JP2021009101A - Object detection device - Google Patents

Abstract

To provide an object detection device that detects presence or absence of an article in a noncontact state without touching the object, does not cause detection precision to be affected by a surface state of an object, can be used even in a wet environment, such as a cleaning process using a cleaning liquid mist, has a high tolerance of an installation position to an object, and does not require any periodical cleaning.SOLUTION: An object detection device includes: swirling flow generation means for blowing out a swirling flow of liquid toward a detection area; and pressure detection means for detecting pressure near the center axis of the swirling flow generated by the swirling flow generation means. The pressure detection means detects presence or absence of an object in a detection area on the basis of a change in the detected pressure.SELECTED DRAWING: Figure 3

Description

The present invention relates to an object detection device. More specifically, in the present invention, in various work processes such as a flat panel display (FPD: Flat Panel Display) manufacturing process, various objects such as a glass substrate for a flat panel display are present. The present invention relates to an object detection device suitable for use when detecting a position or the like.

Generally, a liquid crystal display (LCD: Liquid Crystal Display), a plasma display panel (PDP: Plasma Display Panel), or a low temperature polysilicon thin film transistor (LTPS-TFT: Low Temperature Poly Silicon-Thin Film Transistor) including a process of manufacturing a flat panel). In the field, an object detection device that detects the presence or absence of a glass substrate is used in order to detect the position where the glass substrate for a flat panel display exists in each work process.

Conventionally, such an object detection device is appropriately referred to as an object detection device that contacts an object such as a glass substrate and detects the presence or absence of the object (hereinafter, in the present specification, a "contact type object detection device". )It has been known.

Since such a contact-type object detection device detects the presence or absence of the object by actually contacting the object, the presence or absence of the object is erroneously detected even if a liquid such as a cleaning liquid adheres to the surface of the object. There was no fear, and the detection accuracy was not affected by the surface condition of the object, and the reliability was excellent.

However, on the other hand, it has been pointed out that the contact-type object detection device has problems such as damage to the object due to actual contact with the object or adhesion of dirt to the object.

In view of the problems of the contact-type object detection device described above, an object detection device that detects the presence or absence of the object in a non-contact manner without contacting an object such as a glass substrate (hereinafter, in the present specification, "non-contact". An appropriate object detector ”) has been proposed.

Conventionally, as such a non-contact type object detection device, for example, an object detection device as shown in FIGS. 1A and 1B has been known.

The object detection device 100 shown in FIGS. 1A and 1B is a light emitting unit 102 provided with a light emitting element that emits light (emitted light) L such as a laser beam toward the object 200, and a surface of the object 200. It is configured to include a light receiving unit 104 having a light receiving element that receives the reflected light (reflected light) RL, and a detecting unit 106 that detects the amount of light received by the light receiving unit 104.

Here, the light emitting unit 102 is arranged so as to emit the emitted light L toward the detection area A set as a position for detecting the presence / absence of the object 200 in the object detection device 100.

Further, in the light receiving unit 104, when the object 200 is present in the detection area A, the emitted light L emitted from the light emitting unit 102 toward the detection area A is reflected by the object 200, and the reflected light RL due to the reflection is incident on the object 200. It is arranged at a position where it can receive light.

Reference numeral 202 is a roller conveyor as an object transporting means for transporting the object 200 located outside the detection region A so as to pass through the detection region A.

In the above configuration, as shown in FIG. 1A, when the object 200 does not exist in the detection area A, the emitted light L emitted from the light emitting unit 102 toward the detection area A is reflected by the object 200. Therefore, the amount of received light detected by the detection unit 106 is a low value.

On the other hand, as shown in FIG. 1B, when the object 200 is moved from the left side to the right side in the horizontal direction by the roller conveyor 202 and conveyed to the detection area A, the light emitting unit 102 is directed toward the detection area A. The emitted light L is reflected by the object 200, and the reflected light RL is received by the light receiving unit 104.

Therefore, the light receiving amount detected by the detection unit 106 changes to a high value, and it is possible to detect that the object 200 exists in the detection region A by the change in the light receiving amount.

In this way, the object detection device 100 detects the presence or absence of the object 200 in a non-contact manner without actually contacting the object 200, so that the object 200 may be damaged or dirt may be attached to the object 200. There is no.

