JP2021051156A - Irradiation unit and liquid crystal panel manufacturing device - Google Patents

Irradiation unit and liquid crystal panel manufacturing device Download PDF

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JP2021051156A
JP2021051156A JP2019173213A JP2019173213A JP2021051156A JP 2021051156 A JP2021051156 A JP 2021051156A JP 2019173213 A JP2019173213 A JP 2019173213A JP 2019173213 A JP2019173213 A JP 2019173213A JP 2021051156 A JP2021051156 A JP 2021051156A
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flow path
irradiation unit
substrate
cooling block
irradiation
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JP7302409B2 (en
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純 藤岡
Jun Fujioka
純 藤岡
亮彦 田内
Akihiko Tauchi
亮彦 田内
幸信 中川
Yukinobu Nakagawa
幸信 中川
貴章 田中
Takaaki Tanaka
貴章 田中
剛雄 加藤
Takeo Kato
剛雄 加藤
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Toshiba Lighting and Technology Corp
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Toshiba Lighting and Technology Corp
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Priority to CN202021692780.8U priority patent/CN212623449U/en
Priority to TW109128280A priority patent/TWI829960B/en
Priority to KR1020200104500A priority patent/KR20210035733A/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133382Heating or cooling of liquid crystal cells other than for activation, e.g. circuits or arrangements for temperature control, stabilisation or uniform distribution over the cell

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Mathematical Physics (AREA)

Abstract

To make a maintenance work easier.SOLUTION: An irradiation unit of an embodiment includes a plurality of light emission elements, a cooling block, a cooling pipe, and a third flow passage. The light emission elements are equipped in the front surface of a substrate. The cooling block has a first flow passage extending along a longer direction of the substrate and is arranged in the back surface of the substrate. The cooling pipe has a second flow passage in parallel to the first flow passage and is arranged in the back surface side of the cooling block. A third flow passage connects an end of the first flow passage and one end of the second flow passage to each other.SELECTED DRAWING: Figure 3

Description

本発明の実施形態は、照射ユニットおよび液晶パネル製造装置に関する。 Embodiments of the present invention relate to an irradiation unit and a liquid crystal panel manufacturing apparatus.

従来、複数の発光素子を点灯させて光を照射する照射ユニットが知られている。照射ユニットは、液晶パネルの製造や、インクや接着材の硬化などさまざまな産業分野で使用される。 Conventionally, an irradiation unit that lights a plurality of light emitting elements to irradiate light is known. Irradiation units are used in various industrial fields such as manufacturing liquid crystal panels and curing inks and adhesives.

特開2009−61702号公報JP-A-2009-61702

ところで、大型の液晶パネルを製造するために、例えば全長が2[m]を超えるような長尺の照射ユニットを複数並べて配置させることがあり、構成部材の点検や交換といった保守作業の作業性の改善が必要とされていた。 By the way, in order to manufacture a large liquid crystal panel, for example, a plurality of long irradiation units having a total length exceeding 2 [m] may be arranged side by side, and the workability of maintenance work such as inspection and replacement of constituent members may be improved. Improvement was needed.

本発明が解決しようとする課題は、保守作業を容易にすることができる照射ユニットおよび液晶パネル製造装置を提供することである。 An object to be solved by the present invention is to provide an irradiation unit and a liquid crystal panel manufacturing apparatus capable of facilitating maintenance work.

実施形態の照射ユニットは、複数の発光素子と、冷却ブロックと、冷却管と、第3流路とを具備する。複数の発光素子は、基板の前面に実装されている。冷却ブロックは、基板の長手方向に沿って延びる第1流路を有し、基板の背面に配置される。冷却管は、第1流路に並行する第2流路を有し、冷却ブロックの背面側に配置される。第3流路は、第1流路の一端と第2流路の一端とを連通させる。 The irradiation unit of the embodiment includes a plurality of light emitting elements, a cooling block, a cooling pipe, and a third flow path. A plurality of light emitting elements are mounted on the front surface of the substrate. The cooling block has a first flow path extending along the longitudinal direction of the substrate and is arranged on the back surface of the substrate. The cooling pipe has a second flow path parallel to the first flow path and is arranged on the back side of the cooling block. The third flow path communicates one end of the first flow path with one end of the second flow path.

本発明によれば、保守作業を容易にすることができる。 According to the present invention, maintenance work can be facilitated.

実施形態に係る液晶パネル製造装置の側面図である。It is a side view of the liquid crystal panel manufacturing apparatus which concerns on embodiment. 実施形態に係る照射ユニットの正面図である。It is a front view of the irradiation unit which concerns on embodiment. 実施形態に係る照射ユニットの側面図である。It is a side view of the irradiation unit which concerns on embodiment. 液晶パネルを模式的に示す断面図である。It is sectional drawing which shows typically the liquid crystal panel. 実施形態に係る紫外線照射モジュールの模式図である。It is a schematic diagram of the ultraviolet irradiation module which concerns on embodiment.

