JP2021039048A - 検査方法、及び検査システム - Google Patents

検査方法、及び検査システム Download PDF

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Publication number
JP2021039048A
JP2021039048A JP2019161757A JP2019161757A JP2021039048A JP 2021039048 A JP2021039048 A JP 2021039048A JP 2019161757 A JP2019161757 A JP 2019161757A JP 2019161757 A JP2019161757 A JP 2019161757A JP 2021039048 A JP2021039048 A JP 2021039048A
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Japan
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inspected
defect
inspection
airflow
gas
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JP2019161757A
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Japanese (ja)
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JP2021039048A5 (https=
Inventor
太田　勝啓
Katsuhiro Ota
勝啓 太田
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Hitachi Global Life Solutions Inc
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Hitachi Global Life Solutions Inc
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JP2019161757A 2019-09-05 2019-09-05 検査方法、及び検査システム Pending JP2021039048A (ja)

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JP2019161757A JP2021039048A (ja) 2019-09-05 2019-09-05 検査方法、及び検査システム

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JP2021039048A true JP2021039048A (ja) 2021-03-11
JP2021039048A5 JP2021039048A5 (https=) 2021-11-11

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56166442A (en) * 1980-05-27 1981-12-21 Mitsubishi Heavy Ind Ltd Leakage detector
JP2003279436A (ja) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd 紙カップピンホール検査方法および装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56166442A (en) * 1980-05-27 1981-12-21 Mitsubishi Heavy Ind Ltd Leakage detector
JP2003279436A (ja) * 2002-03-26 2003-10-02 Dainippon Printing Co Ltd 紙カップピンホール検査方法および装置

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