By the way, when the conventional object detection device 100 described above with reference to FIGS. 1A and 1B is used in a wet environment such as a cleaning step using a cleaning liquid mist, the object 200 in the detection region A It has been pointed out that there is a risk that the presence or absence may not be detected properly.

That is, as shown in FIGS. 2A and 2B, when the object detection device 100 is used in a wet environment in which the periphery is covered with the cleaning liquid mist 300, the light emitting end portion 102a and the light receiving portion 104 of the light emitting unit 102 The droplet 302 of the cleaning liquid mist 300 adheres to and is fixed to the light receiving end 104a.

Here, when the droplet 302 adheres to and is fixed to the light emitting end 102a of the light emitting unit 102, the emission state of the emitted light L emitted from the light emitting unit 102 is changed under the influence of the fixed droplet 302. Further, when the droplet 302 adheres to and is fixed to the light receiving end portion 104a of the light receiving portion 104, the light receiving state of the reflected light RL in the light receiving portion 104 is changed under the influence of the fixed droplet 302, and the light receiving state in the detection region A is changed. There was a risk of erroneously detecting the presence or absence of the object 200.

Specifically, the direction of the emitted light L emitted from the light receiving end 102a of the light emitting unit 102 is changed from the preset direction by the droplet 302 fixed on the light emitting end 102a of the light emitting unit 102. The light receiving portion 104 receives light other than the preset direction by the droplet 302 fixed to the light receiving end portion 104a of the light receiving portion 104, such as being scattered or scattered, so that the object 200 in the detection region A receives light. There is a problem that the presence or absence may not be detected properly.

Further, in the conventional object detection device 100, since light is used, the reflection state of the light changes depending on the surface state of the object, which affects the detection accuracy, and the light emitting unit 102 and the light receiving unit 104 are installed on the object 200. There is also a problem that the detection sensitivity of the object 200 changes greatly depending on the position.

Further, in the conventional object detection device 100, the detection sensitivity of the object 200 is lowered due to the dirt adhering to the light emitting unit 102 and the light receiving unit 104, so that the light emitting unit 102 and the light receiving unit 104 need to be regularly cleaned. There was also a problem.

Since the prior art that the applicant of the present application knows at the time of filing the patent application is not an invention related to an invention known in the literature, there is no prior art document information to be described in the specification of the present application.

The present invention has been made in view of various problems of the prior art as described above, and an object of the present invention is to detect the presence or absence of the object in a non-contact manner without contacting the object. The detection accuracy is not affected by the surface condition of the object, and it can be used in a wet environment such as a cleaning process using a cleaning liquid mist, and the installation position with respect to the object is flexible. It is intended to provide an object detection device that is expensive and does not require regular cleaning.

In order to achieve the above object, the present invention generates a swirling flow by a fluid such as air toward the detection region, and based on the result of measuring the change in pressure near the central axis of the swirling flow, in the detection region. It is designed to detect the presence or absence of an object.

Therefore, according to the present invention, the presence or absence of the object can be detected without contacting the object, and since no light is used, the detection accuracy is not affected by the surface state of the object. Moreover, since no light is used, it can be used in a wet environment such as a cleaning process using a cleaning liquid mist.

Further, according to the present invention, since it is only necessary to generate a swirling flow by a fluid such as air toward the detection region, the light receiving portion receives the reflected light of the light emitted from the light emitting portion toward the object. Compared with the conventional object detection device that detects the presence or absence of an object, the installation position is more flexible with respect to the object, and since it does not have a light emitting part or a light receiving part, it is not necessary to perform regular cleaning.

That is, the present invention has a swirling flow generating means for blowing out a swirling flow of fluid toward a detection region, and a pressure detecting means for detecting the pressure near the central axis of the swirling flow generated by the swirling flow generating means. Then, based on the change in pressure detected by the pressure detecting means, the presence or absence of an object in the detection region is detected.

Further, in the present invention, the detection region is located on a substantially extension line of the central axis of the swirling flow.

Further, in the present invention described above, in the present invention, the swirling flow generating means includes a cup portion having a substantially cylindrical shape and having a fluid outlet formed therein, and from the outlet formed in the cup portion. The fluid is blown into the cup portion to form the swirling flow.

