KR102296101B1 - 제어 가능한 스펙트럼 대역폭 및 해상도를 갖는 스펙트럼 필터 - Google Patents
제어 가능한 스펙트럼 대역폭 및 해상도를 갖는 스펙트럼 필터 Download PDFInfo
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- KR102296101B1 KR102296101B1 KR1020197038177A KR20197038177A KR102296101B1 KR 102296101 B1 KR102296101 B1 KR 102296101B1 KR 1020197038177 A KR1020197038177 A KR 1020197038177A KR 20197038177 A KR20197038177 A KR 20197038177A KR 102296101 B1 KR102296101 B1 KR 102296101B1
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- KR
- South Korea
- Prior art keywords
- optical signal
- spectral
- mirror
- spectral range
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/1895—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using fiber Bragg gratings or gratings integrated in a waveguide
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762511504P | 2017-05-26 | 2017-05-26 | |
| US62/511,504 | 2017-05-26 | ||
| US201762597223P | 2017-12-11 | 2017-12-11 | |
| US62/597,223 | 2017-12-11 | ||
| PCT/US2018/034710 WO2018218179A1 (en) | 2017-05-26 | 2018-05-25 | Spectral filter having controllable spectral bandwidth and resolution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20200014808A KR20200014808A (ko) | 2020-02-11 |
| KR102296101B1 true KR102296101B1 (ko) | 2021-08-30 |
Family
ID=64397106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020197038177A Active KR102296101B1 (ko) | 2017-05-26 | 2018-05-25 | 제어 가능한 스펙트럼 대역폭 및 해상도를 갖는 스펙트럼 필터 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10488256B2 (enExample) |
| EP (1) | EP3631389B1 (enExample) |
| JP (1) | JP2020521972A (enExample) |
| KR (1) | KR102296101B1 (enExample) |
| CN (1) | CN110914654A (enExample) |
| WO (1) | WO2018218179A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3821505A4 (en) * | 2018-07-13 | 2022-07-06 | The Government of the United States of America as represented by the Secretary of the Navy | HIGH STABILITY SEMICONDUCTOR LASERS AND SENSORS FOR III-V AND SILICON PHOTONIC INTEGRATED CIRCUITS |
| WO2020163492A1 (en) * | 2019-02-06 | 2020-08-13 | California Institute Of Technology | Compact hyperspectral mid-infrared spectrometer |
| WO2021056251A1 (zh) * | 2019-09-25 | 2021-04-01 | 深圳市海谱纳米光学科技有限公司 | 一种可调光学滤波装置 |
| US11894399B2 (en) | 2021-03-02 | 2024-02-06 | Wisconsin Alumni Research Foundation | Compact hyperspectral spectrometers based on semiconductor nanomembranes |
| US12339478B2 (en) * | 2021-04-22 | 2025-06-24 | Samsung Electronics Co., Ltd. | Spectral filter, and image sensor and electronic device including spectral filter |
| FI131821B1 (en) * | 2023-10-12 | 2025-12-17 | Teknologian Tutkimuskeskus Vtt Oy | Measurement equipment, which includes a Fabry-Perot interferometer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010133642A1 (de) | 2009-05-19 | 2010-11-25 | Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V. | Optisches filter und ein verfahren zur herstellung eines optischen filters |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5144498A (en) * | 1990-02-14 | 1992-09-01 | Hewlett-Packard Company | Variable wavelength light filter and sensor system |
| US5056101A (en) * | 1990-09-19 | 1991-10-08 | At&T Bell Laboratories | Mode partition screening apparatus |
| US5784507A (en) * | 1991-04-05 | 1998-07-21 | Holm-Kennedy; James W. | Integrated optical wavelength discrimination devices and methods for fabricating same |
