JP2020514552A - コーティングされた製品及びその製造方法 - Google Patents
コーティングされた製品及びその製造方法 Download PDFInfo
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- JP2020514552A JP2020514552A JP2019550666A JP2019550666A JP2020514552A JP 2020514552 A JP2020514552 A JP 2020514552A JP 2019550666 A JP2019550666 A JP 2019550666A JP 2019550666 A JP2019550666 A JP 2019550666A JP 2020514552 A JP2020514552 A JP 2020514552A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000002344 surface layer Substances 0.000 claims abstract description 72
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 51
- 239000010410 layer Substances 0.000 claims abstract description 37
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 16
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 14
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 11
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 14
- 239000013078 crystal Substances 0.000 claims description 13
- 239000002210 silicon-based material Substances 0.000 claims description 13
- 239000000203 mixture Substances 0.000 claims description 11
- -1 nitrogen-containing compound Chemical class 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 9
- 239000000155 melt Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 230000008595 infiltration Effects 0.000 claims description 5
- 238000001764 infiltration Methods 0.000 claims description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 4
- 239000004917 carbon fiber Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 2
- 229910021529 ammonia Inorganic materials 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 2
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 2
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims description 2
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 230000035515 penetration Effects 0.000 claims description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims description 2
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims description 2
- 239000005052 trichlorosilane Substances 0.000 claims description 2
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 claims description 2
- 238000010586 diagram Methods 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 230000000704 physical effect Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010285 flame spraying Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000007750 plasma spraying Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims (20)
- 主に炭素又はセラミック材からなる材料から形成され、化学気相成長(CVD)により表面層でコーティングされる、製品、特に物体の、製造方法であって、
前記製品は、少なくとも半結晶性の、好ましくは結晶性の、窒化ケイ素(Si3N4)の表面層でコーティングされ、該表面層は、1100℃超1700℃以下、好ましくは1200℃超1550℃以下、特に好ましくは1300℃超1500℃以下の処理温度で前記製品上に形成される
ことを特徴とする製品製造方法。 - 請求項1に記載の製品製造方法において、
前記表面層は、化学量論比が一定の結晶性窒化ケイ素から形成されている
ことを特徴とする方法。 - 請求項1又は2に記載の製品製造方法において、
前記結晶性窒化ケイ素は、炭素、水素及び/又は金属を実質的に含まない
ことを特徴とする方法。 - 請求項1〜3のいずれか1項に記載の製品製造方法において、
前記結晶性窒化ケイ素は、三方晶(α−Si3N4)、六方晶(β−Si3N4)及び/又は立方晶(γ−Si3N4)に改質して形成される
ことを特徴とする方法。 - 請求項1〜4のいずれか1項に記載の製品製造方法において、
前記製品の前記表面層は、1μm〜5000μm、好ましくは1μm〜1000μm、特に好ましくは5μm〜100μmの層厚で形成する
ことを特徴とする方法。 - 請求項1〜5のいずれか1項に記載の製品製造方法において、
前記表面層は、前記製品上に、処理チャンバ内で1mbar超300mbar以下、好ましくは1mbar超60mbar以下の圧力下で形成される
ことを特徴とする方法。 - 請求項1〜6のいずれか1項に記載の製品製造方法において、
化学気相成長中に、前記製品を処理チャンバ内で処理温度まで加熱し、少なくとも1種類のケイ素含有化合物及び1種類の窒素含有化合物を含む計量された量の気体混合物を前記処理チャンバに供給し、結晶性窒化ケイ素の前記表面層を前記製品上に堆積させる
