected shape and position of the workpiece. A processing device that performs processing is known (see Patent Document 2).

The processing device includes a linear infrared light source disposed below the frame unit conveyance path so as to cross the conveyance path, and a camera disposed above the infrared light source. Then, the frame unit transported on the transport path is irradiated with infrared rays from the infrared light source, and the infrared rays transmitted through the frame unit are photographed by the camera. Then, since the infrared rays are blocked by the workpiece, a shadow of the workpiece appears in the captured image. Then, the shape and contour position of the workpiece can be detected from the shadow appearing in the captured image.

Japanese Patent Application Publication No. 2017-188548 Japanese Patent Application Publication No. 2006-214896

In recent years, before processing a workpiece included in a frame unit, weak-intensity ultraviolet rays are irradiated to the area of the adhesive tape that is attached to the workpiece, to moderately increase the hardness of the adhesive tape in that area. Methods to do so are being considered. If the hardness of the adhesive tape is increased appropriately before processing the workpiece, for example, when the workpiece is processed along the planned dividing line, chipping, which is formed on the back side of the workpiece, can be prevented. Chips can be reduced.

However, in the above-mentioned processing apparatus equipped with an ultraviolet irradiation unit, it is time-consuming to transport the frame unit to the ultraviolet irradiation unit before and after processing and to irradiate the frame unit with ultraviolet rays. Furthermore, since the time required to transport the frame unit increases, processing efficiency decreases.

The present invention has been made in view of these problems, and its purpose is to provide a highly efficient processing device that can irradiate ultraviolet rays to the adhesive tape included in the frame unit during the conveyance path of the frame unit. It is.

According to one aspect of the present invention, an annular frame having an opening, an ultraviolet curing adhesive tape attached to one side of the annular frame so as to close the opening, and an ultraviolet curable adhesive tape attached to the adhesive tape inside the opening. a cassette mounting table on which a cassette accommodating a plurality of frame units each including a supported workpiece is placed; a chuck table holding the frame unit; and the cassette placed on the cassette mounting table. and a transport unit that transports the frame unit between the chuck table, a processing unit that processes the workpiece included in the frame unit held by the chuck table, and a workpiece that is transported by the transport unit. a light source unit that overlaps the conveyance path of the frame unit and extends along a direction intersecting the conveyance path; a camera that photographs a workpiece; a contour detection unit included in the frame unit that detects the position of the contour of the workpiece; the transport unit; the light source unit; the camera; and the contour detection unit. , the light source unit includes a plurality of ultraviolet light LEDs arranged along the direction intersecting the conveyance path with a length exceeding the width of the workpiece, The light source unit further includes a plurality of non-ultraviolet light LEDs that emit non-ultraviolet light and are arranged along the direction intersecting the transport path with a length exceeding the width of the workpiece, and the contour detection unit is configured to emit non-ultraviolet light. , detecting the position of the outline of the workpiece from the captured image obtained by capturing, with the camera, light emitted from the light source unit that passes through the frame unit that is transported on the transport path by the transport unit; The control unit has a condition registration section in which machining conditions of the frame unit are registered, and has a function of reading out the machining conditions of the frame unit registered in the condition registration section and a function of reading out the machining conditions of the frame unit registered in the condition registration section, and If the processing conditions include irradiating the adhesive tape with ultraviolet rays before processing the workpiece, the ultraviolet LED is activated to irradiate the adhesive tape with ultraviolet rays and the ultraviolet rays are transmitted through the frame unit. A function for causing the camera to image the object and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image, and a function for detecting the position of the contour of the workpiece by the processing unit, If the process of irradiating the tape with ultraviolet rays is not included in the processing conditions, the non-ultraviolet light LED is activated to irradiate the frame unit with the non-ultraviolet light, and the non-ultraviolet light transmitted through the frame unit is directed to the camera. A processing apparatus is provided, comprising a function of capturing an image and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image.

Preferably, the light source unit turns on one or more of the plurality of ultraviolet LEDs located in a region overlapping with the workpiece included in the frame unit conveyed by the conveyance unit.

According to another aspect of the present invention, there is provided an annular frame having an opening, an ultraviolet curing adhesive tape attached to one side of the annular frame so as to close the opening, and an ultraviolet curing adhesive tape attached to the adhesive tape inside the opening. a cassette mounting table on which a cassette accommodating a plurality of frame units each containing a mounted and supported workpiece is placed; a chuck table holding the frame units; a transport unit that transports the frame unit between the cassette and the chuck table; a processing unit that processes the workpiece included in the frame unit held by the chuck table; a light source unit that overlaps the conveyance path of the frame unit to be conveyed and extends along a direction that intersects the conveyance path, the light source unit having a length exceeding the width of the workpiece to be conveyed. The light source unit includes a plurality of ultraviolet light LEDs arranged along the direction intersecting the path, and the light source unit is configured to move the workpiece included in the frame unit conveyed by the conveyance unit among the plurality of ultraviolet light LEDs. A processing device is provided that is characterized by lighting one or more ultraviolet light LEDs located in an area overlapping with the above.

Preferably, a camera is disposed facing the light source unit across the conveyance path and photographs the workpiece included in the frame unit, and a camera that captures the position of the outline of the workpiece included in the frame unit. The contour detection unit further includes a contour detection unit that detects, with the camera, an image of light emitted from the light source unit that passes through the frame unit that is conveyed on the conveyance path by the conveyance unit. The position of the contour of the workpiece is detected from the obtained captured image.

A processing apparatus according to one aspect of the present invention includes a light source unit that overlaps a transport path of a frame unit and extends in a direction intersecting the transport path, and the light source unit includes a plurality of ultraviolet LEDs. Therefore, when the frame unit is transferred from the cassette placed on the cassette mounting table to the chuck table, the light source unit can irradiate the frame unit with ultraviolet rays. Further, when the workpiece is transferred to the cassette after processing is completed, the frame unit can be irradiated with ultraviolet rays by the light source unit.

That is, in the processing apparatus according to one aspect of the present invention, instead of the ultraviolet irradiation unit disposed below the cassette mounting table, a light source unit including a plurality of ultraviolet LEDs is disposed in an area overlapping the transport path. . Therefore, there is no need to transport the frame unit to a specific location in order to irradiate the frame unit with ultraviolet rays.

Note that a camera that captures an image of the light that passes through the frame unit to detect the position of the shape and outline of the workpiece, and a light source that emits the light may be disposed on the conveyance path. Here, the transport path is designed to be as short as possible in order to shorten the transport time of the frame unit and improve processing efficiency of the workpiece, and to downsize and save space of the processing equipment. . Therefore, it may not be possible to secure an area where the light source unit that emits ultraviolet light in addition to the light source that emits light that passes through the frame unit can be installed.

