JP2021019072A - Object detection device - Google Patents

Abstract

To eliminate the risk of droplets and dirt adhering to a light emitting end of a light emitting portion and a light receiving end of a light receiving portion, and eliminate the risk of the light emitting end of the light emitting portion and the light receiving end of the light receiving portion being damaged due to the transportation of an object.SOLUTION: An object detection device includes an emitted light hole portion through which an emitted light emitted from a light emitting end portion of a light emitting portion passes, an incident light hole portion that opens a preset first space to surround a light emitting end region, and allows the reflected light of the emitted light emitted from the light emitting portion toward an object to pass through to a light receiving end portion of a light receiving portion, a storage case that opens a preset second space and surrounds the light receiving end area, and gas supply means that supplies gas in the first space and the second space such that the gas blows out from the emitted light hole portion and the incident light hole portion.SELECTED DRAWING: Figure 4

Description

The present invention relates to an object detection device. More specifically, in the present invention, in various work processes such as a flat panel display (FPD: Flat Panel Display) manufacturing process, various objects such as a glass substrate for a flat panel display are present. The present invention relates to an object detection device suitable for use when detecting a position or the like.

Generally, a liquid crystal display (LCD: Lliquid Crystal Display), a plasma display panel (PDP: Plasma Display Panel), or a low temperature polysilicon thin film transistor (LTPS-TFT: Low Temperature Poly Silicon-Thin Film Transistor) including a process of manufacturing a flat panel). In the field, an object detection device that detects the presence or absence of a glass substrate is used in order to detect the position where the glass substrate for a flat panel display exists in each work process.

Conventionally, as such an object detection device, for example, an object detection device as shown in FIGS. 1A and 1B has been known.

The object detection device 100 shown in FIGS. 1A and 1B is a light emitting unit 102 provided with a light emitting element that emits light (emitted light) L such as a laser beam toward the object 200, and a surface of the object 200. It is configured to include a light receiving unit 104 having a light receiving element that receives the reflected light (reflected light) RL, and a detecting unit 106 that detects the amount of light received by the light receiving unit 104.

Here, the light emitting unit 102 is arranged so as to emit the emitted light L toward the detection position A set as the position for detecting the presence / absence of the object 200 in the object detection device 100.

Further, in the light receiving unit 104, when the object 200 is present at the detection position A, the emitted light L emitted from the light emitting unit 102 toward the detection position A is reflected by the object 200, and the reflected light RL due to the reflection is incident on the object 200. It is arranged at a position where it can receive light.

Reference numeral 202 is a roller conveyor as an object transporting means for transporting the object 200 at a position deviating from the detection position A so as to pass through the detection position A.

In the above configuration, as shown in FIG. 1A, when the object 200 does not exist at the detection position A, the emitted light L emitted from the light emitting unit 102 toward the detection position A is reflected by the object 200. Therefore, the amount of received light detected by the detection unit 106 is a low value.

On the other hand, as shown in FIG. 1B, when the object 200 is moved from the left side to the right side in the horizontal direction by the roller conveyor 202 and conveyed to the detection position A, the light emitting unit 102 is directed toward the detection position A. The emitted light L is reflected by the object 200, and the reflected light RF is received by the light receiving unit 104.

Therefore, the light receiving amount detected by the detection unit 106 changes to a high value, and it is possible to detect that the object 200 exists at the detection position A by the change in the light receiving amount.

By the way, when the conventional object detection device 100 described above with reference to FIGS. 1A and 1B is used in a wet environment such as a cleaning step using a cleaning liquid mist, the object 200 is located at the detection position A. There is a problem that the presence or absence may not be detected properly.

That is, as shown in FIGS. 2A and 2B, when the object detection device 100 is used in a wet environment in which the periphery is covered with the cleaning liquid mist 300, the light emitting end portion 102a and the light receiving portion 104 of the light emitting unit 102 The droplet 302 of the cleaning liquid mist 300 adheres to and is fixed to the light receiving end 104a.