以下で説明する実施形態に係る照射ユニット1は、複数の発光素子52と、冷却ブロック10と、冷却管20と、第3流路(流路31)とを具備する。複数の発光素子52は、基板51の前面に実装されている。冷却ブロック10は、基板51の長手方向に沿って延びる第1流路(流路11)を有し、基板51の背面に配置される。冷却管20は、第1流路(流路11)に並行する第2流路(流路21)を有し、冷却ブロック10を挟んで基板51の反対側に配置される。第3流路(流路31)は、第1流路(流路11)の一端と第2流路(流路21)の一端とを連通させる。 The irradiation unit 1 according to the embodiment described below includes a plurality of light emitting elements 52, a cooling block 10, a cooling pipe 20, and a third flow path (flow path 31). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51. The cooling block 10 has a first flow path (flow path 11) extending along the longitudinal direction of the substrate 51, and is arranged on the back surface of the substrate 51. The cooling pipe 20 has a second flow path (flow path 21) parallel to the first flow path (flow path 11), and is arranged on the opposite side of the substrate 51 with the cooling block 10 interposed therebetween. The third flow path (flow path 31) communicates one end of the first flow path (flow path 11) with one end of the second flow path (flow path 21).

また、以下で説明する実施形態に係る照射ユニット1は、基板51の長手方向に沿って冷却ブロック10を保持する保持機構を具備する。 Further, the irradiation unit 1 according to the embodiment described below includes a holding mechanism for holding the cooling block 10 along the longitudinal direction of the substrate 51.

また、以下で説明する実施形態に係る照射ユニット1は、第1流路(流路11)の他端側に接続される第1継手部材(継手部材71)と、第2流路(流路21)の他端側に接続される第2継手部材(継手部材72)とを具備する。 Further, the irradiation unit 1 according to the embodiment described below includes a first joint member (joint member 71) connected to the other end side of the first flow path (flow path 11) and a second flow path (flow path). A second joint member (joint member 72) connected to the other end side of 21) is provided.

また、以下で説明する実施形態に係る冷却ブロック10は、基板51の長手方向に沿って脱着可能に配置される。 Further, the cooling block 10 according to the embodiment described below is detachably arranged along the longitudinal direction of the substrate 51.

また、以下で説明する実施形態に係る液晶パネル製造装置100は、複数の紫外線照射装置を具備する。複数の紫外線照射装置は、光反応性物質を含有する被処理パネル6に光を照射する。紫外線照射装置は、照射ユニット1である。 Further, the liquid crystal panel manufacturing apparatus 100 according to the embodiment described below includes a plurality of ultraviolet irradiation apparatus. The plurality of ultraviolet irradiation devices irradiate the panel 6 to be treated containing the photoreactive substance with light. The ultraviolet irradiation device is an irradiation unit 1.

以下に、本発明に係る実施形態を図面に基づき説明する。なお、以下に示す各実施形態は、本発明が開示する技術を限定するものではない。また、以下に示す各実施形態及び各変形例は、矛盾しない範囲で適宜組合せることができる。また、各実施形態の説明において、同一構成には同一符号を付与して後出の説明を適宜省略する。 Hereinafter, embodiments according to the present invention will be described with reference to the drawings. In addition, each embodiment shown below does not limit the technique disclosed by this invention. In addition, each embodiment and each modification shown below can be appropriately combined within a consistent range. Further, in the description of each embodiment, the same reference numerals are given to the same configurations, and the following description will be omitted as appropriate.

[実施形態]
まず、図1を用いて実施形態に係る液晶パネル製造装置の概要について説明する。図1は、実施形態に係る液晶パネル製造装置の側面図である。
[Embodiment]
First, an outline of the liquid crystal panel manufacturing apparatus according to the embodiment will be described with reference to FIG. FIG. 1 is a side view of the liquid crystal panel manufacturing apparatus according to the embodiment.

なお、説明を分かりやすくするために、図1には、照射方向を正方向とするZ軸を含む3次元の直交座標系を図示している。Z軸を含む3次元の直交座標系を図示している。かかる直交座標系は、後出の説明に用いる他の図面でも示す場合がある。 For the sake of clarity, FIG. 1 illustrates a three-dimensional Cartesian coordinate system including the Z-axis whose positive direction is the irradiation direction. A three-dimensional Cartesian coordinate system including the Z axis is illustrated. Such a Cartesian coordinate system may also be shown in other drawings used in the later description.

図1に示すように、実施形態に係る液晶パネル製造装置100は、照射部140と、ステージ部150とを有する。液晶パネル製造装置100は、ステージ部150に配置された被処理パネル6に紫外線を照射して液晶パネルを製造する装置である。 As shown in FIG. 1, the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes an irradiation unit 140 and a stage unit 150. The liquid crystal panel manufacturing apparatus 100 is an apparatus for manufacturing a liquid crystal panel by irradiating the panel 6 to be processed arranged on the stage portion 150 with ultraviolet rays.

照射部140は、紫外線照射モジュール141と、点灯装置142と、反射板143とを有する。紫外線照射モジュール141は、複数の照射ユニット1を有する。照射ユニット1は、点灯装置142を介して不図示の電源装置から供給された電力により、被処理パネル6の処理に適した波長の紫外線を放射する。 The irradiation unit 140 includes an ultraviolet irradiation module 141, a lighting device 142, and a reflector 143. The ultraviolet irradiation module 141 has a plurality of irradiation units 1. The irradiation unit 1 radiates ultraviolet rays having a wavelength suitable for processing of the panel 6 to be processed by electric power supplied from a power supply device (not shown) via the lighting device 142.

