TWI829960B - Irradiation unit and LCD panel manufacturing equipment - Google Patents

Abstract

The invention provides an irradiation unit and a liquid crystal panel manufacturing device. An object of the present invention is to facilitate maintenance work. The irradiation unit of the embodiment includes a plurality of light-emitting elements, a cooling block, a cooling tube, and a third flow path. A plurality of light-emitting elements are mounted on the front surface of the substrate. The cooling block has a first flow path extending along the longitudinal direction of the substrate, and is arranged on the back surface of the substrate. The cooling pipe has a second flow path parallel to the first flow path, and is arranged on the back side of the cooling block. The third flow path connects one end of the first flow path and one end of the second flow path.

Description

Irradiation unit and LCD panel manufacturing equipment

The invention relates to an irradiation unit and a liquid crystal panel manufacturing device.

Conventionally, an irradiation unit that lights a plurality of light-emitting elements and irradiates light has been known. The irradiation unit is used in various industrial fields such as manufacturing of liquid crystal panels or curing of ink or adhesive materials. [Prior Art Document] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2009-61702

[Problem to be solved by the invention] In addition, in order to manufacture a large liquid crystal panel, a plurality of elongated irradiation units with a total length exceeding 2 [m] may be arranged side by side. Therefore, it is necessary to improve the workability of maintenance operations such as inspection and replacement of structural members.

The problem to be solved by the present invention is to provide an irradiation unit and a liquid crystal panel manufacturing apparatus that facilitate maintenance work. [Technical means to solve problems]

The irradiation unit of the embodiment includes a plurality of light-emitting elements, a cooling block, a cooling tube, and a third flow path. A plurality of light-emitting elements are mounted on the front surface of the substrate. The cooling block has a first flow path extending along the longitudinal direction of the substrate, and is arranged on the back surface of the substrate. The cooling pipe has a second flow path parallel to the first flow path, and is arranged on the back side of the cooling block. The third flow path connects one end of the first flow path and one end of the second flow path. A liquid crystal panel manufacturing apparatus according to another embodiment includes a plurality of ultraviolet irradiation devices that irradiate light to a panel to be processed containing a photoreactive substance, and the ultraviolet irradiation device is the irradiation unit as described in the above embodiment. [Effects of the invention]

According to the present invention, maintenance work can be facilitated.

The irradiation unit 1 of the embodiment described below includes a plurality of light emitting elements 52 , a cooling block 10 , a cooling pipe 20 , and a third flow path (flow path 31 ). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51 . The cooling block 10 has a first flow path (flow path 11 ) extending along the longitudinal direction of the substrate 51 and is arranged on the back surface of the substrate 51 . The cooling pipe 20 has a second flow path (flow path 21 ) parallel to the first flow path (flow path 11 ), and is arranged on the opposite side of the substrate 51 with the cooling block 10 interposed therebetween. The third flow path (flow path 31 ) connects one end of the first flow path (flow path 11 ) and one end of the second flow path (flow path 21 ).

In addition, the irradiation unit 1 of the embodiment described below includes a holding mechanism that holds the cooling block 10 along the longitudinal direction of the substrate 51 .

In addition, the irradiation unit 1 of the embodiment described below includes a first joint member (joint member 71 ) connected to the other end side of the first flow path (flow path 11 ), and a second joint member (joint member 72 ) connected to the other end side of the first flow path (flow path 11 ). on the other end side of the second flow path (flow path 21).

In addition, the cooling block 10 of the embodiment described below is disposed so as to be detachable along the longitudinal direction of the substrate 51 .

In addition, the liquid crystal panel manufacturing apparatus 100 of the embodiment described below includes a plurality of ultraviolet irradiation devices. A plurality of ultraviolet irradiation devices irradiate light to the panel 6 to be processed containing the photoreactive substance. The ultraviolet irradiation device is irradiation unit 1.

Hereinafter, embodiments of the present invention will be described based on the drawings. In addition, each embodiment shown below does not limit the technology disclosed by this invention. In addition, each embodiment and each modification shown below can be combined appropriately within the range which does not conflict. In addition, in the description of each embodiment, the same structures are given the same reference numerals, and subsequent descriptions are appropriately omitted.

[Embodiment] First, the outline of the liquid crystal panel manufacturing apparatus according to the embodiment will be described using FIG. 1 . FIG. 1 is a side view of the liquid crystal panel manufacturing apparatus according to the embodiment.

In order to facilitate explanation, a three-dimensional orthogonal coordinate system including the Z-axis with the irradiation direction as the positive direction is illustrated in FIG. 1 . The orthogonal coordinate system may also be shown in other drawings used in the description below.