Here, when the droplet 302 adheres to and is fixed to the light emitting end 102a of the light emitting unit 102, the emission state of the emitted light L emitted from the light emitting unit 102 is changed under the influence of the fixed droplet 302. Further, when the droplet 302 adheres to and is fixed to the light receiving end portion 104a of the light receiving portion 104, the light receiving state of the reflected light RF in the light receiving portion 104 is changed under the influence of the fixed droplet 302, and the light receiving state is changed at the detection position A. There was a risk of erroneously detecting the presence or absence of the object 200.

Specifically, the direction of the emitted light L emitted from the light receiving end 102a of the light emitting unit 102 is changed from the preset direction by the droplet 302 fixed on the light emitting end 102a of the light emitting unit 102. The light receiving unit 104 receives light other than the preset direction by the droplet 302 fixed to the light receiving end portion 104a of the light receiving unit 104, such as being scattered or scattered, so that the object 200 at the detection position A receives light. There is a problem that the presence or absence may not be detected properly.

As a conventional object detection device provided with means for solving such a problem, for example, the object detection device 101 shown in FIGS. 3A and 3B has been proposed.

In the object detection device 100 described above, the object detection device 101 blows air as a gas toward the light emitting end 102a of the light emitting unit 102 and the light receiving end 104a of the light receiving unit 104. The device 400 is provided.

In the air ejection device 400, a compressor 408 that is an air supply source is connected to one end 402a via a regulator 404 that is an air pressure adjusting means and a pipe 406, and the other end side is a first branch 402b. A pipe 402 formed by branching to a second branch portion 402c is provided.

Here, the first branch portion opening end portion 402bb of the first branch portion 402b of the pipe 402 is arranged so as to open toward the light emitting end portion 102a of the light emitting portion 102, and the second branch portion of the pipe 402. The second branch opening end portion 402cc of the 402c is arranged so as to open toward the light receiving end portion 104a of the light receiving portion 104.

In the above configuration, when the object detection device 101 is used in an environment where the surroundings are covered with the cleaning liquid mist 300, the compressor 408 is operated and the air pressure is adjusted by the regulator 404 to adjust the air pressure at the opening end of the first branch. Air is blown from the portion 402bb toward the light emitting end portion 102a of the light emitting portion 102, and air is blown from the second branch portion opening end portion 402cc toward the light receiving end portion 104a of the light receiving portion 104.

As a result, in the object detection device 101, the light emitting unit 102 is blown off or dried by the cleaning liquid mist 300 adhering to the light emitting end 102a of the light emitting unit 102 and the light receiving end 104a of the light receiving unit 104. It is possible to prevent the droplet 302 from being fixed to the light emitting end portion 102a and the light receiving end portion 104a of the light receiving portion 104, and it is possible to suppress erroneous detection of the presence or absence of the object 200 at the detection position A.

However, in the conventional object detection device 101 described above, when the droplet 302 adhering to the light emitting end 102a of the light emitting unit 102 or the light receiving end 104a of the light receiving unit 104 is blown off or dried, the droplet 302 is blown off or dried. The dirt 304 contained in the 302 may remain at the light emitting end 102a of the light emitting unit 102 and the light receiving end 104a of the light receiving unit 104, and the sensitivity of the light emitting unit 102 and the light receiving unit 140 gradually decreases and becomes dirty. Under the influence of 304, the emitted state of the emitted light L and the received state of the reflected light RF change, which causes a problem that the presence or absence of the object 200 at the detection position A may still be erroneously detected. there were.

Further, in the conventional object detection device 101 described above, in order to remove the dirt 304 remaining on the light emitting end 102a in the light emitting unit 102 and the light receiving end 104a in the light receiving unit 104, the light in the light emitting unit 102 There is also a problem that it is necessary to periodically clean the light receiving end portion 102a and the light receiving end portion 104a of the light receiving portion 104.

Further, in both the conventional object detection device 100 and the object detection device 101 described above, the light emitting end 102a of the light emitting unit 102 and the light receiving end 104a of the light receiving unit 104 are exposed toward the object 200. ..