反射板143は、照射ユニット1から放射される紫外線をステージ部150に向かうように反射させることで、照射効率を高めるものである。図1に示した例では、反射板143は、紫外線照射モジュール141の背面側(Z軸負方向側)にのみ配置させたが、これに限らず、例えば、照射部140やステージ部150の内部に配置させてもよい。 The reflector 143 enhances the irradiation efficiency by reflecting the ultraviolet rays radiated from the irradiation unit 1 toward the stage portion 150. In the example shown in FIG. 1, the reflector 143 is arranged only on the back surface side (Z-axis negative direction side) of the ultraviolet irradiation module 141, but the present invention is not limited to this, and for example, the inside of the irradiation unit 140 and the stage unit 150. It may be arranged in.

ここで、図2、図3を用いて、照射ユニット1の構成例について説明する。図2は、実施形態に係る照射ユニットの正面図である。図3は、実施形態に係る照射ユニットの側面図である。 Here, a configuration example of the irradiation unit 1 will be described with reference to FIGS. 2 and 3. FIG. 2 is a front view of the irradiation unit according to the embodiment. FIG. 3 is a side view of the irradiation unit according to the embodiment.

図2、図3に示すように、実施形態に係る照射ユニット1は、光源部50と、冷却ブロック10と、冷却管20と、接続部材30と、継手部材71、72と、取付部60と、保持部40と、支持部材80とを具備する。 As shown in FIGS. 2 and 3, the irradiation unit 1 according to the embodiment includes a light source unit 50, a cooling block 10, a cooling pipe 20, a connecting member 30, joint members 71 and 72, and a mounting unit 60. , The holding portion 40 and the support member 80 are provided.

光源部50は、基板51と、複数の発光素子52とを有する。基板51は、例えば、セラミックスによって形成された長尺状の基材に、例えば銀等によって所望のパターン状に形成された図示しないプリント配線が設けられたものである。基板51の前面には、複数の発光素子52が、プリント配線と電気的に接続されて設けられている。複数の発光素子52は、基板51の長手方向(X軸方向)に沿って一列に配列されている。 The light source unit 50 includes a substrate 51 and a plurality of light emitting elements 52. The substrate 51 is, for example, a long base material made of ceramics provided with printed wiring (not shown) formed of, for example, silver or the like in a desired pattern. A plurality of light emitting elements 52 are electrically connected to the printed wiring on the front surface of the substrate 51. The plurality of light emitting elements 52 are arranged in a row along the longitudinal direction (X-axis direction) of the substrate 51.

また、図示しないが、基板51は、発光素子52が接続される接続端子と、電源装置から電力が供給される電源端子とを除く領域が、絶縁性を確保し、腐食を防ぐために、被覆膜によって覆われている。被覆膜は、例えば、ガラス材等を主成分とする無機材料によって形成されている。なお、必要に応じて、基板51は、発光素子52が発する光を反射する反射性を高めるために、比較的高い反射率を有する白色のアルミナによって形成されてもよい。また、基板51は、熱伝導性を高く確保するために、比較的高い熱伝導性を有する窒化アルミニウムによって形成されてもよい。 Further, although not shown, the substrate 51 is covered in a region excluding the connection terminal to which the light emitting element 52 is connected and the power supply terminal to which power is supplied from the power supply device in order to ensure insulation and prevent corrosion. Covered by a membrane. The coating film is formed of, for example, an inorganic material containing a glass material or the like as a main component. If necessary, the substrate 51 may be formed of white alumina having a relatively high reflectance in order to enhance the reflectivity of reflecting the light emitted by the light emitting element 52. Further, the substrate 51 may be formed of aluminum nitride having a relatively high thermal conductivity in order to secure a high thermal conductivity.

発光素子52には、紫外線を発する発光ダイオード(LED:Light Emitting Diode)や半導体レーザ(LD:Laser Diode)が用いられる。発光素子52は、例えば、波長300[nm]〜400[nm]程度を主波長とし、かつ、ピーク波長が365[nm]の紫外線を発する。 As the light emitting element 52, a light emitting diode (LED: Light Emitting Diode) or a semiconductor laser (LD: Laser Diode) that emits ultraviolet rays is used. The light emitting element 52 emits ultraviolet rays having a wavelength of about 300 [nm] to 400 [nm] as a main wavelength and a peak wavelength of 365 [nm], for example.

なお、実施形態でいう「紫外線」とは、波長450[nm]以下の波長の光であり、具体的には発光素子52が発する波長365[nm]の光であるが、その他の波長の光も許容される。また、発光素子52は、波長450[nm]以下の光を放射するLEDやLDに限定されるものではなく、例えば波長450[nm]以下の光を放射するのみでなく、波長450[nm]よりも長波長側の光を放射するLEDやLDであってもよい。すなわち、波長450[nm]以下の光を放射するLEDやLDであれば、その発光様式は限定されない。 The "ultraviolet rays" in the embodiment are light having a wavelength of 450 [nm] or less, specifically light having a wavelength of 365 [nm] emitted by the light emitting element 52, but light having other wavelengths. Is also acceptable. Further, the light emitting element 52 is not limited to an LED or LD that emits light having a wavelength of 450 [nm] or less. For example, the light emitting element 52 not only emits light having a wavelength of 450 [nm] or less, but also emits light having a wavelength of 450 [nm] or less. It may be an LED or LD that emits light on a longer wavelength side than that. That is, as long as it is an LED or LD that emits light having a wavelength of 450 [nm] or less, its emission mode is not limited.