As shown in FIG. 1 , the liquid crystal panel manufacturing apparatus 100 according to the embodiment includes an irradiation unit 140 and a stage unit 150 . The liquid crystal panel manufacturing apparatus 100 is an apparatus that irradiates the panel 6 to be processed arranged on the stage unit 150 with ultraviolet rays to manufacture a liquid crystal panel.

The irradiation unit 140 includes an ultraviolet irradiation module 141, a lighting device 142, and a reflection plate 143. The ultraviolet irradiation module 141 has a plurality of irradiation units 1 . The irradiation unit 1 radiates ultraviolet rays of a wavelength suitable for processing of the panel 6 to be processed by using power supplied from a power supply device (not shown) via the lighting device 142 .

The reflection plate 143 improves irradiation efficiency by reflecting ultraviolet rays emitted from the irradiation unit 1 toward the stage portion 150 . In the example shown in FIG. 1 , the reflection plate 143 is disposed only on the back side (Z-axis negative direction side) of the ultraviolet irradiation module 141 , but it is not limited to this. For example, it may also be disposed on the irradiation part 140 or the stage part 150 . interior.

Here, a structural example of the irradiation unit 1 will be described using FIGS. 2 and 3 . Fig. 2 is a front view of the irradiation unit according to the embodiment. Fig. 3 is a side view of the irradiation unit according to the embodiment.

As shown in FIGS. 2 and 3 , the irradiation unit 1 of the embodiment includes a light source part 50 , a cooling block 10 , a cooling pipe 20 , a connecting member 30 , a joint member 71 , a joint member 72 , a mounting part 60 , a holding part 40 , and Support member 80.

The light source unit 50 includes a substrate 51 and a plurality of light emitting elements 52 . The substrate 51 is formed by providing printed wiring (not shown) formed in a desired pattern made of, for example, silver or the like on a long base material made of, for example, ceramics. A plurality of light emitting elements 52 are provided on the front surface of the substrate 51 so as to be electrically connected to printed wiring. The plurality of light emitting elements 52 are arranged in a row along the longitudinal direction (X-axis direction) of the substrate 51 .

Although not shown in the figure, in the substrate 51 , areas other than the connection terminals connected to the light-emitting elements 52 and the power supply terminals supplying power from the power supply device are covered with a coating film in order to ensure insulation and prevent corrosion. . The coating film is formed of an inorganic material whose main component is, for example, glass material. Furthermore, if necessary, the substrate 51 may also be formed of white alumina with relatively high reflectivity to improve the reflectivity of the light emitted by the light emitting element 52 . In addition, the substrate 51 may also be formed of aluminum nitride with relatively high thermal conductivity to ensure high thermal conductivity.

For the light-emitting element 52, a light-emitting diode (LED) or a semiconductor laser (laser diode (LD)) that emits ultraviolet light is used. The light-emitting element 52 emits ultraviolet light having a main wavelength of about 300 [nm] to 400 [nm] and a peak wavelength of 365 [nm], for example.

Furthermore, "ultraviolet light" described in the embodiment refers to light with a wavelength of 450 [nm] or less, specifically light with a wavelength of 365 [nm] emitted by the light-emitting element 52, but light of other wavelengths is also allowed. . In addition, the light-emitting element 52 is not limited to an LED or LD that emits light with a wavelength of 450 [nm] or less. For example, it may not only emit light with a wavelength of 450 [nm] or less, but may also emit light with a wavelength longer than 450 [nm]. LED or LD for wavelength side light. That is, as long as it is an LED or LD that emits light with a wavelength of 450 [nm] or less, the light emission form is not limited.

The cooling block 10 is formed in a substantially rectangular parallelepiped shape and is arranged on the back surface of the substrate 51 . For the cooling block 10, for example, aluminum, aluminum alloy, stainless steel, etc. are used.

In addition, the cooling block 10 has the flow path 11 as a first flow path extending in the longitudinal direction (X-axis direction) of the substrate 51 . By causing the fluid to flow through the flow path 11 , the cooling block 10 functions as a so-called liquid cooling block and can quickly dissipate the heat transferred from the light-emitting element 52 via the substrate 51 . Furthermore, the fluid is, for example, water. In addition, as the fluid, for example, liquids such as liquid nitrogen and antifreeze, or gases such as dry air or nitrogen can also be used.

The cooling pipe 20 is a straight tubular member which has a flow path 21 as a second flow path extending in the X-axis direction in parallel with the flow path 11 and is arranged on the back side of the cooling block 10 . For the cooling pipe 20, for example, aluminum, aluminum alloy, stainless steel, etc. are used. The flow path 21 penetrates to both ends (end 20a, end 20b) of the cooling pipe 20.

