JP2020521972A5 - - Google Patents

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Publication number
JP2020521972A5
JP2020521972A5 JP2019565398A JP2019565398A JP2020521972A5 JP 2020521972 A5 JP2020521972 A5 JP 2020521972A5 JP 2019565398 A JP2019565398 A JP 2019565398A JP 2019565398 A JP2019565398 A JP 2019565398A JP 2020521972 A5 JP2020521972 A5 JP 2020521972A5
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JP
Japan
Prior art keywords
mirror
optical signal
spectral range
wavelength
spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019565398A
Other languages
English (en)
Japanese (ja)
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JP2020521972A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2018/034710 external-priority patent/WO2018218179A1/en
Publication of JP2020521972A publication Critical patent/JP2020521972A/ja
Publication of JP2020521972A5 publication Critical patent/JP2020521972A5/ja
Pending legal-status Critical Current

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JP2019565398A 2017-05-26 2018-05-25 制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ Pending JP2020521972A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762511504P 2017-05-26 2017-05-26
US62/511,504 2017-05-26
US201762597223P 2017-12-11 2017-12-11
US62/597,223 2017-12-11
PCT/US2018/034710 WO2018218179A1 (en) 2017-05-26 2018-05-25 Spectral filter having controllable spectral bandwidth and resolution

Publications (2)

Publication Number Publication Date
JP2020521972A JP2020521972A (ja) 2020-07-27
JP2020521972A5 true JP2020521972A5 (enExample) 2021-06-10

Family

ID=64397106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019565398A Pending JP2020521972A (ja) 2017-05-26 2018-05-25 制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ

Country Status (6)

Country Link
US (1) US10488256B2 (enExample)
EP (1) EP3631389B1 (enExample)
JP (1) JP2020521972A (enExample)
KR (1) KR102296101B1 (enExample)
CN (1) CN110914654A (enExample)
WO (1) WO2018218179A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3821505A4 (en) * 2018-07-13 2022-07-06 The Government of the United States of America as represented by the Secretary of the Navy HIGH STABILITY SEMICONDUCTOR LASERS AND SENSORS FOR III-V AND SILICON PHOTONIC INTEGRATED CIRCUITS
WO2020163492A1 (en) * 2019-02-06 2020-08-13 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
WO2021056251A1 (zh) * 2019-09-25 2021-04-01 深圳市海谱纳米光学科技有限公司 一种可调光学滤波装置
US11894399B2 (en) 2021-03-02 2024-02-06 Wisconsin Alumni Research Foundation Compact hyperspectral spectrometers based on semiconductor nanomembranes
US12339478B2 (en) * 2021-04-22 2025-06-24 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including spectral filter
FI131821B1 (en) * 2023-10-12 2025-12-17 Teknologian Tutkimuskeskus Vtt Oy Measurement equipment, which includes a Fabry-Perot interferometer

Family Cites Families (26)

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Publication number Priority date Publication date Assignee Title
US5144498A (en) * 1990-02-14 1992-09-01 Hewlett-Packard Company Variable wavelength light filter and sensor system
US5056101A (en) * 1990-09-19 1991-10-08 At&T Bell Laboratories Mode partition screening apparatus
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
FR2689345B1 (fr) * 1992-03-26 1995-05-12 Cit Alcatel Filtre optique comprenant un interféromètre Fabry-Perot accordable par rotation.
JPH07103824A (ja) * 1993-09-30 1995-04-21 Shimadzu Corp 分光器
JP3464081B2 (ja) * 1995-07-26 2003-11-05 富士通株式会社 波長分波器
US6324192B1 (en) * 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
US6665109B2 (en) * 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
JP2001281443A (ja) * 2000-03-28 2001-10-10 Toyo Commun Equip Co Ltd エアーギャップ型ファブリペローエタロン
GB2371119A (en) 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
TW531671B (en) * 2002-07-22 2003-05-11 Delta Electronics Inc Tunable filter applied in optical networks
CN1504731A (zh) * 2002-12-03 2004-06-16 台达电子工业股份有限公司 法布里-珀罗装置的精度补偿方法及高精度法布里-珀罗装置
GB2416427A (en) 2004-06-18 2006-01-25 Univ Sheffield DFB laser
JP2008003045A (ja) * 2006-06-26 2008-01-10 Hamano Life Science Research Foundation スペクトル測定装置およびスペクトル測定方法
US7852490B2 (en) * 2007-02-05 2010-12-14 Palo Alto Research Center Incorporated Implanting optical cavity structures
US7817281B2 (en) * 2007-02-05 2010-10-19 Palo Alto Research Center Incorporated Tuning optical cavities
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JP2010224265A (ja) * 2009-03-24 2010-10-07 Olympus Corp ファブリ＝ペロー型可変干渉フィルタの傾斜角度制御方法
DE102009021936A1 (de) * 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches Filter und ein Verfahren zur Herstellung eines optischen Filters
JP2012154780A (ja) * 2011-01-26 2012-08-16 Jvc Kenwood Corp 分光器
CN102401996B (zh) * 2011-11-30 2014-05-07 武汉邮电科学研究院 一种可调谐光滤波器的使用方法
FI125690B (en) 2013-06-18 2016-01-15 Teknologian Tutkimuskeskus Vtt Oy Mirror for Fabry-Perot interferometer and method for its manufacture
WO2015081130A1 (en) 2013-11-26 2015-06-04 Inphenix, Inc. Wavelength tunable mems-fabry perot filter
TWI555119B (zh) 2014-03-21 2016-10-21 力晶科技股份有限公司 具有氣隙的結構的形成方法
US9677935B2 (en) * 2014-11-03 2017-06-13 Trutag Technologies, Inc. Fabry-perot spectral image measurement
US10850974B2 (en) 2015-05-05 2020-12-01 The University Of Western Australia Microelectromechanical systems (MEMS) and methods

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