JP2020536377A - 半導体装置の製造においてケイ素−ゲルマニウム/ケイ素積層体からケイ素およびケイ素−ゲルマニウム合金を同時に除去するためのエッチング溶液 - Google Patents
半導体装置の製造においてケイ素−ゲルマニウム/ケイ素積層体からケイ素およびケイ素−ゲルマニウム合金を同時に除去するためのエッチング溶液 Download PDFInfo
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- JP2020536377A JP2020536377A JP2020517940A JP2020517940A JP2020536377A JP 2020536377 A JP2020536377 A JP 2020536377A JP 2020517940 A JP2020517940 A JP 2020517940A JP 2020517940 A JP2020517940 A JP 2020517940A JP 2020536377 A JP2020536377 A JP 2020536377A
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- silicon
- ammonium
- acid
- germanium
- etching solution
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- 238000005530 etching Methods 0.000 title claims abstract description 94
- 229910000577 Silicon-germanium Inorganic materials 0.000 title claims abstract description 85
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 70
- 239000010703 silicon Substances 0.000 title claims abstract description 70
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 title claims abstract description 59
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title description 55
- 239000004065 semiconductor Substances 0.000 title description 16
- 238000004519 manufacturing process Methods 0.000 title description 5
- 229910045601 alloy Inorganic materials 0.000 title description 3
- 239000000956 alloy Substances 0.000 title description 3
- 239000000203 mixture Substances 0.000 claims abstract description 134
- -1 amine compound Chemical class 0.000 claims abstract description 45
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000004377 microelectronic Methods 0.000 claims abstract description 33
- 239000007800 oxidant agent Substances 0.000 claims abstract description 32
- 150000007524 organic acids Chemical class 0.000 claims abstract description 29
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims abstract description 28
- 239000002904 solvent Substances 0.000 claims abstract description 28
- 150000003868 ammonium compounds Chemical class 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 51
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims description 30
- 239000002253 acid Substances 0.000 claims description 27
- 150000001875 compounds Chemical class 0.000 claims description 24
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 21
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 20
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical group OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 17
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 15
- 239000000872 buffer Substances 0.000 claims description 14
- 239000006172 buffering agent Substances 0.000 claims description 14
