CN110914654A - 具有可控光谱带宽和分辨率的光谱滤波器 - Google Patents

具有可控光谱带宽和分辨率的光谱滤波器 Download PDF

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Publication number
CN110914654A
CN110914654A CN201880046030.2A CN201880046030A CN110914654A CN 110914654 A CN110914654 A CN 110914654A CN 201880046030 A CN201880046030 A CN 201880046030A CN 110914654 A CN110914654 A CN 110914654A
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CN
China
Prior art keywords
spectral
mirror
optical signal
wavelength
spectral range
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Pending
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CN201880046030.2A
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English (en)
Chinese (zh)
Inventor
阿克塞尔·谢勒
全泰允
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California Institute of Technology
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California Institute of Technology
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Application filed by California Institute of Technology filed Critical California Institute of Technology
Publication of CN110914654A publication Critical patent/CN110914654A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
CN201880046030.2A 2017-05-26 2018-05-25 具有可控光谱带宽和分辨率的光谱滤波器 Pending CN110914654A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762511504P 2017-05-26 2017-05-26
US62/511,504 2017-05-26
US201762597223P 2017-12-11 2017-12-11
US62/597,223 2017-12-11
PCT/US2018/034710 WO2018218179A1 (en) 2017-05-26 2018-05-25 Spectral filter having controllable spectral bandwidth and resolution

Publications (1)

Publication Number Publication Date
CN110914654A true CN110914654A (zh) 2020-03-24

Family

ID=64397106

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880046030.2A Pending CN110914654A (zh) 2017-05-26 2018-05-25 具有可控光谱带宽和分辨率的光谱滤波器

Country Status (6)

Country Link
US (1) US10488256B2 (enExample)
EP (1) EP3631389B1 (enExample)
JP (1) JP2020521972A (enExample)
KR (1) KR102296101B1 (enExample)
CN (1) CN110914654A (enExample)
WO (1) WO2018218179A1 (enExample)

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Publication number Priority date Publication date Assignee Title
EP3821505A4 (en) * 2018-07-13 2022-07-06 The Government of the United States of America as represented by the Secretary of the Navy HIGH STABILITY SEMICONDUCTOR LASERS AND SENSORS FOR III-V AND SILICON PHOTONIC INTEGRATED CIRCUITS
WO2020163492A1 (en) * 2019-02-06 2020-08-13 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
WO2021056251A1 (zh) * 2019-09-25 2021-04-01 深圳市海谱纳米光学科技有限公司 一种可调光学滤波装置
US11894399B2 (en) 2021-03-02 2024-02-06 Wisconsin Alumni Research Foundation Compact hyperspectral spectrometers based on semiconductor nanomembranes
US12339478B2 (en) * 2021-04-22 2025-06-24 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including spectral filter
FI131821B1 (en) * 2023-10-12 2025-12-17 Teknologian Tutkimuskeskus Vtt Oy Measurement equipment, which includes a Fabry-Perot interferometer

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TW531671B (en) * 2002-07-22 2003-05-11 Delta Electronics Inc Tunable filter applied in optical networks
CN1504731A (zh) * 2002-12-03 2004-06-16 台达电子工业股份有限公司 法布里-珀罗装置的精度补偿方法及高精度法布里-珀罗装置
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
DE102009021936A1 (de) * 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches Filter und ein Verfahren zur Herstellung eines optischen Filters
CN102401996A (zh) * 2011-11-30 2012-04-04 武汉邮电科学研究院 一种可调谐光滤波器及使用方法

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US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
FR2689345B1 (fr) * 1992-03-26 1995-05-12 Cit Alcatel Filtre optique comprenant un interféromètre Fabry-Perot accordable par rotation.
JPH07103824A (ja) * 1993-09-30 1995-04-21 Shimadzu Corp 分光器
US6324192B1 (en) * 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
US6665109B2 (en) * 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
JP2001281443A (ja) * 2000-03-28 2001-10-10 Toyo Commun Equip Co Ltd エアーギャップ型ファブリペローエタロン
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US7852490B2 (en) * 2007-02-05 2010-12-14 Palo Alto Research Center Incorporated Implanting optical cavity structures
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Publication number Priority date Publication date Assignee Title
CN1146560A (zh) * 1995-07-26 1997-04-02 富士通株式会社 作为波长信号分离器的虚像相控阵
TW531671B (en) * 2002-07-22 2003-05-11 Delta Electronics Inc Tunable filter applied in optical networks
CN1504731A (zh) * 2002-12-03 2004-06-16 台达电子工业股份有限公司 法布里-珀罗装置的精度补偿方法及高精度法布里-珀罗装置
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
DE102009021936A1 (de) * 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches Filter und ein Verfahren zur Herstellung eines optischen Filters
CN102401996A (zh) * 2011-11-30 2012-04-04 武汉邮电科学研究院 一种可调谐光滤波器及使用方法

Also Published As

Publication number Publication date
JP2020521972A (ja) 2020-07-27
KR102296101B1 (ko) 2021-08-30
EP3631389A4 (en) 2021-03-10
EP3631389A1 (en) 2020-04-08
WO2018218179A1 (en) 2018-11-29
EP3631389B1 (en) 2025-03-26
US20180340826A1 (en) 2018-11-29
KR20200014808A (ko) 2020-02-11
US10488256B2 (en) 2019-11-26

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