冷却ブロック10は、略直方体状に形成されており、基板51の背面に配置されている。冷却ブロック10には、例えばアルミニウム、アルミニウム合金、ステンレス鋼等が用いられる。 The cooling block 10 is formed in a substantially rectangular parallelepiped shape and is arranged on the back surface of the substrate 51. For the cooling block 10, for example, aluminum, aluminum alloy, stainless steel or the like is used.

また、冷却ブロック10は、基板51の長手方向(X軸方向)に延びる第1流路としての流路11を有する。冷却ブロック10は、流路11に流体を流通させることにより、いわゆる液冷ブロックとして機能し、基板51を介して発光素子52から伝わった熱を速やかに放熱させることができる。なお、流体は、例えば水である。また、流体として、例えば液体窒素や不凍液などの液体や、乾燥空気や窒素などの気体を使用してもよい。 Further, the cooling block 10 has a flow path 11 as a first flow path extending in the longitudinal direction (X-axis direction) of the substrate 51. The cooling block 10 functions as a so-called liquid cooling block by allowing the fluid to flow through the flow path 11, and can quickly dissipate the heat transferred from the light emitting element 52 via the substrate 51. The fluid is, for example, water. Further, as the fluid, for example, a liquid such as liquid nitrogen or antifreeze, or a gas such as dry air or nitrogen may be used.

冷却管20は、流路11に並行するようにX軸方向に延びる第2流路としての流路21を有し、冷却ブロック10の背面側に配置される直管状部材である。冷却管20には、例えばアルミニウム、アルミニウム合金、ステンレス鋼等が用いられる。流路21は、冷却管20の両端(端部20a、20b)に貫通する。 The cooling pipe 20 has a flow path 21 as a second flow path extending in the X-axis direction so as to be parallel to the flow path 11, and is a straight tubular member arranged on the back surface side of the cooling block 10. For the cooling pipe 20, for example, aluminum, aluminum alloy, stainless steel or the like is used. The flow path 21 penetrates both ends (ends 20a and 20b) of the cooling pipe 20.

接続部材30は、第3流路としての流路31を有する管状部材である。接続部材30は、例えば90[°]エルボジョイントであり、一端が冷却ブロック10の一端(端部10b)側に、他端が冷却管20の一端(端部20b)側に、それぞれ接続される。流路31は、接続部材30の両端に貫通しており、流路11と流路21とを連通させる。接続部材30には、例えばアルミニウム、アルミニウム合金、ステンレス鋼等が用いられる。なお、接続部材30は、直管状部材であってもよい。また、冷却ブロック10および/または冷却管20が流路31に相当するZ軸方向に延びる流路を有していれば、接続部材30を介さずに冷却ブロック10と冷却管20とを接続させた構成であっても構わない。 The connecting member 30 is a tubular member having a flow path 31 as a third flow path. The connecting member 30 is, for example, a 90 [°] elbow joint, and one end is connected to one end (end 10b) side of the cooling block 10 and the other end is connected to one end (end 20b) side of the cooling pipe 20. .. The flow path 31 penetrates both ends of the connecting member 30 to communicate the flow path 11 and the flow path 21. For the connecting member 30, for example, aluminum, aluminum alloy, stainless steel, or the like is used. The connecting member 30 may be a straight tubular member. Further, if the cooling block 10 and / or the cooling pipe 20 has a flow path corresponding to the flow path 31 extending in the Z-axis direction, the cooling block 10 and the cooling pipe 20 are connected without the connection member 30. It does not matter if it has a different configuration.

継手部材71は、冷却ブロック10の他端(端部10a)側に開口する流路11に接続される。また、継手部材72は、冷却管20の他端(端部20a)側に開口する流路21に接続される。継手部材71、72は、例えば、カプリング(カプラ)、ワンタッチ(クイック)ジョイントとも称され、対応するホースその他の管状部材との脱着を容易にする部材である。継手部材71、72が逆止弁その他の逆止機構を備えていると、照射ユニット1を着脱する際に冷却ブロック10や冷却管20の内部からの流体の漏出が生じにくくなり、流体の漏出に伴う光源部50の汚損その他の不具合を抑えることができる。 The joint member 71 is connected to a flow path 11 that opens toward the other end (end 10a) of the cooling block 10. Further, the joint member 72 is connected to a flow path 21 that opens on the other end (end 20a) side of the cooling pipe 20. The joint members 71 and 72 are also referred to as, for example, a coupling (coupler) or a one-touch (quick) joint, and are members that facilitate attachment / detachment to / from a corresponding hose or other tubular member. If the joint members 71 and 72 are provided with a check valve or other check mechanism, fluid leakage from the inside of the cooling block 10 or the cooling pipe 20 is less likely to occur when the irradiation unit 1 is attached or detached, and fluid leakage occurs. It is possible to suppress stains and other problems of the light source unit 50 due to the above.

