JP2021043315A - 露光装置 - Google Patents

露光装置 Download PDF

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Publication number
JP2021043315A
JP2021043315A JP2019164875A JP2019164875A JP2021043315A JP 2021043315 A JP2021043315 A JP 2021043315A JP 2019164875 A JP2019164875 A JP 2019164875A JP 2019164875 A JP2019164875 A JP 2019164875A JP 2021043315 A JP2021043315 A JP 2021043315A
Authority
JP
Japan
Prior art keywords
pixel
pixels
light emitting
exposure unit
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019164875A
Other languages
English (en)
Japanese (ja)
Inventor
英博 園田
Hidehiro Sonoda
英博 園田
幸一 井桁
Koichi Iketa
幸一 井桁
絢香 樋口
Ayaka Higuchi
絢香 樋口
國松　登
Noboru Kunimatsu
登 國松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Display Inc
Original Assignee
Japan Display Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Display Inc filed Critical Japan Display Inc
Priority to JP2019164875A priority Critical patent/JP2021043315A/ja
Priority to PCT/JP2020/027622 priority patent/WO2021049168A1/ja
Priority to TW109125994A priority patent/TWI752575B/zh
Publication of JP2021043315A publication Critical patent/JP2021043315A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2019164875A 2019-09-10 2019-09-10 露光装置 Pending JP2021043315A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019164875A JP2021043315A (ja) 2019-09-10 2019-09-10 露光装置
PCT/JP2020/027622 WO2021049168A1 (ja) 2019-09-10 2020-07-16 露光装置
TW109125994A TWI752575B (zh) 2019-09-10 2020-07-31 曝光裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019164875A JP2021043315A (ja) 2019-09-10 2019-09-10 露光装置

Publications (1)

Publication Number Publication Date
JP2021043315A true JP2021043315A (ja) 2021-03-18

Family

ID=74862299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019164875A Pending JP2021043315A (ja) 2019-09-10 2019-09-10 露光装置

Country Status (3)

Country Link
JP (1) JP2021043315A (zh)
TW (1) TWI752575B (zh)
WO (1) WO2021049168A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102465982B1 (ko) * 2021-07-13 2022-11-09 에스케이씨솔믹스 주식회사 블랭크 마스크 및 이를 이용한 포토마스크

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005028656A (ja) * 2003-07-09 2005-02-03 Fuji Photo Film Co Ltd 露光ヘッドおよび露光装置
US20090002669A1 (en) * 2007-06-29 2009-01-01 Optical Associates, Inc. Ultraviolet light-emitting diode exposure apparatus for microfabrication
US8492072B2 (en) * 2009-04-30 2013-07-23 Infineon Technologies Ag Method for marking objects
CN104808396A (zh) * 2015-05-13 2015-07-29 京东方科技集团股份有限公司 一种液晶盒及其制备方法、显示装置
JP2018014200A (ja) * 2016-07-20 2018-01-25 キヤノン株式会社 有機エレクトロニクス装置の製造方法
JP2018017952A (ja) * 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
CN111373325B (zh) * 2017-11-21 2023-10-17 东丽株式会社 硅氧烷树脂组合物、固化膜及显示装置
WO2019146027A1 (ja) * 2018-01-25 2019-08-01 株式会社ニコン 電子ビーム装置及びデバイス製造方法、並びに光電素子ユニット

Also Published As

Publication number Publication date
WO2021049168A1 (ja) 2021-03-18
TW202113498A (zh) 2021-04-01
TWI752575B (zh) 2022-01-11

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