Further, in the present invention, the present invention is such that a plurality of the outlets are formed in the cup portion.

Further, in the present invention described above, the present invention has two outlets formed in the cup portion, and the two outlets have a substantially circular center point in the cup portion as a point of symmetry. It is arranged point-symmetrically.

Further, in the present invention described above, the present invention further includes a pressure control means for adjusting the pressure of the swirling flow.

Further, in the present invention, the above-mentioned fluid is made to be a gas.

Since the present invention is configured as described above, the presence or absence of the object can be detected without contact with the object, and the detection accuracy is affected by the surface state of the object. It is possible to use it in a wet environment such as a cleaning process using a cleaning liquid mist, and the installation position with respect to an object is high, and regular cleaning is required. It has an excellent effect that it never happens.

1A and 1B are configuration explanatory views schematically showing a schematic configuration of an example of a conventional object detection device. Note that FIG. 1A shows a state in which no object exists in the detection region. Further, FIG. 1B shows a state in which an object exists in the detection region. 2 (a) and 2 (b) are configuration explanatory views schematically showing a state in which the periphery of the conventional object detection device shown in FIG. 1 is covered with a cleaning liquid mist. Note that FIG. 2A shows a state in which no object exists in the detection region. Further, FIG. 2B shows a state in which an object exists in the detection region. 3 (a), (b), and (c) are configuration explanatory views schematically showing a schematic configuration of an object detection device according to an example of the embodiment of the present invention. Note that FIG. 3A is a partial vertical sectional explanatory view (a partial vertical cross-sectional explanatory view taken along the line AA in FIGS. 3B and 3C). Further, FIG. 3B is a cross-sectional explanatory view taken along line BB in FIG. 3A. Further, FIG. 3 (c) is a cross-sectional explanatory view taken along the line CC in FIG. 3 (a). 4 (a) and 4 (b) are configuration explanatory views schematically showing a state in which the object detection device shown in FIGS. 3 (a), (b) and (c) is arranged with respect to the object. Note that FIG. 4A shows a state in which no object exists in the detection region. Further, FIG. 4B shows a state in which an object exists in the detection region. 5 (a) and 5 (b) are explanatory views for explaining the principle of object detection in the object detection device according to an example of the embodiment of the present invention. Note that FIG. 5A shows a state in which no object exists in the detection region. Further, FIG. 5B shows a state in which an object exists in the detection region. 6 (a), (b), and (c) are explanatory views for explaining the change in the detection sensitivity depending on the installation position between the object detection device and the conventional object detection device according to the example of the embodiment of the present invention. In FIGS. 6A, 6B, and 6C, the upper figure shows a conventional object detection device, and the lower figure shows an object detection device according to an example of the embodiment of the present invention. 7 (a) and 7 (b) are explanatory views for explaining a change in detection sensitivity depending on an installation position between an object detection device and a conventional object detection device according to an example of the embodiment of the present invention. In FIGS. 7A and 7B, the upper figure shows a conventional object detection device, and the lower figure shows an object detection device according to an example of the embodiment of the present invention. 8 (a) and 8 (b) are configuration explanatory views schematically showing a schematic configuration of an object detection device according to another example of the embodiment of the present invention.

Hereinafter, an example of an embodiment of the object detection device according to the present invention will be described in detail with reference to the accompanying drawings.

In the following description, the same or corresponding configurations in the respective drawings are designated by the same reference numerals, and detailed configurations and description of the actions thereof will be appropriately omitted.

Here, FIGS. 3A, 3B, and 3C show a configuration explanatory diagram schematically showing a schematic configuration of an object detection device according to an example of the embodiment of the present invention. It should be noted that FIG. 3A shows a partial longitudinal explanatory view (a partial longitudinal explanatory view taken along the line AA in FIGS. 3B and 3C), and FIG. 3B also shows. 3 (a) shows a cross-sectional explanatory view taken along the line BB, and FIG. 3 (c) shows a cross-sectional explanatory view taken along the line CC in FIG. 3 (a).