However, in the processing apparatus according to the present embodiment, since the light source unit includes a plurality of ultraviolet LEDs, another LED that emits light for imaging the frame unit can be arranged between the ultraviolet LEDs. It is also possible to image the frame unit using ultraviolet light emitted by an ultraviolet LED. In other words, since the light source unit can also function as a light source that emits light that passes through the frame unit, the light source unit can be installed in a processing device that images the frame unit on the transport route without making the transport route longer. .

Therefore, according to one aspect of the present invention, a highly efficient processing device is provided that can irradiate an adhesive tape included in a frame unit with ultraviolet rays on the conveyance path of the frame unit.

FIG. 2 is a perspective view schematically showing a processing device. FIG. 3 is a perspective view schematically showing a frame unit and a light source unit that are transported on a transport path by a transport unit. FIG. 3 is a cross-sectional view schematically showing how a frame unit is taken out from a cassette and a workpiece is imaged with a camera. 4(A), 4(C), and 4(E) are top views schematically showing the positional relationship between the frame unit and the light source unit conveyed from the cassette, and FIG. 4(B), FIGS. 4(D) and 4(F) are front views schematically showing captured images in which the shadow of the workpiece is captured. 5(A), 5(C), and 5(E) are top views schematically showing the positional relationship between the frame unit and the light source unit conveyed from the cassette, and FIG. 5(B), FIG. 5(D) and FIG. 5(F) are front views schematically showing captured images in which the shadow of the workpiece is captured. FIG. 6(A) is a bottom view schematically showing an operating ultraviolet LED among the ultraviolet LEDs included in the light source unit that overlap with the edge of the workpiece, and FIG. It is a bottom view which shows typically the ultraviolet light LED which operates among the ultraviolet light LEDs included in the light source unit which overlap with the center part of the light source unit.

Embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. First, a frame unit including a workpiece to be processed by the processing apparatus according to the present embodiment will be described. FIG. 2 includes a perspective view schematically showing the frame unit 11. As shown in FIG.

The frame unit 11 includes an annular frame 9 made of metal or the like having an opening 9a, an ultraviolet curing adhesive tape 7 pasted on one side of the annular frame 9 so as to close the opening 9a, and an adhesive tape 7 on the inside of the opening 9a. The workpiece 1 is attached to and supported by a tape 7. The adhesive tape 7 is, for example, a tape called dicing tape. The workpiece 1 before and after processing is supported by the adhesive tape 7.

The workpiece 1 is, for example, a wafer made of a material such as silicon, SiC (silicon carbide), or another semiconductor, or a disk-shaped substrate made of a material such as sapphire, glass, or quartz. As shown in FIG. 1, a plurality of division lines 3 that intersect with each other are set on the surface 1a of the workpiece 1.

A device 5 such as an IC (Integrated circuit) or an LED (Light emitting diode) is formed in each area partitioned by the planned dividing line 3. When the workpiece 1 is divided along the planned dividing line 3, a plurality of device chips each including a device 5 are formed. The formed individual device chips are supported by adhesive tape 7. The device chip is then peeled off from the adhesive tape 7 and finally mounted on a predetermined mounting target.

The ultraviolet curable adhesive tape 7 includes a base material (not shown) made of, for example, epoxy resin, acrylic resin, synthetic rubber, polyimide, etc., and an adhesive layer (not shown) containing an ultraviolet curable resin on the base material. and, including. The adhesive layer exhibits strong adhesive force to the workpiece 1, but when irradiated with ultraviolet rays (ultraviolet light), it hardens and its adhesive force decreases. When the adhesive tape 7 attached to the workpiece 1 is to be peeled off, the adhesive tape 7 is irradiated with ultraviolet rays to reduce the adhesive strength of the adhesive layer.

An annular frame 9 made of metal or the like is attached to the outer periphery of the adhesive tape 7. In the frame unit 11, the workpiece 1 is adhered to and supported by the adhesive tape 7 inside the opening 9a of the annular frame 9. The workpiece 1 is carried into a processing device in the form of a frame unit 11 that is integrated with an adhesive tape 7 and an annular frame 9, and is processed by a processing unit of the processing device.

When the frame unit 11 is transported, a cassette 13 (see FIG. 1) that can accommodate a plurality of frame units 11 is used. A cassette 13 containing a plurality of frame units 11 is transported to a processing device, the frame units 11 are taken out from the cassette 13, and the workpiece 1 is processed by the processing device.

Next, each component of the processing apparatus according to this embodiment will be explained. FIG. 1 is a perspective view schematically showing the processing device 2. As shown in FIG. The processing device 2 shown in FIG. 1 is a cutting device that cuts and divides the workpiece 1 with an annular cutting blade 44 . The processing apparatus 2 according to the present embodiment will be described below using a case where the processing apparatus 2 is a cutting apparatus as an example, but the processing apparatus 2 according to the present embodiment is not limited to a cutting apparatus. For example, it may be a laser processing device that processes the workpiece 1 with a laser, a grinding device that grinds the workpiece 1, or a polishing device that polishes the workpiece 1.

As shown in FIG. 1, an opening 4a is formed in the upper surface of a corner of the base 4 of the processing device 2, and a cassette mounting table 6 on which a cassette 13 is placed is housed in the opening 4a. The cassette mounting table 6 can be raised and lowered in the vertical direction (Z-axis direction) by a lifting mechanism (not shown). FIG. 3 includes a cross-sectional view schematically showing the cassette 13 and the cassette mounting table 6. As shown in FIG. The cassette 13 has a box-shaped casing in which a loading/unloading port 13b through which the frame unit 11 is loaded/unloaded is formed on the front surface.

A plurality of support frames 13a protruding into the interior of the cassette 13 are formed on inner walls 13c on both sides connected to the loading/unloading entrance 13b of the cassette 13. FIG. 3 shows one of the support frames 13a. The plurality of support frames 13a are formed at height positions corresponding to both inner walls 13c of the cassette 13, respectively. The frame unit 11 is housed in the cassette 13 on a pair of corresponding support frames 13a formed on both inner walls 13c.

As shown in FIG. 1, an opening 4b that is long in the X-axis direction (back and forth direction, processing feed direction) is formed on the side of the opening 4a. Inside the opening 4b, a ball screw type X-axis moving mechanism (processing feed unit) (not shown) and a dust-proof and drip-proof cover 8 that covers the top of the X-axis moving mechanism are arranged. The X-axis moving mechanism includes an X-axis moving table 10, and moves this X-axis moving table 10 in the X-axis direction.