ことを特徴とする方法。 - 請求項7に記載の製品製造方法において、
前記気体混合物は、前記処理チャンバ内の処理気体ノズル内で形成する
ことを特徴とする方法。 - 請求項1〜6のいずれか1項に記載の製品製造方法において、
化学気相成長中、前記製品を処理チャンバ内で処理温度まで加熱し、少なくとも1種類のケイ素含有化合物を含む計量された量の気体を処理チャンバに供給し、前記製品上にケイ素からなる表面層を堆積し、これに続いて、少なくとも1種類の窒素含有化合物を含む計量された量の気体を前記処理チャンバに供給し、前記表面層のケイ素が結晶性窒化ケイ素に変換される
ことを特徴とする方法。 - 請求項9に記載の製品製造方法において、
前記ケイ素含有化合物を含む前記気体を、ケイ素からなる表面層の形成中又は形成後に前記処理チャンバに供給する
ことを特徴とする方法。 - 請求項7〜10のいずれか1項に記載の製品製造方法において、
前記ケイ素含有化合物及び前記窒素含有化合物は、1:20、好ましくは1:2、特に好ましくは1:1の比で前記処理チャンバに供給する
ことを特徴とする方法。 - 請求項7〜11のいずれか1項に記載の製品製造方法において、
抵抗加熱器によって、又は誘導加熱によって、前記処理チャンバを加熱する
ことを特徴とする方法。 - 請求項7〜12のいずれか1項に記載の製品製造方法において、
前記窒素含有化合物として、アンモニア及び/又は窒素を使用し、前記ケイ素含有化合物として、シラン、好ましくはモノシラン、ジシラン、トリシラン、ジクロロシラン、テトラクロロシラン及び/又はトリクロロシランを使用する
ことを特徴とする方法。 - 請求項7〜13のいずれか1項に記載の製品製造方法において、
水素、塩化水素及び/又はアルゴンを、他の気体として使用する
ことを特徴とする方法。 - 請求項1〜14のいずれか1項に記載の製品製造方法において、
前記表面層を形成する前に、前記製品に少なくとも半結晶性の、好ましくは結晶性の窒化ケイ素を浸透させる
ことを特徴とする方法。 - 請求項15に記載の製品製造方法において、
前記製品は、800℃超1700℃以下、好ましくは1000℃超1550℃以下、特に好ましくは、1300℃超1500℃以下の処理温度で、化学気相浸透法(CVI)により浸透させる
ことを特徴とする方法。 - 請求項15又は16に記載の製品製造方法において、
前記製品の浸透中、前記結晶性窒化ケイ素で前記製品の材料の細孔を閉じ又は埋める
ことを特徴とする方法。 - 請求項15〜17のいずれか1項に記載の製品製造方法において、
前記結晶性窒化ケイ素による前記製品の浸透中に、前記製品を完全に浸透させ、又は、浸透層の層厚が最大100μm、好ましくは最大500μm、特に好ましくは最大2500μmとなるように浸透させる、
ことを特徴とする方法。 - 特に金属溶融物又はケイ素溶融物を容れるための、るつぼであって、
グラファイト、炭素繊維強化炭素(CFC)又はセラミック材から構成され、少なくとも該るつぼの溶融物受け部の濡れ表面が、結晶性窒化ケイ素(Si3N4)の表面層でコーティングされている
ことを特徴とするるつぼ。 - 結晶性窒化ケイ素(Si3N4)の層の使用であって、
特に金属溶融物又はケイ素溶融物を容れるための、グラファイト、炭素繊維強化炭素(CFC)又はセラミック材で構成されたるつぼの、溶融物受け部の濡れ表面を形成するための表面層としての使用。
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DE102017204257.5A DE102017204257A1 (de) | 2017-03-14 | 2017-03-14 | Beschichtetes Produkt und Verfahren zur Herstellung |
DE102017204257.5 | 2017-03-14 | ||
PCT/EP2018/055020 WO2018166802A2 (de) | 2017-03-14 | 2018-03-01 | Beschichtetes produkt und verfahren zur herstellung |
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US (1) | US11932937B2 (ja) |
EP (1) | EP3596247A2 (ja) |
JP (1) | JP2020514552A (ja) |
KR (1) | KR20190125349A (ja) |
CN (1) | CN110418858A (ja) |
DE (1) | DE102017204257A1 (ja) |
TW (1) | TWI776860B (ja) |
WO (1) | WO2018166802A2 (ja) |
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KR20200104976A (ko) * | 2019-02-27 | 2020-09-07 | 삼성디스플레이 주식회사 | 증착원 증발 장치 및 그 제조방법 |
CN116589284A (zh) * | 2023-05-20 | 2023-08-15 | 西北工业大学 | 一种高强高纯氮化硅坩埚及其制备方法和应用 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5296999A (en) * | 1976-01-13 | 1977-08-15 | Tohoku Daigaku Kinzoku Zairyo | Silicon nitride having ultraahigh hardness and high purity process for peparing same and apparatus therefore |
JPH05263255A (ja) * | 1992-03-19 | 1993-10-12 | Hitachi Electron Eng Co Ltd | プラズマcvd装置 |
US5300322A (en) * | 1992-03-10 | 1994-04-05 | Martin Marietta Energy Systems, Inc. | Molybdenum enhanced low-temperature deposition of crystalline silicon nitride |
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WO2018166802A2 (de) | 2018-09-20 |
US11932937B2 (en) | 2024-03-19 |
CN110418858A (zh) | 2019-11-05 |
KR20190125349A (ko) | 2019-11-06 |
TWI776860B (zh) | 2022-09-11 |
EP3596247A2 (de) | 2020-01-22 |
US20200024732A1 (en) | 2020-01-23 |
TW201839163A (zh) | 2018-11-01 |
DE102017204257A1 (de) | 2018-09-20 |
WO2018166802A3 (de) | 2019-01-17 |
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