取付部60は、天板144に取り付けられており、照射ユニット1を挟んでY軸方向の両側に配置されている。また、取付部60には、保持部40が配置されている。保持部40は、基板51の長手方向(X軸方向)に沿って延在しており、取付部60は、X軸方向に沿うように複数配置されることにより、保持部40が位置決めされる。 The mounting portions 60 are mounted on the top plate 144 and are arranged on both sides in the Y-axis direction with the irradiation unit 1 interposed therebetween. Further, a holding portion 40 is arranged on the mounting portion 60. The holding portion 40 extends along the longitudinal direction (X-axis direction) of the substrate 51, and a plurality of mounting portions 60 are arranged along the X-axis direction to position the holding portion 40. ..

保持部40は、冷却ブロック10を挟んでY軸方向の両側に配置されており、照射ユニット1の冷却ブロック10側に突出するように形成されている。保持部40は、冷却ブロック10の側面に設けられた凹部12と係合して照射ユニット1を保持する。凹部12は、保持部40と共働して、基板51の長手方向、すなわちX軸方向に沿って冷却ブロック10を保持する保持機構の一例である。 The holding portions 40 are arranged on both sides in the Y-axis direction with the cooling block 10 interposed therebetween, and are formed so as to project toward the cooling block 10 side of the irradiation unit 1. The holding portion 40 engages with the recess 12 provided on the side surface of the cooling block 10 to hold the irradiation unit 1. The recess 12 is an example of a holding mechanism that cooperates with the holding portion 40 to hold the cooling block 10 along the longitudinal direction of the substrate 51, that is, the X-axis direction.

また、保持部40は、冷却ブロック10を脱着させるガイドとしても機能する。すなわち、冷却ブロック10は、凹部12が保持部40と係合するようにX軸方向に沿って冷却ブロック10を脱着させることができる。このため、光源部50を含む冷却ブロック10や照射ユニット1の点検や交換に要する作業時間を短縮することができる。 The holding portion 40 also functions as a guide for attaching and detaching the cooling block 10. That is, the cooling block 10 can be attached and detached along the X-axis direction so that the recess 12 engages with the holding portion 40. Therefore, the work time required for inspection and replacement of the cooling block 10 including the light source unit 50 and the irradiation unit 1 can be shortened.

支持部材80は、冷却管20と冷却ブロック10との間に配置され、冷却ブロック10のたわみや振動等に伴って光源部50で発生しうる不具合を防止する。支持部材80は、照射ユニット1のX軸方向に沿う長さや質量等に応じて1または複数配置することができる。 The support member 80 is arranged between the cooling pipe 20 and the cooling block 10 to prevent problems that may occur in the light source unit 50 due to bending, vibration, or the like of the cooling block 10. One or a plurality of support members 80 can be arranged depending on the length, mass, and the like of the irradiation unit 1 along the X-axis direction.

実施形態に係る照射ユニット1では、流路11→流路31→流路21の順で冷却媒体が略U字状に折り返すように流れる。なお、冷却媒体が流れる方向は、逆であってもよい。 In the irradiation unit 1 according to the embodiment, the cooling medium flows in the order of the flow path 11 → the flow path 31 → the flow path 21 so as to fold back in a substantially U shape. The direction in which the cooling medium flows may be opposite.

ここで、照射ユニット1として、冷却ブロック10の内部に、第1流路(流路11)と第3流路(流路31)と第2流路(流路21)とを設けて、一つの冷却ブロック10内でXY平面に沿って略U字状に冷却媒体を流す構成や、冷却管20をY軸に並列に設けて、冷却ブロック10と同じXY平面に沿って略U字状に冷却媒体を流す構成とすることもできる。しかしながら、当該構成では、冷却ブロック10や冷却管20がY軸方向に幅を占有することとなるため、好ましくない。また、複数の照射ユニット1をY軸に並べるときに所望の間隔(ピッチ)とすることが困難であるため、好ましくない。 Here, as the irradiation unit 1, a first flow path (flow path 11), a third flow path (flow path 31), and a second flow path (flow path 21) are provided inside the cooling block 10. A configuration in which the cooling medium flows in a substantially U-shape along the XY plane in one cooling block 10, or a cooling pipe 20 is provided in parallel with the Y-axis to form a substantially U-shape along the same XY plane as the cooling block 10. It is also possible to have a configuration in which a cooling medium flows. However, in this configuration, the cooling block 10 and the cooling pipe 20 occupy the width in the Y-axis direction, which is not preferable. Further, it is not preferable because it is difficult to set a desired interval (pitch) when arranging a plurality of irradiation units 1 on the Y axis.