A chuck table (holding table) 12 that attracts and holds the frame unit 11 is provided on the X-axis moving table 10 . The chuck table 12 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotation axis that is generally parallel to the Z-axis direction (vertical direction, cutting feed direction). Further, the chuck table 12 is moved in the X-axis direction by the above-mentioned X-axis movement mechanism (processing feed).

The upper surface of the chuck table 12 is a holding surface 12a for holding the frame unit 11. The holding surface 12a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 12. Furthermore, four clamps 12b are provided around the chuck table 12 for fixing the annular frame 9 included in the frame unit 11 from all sides.

A pair of guide rails (temporary storage area) 16 are provided above the opening 4b, and are moved toward and away from each other while remaining parallel to the Y-axis direction (left-right direction, indexing and feeding direction). Each of the pair of guide rails 16 has a support surface that supports the annular frame 9 from below and a side surface that is generally perpendicular to the support surface, and supports the annular frame 9 included in the frame unit 11 pulled out from the cassette 13 on the X axis. Insert it in the direction and adjust it to the specified position.

A gate-shaped first support structure 18 is arranged above the base 4 so as to straddle the opening 4b. A first Y-axis rail 20 along the Y-axis direction is fixed to the front surface of the first support structure 18 (the surface on the guide rail 16 side). A transport unit 22 is slidably connected to the transport unit 22. The first transport unit 22 includes a first moving mechanism 24 and a first holding mechanism 26 supported by the first moving mechanism 24.

The first holding mechanism 26 , for example, comes into contact with the upper surface of the annular frame 9 to attract and hold the annular frame 9 , and is moved up and down by the first moving mechanism 24 and moved along the first Y-axis rail 20 . Move in the Y-axis direction. The first transport unit 22 further includes a gripping mechanism 28 for gripping the annular frame 9. The gripping mechanism 28 is fixed to the tip of the first holding mechanism 26 on the side of the opening 4a in the Y-axis direction.

For example, by gripping the annular frame 9 with the gripping mechanism 28 and moving the first holding mechanism 26 in the Y-axis direction, the frame unit 11 in the cassette 13 can be pulled out to the pair of guide rails 16. Alternatively, the frame unit 11 on the pair of guide rails 16 can be inserted into the cassette 13. Note that after aligning the position of the annular frame 9 included in the frame unit 11 with the pair of guide rails 16, the first holding mechanism 26 attracts and holds the annular frame 9, and the frame unit 11 is placed on the chuck table 12. and bring it in.

Further, on the front surface of the first support structure 18, a second Y-axis rail 30 extending along the Y-axis direction is fixed above the first Y-axis rail 20. A second transport unit 32 is slidably connected to the second Y-axis rail 30. The second transport unit 32 includes a second moving mechanism 34 and a second holding mechanism 36 supported by the second moving mechanism 34.

The second holding mechanism 36 , for example, comes into contact with the upper surface of the annular frame 9 to attract and hold the annular frame 9 , and is moved up and down by the second moving mechanism 34 and along the second Y-axis rail 30 . Move in the axial direction.

For example, the chuck table 12 on which the frame unit 11 including the processed workpiece 1 is placed is positioned below the pair of guide rails 16 . Then, the second holding mechanism 36 is brought into contact with the upper surface of the annular frame 9 included in the frame unit 11 with the pair of guide rails 16 separated from each other, and the annular frame 9 is sucked by the second holding mechanism 36. do. Thereafter, the frame unit 11 is pulled up by the second transport unit 32 and moved in the Y-axis direction. Then, the frame unit 11 can be transported to a cleaning unit 48, which will be described later.

The frame unit 11 cleaned by the cleaning unit 48 is then conveyed onto the pair of guide rails 16 by the first conveyance unit 22 or the second conveyance unit 32. Next, when the annular frame 9 included in the frame unit 11 is gripped by the gripping mechanism 28 of the first transport unit 22 and the first holding mechanism 26 is moved in the Y-axis direction, the frame unit 11 is stored in the cassette 13. can.

In this manner, in the processing apparatus 2, the frame unit 11 is transported by transport units such as the first transport unit 22 and the second transport unit 32. The frame unit 11 is transported along a path from the cassette 13 to the chuck table 12, a path from the chuck table 12 to the cleaning unit 48, and a path from the cleaning unit 48 to the cassette 13. In other words, these routes serve as transport routes for the frame unit 11.

A gate-shaped second support structure 38 is arranged behind the first support structure 18 on the base 4 . On the front surface of the second support structure 38 (the surface on the first support structure 18 side), two sets of cutting units (processing units ) 42 are provided. Each cutting unit 42 is moved in the Y-axis direction (index feed) and in the Z-axis direction (cut feed) by the corresponding Y-axis and Z-axis movement mechanism 40.

Each cutting unit 42 includes a spindle (not shown) serving as a rotation axis that is generally parallel to the Y-axis direction. An annular cutting blade 44 is attached to one end of each spindle. A rotational drive source (not shown) such as a motor is connected to the other end of each spindle. Further, a nozzle for supplying cutting fluid such as pure water to the workpiece 1 and the cutting blade 44 is arranged near the cutting blade 44 .

While supplying cutting fluid from this nozzle, the rotated cutting blade 44 cuts into the workpiece 1 included in the frame unit 11 held on the chuck table 12, thereby machining (cutting) the workpiece 1. can. An imaging unit (camera) 46 is provided adjacent to the cutting unit 42 to take an image of the workpiece 1 held on the chuck table 12. This imaging unit 46 is also moved in the Y-axis direction by the Y-axis and Z-axis moving mechanism 40, and also moves in the Z-axis direction.

A cleaning unit 48 is arranged in an opening 4c formed on the opposite side of the opening 4a with respect to the opening 4b. The cleaning unit 48 includes a spinner table 52 that sucks and holds the frame unit 11 into a cylindrical cleaning space provided in the opening 4c. A rotational drive source (not shown) that rotates the spinner table 52 at a predetermined speed is connected to the lower part of the spinner table 52.

A cleaning fluid (typically a mixed fluid of water and air) is sprayed above the spinner table 52 toward the workpiece 1 included in the frame unit 11 held by the spinner table 52. An injection nozzle 50 is disposed. The workpiece 1 can be cleaned by rotating the spinner table 52 holding the frame unit 11 and spraying cleaning fluid from the spray nozzle 50. Thereafter, the frame unit 11 is housed in the cassette 13 as described above.