Therefore, if there is a misalignment when transporting the object 200, the object 200 comes into contact with the light emitting end 102a or the light receiving end 104a, and the object 200 causes the light emitting end 102a or the light receiving end 104a. It has also been pointed out that such scratches may gradually reduce the sensitivity of the light emitting unit 102 and the light receiving unit 140.

Since the prior art that the applicant of the present application knows at the time of filing the patent application is not an invention related to a document known invention, there is no prior art document information to be described in the specification of the present application.

The present invention has been made in view of various problems of the prior art as described above, and an object of the present invention is a liquid at a light emitting end portion in a light emitting portion and a light receiving end portion in a light receiving portion. It is an object of the present invention to provide an object detection device that eliminates the risk of droplets and dirt adhering to the object and prevents the light emitting end of the light emitting portion and the light receiving end of the light receiving portion from being damaged by the transportation of the object.

In order to achieve the above object, the object detection device according to the present invention is provided with an emitted light hole portion through which the emitted light emitted from the light emitting end portion of the light emitting portion passes, and is provided with a preset first space. It is provided with an incident light hole portion that surrounds the light emitting end region and allows the reflected light of the light emitted from the light emitting portion toward the object to pass to the light receiving end portion of the light receiving portion, and is set in advance. A storage case is provided which opens two spaces and surrounds the periphery of the light receiving end region, and is provided in the first space and the second space so that air is blown out from the outgoing light hole portion and the incident light hole portion. It is designed to supply air.

Therefore, according to the present invention, the light emitting end portion in the light emitting portion and the light receiving end portion in the light receiving portion are covered by the accommodating case, and air is blown from the first space toward the emitted light hole portion. At the same time, air is blown out from the second space toward the emitted light hole portion, so that droplets and dirt do not enter and adhere to the light emitting end portion and the light receiving end portion, and the object There is no risk of damaging the light emitting end and the light receiving end due to transportation.

That is, the present invention includes a light emitting unit provided with a light emitting element that emits emitted light toward an object, a light receiving unit provided with a light receiving element that receives reflected light reflected on the surface of the object, and light receiving in the light receiving unit. An object detection device having a detection unit for detecting an amount, which includes an emission light hole portion through which the emission light emitted from the light emission end portion of the light emitting portion passes, and provides a preset first space. An incident light hole portion that is opened to surround the light emitting end region and allows the reflected light of the emitted light emitted from the light emitting portion toward the object to pass to the light receiving end portion of the light receiving portion. The first is provided so that a second space is opened and a preset second space is opened to surround the periphery of the light receiving end region, and the gas is blown out from the outgoing light hole portion and the incident light hole portion. It is provided with a gas supply means for supplying a gas in the space of the above and in the second space.

Further, in the present invention, the present invention opens a first storage case that opens the first space and surrounds the periphery of the light emitting end region, and a second space. It is formed so as to have a second accommodating case that surrounds the periphery of the light receiving end region.

Further, in the present invention, the gas supply means supplies a gas having substantially the same pressure or a different pressure in the first space and the second space.

Further, in the present invention, in the above-mentioned invention, in the above-mentioned gas supply means, the pressure value of the gas blown out from the above-mentioned emitted light hole portion and the said incident light hole portion is the pressure value of the said emitted light hole portion and the said incident light hole. The gas is supplied so as to have a pressure value equal to or higher than a pressure value at which mist cannot enter for each opening diameter of the portion.

Further, in the present invention described above, the gas supply means is such that air or an inert gas is supplied as a gas.

Since the present invention is configured as described above, there is no risk of droplets or dirt adhering to the light emitting end portion in the light emitting portion or the light receiving end portion in the light receiving portion, and the light emitting portion is conveyed by transporting an object. It has an excellent effect that there is no risk of damaging the light receiving end portion or the light receiving end portion of the light receiving portion.