また、照射ユニット1に冷却管20を設けず、複数の照射ユニット1の冷却ブロック10の第1流路を第3流路で連結して、複数の照射ユニット1に対して一体的に冷却媒体を流す構成とすることもできる。しかしながら、継手部材71が設けられる照射ユニット1と、継手部材72が設けられる照射ユニット1とでは冷却媒体の温度が異なる。このため、複数の照射ユニット1における冷却媒体の温度管理が困難となり、複数の照射ユニット1で紫外線の照度が異なる可能性があるため、好ましくない。また、複数の照射ユニット1の冷却ブロック10の第1流路を第3流路で連結すると、保守作業時に第3流路をすべて取り外さないと交換対象となる照射ユニット1の交換を行うことができないため、好ましくない。 Further, the irradiation unit 1 is not provided with the cooling pipe 20, and the first flow paths of the cooling blocks 10 of the plurality of irradiation units 1 are connected by the third flow path to integrally cool the plurality of irradiation units 1. It can also be configured to flow. However, the temperature of the cooling medium is different between the irradiation unit 1 provided with the joint member 71 and the irradiation unit 1 provided with the joint member 72. For this reason, it becomes difficult to control the temperature of the cooling medium in the plurality of irradiation units 1, and the illuminance of ultraviolet rays may differ among the plurality of irradiation units 1, which is not preferable. Further, when the first flow paths of the cooling blocks 10 of the plurality of irradiation units 1 are connected by the third flow path, the irradiation unit 1 to be replaced can be replaced unless all the third flow paths are removed during maintenance work. It is not preferable because it cannot be done.

以上の不具合を解消するため、本実施形態のように、照射ユニット1は、冷却媒体がX軸方向に沿って略U字状に折り返すように流れる構成とすることが望ましい。 In order to solve the above problems, it is desirable that the irradiation unit 1 has a configuration in which the cooling medium flows so as to fold back in a substantially U shape along the X-axis direction as in the present embodiment.

上述したように、実施形態に係る照射ユニット1は、被処理パネル6の処理に適した波長の紫外線を放射することで液晶パネルを効率よく製造することができるものである。ここで、図4を用いて、被処理パネル6について説明する。 As described above, the irradiation unit 1 according to the embodiment can efficiently manufacture a liquid crystal panel by radiating ultraviolet rays having a wavelength suitable for the treatment of the panel 6 to be treated. Here, the panel 6 to be processed will be described with reference to FIG.

図4は、液晶パネルを模式的に示す断面図である。図4に示す被処理パネル6は、一対の基板7、8と、基板7と基板8との間に設けられた液晶層9とを有する。 FIG. 4 is a cross-sectional view schematically showing the liquid crystal panel. The panel 6 to be processed shown in FIG. 4 has a pair of substrates 7 and 8 and a liquid crystal layer 9 provided between the substrates 7 and the substrate 8.

基板7は、例えば、赤色、緑色、青色の光を透過するカラーフィルタ(図示しない)が基材上に配置され、保護膜でカラーフィルタが覆われてなるカラーフィルタ基板である。基板8は、液晶層9を挟んで基板7と対向するように設けられた対向基板であり、複数の電極がアレイ状に配置されている。 The substrate 7 is, for example, a color filter substrate in which a color filter (not shown) that transmits red, green, and blue light is arranged on a base material, and the color filter is covered with a protective film. The substrate 8 is an opposed substrate provided so as to face the substrate 7 with the liquid crystal layer 9 interposed therebetween, and a plurality of electrodes are arranged in an array.

液晶層9は、液晶組成物と光反応性物質としての重合性モノマーとを含む。液晶層9は、照射ユニット1から放射された特定の波長を有する紫外線を吸収することで重合性モノマーが重合し、ステージ151上での電圧の印加によって配向を制御させた液晶組成物が安定化される。 The liquid crystal layer 9 contains a liquid crystal composition and a polymerizable monomer as a photoreactive substance. The liquid crystal layer 9 polymerizes the polymerizable monomer by absorbing ultraviolet rays having a specific wavelength emitted from the irradiation unit 1, and stabilizes the liquid crystal composition whose orientation is controlled by applying a voltage on the stage 151. Will be done.

次に、図5を用いて、紫外線照射モジュール141における複数の照射ユニット1の配置例について説明する。図5は、実施形態に係る紫外線照射モジュールの模式図である。 Next, an arrangement example of a plurality of irradiation units 1 in the ultraviolet irradiation module 141 will be described with reference to FIG. FIG. 5 is a schematic view of the ultraviolet irradiation module according to the embodiment.

図5に示すように、複数の照射ユニット1は、天板144にそれぞれ固定されており、照射ユニット1の長さ方向がシャッタ160の開閉方向であるX軸方向に沿うようにそれぞれ平行に配置されている。なお、天板144は、反射板143(図1参照)を兼ねてもよい。 As shown in FIG. 5, each of the plurality of irradiation units 1 is fixed to the top plate 144, and the irradiation units 1 are arranged in parallel so that the length direction of the irradiation unit 1 is along the X-axis direction which is the opening / closing direction of the shutter 160. Has been done. The top plate 144 may also serve as a reflector plate 143 (see FIG. 1).