- YWYZEGXAUVWDED-UHFFFAOYSA-N triammonium citrate Chemical compound [NH4+].[NH4+].[NH4+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O YWYZEGXAUVWDED-UHFFFAOYSA-N 0.000 claims description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 13
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 13
- 150000007519 polyprotic acids Polymers 0.000 claims description 13
- 239000001393 triammonium citrate Substances 0.000 claims description 13
- 235000011046 triammonium citrate Nutrition 0.000 claims description 13
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 12
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 claims description 11
- OPKOKAMJFNKNAS-UHFFFAOYSA-N N-methylethanolamine Chemical compound CNCCO OPKOKAMJFNKNAS-UHFFFAOYSA-N 0.000 claims description 11
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 10
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 claims description 10
- 150000003863 ammonium salts Chemical class 0.000 claims description 10
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims description 10
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims description 10
- 230000001590 oxidative effect Effects 0.000 claims description 10
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims description 10
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 claims description 9
- 150000001412 amines Chemical class 0.000 claims description 9
- 235000005985 organic acids Nutrition 0.000 claims description 9
- HHPDFYDITNAMAM-UHFFFAOYSA-N 2-[cyclohexyl(2-hydroxyethyl)amino]ethanol Chemical compound OCCN(CCO)C1CCCCC1 HHPDFYDITNAMAM-UHFFFAOYSA-N 0.000 claims description 8
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical group [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims description 8
- UJMDYLWCYJJYMO-UHFFFAOYSA-N benzene-1,2,3-tricarboxylic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1C(O)=O UJMDYLWCYJJYMO-UHFFFAOYSA-N 0.000 claims description 8
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 claims description 8
- LVTYICIALWPMFW-UHFFFAOYSA-N diisopropanolamine Chemical compound CC(O)CNCC(C)O LVTYICIALWPMFW-UHFFFAOYSA-N 0.000 claims description 8
- CRVGTESFCCXCTH-UHFFFAOYSA-N methyl diethanolamine Chemical compound OCCN(C)CCO CRVGTESFCCXCTH-UHFFFAOYSA-N 0.000 claims description 8
- BFSVOASYOCHEOV-UHFFFAOYSA-N 2-diethylaminoethanol Chemical compound CCN(CC)CCO BFSVOASYOCHEOV-UHFFFAOYSA-N 0.000 claims description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 7
- AKNUHUCEWALCOI-UHFFFAOYSA-N N-ethyldiethanolamine Chemical compound OCCN(CC)CCO AKNUHUCEWALCOI-UHFFFAOYSA-N 0.000 claims description 7
- SLINHMUFWFWBMU-UHFFFAOYSA-N Triisopropanolamine Chemical compound CC(O)CN(CC(C)O)CC(C)O SLINHMUFWFWBMU-UHFFFAOYSA-N 0.000 claims description 7