In order to easily pick up chips formed from the workpiece 1 or the workpiece 1, the adhesive strength of the ultraviolet curing adhesive tape 7 is reduced on the frame unit 11 containing the processed workpiece 1. UV rays are irradiated. The frame unit 11 is irradiated with ultraviolet rays, for example, by an ultraviolet irradiation device provided outside the processing device 2. In this case, the frame unit 11 housed in the cassette 13 is transported to the ultraviolet irradiation device, and the frame unit 11 is irradiated with ultraviolet light in the ultraviolet irradiation device.

However, it is not efficient to prepare an ultraviolet irradiation device just to irradiate the frame unit 11 with ultraviolet rays and to carry the frame unit 11 into and out of the ultraviolet irradiation device. Therefore, a processing apparatus 2 is known in which an ultraviolet irradiation unit provided with a loading/unloading port on the side is provided inside the cassette mounting table 6. In this case, the frame unit 11 is carried into the ultraviolet irradiation unit, ultraviolet rays are irradiated inside the ultraviolet irradiation unit, and the frame unit 11 is transferred from the ultraviolet irradiation unit to the cassette 13.

In recent years, before processing the workpiece 1 included in the frame unit 11, a region of the adhesive tape 7 attached to the workpiece 1 is irradiated with low-intensity ultraviolet rays to reduce the hardness of the adhesive tape 7 in the region. Methods are being considered to moderately increase the By appropriately increasing the hardness of the adhesive tape 7 in advance, for example, when the workpiece 1 is processed along the planned dividing line 3, chipping called chipping that is formed on the back surface 1b of the workpiece 1 can be reduced. can.

However, in a processing device equipped with an ultraviolet irradiation unit, it is still time-consuming to transport the frame unit 11 to the ultraviolet irradiation unit before and after processing and to irradiate the frame unit 11 with ultraviolet rays. Furthermore, since the time required to transport the frame unit 11 increases, processing efficiency decreases.

Therefore, in the processing apparatus 2 according to the present embodiment, a light source unit 54 capable of irradiating ultraviolet rays is arranged in an area that overlaps with the transport path of the frame unit 11. In the processing apparatus 2, the frame unit 11 in the process of being transported can be irradiated with ultraviolet rays. FIG. 1 shows a light source unit 54 disposed in an area sandwiched between the opening 4a and the opening 4b on the upper surface of the base 4 of the processing device 2. However, the position of the light source unit 54 is not limited to this.

The light source unit 54 has a strip-like shape that extends long in the direction intersecting the transport path (X-axis direction) and has a short length in the direction along the transport path (Y-axis direction). FIG. 2 includes a perspective view schematically showing the light source unit 54, and FIG. 3 includes a cross-sectional view schematically showing the light source unit 54. The light source unit 54 has an LED holder 58 extending in a direction (Y-axis direction) intersecting the transport path.

The light source unit 54 includes a plurality of ultraviolet LEDs 62 on the upper surface of the LED holder 58, which have a length exceeding the width of the workpiece 1 and are arranged along the direction (Y-axis direction) intersecting the transport path. Therefore, the LED holder 58 also has a length that exceeds the width of the workpiece 1. The LED holder 58 is housed in, for example, a space formed inside the light source unit 54 and faces the transport path of the frame unit 11. The space is protected by, for example, a protective cover 64 that transmits light such as ultraviolet light.

The ultraviolet light LED 62 has a function of emitting light with a wavelength in the ultraviolet region (ultraviolet light, ultraviolet rays). The LED holder 58 accommodates a plurality of wires (not shown) connected to each of the plurality of ultraviolet LEDs 62. The plurality of wirings serve as paths for supplying power to the respective ultraviolet light LEDs 62. The plurality of wirings are each connected to a dimmer or power supply that can be independently controlled so that the plurality of ultraviolet light LEDs 62 can be turned on and off independently, and the intensity of the emitted ultraviolet light can be controlled. .

2 and 3 schematically show the frame unit 11 that is gripped by the gripping mechanism 28 of the first transport unit 22 and pulled out from the cassette 13. When the ultraviolet LED 62 of the light source unit 54 is activated when the frame unit 11 is pulled out from the cassette 13, the adhesive tape 7 included in the frame unit 11 can be irradiated with ultraviolet rays from below.

At this time, the frame unit 11 is irradiated with ultraviolet rays strong enough to moderately cure the adhesive tape 7 while leaving the adhesive tape 7 with the adhesion force necessary for processing the workpiece 1. In the processing apparatus 2 according to the present embodiment, the light source unit 54 including the plurality of ultraviolet LEDs 62 is arranged in an area overlapping with the conveyance path of the frame unit 11, so that the frame unit 11 is exposed to ultraviolet light while the frame unit 11 is conveyed. can be irradiated.

Here, the light source unit 54 can also irradiate ultraviolet rays only to a specific irradiation target area of the frame unit 11 by individually controlling each ultraviolet light LED 62. For example, when the adhesive tape 7 in the region overlapping with the workpiece 1 is to be appropriately cured, a decrease in the adhesive strength of the adhesive tape 7 in the region overlapping with the annular frame 9 is not desired. Therefore, when the frame unit 11 passes through an area overlapping with the light source unit 54, only the ultraviolet LED 62 overlapping with the workpiece 1 at that time is activated.

As the frame unit 11 moves, the number of ultraviolet LEDs 62 that overlap the workpiece 1 increases or decreases, so while the ultraviolet LEDs 62 that overlap the workpiece 1 are activated, the ultraviolet LEDs 62 that no longer overlap the workpiece 1 are activated. stop the operation. 6(A) and 6(B) are bottom views schematically showing the light source unit 54 and the frame unit 11. FIG. In FIGS. 6A and 6B, things that cannot be directly seen from below are indicated by broken lines, and ultraviolet LEDs 62a that are not activated and ultraviolet LEDs 62b that are activated are schematically shown.

FIG. 6A schematically shows the positional relationship between the light source unit 54 and the workpiece 1 at the time when they begin to overlap. At this point, the ultraviolet LED 62 near the center of the light source unit 54 is activated. FIG. 6(B) schematically shows the positional relationship between the light source unit 54 and the workpiece 1 at the time when they overlap to the maximum extent. At this point, more ultraviolet LEDs 62 are activated. In this way, it is preferable that the ultraviolet LED 62 to be activated is determined depending on the positional relationship between the light source unit 54 and the workpiece 1.