1A and 1B are configuration explanatory views schematically showing a schematic configuration of an example of a conventional object detection device. Note that FIG. 1A shows a state in which no object exists at the detection position. Further, FIG. 1B shows a state in which an object exists at the detection position. 2 (a) and 2 (b) are configuration explanatory views schematically showing a state in which the periphery of the conventional object detection device shown in FIG. 1 is covered with a cleaning liquid mist. Note that FIG. 2A shows a state in which no object exists at the detection position. Further, FIG. 2B shows a state in which an object exists at the detection position. 3A and 3B are configuration explanatory views schematically showing a schematic configuration of another example of the conventional object detection device. Note that FIG. 3A shows a state in which no object exists at the detection position. Further, FIG. 3B shows a state in which an object exists at the detection position. 4 (a) and 4 (b) are configuration explanatory views schematically showing a schematic configuration of an object detection device according to an example of the embodiment of the present invention. Note that FIG. 4A shows a state in which no object exists at the detection position. Further, FIG. 4B shows a state in which an object exists at the detection position. 5 (a) and 5 (b) are configuration explanatory views schematically showing a schematic configuration of an object detection device according to another example of the embodiment of the present invention. Note that FIG. 5A shows a state in which no object exists at the detection position. Further, FIG. 5B shows a state in which an object exists at the detection position. FIG. 6 is a configuration explanatory view schematically showing a schematic configuration of an object detection device according to another example of the embodiment of the present invention.

Hereinafter, an example of an embodiment of the object detection device according to the present invention will be described in detail with reference to the accompanying drawings.

In the following description, the same or equivalent configurations as those of the conventional object detection apparatus described with reference to FIGS. 1 to 3 in the above-mentioned "Background Technology" section are designated by the same reference numerals. The detailed configuration and description of the operation will be omitted as appropriate.

4 (a) and 4 (b) show a configuration explanatory diagram schematically showing a schematic configuration of an object detection device according to an example of the embodiment of the present invention. Note that FIG. 4A shows a state in which no object exists at the detection position, and FIG. 4B shows a state in which an object exists at the detection position.

The object detection device 10 according to an example of the embodiment of the present invention shown in FIGS. 4 (a) and 4 (b) is a light emitting unit including a light emitting element that emits light such as laser light as light L emitted toward the object 200. In the light receiving unit 104, the light receiving unit 104 having a light receiving element for receiving the light (reflected light) RL reflected on the surface of the object 200, the housing case 12 for accommodating the light emitting unit 102 and the light receiving unit 104 inside, and the light receiving unit 104. It has a detection unit 106 that detects the amount of light received.

Here, the accommodation case 12 includes an emission light hole portion 14 through which the emission light L emitted from the light emission end portion 102a of the light emitting portion 102 passes, and the light emission end is opened by opening a preset first space 16. An incident light hole portion 18 that surrounds a region around the portion 102a and allows the reflected light RL of the emitted light L emitted from the light emitting portion 102 toward the object 200 to pass to the light receiving end portion 104a of the light receiving portion 104. At the same time, it is formed so as to open a preset second space 20 and surround a region around the light receiving end portion 104a.

Further, the storage case 12 includes a first communication hole 22 that communicates the first space 16 with the outside, and a second communication hole 24 that communicates the second space 20 with the outside.

Therefore, the first space 16 which is a region around the light emitting end portion 102a of the light emitting portion 102 communicates with the outside through the emitting light hole portion 14 and the first communication hole 22, and similarly, the light of the light receiving portion 104. The second space 20, which is a region around the light receiving end portion 104a, communicates with the outside through the incident light hole portion 18 and the second communication hole 24.

A regulator 404, which is an air pressure adjusting means, is connected to the first communication hole 22 and the second communication hole 24 via a three-pronged pipe 26, and an air supply source is connected to the regulator 402 via a pipe 28. The compressor 408 is connected.

In the above configuration, as shown in FIG. 4A, when the object 200 does not exist at the detection position A, the object 200 is emitted from the light emitting unit 102 through the emission light hole portion 14 toward the detection position A. Since the emitted light L is not reflected by the object 200, the amount of received light detected by the detection unit 106 is a low value.