Further, FIGS. 4 (a) and 4 (b) show a configuration explanatory diagram schematically showing a state in which the object detection device shown in FIGS. 3 (a), (b) and (c) is arranged with respect to the object. .. Note that FIG. 4A shows a state in which no object exists in the detection area, and FIG. 4B shows a state in which an object exists in the detection area.

An object detection device according to an example of the embodiment of the present invention will be described with reference to FIGS. 3 (a), 3 (b), (c) to 4 (a), (b).

The object detection device 10 serves as a swirling flow generating unit 12 as a swirling flow generating means for generating a swirling flow RF by air (air) as a fluid toward the detection region A, and an air supply source to the swirling flow generating unit 12. As a pressure adjusting means arranged between the compressor 14 and the swirling flow generating section 12 and the compressor 14 to adjust the pressure of the air supplied from the compressor 14 to the swirling flow generating section 12 to a pressure suitable for detecting the object 200. The regulator 16 and a pressure gauge 18 as a pressure detecting means provided with a pressure sensor (not shown) for detecting the pressure in the vicinity of the central axis CA of the swirling flow RF generated by the swirling flow generating unit 12 are provided. It is composed of.

Here, the detection region A is located on a substantially extension line of the central axis CA of the swirling flow RF. That is, the swirling flow generating unit 12 is arranged so that the central axis CA of the generated swirling flow RF generally passes through the detection region A. Such a detection region A is a blowing region (air blowing region) of the swirling flow RF by the air blown from the swirling flow generating unit 12.

The object 200 is conveyed toward the detection area A by the roller conveyor 202, and the presence or absence of the object 200 in the detection area A is detected by the object detection device 10.

Next, the detailed configuration of the swirling flow generating portion 12 will be described. The swirling flow generating portion 12 includes a small-diameter hole portion 22 penetrating along the central axis and has an edge portion 24 formed at the upper end portion. It includes a 1-cylindrical member 20 and a second cylindrical member 30 arranged with a predetermined gap G on the outer diameter side on the lower side of the edge 24 of the first cylindrical member 20.

Here, reference numeral 40 is an air chamber which is a space formed by arranging the first cylindrical member 20 and the second cylindrical member 30 with a gap G opened.

Here, in the lower portion of the first cylindrical member 20, a step portion 26 that is recessed and dented so as to form a cup portion 50 having a substantially cylindrical shape is provided. The step portion 26 includes a step portion horizontal surface portion 26a formed by extending in the horizontal direction from the position of the lower end portion of the hole portion 22, and a step portion formed by extending vertically upward from the lower end portion of the first cylindrical member 20. It is formed from a vertical surface portion 26b.

The gap G and the upper end portion 50a of the cup portion 50 communicate with each other and are horizontal at the upper end portion 50a of the cup portion 50 of the first cylindrical member 20, that is, the portion of the first cylindrical member 22 parallel to the stepped horizontal surface portion 26a. A first horizontal hole 28 and a second horizontal hole 29 extending in the direction are bored.

The first air outlet 28a opening in the cup portion 50 in the first horizontal hole 28 and the second air outlet 29a opening in the cup portion 50 in the second horizontal hole 29 are substantially circular in the upper end portion 50a of the cup portion 50. They are arranged point-symmetrically with the center point of the shape as the point of symmetry.

Further, the first horizontal hole 28 is arranged so as to extend in the tangential direction with the first air outlet 28a as a contact point with the cup portion 50 with respect to the circular shape at the upper end portion 50a of the cup portion 50.

That is, the first air outlet 28a and the cup portion 50 are arranged so that the air blown from the first air outlet 28a forms a swirling flow RF along the step portion vertical surface portion 26b.

Similar to the first horizontal hole 28, the second horizontal hole 29 extends in the tangential direction with the second air outlet 29a as the contact point with the cup portion 50 with respect to the circular shape at the upper end portion 50a of the cup portion 50. Is arranged.

That is, the second air outlet 29a and the cup portion 50 are arranged so that the air blown from the second air outlet 29a forms a swirling flow RF along the step portion vertical surface portion 26b.

On the other hand, a pressure gauge 18 is connected above the hole 20 in the first cylindrical member 22, and the pressure gauge 18 measures the pressure in the cup portion 50 near the central axis CA of the swirling flow RF.