| FR2689345B1 (fr) * | 1992-03-26 | 1995-05-12 | Cit Alcatel | Filtre optique comprenant un interféromètre Fabry-Perot accordable par rotation. |
| JPH07103824A (ja) * | 1993-09-30 | 1995-04-21 | Shimadzu Corp | 分光器 |
| JP3464081B2 (ja) * | 1995-07-26 | 2003-11-05 | 富士通株式会社 | 波長分波器 |
| US6324192B1 (en) * | 1995-09-29 | 2001-11-27 | Coretek, Inc. | Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same |
| US6665109B2 (en) * | 2000-03-20 | 2003-12-16 | Np Photonics, Inc. | Compliant mechanism and method of forming same |
| JP2001281443A (ja) * | 2000-03-28 | 2001-10-10 | Toyo Commun Equip Co Ltd | エアーギャップ型ファブリペローエタロン |
| GB2371119A (en) | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
| TW531671B (en) * | 2002-07-22 | 2003-05-11 | Delta Electronics Inc | Tunable filter applied in optical networks |
| CN1504731A (zh) * | 2002-12-03 | 2004-06-16 | 台达电子工业股份有限公司 | 法布里-珀罗装置的精度补偿方法及高精度法布里-珀罗装置 |
| GB2416427A (en) | 2004-06-18 | 2006-01-25 | Univ Sheffield | DFB laser |
| JP2008003045A (ja) * | 2006-06-26 | 2008-01-10 | Hamano Life Science Research Foundation | スペクトル測定装置およびスペクトル測定方法 |
| US7852490B2 (en) * | 2007-02-05 | 2010-12-14 | Palo Alto Research Center Incorporated | Implanting optical cavity structures |
| US7817281B2 (en) * | 2007-02-05 | 2010-10-19 | Palo Alto Research Center Incorporated | Tuning optical cavities |
| JP2009128193A (ja) * | 2007-11-22 | 2009-06-11 | Graduate School For The Creation Of New Photonics Industries | 波長センサ |
| JP2010224265A (ja) * | 2009-03-24 | 2010-10-07 | Olympus Corp | ファブリ=ペロー型可変干渉フィルタの傾斜角度制御方法 |
| JP2012154780A (ja) * | 2011-01-26 | 2012-08-16 | Jvc Kenwood Corp | 分光器 |
| CN102401996B (zh) * | 2011-11-30 | 2014-05-07 | 武汉邮电科学研究院 | 一种可调谐光滤波器的使用方法 |
| FI125690B (en) | 2013-06-18 | 2016-01-15 | Teknologian Tutkimuskeskus Vtt Oy | Mirror for Fabry-Perot interferometer and method for its manufacture |
| WO2015081130A1 (en) | 2013-11-26 | 2015-06-04 | Inphenix, Inc. | Wavelength tunable mems-fabry perot filter |
| TWI555119B (zh) | 2014-03-21 | 2016-10-21 | 力晶科技股份有限公司 | 具有氣隙的結構的形成方法 |
| US9677935B2 (en) * | 2014-11-03 | 2017-06-13 | Trutag Technologies, Inc. | Fabry-perot spectral image measurement |
| US10850974B2 (en) | 2015-05-05 | 2020-12-01 | The University Of Western Australia | Microelectromechanical systems (MEMS) and methods |
-
2018
- 2018-05-25 EP EP18806111.3A patent/EP3631389B1/en active Active
- 2018-05-25 US US15/990,114 patent/US10488256B2/en active Active
- 2018-05-25 JP JP2019565398A patent/JP2020521972A/ja active Pending
- 2018-05-25 KR KR1020197038177A patent/KR102296101B1/ko active Active
- 2018-05-25 WO PCT/US2018/034710 patent/WO2018218179A1/en not_active Ceased
- 2018-05-25 CN CN201880046030.2A patent/CN110914654A/zh active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010133642A1 (de) | 2009-05-19 | 2010-11-25 | Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V. | Optisches filter und ein verfahren zur herstellung eines optischen filters |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2020521972A (ja) | 2020-07-27 |
| EP3631389A4 (en) | 2021-03-10 |
| EP3631389A1 (en) | 2020-04-08 |
| WO2018218179A1 (en) | 2018-11-29 |
| CN110914654A (zh) | 2020-03-24 |
| EP3631389B1 (en) | 2025-03-26 |
| US20180340826A1 (en) | 2018-11-29 |
| KR20200014808A (ko) | 2020-02-11 |
| US10488256B2 (en) | 2019-11-26 |
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