- YDSWCNNOKPMOTP-UHFFFAOYSA-N mellitic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(O)=O)=C(C(O)=O)C(C(O)=O)=C1C(O)=O YDSWCNNOKPMOTP-UHFFFAOYSA-N 0.000 claims description 7
- MIJDSYMOBYNHOT-UHFFFAOYSA-N 2-(ethylamino)ethanol Chemical compound CCNCCO MIJDSYMOBYNHOT-UHFFFAOYSA-N 0.000 claims description 6
- WAEVWDZKMBQDEJ-UHFFFAOYSA-N 2-[2-(2-methoxypropoxy)propoxy]propan-1-ol Chemical compound COC(C)COC(C)COC(C)CO WAEVWDZKMBQDEJ-UHFFFAOYSA-N 0.000 claims description 6
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 claims description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- LHIJANUOQQMGNT-UHFFFAOYSA-N aminoethylethanolamine Chemical compound NCCNCCO LHIJANUOQQMGNT-UHFFFAOYSA-N 0.000 claims description 6
- 125000002843 carboxylic acid group Chemical group 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- KHIWWQKSHDUIBK-UHFFFAOYSA-N periodic acid Chemical compound OI(=O)(=O)=O KHIWWQKSHDUIBK-UHFFFAOYSA-N 0.000 claims description 6
- FENFUOGYJVOCRY-UHFFFAOYSA-N 1-propoxypropan-2-ol Chemical compound CCCOCC(C)O FENFUOGYJVOCRY-UHFFFAOYSA-N 0.000 claims description 5
- LCFVJGUPQDGYKZ-UHFFFAOYSA-N Bisphenol A diglycidyl ether Chemical compound C=1C=C(OCC2OC2)C=CC=1C(C)(C)C(C=C1)=CC=C1OCC1CO1 LCFVJGUPQDGYKZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000001089 [(2R)-oxolan-2-yl]methanol Substances 0.000 claims description 5
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- APUPEJJSWDHEBO-UHFFFAOYSA-P ammonium molybdate Chemical compound [NH4+].[NH4+].[O-][Mo]([O-])(=O)=O APUPEJJSWDHEBO-UHFFFAOYSA-P 0.000 claims description 5
- 239000011609 ammonium molybdate Substances 0.000 claims description 5
- 235000018660 ammonium molybdate Nutrition 0.000 claims description 5
- 229940010552 ammonium molybdate Drugs 0.000 claims description 5
- 229910001870 ammonium persulfate Inorganic materials 0.000 claims description 5
- 150000004985 diamines Chemical class 0.000 claims description 5
- 229940043276 diisopropanolamine Drugs 0.000 claims description 5
- 230000036961 partial effect Effects 0.000 claims description 5
- JLKDVMWYMMLWTI-UHFFFAOYSA-M potassium iodate Chemical compound [K+].[O-]I(=O)=O JLKDVMWYMMLWTI-UHFFFAOYSA-M 0.000 claims description 5
- 239000001230 potassium iodate Substances 0.000 claims description 5
- 235000006666 potassium iodate Nutrition 0.000 claims description 5
- 229940093930 potassium iodate Drugs 0.000 claims description 5
- 235000010333 potassium nitrate Nutrition 0.000 claims description 5
- 239000004323 potassium nitrate Substances 0.000 claims description 5
- 239000012286 potassium permanganate Substances 0.000 claims description 5
- 150000003462 sulfoxides Chemical class 0.000 claims description 5