Next, the second cylindrical member 30 is provided with a through hole 30a for communicating the gap G and the outside of the second cylindrical member 30, and an air injection hole 32a for communicating the through hole 30a and the regulator 16. The air injection pipe 32 to be formed is arranged.

Reference numeral 60 is a seal member for tightly maintaining the gap G formed by the first cylindrical member 22 and the second cylindrical member 30.

In the above configuration, the roller conveyor 202 is rotated in the direction of arrow D, the object 200 is moved in the direction of arrow E, that is, from the left side to the right side in the horizontal direction, and the object 200 is swirled by the object detection device 10. It is conveyed toward the generation unit 12.

Here, in order for the object detection device 10 to detect the presence or absence of the object 200 in the detection region A, the air sent from the compressor 14 is injected into the air injection hole 32a via the regulator 16.

Then, the air injected into the air injection hole 32a passes through the through hole 30a and flows into the air chamber 40, and the uneven distribution of the air pressure in the air chamber 40 is eliminated.

Then, the uneven distribution of pressure in the air chamber 40 is eliminated, and the air passes through the first horizontal hole 28, is blown out from the first air outlet 28a into the cup portion 50, and passes through the second horizontal hole 29. A swirling flow RF of air that is blown into the cup portion 50 from the second air outlet 29a and swirls along the vertical surface portion 26b of the step portion in the cup 50 is generated, and the swirling flow RF is the lower end portion of the cup portion 50. It flows out of the cup portion 50 from 50b.

That is, the cup portion 50 serves as an air outlet (air outlet) that is blown out as a swirling flow RF from the swirling flow generating unit 12 toward the detection region A.

At this time, when the object 200 does not exist in the detection region A as shown in FIG. 4A, the swirling flow RF in the cup portion 50 is released as it is without being hindered by the object 200, and is released by the pressure gauge 18. The pressure value P1 in the vicinity of the central axis CA of the swirling flow RF to be measured is approximately atmospheric pressure, and more specifically, a slight negative pressure (0≈P1 <0).

On the other hand, when the object 200 is conveyed to the detection area A by the roller conveyor 202 and the object 200 is present in the detection area A by the roller conveyor 202 as shown in FIG. 3B, the inside of the cup portion 50 The swirling flow RF is blocked by the object 200. Therefore, the swirling flow RF hits the object 200 and spreads in the circumferential direction of the swirling along the object 200, and the pressure value P2 in the vicinity of the central axis CA of the swirling flow RF measured by the pressure gauge 18 is described above. It becomes a negative pressure below the pressure value P1 (P2 <P1 <0). When the lower end portion 50b of the cup portion 50 is completely closed, the pressure P2 becomes higher than the pressure P1 described above.

In the object detection device 10, the presence / absence of the object 200 in the detection area A can be detected by the change in the pressure value measured by the pressure gauge 18.

The change in the pressure value in the vicinity of the central axis CA of the swirling flow RF in the cup portion 50 described above will be described in more detail with reference to FIGS. 5A and 5B.

When air is supplied into the cup portion 50 from the first air outlet 28a and the second air outlet 29a, the air swirls in the cup portion 50 to generate centrifugal force, and the air swirls in the cup portion 50. The vicinity of the central axis CA, which is the central part of the swirl of the flow RF, becomes negative pressure due to the Bernoulli effect.

Here, since air continues to be supplied into the cup portion 50 from the first air outlet 28a and the second air outlet 29a, the swirling air goes out from the lower end portion 50b of the cup portion 50 to the outside of the cup portion 50 and outside. It spreads to (see the symbol α) and entrains the surrounding air by friction.

Therefore, the pressure near the central axis CA tends to be further negative, but as shown in FIG. 5A, if the object 200 is not present below the lower end 50b of the cup 50, the lower end 50b of the cup 50 is not present. Is open, air is supplied from the outside (see reference numeral β), and as a result, the pressure near the central axis CA becomes a negative pressure state close to atmospheric pressure.

However, as shown in FIG. 5 (b), when the object 200 is present below the lower end portion 50b of the cup portion 50, the supply of air from the outside to the inside of the cup portion 50 is cut off, and in FIG. 5 (a). The vicinity of the central axis CA is in a state of larger negative pressure than the case.