The connection member 30 is a tubular member having a flow path 31 as a third flow path. The connecting member 30 is, for example, a 90[°] elbow joint, with one end connected to one end (end 10 b ) of the cooling block 10 and the other end connected to one end (end 20 b ) of the cooling pipe 20 . The flow path 31 penetrates to both ends of the connecting member 30 so that the flow path 11 and the flow path 21 are connected. For the connection member 30, for example, aluminum, aluminum alloy, stainless steel, etc. are used. Furthermore, the connecting member 30 may also be a straight tubular member. In addition, as long as the cooling block 10 and/or the cooling pipe 20 has a flow path extending in the Z-axis direction corresponding to the flow path 31 , the cooling block 10 and the cooling pipe 20 may be connected without the connection member 30 . .

The joint member 71 is connected to the flow path 11 opened on the other end (end 10 a ) side of the cooling block 10 . In addition, the joint member 72 is connected to the flow path 21 opened on the other end (end 20 a ) side of the cooling pipe 20 . The joint members 71 and 72 are, for example, also called couplings (couplers) and one-touch (quick) joints, and facilitate attachment and detachment of corresponding hoses and other tubular members. component. If the joint members 71 and 72 include check valves and other check mechanisms, leakage of fluid from the inside of the cooling block 10 or the cooling pipe 20 is less likely to occur when the irradiation unit 1 is attached and detached, thereby suppressing the risk of fluid leakage. Contamination and other defects of the light source unit 50 .

The mounting portion 60 is mounted on the top plate 144 and is arranged on both sides in the Y-axis direction with the irradiation unit 1 interposed therebetween. In addition, the holding part 40 is arranged in the mounting part 60 . The holding portion 40 extends along the longitudinal direction (X-axis direction) of the substrate 51 and is positioned by multiple mounting portions 60 arranged along the X-axis direction.

The holding portion 40 is arranged on both sides in the Y-axis direction across the cooling block 10 and is formed to protrude toward the cooling block 10 side of the irradiation unit 1 . The holding part 40 is engaged with the recessed part 12 provided in the side surface of the cooling block 10, and holds the irradiation unit 1. The recessed portion 12 is an example of a holding mechanism that cooperates with the holding portion 40 to hold the cooling block 10 along the longitudinal direction of the substrate 51 , that is, in the X-axis direction.

In addition, the holding portion 40 also functions as a guide for attaching and detaching the cooling block 10 . That is, the cooling block 10 can be attached and detached along the X-axis direction so that the recessed portion 12 and the holding portion 40 are engaged. Therefore, the work time required for inspection or replacement of the cooling block 10 including the light source unit 50 or the irradiation unit 1 can be shortened.

The support member 80 is disposed between the cooling pipe 20 and the cooling block 10 to prevent problems that may occur in the light source unit 50 due to bending or vibration of the cooling block 10 . One or more supporting members 80 may be arranged according to the length or mass of the irradiation unit 1 along the X-axis direction.

In the irradiation unit 1 of the embodiment, the cooling medium flows in a substantially U-shaped turn in the order of the flow path 11 → the flow path 31 → the flow path 21 . Furthermore, the direction of flow of the cooling medium can also be reversed.

Here, the irradiation unit 1 may have a structure in which a first flow path (flow path 11 ), a third flow path (flow path 31 ), and a second flow path (flow path 21 ) are provided inside the cooling block 10 , a structure in which the cooling medium flows in a substantially U-shaped shape along the XY plane in one cooling block 10, or cooling pipes 20 are arranged side by side on the Y axis, and the cooling medium flows in a substantially U-shaped shape along the same XY plane as the cooling block 10. The structure of the medium. However, in this structure, the cooling block 10 or the cooling pipe 20 occupies the width in the Y-axis direction, so it is not preferable. In addition, when a plurality of irradiation units 1 are arranged on the Y-axis, it is difficult to achieve a desired interval (pitch), which is not preferable.

In addition, a structure may be adopted in which the cooling pipe 20 is not provided in the irradiation unit 1 , and the first flow paths of the cooling blocks 10 of the plurality of irradiation units 1 are connected with the third flow path, so that the plurality of irradiation units 1 flows together. cooling medium. However, the temperature of the cooling medium is different in the irradiation unit 1 provided with the joint member 71 and the irradiation unit 1 provided with the joint member 72 . Therefore, it is difficult to control the temperature of the cooling medium in the plurality of irradiation units 1, and the illuminance of the ultraviolet rays may be different in the plurality of irradiation units 1, which is not preferable. In addition, if the first flow paths of the cooling blocks 10 of the plurality of irradiation units 1 are connected by the third flow path, the irradiation unit 1 to be replaced cannot be replaced unless all the third flow paths are removed during maintenance work. Replacement is not preferred.