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 claims description 5
- HQDAZDGXZONBTK-UHFFFAOYSA-N 1-amino-1-ethoxyethanol Chemical group CCOC(C)(N)O HQDAZDGXZONBTK-UHFFFAOYSA-N 0.000 claims description 4
- CCKNPKNHNFDGND-UHFFFAOYSA-N 1-fluoro-3-(isothiocyanatomethyl)benzene Chemical compound FC1=CC=CC(CN=C=S)=C1 CCKNPKNHNFDGND-UHFFFAOYSA-N 0.000 claims description 4
- PAWQVTBBRAZDMG-UHFFFAOYSA-N 2-(3-bromo-2-fluorophenyl)acetic acid Chemical compound OC(=O)CC1=CC=CC(Br)=C1F PAWQVTBBRAZDMG-UHFFFAOYSA-N 0.000 claims description 4
- GPICKHDXBPTBLD-UHFFFAOYSA-N 2-methylpropane-1,2,3-tricarboxylic acid Chemical compound OC(=O)CC(C)(CC(O)=O)C(O)=O GPICKHDXBPTBLD-UHFFFAOYSA-N 0.000 claims description 4
- USFZMSVCRYTOJT-UHFFFAOYSA-N Ammonium acetate Chemical compound N.CC(O)=O USFZMSVCRYTOJT-UHFFFAOYSA-N 0.000 claims description 4
- 239000005695 Ammonium acetate Substances 0.000 claims description 4
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims description 4
- GEHMBYLTCISYNY-UHFFFAOYSA-N Ammonium sulfamate Chemical compound [NH4+].NS([O-])(=O)=O GEHMBYLTCISYNY-UHFFFAOYSA-N 0.000 claims description 4
- 229940043376 ammonium acetate Drugs 0.000 claims description 4
- 235000019257 ammonium acetate Nutrition 0.000 claims description 4
- 239000001099 ammonium carbonate Substances 0.000 claims description 4
- 235000012501 ammonium carbonate Nutrition 0.000 claims description 4
- KHPLPBHMTCTCHA-UHFFFAOYSA-N ammonium chlorate Chemical compound N.OCl(=O)=O KHPLPBHMTCTCHA-UHFFFAOYSA-N 0.000 claims description 4
- 235000019270 ammonium chloride Nutrition 0.000 claims description 4
- VZTDIZULWFCMLS-UHFFFAOYSA-N ammonium formate Chemical compound [NH4+].[O-]C=O VZTDIZULWFCMLS-UHFFFAOYSA-N 0.000 claims description 4
- VBIXEXWLHSRNKB-UHFFFAOYSA-N ammonium oxalate Chemical compound [NH4+].[NH4+].[O-]C(=O)C([O-])=O VBIXEXWLHSRNKB-UHFFFAOYSA-N 0.000 claims description 4
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052921 ammonium sulfate Inorganic materials 0.000 claims description 4
- 235000011130 ammonium sulphate Nutrition 0.000 claims description 4
- UBKBVPONTPMQQW-UHFFFAOYSA-N azane;2-hydroxyacetic acid Chemical compound [NH4+].OCC([O-])=O UBKBVPONTPMQQW-UHFFFAOYSA-N 0.000 claims description 4
- NGPGDYLVALNKEG-UHFFFAOYSA-N azanium;azane;2,3,4-trihydroxy-4-oxobutanoate Chemical compound [NH4+].[NH4+].[O-]C(=O)C(O)C(O)C([O-])=O NGPGDYLVALNKEG-UHFFFAOYSA-N 0.000 claims description 4
- QNSOHXTZPUMONC-UHFFFAOYSA-N benzene pentacarboxylic acid Natural products OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C(C(O)=O)=C1C(O)=O QNSOHXTZPUMONC-UHFFFAOYSA-N 0.000 claims description 4