Next, FIGS. 6A, 6B, and 6C are for explaining changes in detection sensitivity depending on the installation position between the object detection device 10 and the conventional object detection device 100 according to an example of the embodiment of the present invention. The explanatory diagram of is shown. In FIGS. 6A, 6B, and 6C, the upper figure shows the conventional object detection device 100, and the lower figure shows the object detection device 10 according to an example of the embodiment of the present invention.

Similarly, FIGS. 7A and 7B are explanatory views for explaining a change in detection sensitivity depending on the installation position between the object detection device 10 and the conventional object detection device 100 according to an example of the embodiment of the present invention. Is shown. In FIGS. 7A and 7B, the upper figure shows the conventional object detection device 100, and the lower figure shows the object detection device 10 according to an example of the embodiment of the present invention.

In the conventional object detection device 100, the object 200 hits the object 200 with the emitted light L emitted from the light emitting unit 102, and the light receiving unit 104 receives the reflected light RL of the emitted light L hitting the object 200, so that the object 200 is in the detection region. Detects the presence in A (see the upper figure in FIG. 6A).

Therefore, in the conventional object detection device 100, the distance between the light emitting unit 102 and the light receiving unit 104 and the object 200 is too close to the preset distance (see the upper figure of FIG. 6B). ), Or if it is too far from the preset distance (see the upper figure of FIG. 6C), the reflected light RL of the emitted light L that hits the object 200 does not reach the light receiving unit 104. , If the object 200 does not exist in the detection area A, it will be erroneously detected.

That is, in the conventional object detection device 100, the distance between the light emitting unit 102 and the light receiving unit 104 and the object 200 is adjusted to the preset distance range (appropriate range) shown in the upper figure of FIG. 6A. However, there was a problem that this adjustment range was extremely narrow.

Further, in the conventional object detection device 100, if the surface of the object 200 is difficult to reflect light, the thickness of the object 200 changes, or the surface of the object 200 is wavy, the detection result is unstable. It becomes a thing.

On the other hand, in the object detection device 10, for example, even if the distance between the swirling flow generating unit 12 and the object 200 is closer than in the case shown in the lower figure of FIG. 6A (see the lower figure of FIG. 6B). ), Or even if the distance between the swirling flow generating unit 12 and the object 200 is longer than in the case shown in the lower figure of FIG. 6 (a) (see the lower figure of FIG. 6 (b)), the compressor 14 and By adjusting the pressure of the air supplied to the cup portion 50 by controlling the regulator 16, it is possible to appropriately detect the presence or absence of the object 200 in the detection region A, and the distance between the swirling flow generating portion 12 and the object 200. Wide adjustment range.

Further, in the conventional object detection device 100, when the object detection device 100 is arranged at an appropriate installation angle set in advance with respect to the object 200 (see the upper figure of FIG. 7A). Although it is possible to properly detect that the object 200 exists in the detection area A, when the object detection device 100 is arranged with respect to the object 200 at a deviation from an appropriate preset installation angle (FIG. FIG. In 7 (b), refer to the above figure), it becomes impossible to properly detect that the object 200 exists in the detection area A.

On the other hand, in the object detection device 10, when the object detection device 10 is arranged at an appropriate setting angle set in advance with respect to the object 200 (see the lower figure of FIG. 7A), the object 200 is It goes without saying that it is possible to properly detect the presence in the detection area A, but when the object detection device 10 is arranged with respect to the object 200 at a deviation from an appropriate preset installation angle ( Also in FIG. 7 (b), the central axis CA is maintained in a negative pressure state until the lower end portion 50b of the cup portion 50 is supplied with external air into the cup portion 50. , It is possible to properly detect that the object 200 exists in the detection area A.

As described above, according to the object detection device 10 described above, the presence or absence of the object 200 in the detection region A can be detected without contacting the object 200, so that the object 200 may be damaged. The risk of becoming dirty can be eliminated.

Further, since the object detection device 10 does not use light like the object detection device 100, the difference in the surface state of the object, for example, the difference in the color of the surface of the object, the difference in the transparency of the object, and the difference in the surface of the object. The detection accuracy is not affected by the difference in reflectance or the difference in the material of the object, and the presence or absence of the object 200 in the detection area A can be appropriately detected.