On the other hand, as shown in FIG. 4B, when the object 200 is moved from the left side to the right side in the horizontal direction by the roller conveyor 202 and conveyed to the detection position A, the light emitting portion 102 emits the light hole portion 14 The emitted light L that has passed through and emitted toward the detection position A is reflected by the object 200, and the reflected light RF passes through the incident light hole portion 18 and reaches the light receiving portion 104 to be received.

Therefore, the light receiving amount detected by the detection unit 106 changes to a high value, and it is possible to detect that the object 200 exists at the detection position A by the change in the light receiving amount.

Further, even if the object detection device 10 is used in an environment in which the periphery is covered with the cleaning liquid mist 300, the light emitting end portion 102a of the light emitting unit 102 and the light receiving end portion 104a of the light receiving unit 104 are inside the housing case 24. Since it is housed, the light emitting end portion 102a and the light receiving end portion 104a do not come into contact with the cleaning liquid mist 300.

Further, in the object detection device 10, the compressor 408 is operated and the air pressure is adjusted by the regulator 404 to blow air into the first space 16 through the first communication hole 22 and the second communication hole 24. By blowing air into the second space 18 through the space 18, the air blown into the first space 16 passes through the exit light hole portion 14 and is blown out to the outside of the accommodation case 12, and similarly, the second space The air blown into the 20 passes through the incident light hole portion 18 and is blown out to the outside of the accommodation case 12.

By blowing air from the outgoing light hole portion 14 and the incident light hole portion 18, the cleaning liquid mist 300 may pass through the outgoing light hole portion 14 and the incident light hole portion 18 and enter the inside of the housing case 24. Be prevented.

That is, in the object detection device 10, the light emitting end portion 102a of the light emitting unit 102 and the light receiving end portion 104a of the light receiving unit 104 are covered by the accommodating case 24, and the light emitting hole portion 14 is emitted from the first space 16. Since the air is blown toward the light emitting end 102a and the light receiving end 104a because the air is blown from the second space 18 toward the incident light hole portion 18, droplets and dirt adhere to the light emitting end portion 102a and the light receiving end portion 104a. In addition, there is no risk of damaging the light emitting end 102a and the light receiving end 104a by transporting the object 200.

It should be noted that the embodiments described above are merely examples, and the present invention can be implemented in various other embodiments. That is, the present invention is not limited to the embodiments described above, and various omissions, replacements, changes, etc. can be made without departing from the gist of the present invention.

For example, the embodiment described above may be modified as shown in (1) to (7) below.

(1) In the embodiment described above, the case where air of substantially the same pressure is supplied to the first space 16 and the second space 18 by the same system has been described, but the present invention is not limited to this. Of course. That is, air of different pressures may be supplied to the first space 16 and the second space 18 according to the design conditions and the installation environment of the object detection device 10.

(2) In the embodiment described above, the case where the storage case 24 for accommodating the light emitting unit 102 and the light receiving unit 104 is integrally formed has been illustrated and described, but the present invention is not limited to this. Of course. For example, as shown in FIG. 5, the light emitting unit accommodating case 30 accommodating the light emitting unit 102 and the light receiving unit accommodating case 32 accommodating the light receiving unit 104 are formed as separate bodies, and the light emitting unit 102 and the light receiving unit 104 are formed. May be formed to form a containment case.

Further, when the light emitting unit accommodating case 30 accommodating the light emitting unit 102 and the light receiving unit accommodating case 32 accommodating the light receiving unit 104 are formed as separate bodies, air is supplied to the light emitting unit accommodating case 30 and the light receiving unit accommodating case 32. A compressor and a regulator for supplying air are provided in separate systems, and air having different pressures is supplied between the light emitting unit accommodating case 30 and the light receiving unit accommodating case 32 according to the design conditions and installation environment of the object detection device 10. It may be possible to supply.

(3) In the embodiment described above, the case where the object 200 is moved from the left side to the right side along the horizontal direction with respect to the object detection device 10 has been described, but the present invention is not limited to this. Of course there is no such thing. That is, the object 200 may be moved from the right side to the left side along the horizontal direction with respect to the object detection device 10, and the object detection device 10 detects the presence or absence of the object 200 regardless of the transport direction of the object 200. can do.