- GGAUUQHSCNMCAU-UHFFFAOYSA-N butane-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)CC(C(O)=O)C(C(O)=O)CC(O)=O GGAUUQHSCNMCAU-UHFFFAOYSA-N 0.000 claims description 4
- YXVFQADLFFNVDS-UHFFFAOYSA-N diammonium citrate Chemical compound [NH4+].[NH4+].[O-]C(=O)CC(O)(C(=O)O)CC([O-])=O YXVFQADLFFNVDS-UHFFFAOYSA-N 0.000 claims description 4
- KQTIIICEAUMSDG-UHFFFAOYSA-N tricarballylic acid Chemical compound OC(=O)CC(C(O)=O)CC(O)=O KQTIIICEAUMSDG-UHFFFAOYSA-N 0.000 claims description 4
- IQVLXQGNLCPZCL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 2,6-bis[(2-methylpropan-2-yl)oxycarbonylamino]hexanoate Chemical compound CC(C)(C)OC(=O)NCCCCC(NC(=O)OC(C)(C)C)C(=O)ON1C(=O)CCC1=O IQVLXQGNLCPZCL-UHFFFAOYSA-N 0.000 claims description 3
- KBKZYWOOZPIUJT-UHFFFAOYSA-N azane;hypochlorous acid Chemical compound N.ClO KBKZYWOOZPIUJT-UHFFFAOYSA-N 0.000 claims description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 3
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical compound [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 claims 1
- 229940116349 dibasic ammonium phosphate Drugs 0.000 claims 1
- 239000000243 solution Substances 0.000 abstract description 28
- 239000007853 buffer solution Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 18
- 239000000758 substrate Substances 0.000 description 17
- 239000002131 composite material Substances 0.000 description 11
- 239000003989 dielectric material Substances 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 8
- 150000007513 acids Chemical class 0.000 description 8
- 230000003139 buffering effect Effects 0.000 description 8
- 238000004140 cleaning Methods 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 7
- 239000002738 chelating agent Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 239000004615 ingredient Substances 0.000 description 6
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- 239000002070 nanowire Substances 0.000 description 5
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- GIAFURWZWWWBQT-UHFFFAOYSA-N 2-(2-aminoethoxy)ethanol Chemical compound NCCOCCO GIAFURWZWWWBQT-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 150000003628 tricarboxylic acids Chemical class 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 239000000908 ammonium hydroxide Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000003139 biocide Substances 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- NFDRPXJGHKJRLJ-UHFFFAOYSA-N edtmp Chemical compound OP(O)(=O)CN(CP(O)(O)=O)CCN(CP(O)(O)=O)CP(O)(O)=O NFDRPXJGHKJRLJ-UHFFFAOYSA-N 0.000 description 3
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 125000000864 peroxy group Chemical group O(O*)* 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 150000003627 tricarboxylic acid derivatives Chemical class 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- SPEUIVXLLWOEMJ-UHFFFAOYSA-N 1,1-dimethoxyethane Chemical compound COC(C)OC SPEUIVXLLWOEMJ-UHFFFAOYSA-N 0.000 description 2