In order to eliminate the above disadvantages, it is desirable that the irradiation unit 1 has a structure in which the cooling medium flows in a substantially U-shaped turn along the X-axis direction as in the present embodiment.

As described above, the irradiation unit 1 of the embodiment can efficiently manufacture a liquid crystal panel by radiating ultraviolet rays of a wavelength suitable for processing the panel 6 to be processed. Here, the panel 6 to be processed will be described using FIG. 4 .

FIG. 4 is a cross-sectional view schematically showing a liquid crystal panel. The panel 6 to be processed shown in FIG. 4 has a pair of substrates 7 and 8 and a liquid crystal layer 9 provided between the substrate 7 and the substrate 8 .

The substrate 7 is a color filter in which a color filter (not shown) that transmits red, green, and blue light is arranged on a base material, and the color filter is covered with a protective film. substrate. The substrate 8 is a counter substrate provided to face the substrate 7 with the liquid crystal layer 9 interposed therebetween, and has a plurality of electrodes arranged in an array.

The liquid crystal layer 9 contains a liquid crystal composition and a polymerizable monomer as a photoreactive substance. The liquid crystal layer 9 absorbs ultraviolet light having a specific wavelength emitted from the irradiation unit 1 to polymerize the polymerizable monomer, thereby stabilizing the liquid crystal composition whose alignment is controlled by voltage application on the stage 151 .

Next, an arrangement example of the plurality of irradiation units 1 in the ultraviolet irradiation module 141 will be described using FIG. 5 . FIG. 5 is a schematic diagram of an ultraviolet irradiation module according to the embodiment.

As shown in FIG. 5 , the plurality of irradiation units 1 are respectively fixed to the top plate 144 and are arranged in parallel such that the longitudinal direction of the irradiation units 1 is along the X-axis direction serving as the opening and closing direction of the shutter 160 . Furthermore, the top plate 144 may also serve as the reflection plate 143 (see FIG. 1 ).

In addition, the plurality of irradiation units 1 are arranged in different directions in the irradiation area R1 and the irradiation area R2. Specifically, in the irradiation area R1, the joint members 71 and 72 are located at the end portion 145 on the negative side of the X-axis, and in the irradiation area R2, the joint members 71 and 72 are located at the end portions on the positive side of the X-axis. 146. Thereby, the irradiation unit 1 can be attached and detached from the end part 145 in the irradiation area R1, and the irradiation unit 1 can be attached and detached from the end part 146 in the irradiation area R2. Therefore, maintenance work can be made easy. Furthermore, when the irradiation area is narrow, or when the entire irradiation unit 1 is long, the plurality of irradiation units 1 may all be arranged in the same direction.

Return to Figure 1 for further explanation. The stage part 150 has a stage 151 and a lift pin 152. The stage 151 applies voltage to the panel 6 to be processed placed at a predetermined position. For example, aluminum with high heat dissipation properties can be used for the stage 151 . In addition, if the surface of the stage 151 is coated with a fluororesin, static elimination after panel replacement can be performed quickly, and a liquid crystal panel can be manufactured efficiently.

The lift pin 152 is an elevator that raises and lowers the mounted panel 6 to be processed, and is mainly used for loading and unloading the panel 6 to be processed. Specifically, the jacking pin 152 receives the panel 6 to be processed carried into the stage unit 150 from the loading/unloading port (not shown). In addition, the lifting pin 152 lifts the ultraviolet-irradiated panel 6 to be processed placed on the stage 151 and transfers it to a transfer robot (not shown).

As described above, the irradiation unit 1 of the embodiment includes the plurality of light-emitting elements 52 , the cooling block 10 , the cooling pipe 20 , and the third flow path (the flow path 31 ). The plurality of light emitting elements 52 are mounted on the front surface of the substrate 51 . The cooling block 10 has a first flow path (flow path 11 ) extending along the longitudinal direction of the substrate 51 and is arranged on the back surface of the substrate 51 . The cooling pipe 20 has a second flow path (flow path 21 ) parallel to the first flow path (flow path 11 ), and is arranged on the opposite side of the substrate 51 across the cooling block 10 . The third flow path (flow path 31 ) connects one end of the first flow path (flow path 11 ) and one end of the second flow path (flow path 21 ). Therefore, maintenance work can be made easy.