また、複数の照射ユニット1は、照射領域R1と照射領域R2とで配置される向きが異なる。具体的には、照射領域R1では、X軸負方向側の端部145に継手部材71、72が位置し、照射領域R2では、X軸正方向側の端部146に継手部材71、72が位置するようにそれぞれ配置される。これにより、照射領域R1では、端部145から、照射領域R2では、端部146からの照射ユニット1の脱着がそれぞれ可能になる。このため、保守作業を容易にすることができる。なお、照射領域が狭い場合、あるいは照射ユニット1の全長が大きい場合、複数の照射ユニット1は、すべて同じ方向に配列させてもよい。 Further, the plurality of irradiation units 1 are arranged in different directions in the irradiation region R1 and the irradiation region R2. Specifically, in the irradiation region R1, the joint members 71 and 72 are located at the end 145 on the negative direction side of the X axis, and in the irradiation region R2, the joint members 71 and 72 are located at the end 146 on the positive direction side of the X axis. Each is placed so that it is located. As a result, the irradiation unit 1 can be attached and detached from the end portion 145 in the irradiation region R1 and from the end portion 146 in the irradiation region R2. Therefore, maintenance work can be facilitated. When the irradiation area is narrow or the total length of the irradiation unit 1 is large, the plurality of irradiation units 1 may all be arranged in the same direction.

図1に戻り、さらに説明する。ステージ部150は、ステージ151と、リフトピン152とを有する。ステージ151は、所定の位置に載置された被処理パネル6に電圧を印加する。ステージ151は、例えば、放熱性の高いアルミニウムを使用することができる。また、ステージ151の表面にフッ素樹脂をコーティングすると、パネル交換後の迅速な除電が可能となり、液晶パネルを効率よく製造することができる。 Returning to FIG. 1, a further description will be given. The stage portion 150 has a stage 151 and a lift pin 152. The stage 151 applies a voltage to the panel 6 to be processed, which is placed at a predetermined position. For the stage 151, for example, aluminum having high heat dissipation can be used. Further, by coating the surface of the stage 151 with a fluororesin, it is possible to quickly remove static electricity after replacing the panel, and the liquid crystal panel can be efficiently manufactured.

リフトピン152は、載置された被処理パネル6を昇降させる昇降機であり、主として被処理パネル6の搬出入に使用される。具体的には、リフトピン152は、不図示の搬出入口からステージ部150に搬入された被処理パネル6を受け取る。また、リフトピン152は、ステージ151上に載置された紫外線照射後の被処理パネル6を浮上させ、不図示の搬送ロボットに受け渡す。 The lift pin 152 is an elevator that raises and lowers the mounted panel 6 to be processed, and is mainly used for carrying in and out the panel 6 to be processed. Specifically, the lift pin 152 receives the panel 6 to be processed carried into the stage portion 150 from a carry-in / out port (not shown). Further, the lift pin 152 floats the panel 6 to be processed after being irradiated with ultraviolet rays, which is placed on the stage 151, and delivers it to a transfer robot (not shown).

上述したように、実施形態に係る照射ユニット1は、複数の発光素子52と、冷却ブロック10と、冷却管20と、第3流路(流路31)とを具備する。複数の発光素子52は、基板51の前面に実装されている。冷却ブロック10は、基板51の長手方向に沿って延びる第1流路(流路11)を有し、基板51の背面に配置される。冷却管20は、第1流路(流路11)に並行する第2流路(流路21)を有し、冷却ブロック10を挟んで基板51の反対側に配置される。第3流路(流路31)は、第1流路(流路11)の一端と第2流路(流路21)の一端とを連通させる。このため、保守作業を容易にすることができる。 As described above, the irradiation unit 1 according to the embodiment includes a plurality of light emitting elements 52, a cooling block 10, a cooling pipe 20, and a third flow path (flow path 31). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51. The cooling block 10 has a first flow path (flow path 11) extending along the longitudinal direction of the substrate 51, and is arranged on the back surface of the substrate 51. The cooling pipe 20 has a second flow path (flow path 21) parallel to the first flow path (flow path 11), and is arranged on the opposite side of the substrate 51 with the cooling block 10 interposed therebetween. The third flow path (flow path 31) communicates one end of the first flow path (flow path 11) with one end of the second flow path (flow path 21). Therefore, maintenance work can be facilitated.

また、実施形態に係る冷却ブロック10は、基板51の長手方向に沿って脱着可能に配置される。このため、保守作業を容易にすることができる。 Further, the cooling block 10 according to the embodiment is detachably arranged along the longitudinal direction of the substrate 51. Therefore, maintenance work can be facilitated.

また、実施形態に係る照射ユニット1は、第1流路(流路11)の他端側に接続される第1継手部材(継手部材71)と、第2流路(流路21)の他端側に接続される第2継手部材(継手部材72)とを具備する。このため、保守作業の際に冷却媒体が落下しにくくなる。 Further, the irradiation unit 1 according to the embodiment includes a first joint member (joint member 71) connected to the other end side of the first flow path (flow path 11), a second flow path (flow path 21), and the like. It includes a second joint member (joint member 72) connected to the end side. Therefore, the cooling medium is less likely to fall during maintenance work.

また、実施形態に係る冷却ブロック10は、基板51の長手方向に沿って脱着可能に配置される。このため、保守作業を容易にすることができる。 Further, the cooling block 10 according to the embodiment is detachably arranged along the longitudinal direction of the substrate 51. Therefore, maintenance work can be facilitated.