- HXKKHQJGJAFBHI-UHFFFAOYSA-N 1-aminopropan-2-ol Chemical compound CC(O)CN HXKKHQJGJAFBHI-UHFFFAOYSA-N 0.000 description 2
- DURPTKYDGMDSBL-UHFFFAOYSA-N 1-butoxybutane Chemical compound CCCCOCCCC DURPTKYDGMDSBL-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- URDCARMUOSMFFI-UHFFFAOYSA-N 2-[2-[bis(carboxymethyl)amino]ethyl-(2-hydroxyethyl)amino]acetic acid Chemical compound OCCN(CC(O)=O)CCN(CC(O)=O)CC(O)=O URDCARMUOSMFFI-UHFFFAOYSA-N 0.000 description 2
- WYMDDFRYORANCC-UHFFFAOYSA-N 2-[[3-[bis(carboxymethyl)amino]-2-hydroxypropyl]-(carboxymethyl)amino]acetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)CN(CC(O)=O)CC(O)=O WYMDDFRYORANCC-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- 241000173529 Aconitum napellus Species 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
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- PTMHPRAIXMAOOB-UHFFFAOYSA-N phosphoramidic acid Chemical class NP(O)(O)=O PTMHPRAIXMAOOB-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000473 propyl gallate Substances 0.000 description 1
- 235000010388 propyl gallate Nutrition 0.000 description 1
- 229940075579 propyl gallate Drugs 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- NMHFBDQVKIZULJ-UHFFFAOYSA-N selanylideneindium Chemical compound [In]=[Se] NMHFBDQVKIZULJ-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- VWDWKYIASSYTQR-YTBWXGASSA-N sodium;dioxido(oxo)azanium Chemical compound [Na+].[O-][15N+]([O-])=O VWDWKYIASSYTQR-YTBWXGASSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229940095064 tartrate Drugs 0.000 description 1
- VKFFEYLSKIYTSJ-UHFFFAOYSA-N tetraazanium;phosphonato phosphate Chemical compound [NH4+].[NH4+].[NH4+].[NH4+].[O-]P([O-])(=O)OP([O-])([O-])=O VKFFEYLSKIYTSJ-UHFFFAOYSA-N 0.000 description 1
- 150000000000 tetracarboxylic acids Chemical class 0.000 description 1
- QSUJAUYJBJRLKV-UHFFFAOYSA-M tetraethylazanium;fluoride Chemical compound [F-].CC[N+](CC)(CC)CC QSUJAUYJBJRLKV-UHFFFAOYSA-M 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium(II) oxide Chemical compound [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- ASVMCHUOIVTKQQ-UHFFFAOYSA-M triethyl(methyl)azanium;fluoride Chemical compound [F-].CC[N+](C)(CC)CC ASVMCHUOIVTKQQ-UHFFFAOYSA-M 0.000 description 1
- ZMANZCXQSJIPKH-UHFFFAOYSA-O triethylammonium ion Chemical compound CC[NH+](CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-O 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- BZWNJUCOSVQYLV-UHFFFAOYSA-H trifluoroalumane Chemical compound [F-].[F-].[F-].[F-].[F-].[F-].[Al+3].[Al+3] BZWNJUCOSVQYLV-UHFFFAOYSA-H 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- AQLJVWUFPCUVLO-UHFFFAOYSA-N urea hydrogen peroxide Chemical compound OO.NC(N)=O AQLJVWUFPCUVLO-UHFFFAOYSA-N 0.000 description 1