That is, preferably, the light source unit 54 turns on one or more of the plurality of ultraviolet light LEDs 62 located in a region overlapping with the workpiece 1 included in the frame unit 11 transported by the transport unit.

Further, when the frame unit 11 including the processed workpiece 1 is stored in the cassette 13, the frame unit 11 passes through the region overlapping with the light source unit 54 again. At this time, in order to easily peel off the chips formed from the workpiece 1 and the workpiece 1 from the adhesive tape 7, the light source unit 54 may be activated to irradiate the frame unit 11 with ultraviolet rays.

In this case, in order to reliably reduce the adhesive strength of the adhesive tape 7, it is preferable to irradiate the frame unit 11 with ultraviolet rays at a higher intensity. Here, all the ultraviolet LEDs 62 may be activated in order to irradiate the frame unit 11 with ultraviolet light with higher intensity. However, even in this case, if it is not desired to reduce the adhesive force of the adhesive tape 7 in the area overlapping with the annular frame 9, it is not necessary to turn on all the ultraviolet LEDs 62.

In addition, when the adhesive tape 7 is irradiated with ultraviolet rays before processing the workpiece 1, when the adhesive tape 7 is irradiated after the processing of the workpiece 1, the adhesive tape 7 is It is not necessary to irradiate UV rays with the same intensity as when not irradiating UV rays. When the workpiece 1 is irradiated with ultraviolet rays before processing, the adhesive tape 7 has already undergone some degree of deterioration, so when irradiating the ultraviolet rays after processing, the adhesive tape 7 is applied with a strength that takes into account the progress of the deterioration. You can irradiate it with ultraviolet light.

Note that when irradiating the frame unit 11 with ultraviolet rays, the irradiation of ultraviolet rays may be continued while moving the frame unit 11 without stopping. In this case, even if the ultraviolet rays are irradiated, the time required until the frame unit 11 that has been carried out from the cassette 13 and processed is housed in the cassette 13 again does not increase substantially. Therefore, ultraviolet irradiation can be carried out extremely efficiently. However, when irradiating the ultraviolet rays, the moving speed of the frame unit 11 may be reduced for reasons such as controlling the irradiation intensity of the ultraviolet rays.

Furthermore, when irradiating the frame unit 11 with ultraviolet rays, the frame unit 11 may be moved and stopped repeatedly, and the irradiation with ultraviolet rays may be performed each time the frame unit 11 stops. If the frame unit 11 is stopped when the frame unit 11 is irradiated with ultraviolet rays, the irradiation target area of the frame unit 11 can be irradiated with ultraviolet rays with a predetermined intensity and with higher precision.

Here, in the processing apparatus 2 according to the present embodiment, the position of the outline of the workpiece 1 is detected by capturing an image of the workpiece 1 included in the frame unit 11 passing through an area overlapping the light source unit 54 with a camera. Good too. If the position of the outline of the workpiece 1 can be detected, the shape of the frame unit 11 and the position in the frame unit 11 can be detected. In the processing device 2, the chuck table 12 and the cutting unit 42 can be operated based on the acquired information, so the workpiece 1 can be processed with high precision.

As shown in FIGS. 1, 2, and 3, the processing apparatus 2 according to the present embodiment includes a camera 56 that faces the light source unit 54 across the transport path of the frame unit 11. The camera 56 can image the light emitted from the light source unit 54 and transmitted through the frame unit 11 to form a captured image. For example, the camera 56 uses an imaging device that is sensitive to light with wavelengths in the ultraviolet region so that ultraviolet light transmitted through the frame unit 11 can be detected. Note that the image sensor may be sensitive to light of wavelengths other than the ultraviolet region.

Each figure shows a case where the light source unit 54 is arranged below the transport route and the camera 56 is arranged above the transport route. However, the processing apparatus 2 according to the present embodiment is not limited to this, and the light source unit 54 may be disposed above the conveyance path, and the camera 56 may be disposed below the conveyance path.

When the frame unit 11 is irradiated with ultraviolet light by the light source unit 54, the ultraviolet light is absorbed by the adhesive tape 7 and transmitted through the adhesive tape 7 while being attenuated in a region of the frame unit 11 where the workpiece 1 is not present. On the other hand, in the area where the workpiece 1 is present, if the workpiece 1 is made of a material that does not transmit ultraviolet rays, the ultraviolet rays that have passed through the adhesive tape 7 are blocked by the workpiece 1 .

Therefore, when the camera 56 captures an image of the ultraviolet light that has passed through the frame unit 11, a captured image in which the workpiece 1 appears in the shadow is obtained. Then, the position of the contour of the workpiece 1 included in the frame unit 11 can be detected from the captured image, and the shape of the workpiece 1 and the position of the workpiece 1 in the frame unit 11 can be detected.

Note that, as shown in FIG. 2, the camera 56 may be movable along the direction (Y-axis direction) that intersects the transport path. For example, the processing device 2 may include a moving mechanism (not shown) that moves the camera 56 in a direction intersecting the transport path. In this case, by repeating imaging while moving the camera 56, imaging can be performed in the entire region of the frame unit 11 that overlaps with the light source unit 54.

As schematically shown in FIG. 3, the processing apparatus 2 according to this embodiment includes a contour detection unit 70 that is connected to the camera 56 and detects the position of the contour of the workpiece 1 included in the frame unit 11. Then, the contour detection unit 70 detects the contour of the workpiece 1 from the captured image obtained by capturing the light emitted from the light source unit 54 that passes through the frame unit 11 conveyed on the conveyance path with the camera 56. It has the function of detecting the position. Note that the functions of the contour detection unit 70 may be realized by a control unit 72, which will be described later.

The process by which the contour detection unit 70 detects the position of the contour of the workpiece 1 from the captured image will be described in detail. 4(A), FIG. 4(C), FIG. 4(E), FIG. 5(A), FIG. 5(C), and FIG. 5(E) show that the frame unit is connected from the cassette 13 to the pair of guide rails 16. 11 is shown step by step as it is being carried out.

These figures schematically illustrate the inside of the cassette 13, the light source unit 54, the pair of guide rails 16, and the gripping mechanism 28 provided at the end of the first holding mechanism 26 of the first transport unit 22. FIG. In these figures, the top plate of the cassette 13, the support frame 13a, the camera 56, the cassette mounting table 6, the openings 4a and 4b, the dust-proof and drip-proof cover 8, and the like are omitted.

As shown in these figures, the frame unit 11 including the annular frame 9 held by the gripping mechanism 28 of the first transport unit 22 overlaps the light source unit 54 during the process of being carried out from the cassette 13. Then, the frame unit 11 is transported to the pair of guide rails 16 while the region overlapping with the light source unit 54 changes.

