JP2020534569A5 - - Google Patents
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- Publication number
- JP2020534569A5 JP2020534569A5 JP2020515659A JP2020515659A JP2020534569A5 JP 2020534569 A5 JP2020534569 A5 JP 2020534569A5 JP 2020515659 A JP2020515659 A JP 2020515659A JP 2020515659 A JP2020515659 A JP 2020515659A JP 2020534569 A5 JP2020534569 A5 JP 2020534569A5
- Authority
- JP
- Japan
- Prior art keywords
- aod
- phase shift
- reflector
- positioner according
- beam positioner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000010363 phase shift Effects 0.000 claims 24
- 230000010287 polarization Effects 0.000 claims 6
- 239000000463 material Substances 0.000 claims 5
- 229910052732 germanium Inorganic materials 0.000 claims 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 2
- 230000001902 propagating effect Effects 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762562047P | 2017-09-22 | 2017-09-22 | |
| US62/562,047 | 2017-09-22 | ||
| PCT/US2018/052018 WO2019060590A1 (en) | 2017-09-22 | 2018-09-20 | ACOUSTO-OPTICAL SYSTEM WITH REFLECTOR WITH PHASE |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020534569A JP2020534569A (ja) | 2020-11-26 |
| JP2020534569A5 true JP2020534569A5 (https=) | 2021-09-16 |
| JP7360384B2 JP7360384B2 (ja) | 2023-10-12 |
Family
ID=65810602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020515659A Active JP7360384B2 (ja) | 2017-09-22 | 2018-09-20 | 位相シフト反射器を有する音響光学システム |
Country Status (9)
| Country | Link |
|---|---|
| US (3) | US11705686B2 (https=) |
| EP (2) | EP4699731A3 (https=) |
| JP (1) | JP7360384B2 (https=) |
| KR (1) | KR102617769B1 (https=) |
| CN (2) | CN111133361B (https=) |
| SG (1) | SG11202001217RA (https=) |
| SI (1) | SI3673315T1 (https=) |
| TW (3) | TWI894485B (https=) |
| WO (1) | WO2019060590A1 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI892641B (zh) | 2019-01-31 | 2025-08-01 | 美商伊雷克托科學工業股份有限公司 | 光學系統 |
| US20220168847A1 (en) | 2019-06-10 | 2022-06-02 | Electro Scientific Industries, Inc. | Laser processing apparatus, methods of operating the same, and methods of processing workpieces using the same |
| KR102903491B1 (ko) | 2020-04-20 | 2025-12-23 | 삼성디스플레이 주식회사 | 색변환 패널 및 이를 포함하는 표시 장치, 그리고 그 제조 방법 |
| KR102545519B1 (ko) * | 2022-01-03 | 2023-06-21 | (주)오로스 테크놀로지 | 편광 변조가 최소화된 반사형 광학계 및 이를 구비한 분광 타원계 |
| WO2023146631A1 (en) * | 2022-01-28 | 2023-08-03 | Electro Scientific Industries, Inc. | Germanium aod system with parallel and perpendicular orientations |
| US20230259001A1 (en) * | 2022-02-16 | 2023-08-17 | Quantinuum Llc | Fast frequency-tunable optical relay and methods of use |
| TW202337606A (zh) * | 2022-02-27 | 2023-10-01 | 美商伊雷克托科學工業股份有限公司 | 用於聲光偏轉器(aod)之熱穩定操作的方法和設備 |
| CN120958375A (zh) * | 2023-04-07 | 2025-11-14 | 伊雷克托科学工业股份有限公司 | 用于具有减少的声波智能的声光偏转器的热稳定操作的系统和方法 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3671103A (en) * | 1970-04-09 | 1972-06-20 | Nippon Telegraph & Telephone | Di-lead molybdate ultrasonic light deflector |
| US3655255A (en) * | 1970-07-13 | 1972-04-11 | Bell Telephone Labor Inc | Acoustic-optic ultrasonic devices using germanium containing chalcogenide glasses |
| US5748222A (en) * | 1992-06-11 | 1998-05-05 | Zed Instruments Ltd. | Laser angroxing head employing acousto-optic modulator |
| JP3323548B2 (ja) | 1992-09-07 | 2002-09-09 | レーザーテック株式会社 | ビーム偏向装置 |
| TW245669B (https=) | 1993-09-27 | 1995-04-21 | Mitsubishi Electric Machine | |
| EP1571824B1 (en) * | 1996-10-30 | 2012-10-24 | FUJIFILM Corporation | Method and apparatus for inner face scanning with multi beams |
| JP3253548B2 (ja) | 1997-01-24 | 2002-02-04 | 有限会社祥起金型 | 道路標識ポール |
| US6236507B1 (en) * | 1998-04-17 | 2001-05-22 | Zygo Corporation | Apparatus to transform two nonparallel propagating optical beam components into two orthogonally polarized beam components |
| JP3870693B2 (ja) | 2000-11-28 | 2007-01-24 | 三菱電機株式会社 | レーザ加工機 |
| US6885807B2 (en) | 2001-03-14 | 2005-04-26 | Nuonics, Inc. | High speed fiber-optic attenuation modules |