- 239000004034 viscosity adjusting agent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
Description
本願は、2017年9月29日出願の米国仮特許出願第62/565,704号および2018年9月26日出願の米国特許出願第16/142,291号に対して優先権を主張し、それらの全体を参照することによって本明細書の内容とする。
水、
酸化剤、
アミン化合物と多官能性有機酸を含む緩衝剤組成物、
水混和性溶媒、および、
フッ化物イオン源、
を含むエッチング溶液。
水、
アミン、
酸化剤、
アンモニウム化合物と多官能性有機酸を含む緩衝剤組成物、
水混和性溶媒、および、
フッ化物イオン源、
を含むエッチング溶液。
ケイ素およびケイ素−ゲルマニウムを含むマイクロ電子装置を、水、酸化剤、アミン化合物と多官能性有機酸とを含む緩衝剤組成物、水混和性溶媒、およびフッ化物イオン源を含むエッチング溶液と接触させる工程、および、
そのマイクロ電子装置を、ケイ素およびケイ素−ゲルマニウムが少なくとも部分的に除去された後に濯ぐ工程、ケイ素のケイ素−ゲルマニウムに対するエッチング速度は約3:1〜1:3である。
ケイ素およびケイ素−ゲルマニウムを含むマイクロ電子装置を、水、酸化剤、アミン、アンモニウム化合物と多官能性有機酸とを含む緩衝剤組成物、水混和性溶媒、およびフッ化物イオン源を含むエッチング溶液と接触させる工程、および、
そのマイクロ電子装置を、ケイ素およびケイ素−ゲルマニウムが少なくとも部分的に除去された後に濯ぐ工程、ケイ素のケイ素−ゲルマニウムに対するエッチング速度は約3:1〜1:3である。
水
酸化剤
フッ化物イオン源
R1NR2R3R4F,
式中、R1、R2、R3およびR4は、それぞれHまたは(C1〜C4)アルキル基を表わす、
を有する脂肪族第1級、第2級もしくは第3級アミンのフッ化物塩がある。典型的には、R1、R2、R3およびR4基中の炭素原子の総数は、12炭素原子以下である。脂肪族第1級、第2級もしくは第3級アミンのフッ化物塩の例としては、例えばフッ化テトラメチルアンモニウム、フッ化テトラエチルアンモニウム、フッ化メチルトリエチルアンモニウム、およびフッ化テトラブチルアンモニウム。
水混和性溶媒
アミン化合物
緩衝剤
他の随意選択的な成分
方法
この例の主題である全ての組成物は、250mLのビーカ中で成分を1インチのテフロンコーティングされた攪拌棒で混合することによって調製された。典型的には、このビーカに加えられた最初の材料は脱イオン(DI)水であり、次いで他の成分が特別な順番はなく加えられた。
基材の組成
SiまたはSiGeブランケットウエハが、配合物の開発のためのエッチング速度の試験のために用いられた。SiおよびSiGeフィンを有するパターン化されたウエハが、本発明の組成物を用いて、フィンのトリミングを確認するために用いられた。
処理条件
例
Claims (22)
- マイクロ電子装置からケイ素およびケイ素−ゲルマニウムの同時の除去のために好適なエッチング溶液であって、
水、
酸化剤、
アミン化合物および多官能性有機酸を含む緩衝剤租背物、
水混和性溶媒、ならびに、
フッ化物イオン源、
を含んでなるエッチング溶液。 - マイクロ電子装置からケイ素およびケイ素−ゲルマニウムの同時の除去のために好適なエッチング溶液であって、
水、
アミン、
酸化剤、
アンモニウム化合物および多官能性有機酸を含む緩衝剤租背物、
水混和性溶媒、ならびに、
フッ化物イオン源、
を含んでなるエッチング溶液。 - 前記酸化剤が、過酸化水素、過ヨウ素酸、ヨウ素酸カリウム、過マンガン酸カリウム、過硫酸アンモニウム、モリブデン酸アンモニウム、硝酸第二鉄、硝酸、硝酸カリウム、アンモニア、およびそれらの混合物からなる群から選択される、請求項1記載のエッチング溶液。
- 前記酸化剤が、過酸化水素、過ヨウ素酸、ヨウ素酸カリウム、過マンガン酸カリウム、過硫酸アンモニウム、モリブデン酸アンモニウム、硝酸第二鉄、硝酸、硝酸カリウム、アンモニア、およびそれらの混合物からなる群から選択される、請求項2記載のエッチング溶液。
- 前記酸化剤が、過酸化水素である、請求項4記載のエッチング溶液。
- 前記アミン化合物が、N−メチルエタノールアミン(NMEA)、モノエタノールアミン(MEA)、ジエタノールアミン、トリエタノールアミン、トリイソプロパノールアミン、2−(2−アミノエチルアミノ)エタノール、2−(2−アミノエトキシ)エタノール(AEE)、トリエタノールアミン、N−エチルエタノールアミン、N,N−ジメチルエタノールアミン、N,N−ジエチルエタノールアミン、N−メチルジエタノールアミン、N−エチルジエタノールアミン、シクロヘキシルアミンジエタノール、ジイソプロパノールアミン、シクロヘキシルアミンジエタノール、およびそれらの混合物からなる群から選択されるアルカノ―ルアミン化合物である、請求項1記載のエッチング溶液。
- 前記アミン化合物が、N−メチルエタノールアミン(NMEA)、モノエタノールアミン(MEA)、ジエタノールアミン、トリエタノールアミン、トリイソプロパノールアミン、2−(2−アミノエチルアミノ)エタノール、2−(2−アミノエトキシ)エタノール(AEE)、トリエタノールアミン、N−エチルエタノールアミン、N,N−ジメチルエタノールアミン、N,N−ジエチルエタノールアミン、N−メチルジエタノールアミン、N−エチルジエタノールアミン、シクロヘキシルアミンジエタノール、ジイソプロパノールアミン、シクロヘキシルアミンジエタノール、およびそれらの混合物からなる群から選択されるアルカノ―ルアミン化合物である、請求項2記載のエッチング溶液。