FIG. 4A schematically shows the frame unit 11 pulled out from the cassette 13 and starting to overlap the light source unit 54. In this state, when the ultraviolet LED 62 of the light source unit 54 is activated, a portion of the ultraviolet light passes through the frame unit 11 . When the transmitted ultraviolet rays are imaged by the camera 56, a captured image 66a schematically shown in FIG. 4(B) is obtained. FIG. 4(B) is a front view schematically showing the captured image 66a.

In the captured image 66a, an area that does not transmit ultraviolet light appears as a shadow 68a. A shadow 68a indicates a region of the frame unit 11 where the workpiece 1 is present. Although the shadow of the annular frame 9 is omitted in the captured image 66a for convenience of explanation, the shadow of the annular frame 9 may be included in the captured image 66a.

FIG. 4(C) schematically shows the frame unit 11 in a state where it is further pulled out from the cassette 13 from the state shown in FIG. 4(A). When the frame unit 11 moves, the area of the frame unit 11 that overlaps with the light source unit 54 changes. FIG. 4(D) schematically shows a captured image 66b obtained by capturing ultraviolet rays emitted from the light source unit 54 and transmitted through the frame unit 11 with the camera 56 in the positional relationship shown in FIG. 4(C). There is. In the captured image 66b, the area where the workpiece 1 is present appears as a shadow 68b.

Similarly, FIG. 4(F), FIG. 5(B), FIG. 5(D), and FIG. 5(F) respectively show FIG. 4(E), FIG. 5(A), FIG. 5(C), Also, captured images 66c, 66d, 66e, and 66f obtained in the positional relationship shown in FIG. 5(E) are schematically shown. In each of the captured images 66c, 66d, 66e, and 66f, the area where the workpiece 1 is present appears as shadows 68c, 68d, 68e, and 68f.

The contour detection unit 70 detects the position of the contour of the workpiece 1 by combining the obtained captured images 66a, 66b, 66c, 66d, 66e, and 66f, for example. In this manner, by operating the camera 56 while irradiating the frame unit 11 with ultraviolet light from the light source unit 54, the position of the contour of the workpiece 1 on the frame unit 11 can be detected while appropriately curing the adhesive tape 7.

Note that when detecting the position of the outline of the workpiece 1 while appropriately reducing the adhesive strength of the area of the adhesive tape 7 attached to the workpiece 1, the method shown in FIGS. 6(A) and 6(B) As shown, only the ultraviolet LED 62 overlapping the workpiece 1 may be activated. However, in this case, the amount of ultraviolet light that passes through the area of the frame unit 11 that does not overlap with the workpiece 1 is insufficient, and the shadow of the workpiece 1 is not clear in the obtained captured image, and the camera 56 It may be difficult to detect the outline of object 1.

Therefore, in addition to the ultraviolet LEDs 62 that overlap the workpiece 1, among the ultraviolet LEDs 62 that do not overlap the workpiece 1, those in a range that does not overlap the annular frame 9 of the frame unit 11 may be activated. For example, the ultraviolet LED 62 adjacent to the ultraviolet LED 62 overlapping the workpiece 1 is activated. In this case, in the captured image obtained using the camera 56, the area that does not overlap with the workpiece 1 appears clearly and brightly, so that the outline of the workpiece 1 can be clearly detected.

Note that depending on the processing conditions performed by the processing apparatus 2 on the workpiece 1 included in the frame unit 11, the frame unit 11 may not be irradiated with ultraviolet rays before processing the workpiece 1. In this case, the frame unit 11 is not irradiated with ultraviolet rays, and even if the camera 56 is operated, the ultraviolet rays cannot be detected. Therefore, the contour detection unit 70 cannot detect the position of the contour of the workpiece 1.

Therefore, the light source unit 54 may include a non-ultraviolet light LED 60 that irradiates the frame unit 11 with light so that the position of the outline of the workpiece 1 can be detected even when the frame unit 11 is not irradiated with ultraviolet rays. In this case, as shown in FIG. 2, a plurality of non-ultraviolet light LEDs 60 are provided on the upper surface of the LED holder 58.

The non-ultraviolet light LED 60 has a length exceeding the width of the workpiece 1 and is arranged along the direction (Y-axis direction) intersecting the conveyance path. For example, as shown in FIG. 2, each non-ultraviolet light LED 60 is arranged adjacent to each ultraviolet light LED 62 in the Y-axis direction. Alternatively, each non-ultraviolet light LED 60 may be arranged between each ultraviolet light LED 62. That is, the non-ultraviolet light LEDs 60 and the ultraviolet light LEDs 62 may be arranged alternately along the direction (Y-axis direction) intersecting the transport path.

The non-ultraviolet LED 60 is an LED that has a function of emitting light in a wavelength range other than ultraviolet rays, and for example, a visible light LED that emits light in a visible light range (visible light) or light in an infrared wavelength range. This is an infrared LED that emits (infrared light). The plurality of non-ultraviolet light LEDs 60 may be connected to different wirings, may be independently switched on and off, and may be able to independently control the intensity of the light they emit. Alternatively, the plurality of non-ultraviolet light LEDs 60 may be switched on and off as a unit.

If the adhesive tape 7 is not irradiated with ultraviolet light before processing the workpiece 1 in the cutting unit (processing unit) 42, the non-ultraviolet light LED 60 is operated in place of the ultraviolet light LED 62 to irradiate the frame unit 11 with non-ultraviolet light. let Then, the non-ultraviolet light transmitted through the frame unit 11 is imaged by the camera 56 to obtain a captured image. In the captured image, the area where the workpiece 1 exists appears as a shadow. Therefore, the contour detection unit 70 can detect the position of the contour of the workpiece 1 in the frame unit 11 based on the captured image.

In addition, when imaging the workpiece 1 with non-ultraviolet light, it is not necessary to operate all of the non-ultraviolet light LEDs 60, and only the non-ultraviolet light LEDs 60 that overlap the workpiece 1 may be activated. In addition to the non-ultraviolet LED 60 that overlaps the workpiece 1, a non-ultraviolet LED 60 adjacent to the non-ultraviolet LED 60 that overlaps the workpiece 1 may be activated.

As described above, in the processing apparatus 2 according to the present embodiment, when a process of irradiating ultraviolet rays is performed before processing the workpiece 1, the ultraviolet rays emitted from the ultraviolet LED 62 are imaged by the camera 56 and The position of the outline of the workpiece 1 can be detected. Furthermore, even when this process is not performed, the outline of the workpiece 1 can be detected by imaging the non-ultraviolet light emitted from the non-ultraviolet light LED 60 with the camera 56.