Further, since the object detection device 10 does not use light like the object detection device 100, it can be used in a wet environment such as a cleaning process using a cleaning liquid mist. At this time, regardless of the difference in the type of cleaning process, for example, the difference in the type of detergent, the difference in temperature during cleaning, whether the cleaning process is dry treatment or wet treatment, the presence or absence of the object 200 in the detection region A is appropriate. Can be detected.

Further, the object detection device 10 can be used for both the dry treatment and the wet treatment in the cleaning step as described above, that is, regardless of whether the object 200 is in the dry state or the wet state. The presence or absence of the object 200 in the detection region A can be detected without contact.

Furthermore, since the object detection device 10 only needs to generate a swirling flow RF by a fluid such as air toward the detection region A, the installation position with respect to the object 200, that is, the cup portion 50 which is an air outlet for the object 200. Even if the installation position is slightly changed, the negative pressure state in the cup portion 50 can be detected. Therefore, by receiving the reflected light of the light emitted from the light emitting portion 102 toward the object 200 by the light receiving portion 104. Compared with the conventional object detection device 100 that detects the presence / absence of the object 200, the margin of the installation position with respect to the object 200 is remarkably high.

Furthermore, since the object detection device 10 only needs to generate a swirling flow by a fluid such as air toward the detection region A, what kind of object 200 is directed toward the detection region A, which is an air blowing region with respect to the object 200. Since it can be transported from the direction, the design margin is extremely high.

Further, unlike the conventional object detection device 100, the object detection device 10 does not have a light emitting unit 102 or a light receiving unit 104, so that periodic cleaning is not required.

That is, in the conventional object detection device 100, when the light emitting unit 102 or the light receiving unit 104 becomes dirty, the detection sensitivity gradually decreases and erroneous detection occurs, so that it is necessary to perform regular cleaning. It becomes.

On the other hand, in the object detection device 10, it is assumed that when the area inside the cup portion 50 becomes dirty, the detection sensitivity gradually decreases and false detection occurs, but the swirling flow from the cup portion 50 Since the RF air is blown out, it is difficult for dirt to adhere to the region inside the cup portion 50, so that it is not necessary to regularly clean the region inside the cup portion 50.

It should be noted that the embodiments described above are merely examples, and the present invention can be implemented in various other embodiments. That is, the present invention is not limited to the embodiments described above, and various omissions, replacements, changes, etc. can be made without departing from the gist of the present invention.

For example, the embodiment described above may be modified as shown in (1) to (7) below.

(1) In the embodiment described above, the case where the object 200 is moved from the left side to the right side along the horizontal direction with respect to the swirling flow generating portion 12 has been described, but the present invention is limited to this. Of course not. That is, the object 200 may be moved from the right side to the left side along the horizontal direction with respect to the swirling flow generating unit 12, and the object detection device 10 determines the presence or absence of the object 200 regardless of the transport direction of the object 200. Can be detected.

(2) Although the description is omitted in the embodiment described above, when the object detection device 10 is used in a dry environment, for example, as shown in FIG. 8A, the swirling flow generating unit 12 May be arranged on the lower side of the object 200 to blow out a swirling flow from the lower side to the upper side. When the arrangement shown in FIG. 8A is adopted in a wet environment, the pressure of the swirling flow blown out from the cup portion 50 is adjusted by controlling the compressor 14 and the regulator 16 to enter the cup portion 50. It is desirable to prevent liquids from entering.

(3) In the embodiment described above, the object 200 is moved from the left side to the right side along the horizontal direction with respect to the swirling flow generating unit 12, and the object 200 is moved by the object detection device 10. I tried to detect the presence or absence of, but of course it is not limited to this.

For example, the object 200 is conveyed to the swirling flow generating unit 12 so as to move from the upper side to the lower side or from the lower side to the upper side along the vertical direction, and the presence / absence of the object 200 is performed by the object detection device 10. May be detected. In this case, the swirling flow generating portion 12 is arranged on either the left side or the right side in the horizontal direction with respect to the object 200. Specifically, for example, as shown in FIG. 8B, the swirling flow generating unit 12 is arranged on the right side in the horizontal direction with respect to the object 200, and the swirling flow generating unit 12 airs to the object 200. The object 200 is conveyed so as to move from the upper side to the lower side along the vertical direction with respect to the swirling flow generating portion 12 so as to blow out the swirling flow.