- アルカノ―ルアミンが、アミノ(エトキシ)エタノール(AEE)である、請求項7記載のエッチング組成物。
- 前記水混和性溶媒が、エチレングリコール、プロピレングリコール、1,4−ブタンジオール、トリプロピレングリコールメチルエーテル、プロピレングリコールプロピルエーテル、ジエチレングリコールn−ブチルエーテル、ヘキシルオキシプロピルアミン、ポリ(オキシエチレン)ジアミン、ジメチルスルホキシド、テトラヒドロフルフリルアルコール、グリセロール、アルコール、スルホキシド、またはそれらの混合物からなる群から選択される、請求項1記載の組成物。
- 前記水混和性溶媒が、エチレングリコール、プロピレングリコール、1,4−ブタンジオール、トリプロピレングリコールメチルエーテル、プロピレングリコールプロピルエーテル、ジエチレングリコールn−ブチルエーテル、ヘキシルオキシプロピルアミン、ポリ(オキシエチレン)ジアミン、ジメチルスルホキシド、テトラヒドロフルフリルアルコール、グリセロール、アルコール、スルホキシド、またはそれらの混合物からなる群から選択される、請求項2記載の組成物。
- 前記水混和性溶媒が、ブチルジグリセロールである、請求項2記載のエッチング溶液。
- 前記アミン化合物が、アルカノ―ルアミンであり、そして前記多官能性有機酸が、少なくとも3つのカルボン酸基を有する多塩基酸である、請求項1記載のエッチング溶液。
- 前記アミン化合物が、アルカノ―ルアミンであり、そして前記多官能性有機酸が、少なくとも3つのカルボン酸基を有する多塩基酸である、請求項2記載のエッチング溶液。
- 前記多官能性酸が、クエン酸、2−メチルプロパン−1,2,3−トリスカルボン酸、ベンゼン−1,2,3−トリカルボン酸[ヘミメリット]、プロパン−1,2,3−トリカルボン酸[トリカルバリル]、1,cis−2,3−プロペントリカルボン酸[アコニット]、例えば、ブタン−1,2,3,4−テトラカルボン酸、シクロペンタンテトラ−1,2,3,4−カルボン酸、ベンゼン−1,2,4,5−テトラカルボン酸[ピロメリット]、ベンゼンペンタカルボン酸、およびベンゼンヘキサカルボン酸[メリト])、およびそれらの混合物からなる群から選択される、請求項2記載のエッチング溶液。
- 前記緩衝剤が、塩化アンモニウム、硫酸アンモニウム、硝酸アンモニウム、炭酸アンモニウム、次亜塩素酸アンモニウム、塩素酸アンモニウム、過マンガン酸アンモニウム、酢酸アンモニウム、二塩基性リン酸アンモニウム、クエン酸二アンモニウム、クエン酸三アンモニウム(TAC)、スルファミン酸アンモニウム、シュウ酸アンモニウム、ギ酸アンモニウム、酒石酸アンモニウム、酒石酸水素アンモニウムおよびグリコール酸アンモニウムからなる群から選択されるアンモニウム塩を含む、請求項2記載のエッチング溶液。
- 前記緩衝剤が、クエン酸三アンモニウム(TAC)である、請求項15記載のエッチング溶液。
- ケイ素およびケイ素−ゲルマニウムを含むマイクロ電子装置からケイ素およびケイ素−ゲルマニウムを同時にエッチングするための方法であって、以下の工程、
ケイ素およびケイ素−ゲルマニウムを含む前記マイクロ電子装置を、水、酸化剤、アミン化合物と多官能性有機酸とを含む緩衝剤組成物、水混和性溶媒、およびフッ化物イオン源を含むエッチング溶液と接触させる工程、ならびに
前記マイクロ電子装置を、前記ケイ素およびケイ素−ゲルマニウムが少なくとも部分的に除去された後で、すすぐ工程、
ここでケイ素のケイ素−ゲルマニウムに対するエッチング速度が、約3:1〜1:3である、
を含んでなる方法。 - ケイ素およびケイ素−ゲルマニウムを含むマイクロ電子装置からケイ素およびケイ素−ゲルマニウムを同時にエッチングするための方法であって、以下の工程、
ケイ素およびケイ素−ゲルマニウムを含む前記マイクロ電子装置を、水、酸化剤、アミン、アンモニウム化合物と多官能性有機酸とを含む緩衝剤組成物、水混和性溶媒、およびフッ化物イオン源を含むエッチング溶液と接触させる工程、ならびに
前記マイクロ電子装置を、前記ケイ素およびケイ素−ゲルマニウムが少なくとも部分的に除去された後で、すすぐ工程、
ここでケイ素のケイ素−ゲルマニウムに対するエッチング速度が、約3:1〜1:3である、
を含んでなる方法。 - 前記マイクロ電子装置を乾燥する工程を更に含む、請求項18記載の方法。
- ケイ素のケイ素−ゲルマニウムに対するエッチング速度が、約2:1〜1:2である、請求項18記載の方法。
- ケイ素のケイ素−ゲルマニウムに対するエッチング速度が、実質的に1:1である、請求項18記載の方法。
- 前記接触させる工程が、約25℃〜約80℃の温度で行われる、請求項18記載の方法。
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US16/142,291 US20190103282A1 (en) | 2017-09-29 | 2018-09-26 | Etching Solution for Simultaneously Removing Silicon and Silicon-Germanium Alloy From a Silicon-Germanium/Silicon Stack During Manufacture of a Semiconductor Device |
US16/142,291 | 2018-09-26 | ||
PCT/US2018/053304 WO2019067836A1 (en) | 2017-09-29 | 2018-09-28 | ETCHING SOLUTION FOR SIMULTANEOUSLY REMOVING SILICON AND A SILICON-GERMANIUM ALLOY FROM A SILICON-GERMANIUM / SILICON STACK DURING THE MANUFACTURE OF A SEMICONDUCTOR DEVICE |
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IL (1) | IL273545B2 (ja) |
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