Furthermore, in the processing apparatus 2 according to this embodiment, the ultraviolet light LED 62 and the non-ultraviolet light LED 60 may be operated simultaneously. For example, even if the process of irradiating the frame unit 11 with ultraviolet rays is performed in advance, even if the intensity of the irradiated ultraviolet rays is low and the ultraviolet rays that pass through the frame unit 11 are imaged by the camera 56, the contrast of the captured image obtained is may not reach the required level.

In this case, the ultraviolet light LED 62 is activated to irradiate the frame unit 11 with ultraviolet light to carry out the process, and the non-ultraviolet light LED 60 is activated to irradiate the frame unit 11 with non-ultraviolet light. Then, when the non-ultraviolet light transmitted through the frame unit 11 is imaged by the camera 56, a captured image with a sufficient level of contrast that can be used to detect the position of the outline of the workpiece 1 is obtained.

Note that the area of the frame unit 11 that is irradiated with ultraviolet light and the area that is irradiated with non-ultraviolet light may be the same, may correspond to each other, or may be completely different. The ultraviolet LED 62 to be activated is preferably selected so that ultraviolet irradiation is most efficient for the purpose of irradiating the frame unit 11 with ultraviolet rays. Further, the non-ultraviolet light LED 60 to be activated is preferably selected so that the position of the outline of the workpiece 1 can be detected most efficiently. The ultraviolet light LED 62 and the non-ultraviolet light LED 60 to be activated may be determined independently from each other.

In this way, the operation of the light source unit 54 can be changed according to the conditions of the processing performed on the frame unit 11 in the processing apparatus 2. The processing apparatus 2 according to the present embodiment may have a function of determining the content of the operation of the light source unit 54 based on the conditions of processing performed on the frame unit 11. Further, the processing device 2 may correct the operation of the light source unit 54 at any time based on captured images obtained by repeatedly capturing images of the workpiece 1 with the camera 56.

For example, if it is found that an ultraviolet LED 62 that does not overlap the workpiece 1 is activated based on a captured image obtained at a certain point, the light source unit 54 is corrected. Furthermore, if it is found that the necessary ultraviolet light LED 62 is not operating based on the captured image obtained at a certain point, the operation of the light source unit 54 is corrected so that the necessary ultraviolet light LED 62 is operated. . In this way, the operation of the light source unit 54 can be corrected even during ultraviolet irradiation.

As shown in FIG. 1, the processing device 2 includes a control unit 72 that controls each component. The control unit 72 controls, for example, transport units such as the first transport unit 22 and the second transport unit 32, the light source unit 54, the camera 56, and the contour detection unit 70.

The control unit 72 is, for example, a processor capable of processing data, and is a processing device having a circuit configured to perform functions represented by a computer program. The control unit 72 includes a microprocessor, a CPU (Central Processing Unit), etc. as a processor, and the program is stored in a storage device such as a hard disk drive or flash memory. Then, it functions as a concrete means in which software such as the program and the processing device (hardware resources) cooperate.

The control unit 72 includes a condition registration section 74 in which machining conditions for the frame unit 11 are registered. For example, conditions for machining performed by the machining device 2 on each frame unit 11 accommodated in the cassette 13 are registered in advance in the condition registration section 74 . The processing conditions registered in the condition registration section 74 include all or part of the conditions for conveyance, processing, cleaning, ultraviolet irradiation, etc. performed on the frame unit 11 by the processing device 2.

For example, the rotation speed, cutting depth, feed rate, etc. of the cutting blade 44 are registered in the condition registration section 74 as processing conditions for processing performed by the cutting unit (processing unit) 42. Further, as conditions for cleaning performed in the cleaning unit 48, the rotational speed of the spinner table 52, the amount of cleaning liquid sprayed from the spray nozzle 50, etc. are registered. Further, in the condition registration section 74, the necessity of ultraviolet irradiation to the frame unit 11 before and after processing the workpiece 1 with the cutting unit 42 and the ultraviolet irradiation conditions are registered as processing conditions.

The control unit 72 has a function of reading the processing conditions of the frame unit 11 registered in the condition registration section 74, and determines whether it is necessary to irradiate the frame unit 11 carried out from the cassette 13 with ultraviolet rays based on the processing conditions. Determine whether or not. Then, the light source unit 54 is controlled as necessary to irradiate the frame unit 11 conveyed on the conveyance path with ultraviolet rays.

For example, if the processing conditions include a process of irradiating the adhesive tape 7 with ultraviolet rays before processing the workpiece 1 with the cutting unit (processing unit) 42, the control unit 72 controls the ultraviolet light LED 62 of the light source unit 54. It is activated to irradiate the adhesive tape 7 with ultraviolet rays. In this case, the contour of the workpiece 1 can be detected by capturing an image of the ultraviolet light transmitted through the frame unit 11 with the camera 56.

The control unit 72 causes the camera 56 to image the ultraviolet rays that pass through the frame unit 11 to obtain a captured image, and causes the contour detection unit 70 to detect the position of the outline of the workpiece 1 based on the obtained captured image. let Thereafter, the frame unit 11 is transferred to the chuck table 12, and the relative positions of the cutting unit 42 and the chuck table 12 and the orientation of the chuck table 12 are controlled based on the detected position of the outline of the workpiece 1.

Furthermore, if the processing conditions do not include a process of irradiating the adhesive tape 7 with ultraviolet rays before processing the workpiece 1 with the cutting unit (processing unit) 42, the control unit 72 controls the ultraviolet LED 62 of the light source unit 54. does not operate. In this case, the non-ultraviolet light LED 60 is activated to irradiate the frame unit 11 with non-ultraviolet light. Then, the camera 56 is caused to image the non-ultraviolet light that passes through the frame unit 11, and the contour detection unit 70 is caused to detect the position of the contour of the workpiece 1 based on the obtained captured image.

That is, the control unit 72 determines whether or not the non-ultraviolet light LED 60 and the ultraviolet light LED 62 need to be operated according to the contents of the processing conditions registered in the condition registration section 74. In particular, when capturing an image of the frame unit 11 with the camera 56, the non-ultraviolet light LED 60 is not activated if the ultraviolet light emitted by the ultraviolet light LED 62 is sufficient for imaging. Therefore, when capturing an image of the frame unit 11, the light source unit 54 can be operated with the minimum necessary power, and the frame unit 11 can be processed with high efficiency.