また、実施形態に係る液晶パネル製造装置100は、複数の紫外線照射装置を具備する。複数の紫外線照射装置は、光反応性物質を含有する被処理パネル6に光を照射する。紫外線照射装置は、照射ユニット1である。このため、保守作業を容易にすることができる。 Further, the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes a plurality of ultraviolet irradiation apparatus. The plurality of ultraviolet irradiation devices irradiate the panel 6 to be treated containing the photoreactive substance with light. The ultraviolet irradiation device is an irradiation unit 1. Therefore, maintenance work can be facilitated.

なお、上記した実施形態では、冷却ブロック10の凹部12が、保持部40と共働する保持機構の一例であるとして説明したが、これに限らず、例えば冷却ブロック10が基板51の長手方向に沿って突出する凸部を有し、保持部40がこの凸部と係合する凹部を有する構成としてもよい。 In the above embodiment, the recess 12 of the cooling block 10 has been described as an example of a holding mechanism that cooperates with the holding portion 40, but the present invention is not limited to this, and for example, the cooling block 10 is oriented in the longitudinal direction of the substrate 51. A configuration may be configured in which the holding portion 40 has a concave portion that protrudes along the convex portion and engages with the convex portion.

また、上記した各実施形態では、発光素子52は、基板51の長手方向に沿って一列に配列されるとして説明したが、これに限らず、例えば、配列方向に沿って、配列方向と交差する方向へ位置が交互にずらされた、いわゆる千鳥配列にされてもよい。 Further, in each of the above-described embodiments, the light emitting elements 52 have been described as being arranged in a row along the longitudinal direction of the substrate 51, but the present invention is not limited to this, and for example, the light emitting elements 52 intersect the arrangement direction along the arrangement direction. It may be arranged in a so-called staggered arrangement in which the positions are alternately shifted in the direction.

本発明の実施形態を説明したが、実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。実施形態やその変形は、発明の範囲や要旨に含まれると同様に、特許請求の範囲に記載された発明とその均等の範囲に含まれるものである。 Although embodiments of the present invention have been described, the embodiments are presented as examples and are not intended to limit the scope of the invention. The embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. The embodiments and variations thereof are included in the scope of the invention described in the claims and the equivalent scope thereof, as are included in the scope and gist of the invention.

1 照射ユニット
6 被処理パネル
10 冷却ブロック
12 凹部
20 冷却管
30 接続部材
40 保持部
50 光源部
51 基板
52 発光素子
71、72 継手部材
140 照射部
141 紫外線照射モジュール
100 液晶パネル製造装置
1 Irradiation unit 6 Processed panel 10 Cooling block 12 Recession 20 Cooling pipe 30 Connecting member 40 Holding part 50 Light source part 51 Substrate 52 Light emitting element 71, 72 Joint member 140 Irradiation part 141 Ultraviolet irradiation module 100 Liquid crystal panel manufacturing equipment

Claims (5)

基板の前面に実装された複数の発光素子と;
前記基板の長手方向に沿って延びる第1流路を有し、前記基板の背面に配置される冷却ブロックと;
前記第1流路に並行する第2流路を有し、前記冷却ブロックの背面側に配置される冷却管と;
前記第1流路の一端と前記第2流路の一端とを連通させる第3流路と;
を具備する照射ユニット。
With multiple light emitting elements mounted on the front of the board;
With a cooling block having a first flow path extending along the longitudinal direction of the substrate and located on the back surface of the substrate;
With a cooling pipe having a second flow path parallel to the first flow path and arranged on the back side of the cooling block;
With a third flow path that communicates one end of the first flow path and one end of the second flow path;
Irradiation unit equipped with.
前記基板の長手方向に沿って前記冷却ブロックを保持する保持機構;
を具備する請求項1に記載の照射ユニット。
A holding mechanism that holds the cooling block along the longitudinal direction of the substrate;
The irradiation unit according to claim 1.
前記第1流路の他端側に接続される第1継手部材と;
前記第2流路の他端側に接続される第2継手部材と;
を具備する、請求項1または2に記載の照射ユニット。
With the first joint member connected to the other end side of the first flow path;
With the second joint member connected to the other end side of the second flow path;
The irradiation unit according to claim 1 or 2.
前記冷却ブロックは、前記基板の長手方向に沿って脱着可能に配置される、請求項1〜3のいずれか1つに記載の照射ユニット。 The irradiation unit according to any one of claims 1 to 3, wherein the cooling block is detachably arranged along the longitudinal direction of the substrate. 光反応性物質を含有する被処理パネルに光を照射する複数の紫外線照射装置;
を具備し、
前記紫外線照射装置は、請求項1〜4のいずれか1つに記載の照射ユニットである、液晶パネル製造装置。
Multiple UV irradiators that irradiate panels to be treated containing photoreactive substances with light;
Equipped with
The ultraviolet irradiation device is a liquid crystal panel manufacturing device, which is the irradiation unit according to any one of claims 1 to 4.
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TW109128280A TWI829960B (en) 2019-09-24 2020-08-19 Irradiation unit and LCD panel manufacturing equipment
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