JP2020521972A - 制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ - Google Patents

制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ Download PDF

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JP2020521972A
JP2020521972A JP2019565398A JP2019565398A JP2020521972A JP 2020521972 A JP2020521972 A JP 2020521972A JP 2019565398 A JP2019565398 A JP 2019565398A JP 2019565398 A JP2019565398 A JP 2019565398A JP 2020521972 A JP2020521972 A JP 2020521972A
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mirror
spectral
optical signal
wavelength
spectral range
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Japanese (ja)
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JP2020521972A5 (enExample
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シェーラー アクセル
シェーラー アクセル
テヨン ジョン
テヨン ジョン
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California Institute of Technology
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California Institute of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2019565398A 2017-05-26 2018-05-25 制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ Pending JP2020521972A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762511504P 2017-05-26 2017-05-26
US62/511,504 2017-05-26
US201762597223P 2017-12-11 2017-12-11
US62/597,223 2017-12-11
PCT/US2018/034710 WO2018218179A1 (en) 2017-05-26 2018-05-25 Spectral filter having controllable spectral bandwidth and resolution

Publications (2)

Publication Number Publication Date
JP2020521972A true JP2020521972A (ja) 2020-07-27
JP2020521972A5 JP2020521972A5 (enExample) 2021-06-10

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JP2019565398A Pending JP2020521972A (ja) 2017-05-26 2018-05-25 制御可能なスペクトル帯域幅及び解像度を有するスペクトルフィルタ

Country Status (6)

Country Link
US (1) US10488256B2 (enExample)
EP (1) EP3631389B1 (enExample)
JP (1) JP2020521972A (enExample)
KR (1) KR102296101B1 (enExample)
CN (1) CN110914654A (enExample)
WO (1) WO2018218179A1 (enExample)

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EP3821505A4 (en) * 2018-07-13 2022-07-06 The Government of the United States of America as represented by the Secretary of the Navy HIGH STABILITY SEMICONDUCTOR LASERS AND SENSORS FOR III-V AND SILICON PHOTONIC INTEGRATED CIRCUITS
WO2020163492A1 (en) * 2019-02-06 2020-08-13 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
WO2021056251A1 (zh) * 2019-09-25 2021-04-01 深圳市海谱纳米光学科技有限公司 一种可调光学滤波装置
US11894399B2 (en) 2021-03-02 2024-02-06 Wisconsin Alumni Research Foundation Compact hyperspectral spectrometers based on semiconductor nanomembranes
US12339478B2 (en) * 2021-04-22 2025-06-24 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including spectral filter
FI131821B1 (en) * 2023-10-12 2025-12-17 Teknologian Tutkimuskeskus Vtt Oy Measurement equipment, which includes a Fabry-Perot interferometer

Citations (12)

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JPH04213403A (ja) * 1990-02-14 1992-08-04 Hewlett Packard Co <Hp> 可変波長光フィルタ及びセンサシステム
JPH04264223A (ja) * 1990-09-19 1992-09-21 American Teleph & Telegr Co <Att> モード分配観測装置および光フィルタ
JPH0626931A (ja) * 1992-03-26 1994-02-04 Alcatel Cit 回転により同調可能なファブリー・ペロ型干渉計を含む光学フィルタ
JPH07103824A (ja) * 1993-09-30 1995-04-21 Shimadzu Corp 分光器
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JP2001281443A (ja) * 2000-03-28 2001-10-10 Toyo Commun Equip Co Ltd エアーギャップ型ファブリペローエタロン
JP2008003045A (ja) * 2006-06-26 2008-01-10 Hamano Life Science Research Foundation スペクトル測定装置およびスペクトル測定方法
US20080186483A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Implanting optical cavity structures
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
JP2009128193A (ja) * 2007-11-22 2009-06-11 Graduate School For The Creation Of New Photonics Industries 波長センサ
JP2012154780A (ja) * 2011-01-26 2012-08-16 Jvc Kenwood Corp 分光器
WO2016073226A1 (en) * 2014-11-03 2016-05-12 Trutagtechnologies, Inc. Fabry-perot spectral image measurement