Further, the moving direction of the object 200 with respect to the object detecting device 10 is not limited to the horizontal direction and the vertical direction, and may be set to move in any direction. In this case, the object detection device 10 arranges the swirling flow generating unit 12 with respect to the object 200 so that the swirling flow of air can be blown out to the object 200 moving in an arbitrary direction.

(4) In the embodiment described above, two air outlets (first air outlet 28a and second air outlet 29a) are provided as outlets for blowing air to the cup portion 50 of the swirling flow generating portion 12. It is provided so as to generate a swirling flow of air in the cup portion 50, but it is needless to say that the present invention is not limited to this. The number of air outlets for generating a swirling flow of air in the cup portion 50 may be one, or may be three or more. It should be noted that it is possible to easily generate a swirling flow in which the air flow is uniform by blowing air into the cup portion 50 from a plurality of locations rather than blowing air into the cup portion 50 from only one location. Therefore, it is preferable.

(5) In the embodiment described above, two air outlets (first air outlet 28a and second air outlet 29a) are provided as outlets for blowing air to the cup portion 50 of the swirling flow generating portion 12. It is provided so as to generate a swirling flow of air in the cup portion 50, but it is needless to say that the present invention is not limited to this. For example, a fan may be provided in the cup portion as the swirling flow generating portion, and the swirling flow of air may be generated by rotating the fan in the cup portion.

(6) In the above-described embodiment, the case where air is used as the fluid has been described, but it goes without saying that the present invention is not limited to this. As the fluid, for example, another gas such as an inert gas such as nitrogen or argon may be used.

(7) It goes without saying that the above-described embodiments and the above-described embodiments (1) to (6) may be combined as appropriate.

The present invention can be used for processing such as detecting the position where various objects exist in various work processes such as a flat panel display manufacturing process.

10 Object detection device 12 Swirling flow generator (Swirl flow generating means)
14 Compressor (pressure control means)
16 Regulator (pressure control means)
18 Pressure gauge (pressure detecting means)
20 First cylindrical member 22 Hole part 24 Edge part 26 Step part 26a Step part Horizontal plane part 26b Step part Vertical surface part 28 First horizontal hole 28a First air outlet (outlet)
29 Second horizontal hole 29a Second air outlet (outlet)
30 Second cylindrical member 30a Through hole 32 Air injection tube 32a Air injection hole 40 Air chamber 50 Cup part 50a Upper end part 50b Lower end part 60 Seal member RF Swirling flow CA Swirling flow central axis G Gap 100 Object detector 102 Light emitting part 102a Light emitting end 104 Light receiving end 104a Light receiving end 106 Detection part 200 Object 202 Roller conveyor 300 Cleaning liquid mist 302 Droplet L Emission light RL Reflected light A Detection area

Claims (7)

A swirling flow generating means that blows a swirling flow of fluid toward the detection region,
It has a pressure detecting means for detecting the pressure near the central axis of the swirling flow generated by the swirling flow generating means.
An object detection device characterized in that the presence or absence of an object in the detection region is detected based on a change in pressure detected by the pressure detecting means. In the object detection device according to claim 1,
An object detection device characterized in that the detection region is located on a substantially extension line of the central axis of the swirling flow. In the object detection device according to any one of claims 1 or 2.
The swirling flow generating means is provided with a cup portion having a substantially cylindrical shape and having an outlet for the fluid formed therein, and the fluid is blown into the cup portion from the outlet formed in the cup portion to blow the fluid into the cup portion. An object detection device characterized by forming a. In the object detection device according to claim 3,
An object detection device characterized in that a plurality of the outlets are formed in the cup portion. In the object detection device according to claim 4,
Two outlets are formed in the cup portion.
An object detection device characterized in that the two outlets are arranged point-symmetrically with a substantially circular center point in the cup portion as a point of symmetry. In the object detection device according to any one of claims 1, 2, 3, 4 or 5, further
An object detection device including a pressure control means for adjusting the pressure of the swirling flow. In the object detection device according to any one of claims 1, 2, 3, 4, 5 or 6.
An object detection device characterized in that the fluid is a gas.

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