JP2020513647A - 製造プロセスにおける粒子によって誘発されるアークの検出のための組成発光分光分析 - Google Patents
製造プロセスにおける粒子によって誘発されるアークの検出のための組成発光分光分析 Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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Abstract
Description
Claims (20)
- プラズマ処理システム内の異常事象を検出するための方法であって、
プラズマ処理チャンバ内でプラズマを点火するステップと、
前記プラズマ処理チャンバ内のプラズマからスペクトル分解発光信号を検出し、該スペクトル分解発光信号は、異常事象からの発光を含む、ステップと、
前記スペクトル分解発光信号を処理するステップと、
処理した前記スペクトル分解発光信号から異常事象のシグネチャを検出する、方法。 - 前記異常事象は、アーキング事象またはプラズマ不安定性を含む、請求項1に記載の方法。
- 故障の検出のために前記異常事象を記録するか、前記プラズマ処理システムのオペレータに通知するか、あるいはその両方を行うステップをさらに含む、請求項1に記載の方法。
- 処理した前記スペクトル分解発光信号から少なくとも1つの化学種のスペクトルシグネチャを識別するステップをさらに含む、請求項1に記載の方法。
- 前記少なくとも1つの化学種の識別された前記スペクトルシグネチャに基づいて前記異常事象を分類するステップをさらに含む、請求項4に記載の方法。
- 識別された前記スペクトルシグネチャに関連付けられた前記少なくとも1つの化学種が前記異常事象中に前記プラズマ処理チャンバ内で発展した発生源を決定するステップをさらに含む、請求項4に記載の方法。
- 識別された前記スペクトルシグネチャに関連付けられた前記少なくとも1つの化学種が前記異常事象中に前記プラズマ処理チャンバ内で発展した表面を識別するステップをさらに含む、請求項4に記載の方法。
- 識別された前記スペクトルシグネチャに関連付けられた前記少なくとも1つの化学種が前記異常事象中に前記プラズマ処理チャンバ内で発展した位置を識別するステップをさらに含む、請求項4に記載の方法。
- プラズマ電気パラメータを測定するステップと、
前記異常事象中の前記プラズマ電気パラメータの挙動を前記異常事象と関連付けるステップと、をさらに含む、請求項1に記載の方法。 - 前記プラズマ電気パラメータは、無線周波数(RF)電力、基板ホルダRF電力、およびプラズマ電位を含む群から選択されるパラメータを含む、請求項9に記載の方法。
- 前記異常事象に関連すると識別された条件での前記プラズマ処理システムの動作を防止するようにコントローラを設定する、請求項9に記載の方法。
- 前記スペクトル分解発光信号は、分光計を使用して検出される、請求項1に記載の方法。
- 前記スペクトル分解発光信号を処理するステップは、専用のアーク検出器コントローラにおいて実行される、請求項1に記載の方法。
- 前記アーク検出器コントローラは、高速非スペクトル分解アーク検出器から非スペクトル分解発光信号を受信するように構成されている、請求項13に記載の方法。
- 前記アーク検出器コントローラは、検出された前記スペクトル分解発光信号と検出された前記非スペクトル分解発光信号との両方を使用して、アーキング事象を検出するように構成されている、請求項14に記載の方法。
- 前記スペクトル分解発光信号を処理するステップは、プラズマ終点検出器コントローラにおいて実行される、請求項1に記載の方法。
- プラズマ処理システムにおいて異常事象を検出するための装置であって、
前記プラズマ処理システムのプラズマ処理チャンバに配置され、前記プラズマ処理チャンバへの光学的アクセスを提供するための窓と、
前記窓を通して、前記プラズマ処理チャンバ内のスペクトル分解発光信号を検出するための分光計と、
前記異常事象を引き起こした化学種を処理し、決定するように構成されたコントローラと、を含む装置。 - 前記異常事象を引き起こした前記化学種を識別するために、スペクトルデータの事後分析における参照のために、事前に予め識別され、記憶され、使用されたスペクトル分解発光信号の記憶部をさらに含む、請求項17に記載の装置。
- アーキング事象の発生および該アーキング事象の発生の特定の時刻瞬間を検出するように構成されているフォトダイオード検出器をさらに含む、請求項18に記載の装置。
- 前記化学種の決定は、それらの対応するケミカル−インプリント識別に基づく、請求項17に記載の装置。
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US201662424153P | 2016-11-18 | 2016-11-18 | |
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PCT/US2017/062316 WO2018094219A1 (en) | 2016-11-18 | 2017-11-17 | Compositional optical emission spectroscopy for detection of particle induced arcs in a fabrication process |
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JP2023522479A (ja) * | 2021-04-13 | 2023-05-30 | ヴェリティー インストルメンツ,インコーポレイテッド | スペクトル・フィルタリングのためのシステム、機器、及び方法 |
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US10622197B2 (en) * | 2015-07-21 | 2020-04-14 | Tokyo Electron Limited | Plasma processing apparatus and plasma processing method |
US10900907B2 (en) * | 2017-02-17 | 2021-01-26 | Radom Corporation | Portable plasma source for optical spectroscopy |
US20180294197A1 (en) * | 2017-04-06 | 2018-10-11 | Lam Research Corporation | System design for in-line particle and contamination metrology for showerhead and electrode parts |
CN109490721A (zh) * | 2018-09-11 | 2019-03-19 | 惠科股份有限公司 | 一种监控装置和监控方法 |
KR20220030439A (ko) * | 2020-08-31 | 2022-03-11 | 삼성전자주식회사 | 반도체 장치 제조 공정의 모니터링 방법 및 이를 포함하는 반도체 장치의 제조 방법 |
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WO2018094219A1 (en) | 2018-05-24 |
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