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JP3464081B2 (ja) * 1995-07-26 2003-11-05 富士通株式会社 波長分波器
US6324192B1 (en) * 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
US6665109B2 (en) * 2000-03-20 2003-12-16 Np Photonics, Inc. Compliant mechanism and method of forming same
GB2371119A (en) 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
TW531671B (en) * 2002-07-22 2003-05-11 Delta Electronics Inc Tunable filter applied in optical networks
CN1504731A (zh) * 2002-12-03 2004-06-16 台达电子工业股份有限公司 法布里-珀罗装置的精度补偿方法及高精度法布里-珀罗装置
GB2416427A (en) 2004-06-18 2006-01-25 Univ Sheffield DFB laser
JP2010224265A (ja) * 2009-03-24 2010-10-07 Olympus Corp ファブリ＝ペロー型可変干渉フィルタの傾斜角度制御方法
DE102009021936A1 (de) * 2009-05-19 2010-11-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Optisches Filter und ein Verfahren zur Herstellung eines optischen Filters
CN102401996B (zh) * 2011-11-30 2014-05-07 武汉邮电科学研究院 一种可调谐光滤波器的使用方法
FI125690B (en) 2013-06-18 2016-01-15 Teknologian Tutkimuskeskus Vtt Oy Mirror for Fabry-Perot interferometer and method for its manufacture
WO2015081130A1 (en) 2013-11-26 2015-06-04 Inphenix, Inc. Wavelength tunable mems-fabry perot filter
TWI555119B (zh) 2014-03-21 2016-10-21 力晶科技股份有限公司 具有氣隙的結構的形成方法
US10850974B2 (en) 2015-05-05 2020-12-01 The University Of Western Australia Microelectromechanical systems (MEMS) and methods

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04213403A (ja) * 1990-02-14 1992-08-04 Hewlett Packard Co <Hp> 可変波長光フィルタ及びセンサシステム
JPH04264223A (ja) * 1990-09-19 1992-09-21 American Teleph & Telegr Co <Att> モード分配観測装置および光フィルタ
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JPH0626931A (ja) * 1992-03-26 1994-02-04 Alcatel Cit 回転により同調可能なファブリー・ペロ型干渉計を含む光学フィルタ
JPH07103824A (ja) * 1993-09-30 1995-04-21 Shimadzu Corp 分光器
JP2001281443A (ja) * 2000-03-28 2001-10-10 Toyo Commun Equip Co Ltd エアーギャップ型ファブリペローエタロン
JP2008003045A (ja) * 2006-06-26 2008-01-10 Hamano Life Science Research Foundation スペクトル測定装置およびスペクトル測定方法
US20080186483A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Implanting optical cavity structures
US20080187011A1 (en) * 2007-02-05 2008-08-07 Palo Alto Research Center Incorporated Tuning optical cavities
JP2009128193A (ja) * 2007-11-22 2009-06-11 Graduate School For The Creation Of New Photonics Industries 波長センサ
JP2012154780A (ja) * 2011-01-26 2012-08-16 Jvc Kenwood Corp 分光器
WO2016073226A1 (en) * 2014-11-03 2016-05-12 Trutagtechnologies, Inc. Fabry-perot spectral image measurement

Also Published As

Publication number Publication date
KR102296101B1 (ko) 2021-08-30
EP3631389A4 (en) 2021-03-10
EP3631389A1 (en) 2020-04-08
WO2018218179A1 (en) 2018-11-29
CN110914654A (zh) 2020-03-24
EP3631389B1 (en) 2025-03-26
US20180340826A1 (en) 2018-11-29
KR20200014808A (ko) 2020-02-11
US10488256B2 (en) 2019-11-26

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