| WO2003046613A2 (en) | 2001-11-28 | 2003-06-05 | Overbeck James W | Scanning microscopy, fluorescence detection, and laser beam positioning |
| JP2003329956A (ja) * | 2002-05-14 | 2003-11-19 | Fuji Photo Film Co Ltd | 画像露光装置 |
| US7039079B2 (en) * | 2003-03-14 | 2006-05-02 | Coherent, Inc. | Pulsed CO2 laser including an optical damage resistant electro-optical switching arrangement |
| WO2005026810A2 (en) | 2003-09-10 | 2005-03-24 | Zetetic Institute | Catoptric and catadioptric imaging systems with adaptive catoptric surfaces |
| US7133186B2 (en) * | 2004-06-07 | 2006-11-07 | Electro Scientific Industries, Inc. | AOM modulation techniques employing transducers to modulate different axes |
| JP2006053438A (ja) * | 2004-08-13 | 2006-02-23 | Fuji Photo Film Co Ltd | 走査露光装置 |
| US7423727B2 (en) | 2005-01-25 | 2008-09-09 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7279721B2 (en) | 2005-04-13 | 2007-10-09 | Applied Materials, Inc. | Dual wavelength thermal flux laser anneal |
| US7667888B2 (en) | 2007-04-06 | 2010-02-23 | Harris Corporation | Low cost system and method that implements acousto-optic (AO) RF signal excitation |
| US7538929B2 (en) * | 2007-04-06 | 2009-05-26 | Harris Corporation | RF phase modulation technique for performing acousto-optic intensity modulation of an optical wavefront |
| JP2009181689A (ja) * | 2008-01-30 | 2009-08-13 | Jds Uniphase Corp | ２ミラー位相シフタを有する光ピックアップ・ユニット |
| HU0800781D0 (en) | 2008-12-31 | 2009-03-02 | Femtonics Kft | Focusing system comprising acousto-optic deflectors for focusing an electromagnetic beam |
| CN101738815B (zh) | 2009-12-03 | 2012-05-09 | 深圳先进技术研究院 | 激光三维扫描装置和激光三维扫描方法 |
| JP2012253092A (ja) * | 2011-05-31 | 2012-12-20 | Mitsubishi Electric Corp | 固体レーザ発振器 |
| DE112012002844T5 (de) | 2011-07-05 | 2014-04-24 | Electronic Scientific Industries, Inc. | Verfahren zur Laserbearbeitung mit einem thermisch stabilisierten akustooptischen Strahlablenker und thermisch stabilisiertes Hochgeschwindigkeits-Laserbearbeitungssystem |
| JP2013172100A (ja) | 2012-02-22 | 2013-09-02 | Mitsubishi Electric Corp | レーザ装置の調整方法およびレーザ装置の製造方法 |
| CN103676126A (zh) * | 2013-12-20 | 2014-03-26 | 同济大学 | 一种光镊操作仪 |
| CN103730826A (zh) * | 2014-01-04 | 2014-04-16 | 天津奇谱光电技术有限公司 | 一种可调谐激光器系统 |
| DE102014200633B3 (de) * | 2014-01-15 | 2015-05-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bearbeitungsvorrichtung und -verfahren zur Laserbearbeitung einer Oberfläche |
| US20150338718A1 (en) | 2014-05-22 | 2015-11-26 | Intel Corporation | Acousto-optic deflector with multiple transducers for optical beam steering |
| NL2016543A (en) * | 2015-04-16 | 2016-10-19 | Asml Holding Nv | Method and apparatus for optical fiber connection. |
| KR20250037607A (ko) * | 2015-09-09 | 2025-03-17 | 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 | 작업물들을 레이저 가공하기 위한 레이저 가공 장치, 방법들 및 관련된 배열들 |
-
2018
- 2018-09-20 US US16/636,605 patent/US11705686B2/en active Active
- 2018-09-20 SI SI201831289T patent/SI3673315T1/sl unknown
- 2018-09-20 SG SG11202001217RA patent/SG11202001217RA/en unknown
- 2018-09-20 KR KR1020207006324A patent/KR102617769B1/ko active Active
- 2018-09-20 EP EP25217036.0A patent/EP4699731A3/en active Pending
- 2018-09-20 CN CN201880055941.1A patent/CN111133361B/zh active Active
- 2018-09-20 CN CN202210584764.4A patent/CN114755868A/zh active Pending
- 2018-09-20 EP EP18858748.9A patent/EP3673315B1/en active Active
- 2018-09-20 JP JP2020515659A patent/JP7360384B2/ja active Active
- 2018-09-20 WO PCT/US2018/052018 patent/WO2019060590A1/en not_active Ceased
- 2018-09-21 TW TW111134346A patent/TWI894485B/zh active
- 2018-09-21 TW TW114128192A patent/TW202544517A/zh unknown
- 2018-09-21 TW TW107133424A patent/TWI779100B/zh active
-
2023
- 2023-05-31 US US18/326,463 patent/US12381369B2/en active Active
-
2025
- 2025-07-10 US US19/265,229 patent/US20250343388A1/en active Pending
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