In addition, the cooling block 10 of the embodiment is disposed so as to be detachable along the longitudinal direction of the substrate 51 . Therefore, maintenance work can be made easy.

In addition, the irradiation unit 1 of the embodiment includes: a first joint member (joint member 71 ) connected to the other end side of the first flow path (flow path 11 ); and a second joint member (joint member 72 ) connected to the second The other end side of the flow path (flow path 21). Therefore, it is difficult for the cooling medium to fall during maintenance work.

In addition, the cooling block 10 of the embodiment is disposed so as to be detachable along the longitudinal direction of the substrate 51 . Therefore, maintenance work can be made easy.

In addition, the liquid crystal panel manufacturing apparatus 100 of the embodiment includes a plurality of ultraviolet irradiation devices. A plurality of ultraviolet irradiation devices irradiate light to the panel 6 to be processed containing the photoreactive substance. The ultraviolet irradiation device is irradiation unit 1. Therefore, maintenance work can be made easy.

Furthermore, in the above embodiment, an example of the holding mechanism in which the recessed portion 12 and the holding portion 40 of the cooling block 10 cooperate has been described. However, the present invention is not limited to this. For example, the cooling block 10 may have a structure as follows. The holding portion 40 has a convex portion protruding along the longitudinal direction of the substrate 51 and a concave portion that engages with the convex portion.

In addition, in each of the above-described embodiments, the case where the light-emitting elements 52 are arranged in a row along the longitudinal direction of the substrate 51 has been described. However, the present invention is not limited to this. For example, the light-emitting elements 52 may be arranged in a row along the arrangement direction. The so-called zigzag arrangement is a so-called zigzag arrangement in which the crossing directions are alternately staggered.

The embodiments of the present invention have been described. However, the embodiments are only examples and are not intended to limit the scope of the invention. The embodiments can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. The embodiments and their modifications are included in the scope and gist of the invention, and are also included in the invention described in the claims and their equivalent scope.

1:Irradiation unit 6: Processed panel 7, 8: Substrate 9: Liquid crystal layer 10: Cooling block 10a, 20a: end (other end) 10b, 20b: end (one end) 11: Flow path (first flow path) 12: concave part 20: Cooling pipe 21: Flow path (second flow path) 30:Connection components 31: Flow path (third flow path) 40:Maintenance Department 50:Light source department 51:Substrate 52:Light-emitting components 60:Installation Department 71: Joint component (first joint component) 72: Joint member (second joint member) 80:Supporting member 100:LCD panel manufacturing equipment 140: Irradiation Department 141:Ultraviolet irradiation module 142:Lighting device 143: Reflective plate 144:Roof plate 145, 146: End 150: stage section 151: Carrier platform 152: Jacking pin R1, R2: irradiation area

FIG. 1 is a side view of the liquid crystal panel manufacturing apparatus according to the embodiment. Fig. 2 is a front view of the irradiation unit according to the embodiment. Fig. 3 is a side view of the irradiation unit according to the embodiment. FIG. 4 is a cross-sectional view schematically showing a liquid crystal panel. FIG. 5 is a schematic diagram of an ultraviolet irradiation module according to the embodiment.

1:Irradiation unit

10: Cooling block

10a, 20a: end (other end)

10b, 20b: end (one end)

11: Flow path (first flow path)

20: Cooling pipe

21: Flow path (second flow path)

30:Connection components

31: Flow path (third flow path)

40:Maintenance Department

50:Light source department

51:Substrate

52:Light-emitting components

71: Joint member (first joint member)

72: Joint member (second joint member)

80:Supporting member

Claims (4)

An irradiation unit includes: a plurality of light-emitting elements installed on the front surface of a substrate; a cooling block having a first flow path extending along the longitudinal direction of the substrate and arranged on the back surface of the substrate; a cooling tube having a second flow path parallel to the first flow path and arranged on the back side of the cooling block; a third flow path connecting one end of the first flow path and one end of the second flow path; and maintaining part to hold only the side surface of the cooling block along the longitudinal direction of the substrate, wherein the holding part is provided in a manner to protrude from both sides of the cooling block clamped toward the side surface of the cooling block, and in The holding portion is not provided on the back side of the cooling block. The irradiation unit according to claim 1, including: a first joint member connected to the other end side of the first flow path; and a second joint member connected to the other end side of the second flow path. The irradiation unit according to claim 1, wherein the cooling block is detachably arranged along a longitudinal direction of the substrate. A liquid crystal panel manufacturing device includes: a plurality of ultraviolet irradiation devices that irradiate light to a panel to be processed containing a photoreactive substance, and The ultraviolet irradiation device is an irradiation unit according to any one of claims 1 to 3.

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