(4) In the embodiment described above, the object 200 is moved by the object detection device 10 from the left side to the right side along the horizontal direction with respect to the object detection device 10. The presence or absence is detected, but it is of course not limited to this. For example, as shown in FIG. 6, the object 200 is conveyed to the object detection device 10 so as to move from the upper side to the lower side or from the lower side to the upper side along the vertical direction, and the object detection device. The presence or absence of the object 200 may be detected by 10.

Further, the moving direction of the object 200 with respect to the object detecting device 10 is not limited to the horizontal direction and the vertical direction, and may be set to move in any direction.

(5) Although detailed description is omitted in the embodiment described above, the pressure value of the air blown out from the outgoing light hole portion 14 and the incident light hole portion 18 is incident on the outgoing light hole portion 14. Set the pressure value or more so that mist such as cleaning liquid cannot enter into each opening diameter of the optical hole portion 18.

(6) In the above-described embodiment, the case where air is used as the gas has been described, but it goes without saying that the present invention is not limited to this. As the gas, for example, another gas such as an inert gas such as nitrogen or argon may be used.

(7) It goes without saying that the above-described embodiments and the above-described embodiments (1) to (6) may be combined as appropriate.

The present invention can be used for processing such as detecting the position where various objects exist in various work processes such as a flat panel display manufacturing process.

10 Object detection device 12 Storage case 14 Emission light hole 16 First space (first space)
18 Incident light hole 20 Second space (second space)
22 First communication hole (gas supply means)
24 Second communication hole (gas supply means)
26 Three-pronged piping (gas supply means)
28 Piping (gas supply means)
30 Light emitting part storage case (first storage case)
32 Light receiving part storage case (second storage case)
100 Object detection device 101 Object detection device 102 Light emitting part 102a Light emitting end part 104 Light receiving part 104a Light receiving end part 106 Detection part 200 Object 202 Roller conveyor 300 Cleaning liquid mist 302 Droplet 304 Dirt 400 Air ejection device 402 Piping 402a End part 402b 1st branch 402bb 1st branch open end 402c 2nd branch 402cc 2nd branch open end 404 Regulator (gas supply means)
406 Piping 408 Compressor (Gas supply means)
L Outgoing light RL Reflected light A Detection position

Claims (5)

A light emitting unit equipped with a light emitting element that emits light emitted toward an object,
A light receiving unit provided with a light receiving element that receives the reflected light reflected on the surface of the object, and
An object detection device having a detection unit for detecting the amount of light received in the light receiving unit.
An emission light hole portion through which the emitted light emitted from the light emitting end portion of the light emitting portion passes is provided, and a preset first space is opened to surround the light emitting end portion region, and the light emitting portion is described. The light is provided with an incident light hole portion that allows the reflected light of the emitted light emitted from the light emitting portion toward the object to pass to the light receiving end portion of the light receiving portion, and a second space set in advance is opened. A storage case that surrounds the light receiving end area,
An object characterized by having a gas supply means for supplying gas in the first space and in the second space so that gas is blown out from the outgoing light hole portion and the incident light hole portion. Detection device. In the object detection device according to claim 1,
The storage case has a first storage case that opens the first space and surrounds the periphery of the light emitting end region, and a second housing case that opens the second space and surrounds the periphery of the light receiving end region. An object detection device characterized in that it is formed by having a storage case of the above. In the object detection device according to any one of claims 1 or 2.
The gas supply means is an object detection device that supplies a gas having substantially the same pressure or a different pressure into the first space and the second space. In the object detection device according to any one of claims 1, 2 or 3.
In the gas supply means, the pressure value of the gas blown out from the outgoing light hole portion and the incident light hole portion is measured by mist with respect to the opening diameters of the outgoing light hole portion and the incident light hole portion. An object detection device characterized in that the gas is supplied so as to be equal to or higher than a pressure value that cannot be penetrated. In the object detection device according to any one of claims 1, 2, 3 or 4.
The gas supply means is an object detection device that supplies air or an inert gas as a gas.

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