As described above, the present embodiment provides a highly efficient processing device 2 that can irradiate the adhesive tape 7 included in the frame unit 11 with ultraviolet rays on the transport path of the frame unit 11.

If a light source that emits non-ultraviolet light for imaging the frame unit 11 with the camera 56 is provided separately from the light source unit 54 in an area that overlaps with the conveyance path, the conveyance path must be arranged in order to secure an area for disposing the light source. We have no choice but to design for a long time. In this case, the time required to transport the frame unit 11 increases, and the efficiency of processing performed by the processing device 2 decreases. In contrast, in the processing apparatus 2 according to the present embodiment, the light source unit 54 plays the role of the light source, so the light source is unnecessary and there is no need to lengthen the conveyance path.

Note that the present invention is not limited to the description of the embodiments described above, and can be implemented with various modifications. For example, in the above embodiment, a case has been described in which the camera 56 that images the frame unit 11 includes an image sensor that is sensitive to both ultraviolet light and non-ultraviolet light, but one embodiment of the present invention is not limited to this.

That is, the processing device 2 is equipped with a camera including an image sensor sensitive to ultraviolet light and a camera including an image sensor sensitive to non-ultraviolet light in an area that overlaps with the transport path of the frame unit 11 so as to be adjacent to each other. It's okay. In this case, the control unit 72 determines the camera to be used for imaging based on the wavelength of light irradiated to the frame unit 11 when imaging the frame unit 11.

In addition, the structure, method, etc. according to the above embodiments can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

1 Workpiece 1a Front side 1b Back side 3 Planned dividing line 5 Device 7 Adhesive tape 9 Annular frame 9a Opening 11 Frame unit 13 Cassette 13a Support frame 13b Carrying in/out entrance 13c Inner wall 2 Processing device 4 Base 4a, 4b, 4c Opening 6 Cassette mounting Placement stand 8 Dust-proof and drip-proof cover 10 X-axis moving table 12 Chuck table 12a Holding surface 12b Clamp 16 Guide rail 18, 38 Support structure 20, 30 Y-axis rail 22, 32 Transport unit 24, 34 Moving mechanism 26, 36 Holding mechanism 28 Gripping Mechanism 40 Y-axis Z-axis movement mechanism 42 Cutting unit (processing unit)
44 Cutting blade 46 Imaging unit (camera)
48 Cleaning unit 50 Spray nozzle 52 Spinner table 54 Light source unit 56 Camera 58 LED holder 60 Non-ultraviolet LED
62, 62a, 62b Ultraviolet LED
64 Protective cover 66a, 66b, 66c, 66d, 66e, 66f Captured image 68b, 68c, 68d, 68e, 68f Shadow 70 Contour detection unit 72 Control unit 74 Condition registration section

Claims (4)

an annular frame having an opening; an ultraviolet curing adhesive tape attached to one side of the annular frame so as to close the opening; and a workpiece attached to and supported by the adhesive tape inside the opening; a cassette mounting table on which a cassette accommodating a plurality of frame units each including a cassette is mounted;
a chuck table that holds the frame unit;
a transport unit that transports the frame unit between the cassette placed on the cassette mounting table and the chuck table;
a processing unit that processes the workpiece included in the frame unit held by the chuck table;
a light source unit that overlaps with the transport path of the frame unit transported by the transport unit and extends along a direction that intersects the transport route;
a camera disposed facing the light source unit across the conveyance path and photographing the workpiece included in the frame unit;
a contour detection unit that detects the position of the contour of the workpiece included in the frame unit;
A control unit that controls the transport unit, the light source unit, the camera, and the contour detection unit,
The light source unit includes a plurality of ultraviolet LEDs arranged along the direction intersecting the conveyance path with a length exceeding the width of the workpiece,
The light source unit further includes a plurality of non-ultraviolet light LEDs that emit non-ultraviolet light and are arranged along the direction intersecting the conveyance path with a length exceeding the width of the workpiece,
The contour detection unit detects the workpiece from an image obtained by capturing, with the camera, light emitted from the light source unit that passes through the frame unit that is transported on the transport path by the transport unit. Detect the position of the contour,
The control unit includes:
It has a condition registration section in which machining conditions of the frame unit are registered,
a function of reading out the processing conditions of the frame unit registered in the condition registration section;
If the processing conditions include a process of irradiating the adhesive tape with ultraviolet rays before processing the workpiece in the processing unit, the ultraviolet LED is activated to irradiate the adhesive tape with ultraviolet rays, and the frame A function of causing the camera to image the ultraviolet rays that pass through the unit, and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image;
If the processing conditions do not include the process of irradiating the adhesive tape with ultraviolet rays before processing the workpiece in the processing unit, the non-ultraviolet light LED is activated to irradiate the frame unit with the non-ultraviolet light. a function of causing the camera to image the non-ultraviolet light transmitted through the frame unit, and causing the contour detection unit to detect the position of the contour of the workpiece based on the obtained captured image;
A processing device characterized by comprising : The light source unit is characterized in that, among the plurality of ultraviolet LEDs, one or more ultraviolet LEDs located in an area overlapping with the workpiece included in the frame unit conveyed by the conveyance unit are turned on. The processing device according to claim 1 . an annular frame having an opening; an ultraviolet curing adhesive tape attached to one side of the annular frame so as to close the opening; and a workpiece attached to and supported by the adhesive tape inside the opening; a cassette mounting table on which a cassette accommodating a plurality of frame units each including a cassette is mounted;
a chuck table that holds the frame unit;
a transport unit that transports the frame unit between the cassette placed on the cassette mounting table and the chuck table;
a processing unit that processes the workpiece included in the frame unit held by the chuck table;
a light source unit that overlaps the transport path of the frame unit transported by the transport unit and extends along a direction that intersects the transport path,
The light source unit includes a plurality of ultraviolet LEDs arranged along the direction intersecting the conveyance path with a length exceeding the width of the workpiece,
The light source unit is characterized in that, among the plurality of ultraviolet LEDs, one or more ultraviolet LEDs located in an area overlapping with the workpiece included in the frame unit conveyed by the conveyance unit are turned on. Processing equipment. The processing device according to claim 3 ,
a camera disposed facing the light source unit across the conveyance path and photographing the workpiece included in the frame unit;
further comprising a contour detection unit that detects the position of the contour of the workpiece included in the frame unit,
The contour detection unit detects the workpiece from an image obtained by capturing, with the camera, light emitted from the light source unit that passes through the frame unit that is transported on the transport path by the transport unit. A processing device characterized by detecting the position of a contour.

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