JP2020507052A - 固体検査装置およびその使用方法 - Google Patents
固体検査装置およびその使用方法 Download PDFInfo
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- JP2020507052A JP2020507052A JP2018566892A JP2018566892A JP2020507052A JP 2020507052 A JP2020507052 A JP 2020507052A JP 2018566892 A JP2018566892 A JP 2018566892A JP 2018566892 A JP2018566892 A JP 2018566892A JP 2020507052 A JP2020507052 A JP 2020507052A
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Abstract
Description
別の例として、固体ホスト材料内に蛍光材料をドーピングすることに加えて、またはその代わりに、蛍光フィルムが光学ターゲットの上にコーティングすることができる。
本明細書に開示される実施例は、内部に蛍光材料を有する固体を用いる光学ターゲットを説明する。光学ターゲットは、測定される光学特性に依存して、ナノメートルスケールまたはマイクロメートルスケールなどの所定のレベルの精度および正確性で蛍光に基づいた光学システムの光学系をキャリブレーションするために用いることができる。本明細書に開示される1つ以上の実施例は、有意な利益をもたらす。例えば、固体ターゲットシステムは、従来の液体色素ベースターゲットおよび流体対応ターゲットと比較して、製造が比較的容易である。固体ターゲットシステムは、時間の経過とともに部品が漏れたり光劣化したりしないので、比較的長い貯蔵寿命を示す。また、固体ターゲットシステムは、独自の社内プロセスを必要とせず、ゆえにたやすくサプライヤに委託できる。また、固体ターゲットシステムは、一定の光パワーで光劣化なしに経時的に一定の蛍光発光を可能にし、固体ターゲットシステムが現場での光源装置のパワー計測とパワーキャリブレーションに用いられる可能性を提供する。前述の機能性をシーケンスシステムに永続的に統合することにより、遠隔システムモニタリングにより装置の動作可能時間を延長することが可能となる。
例として、本明細書に記載される検査装置100は、マイクロ流体工学、半導体、バイオテクノロジーおよび消費者産業装置に関連して利用することができる。例えば、検査装置100は、マスクアライナおよびステッパのような半導体冶具の配列や、マシンビジョンシステムのキャリブレーション、および光コヒーレンストモグラフィや蛍光ベースの生物学的撮像のような応用光学ステージのために用いることができる。他の例として、検査装置100は、蛍光顕微鏡のような標準的コンシューマ光学冶具のキャリブレーションに関連して用いることができる。
一旦光学ターゲット120がポケット214に挿入されると、ガラス層は内部レッジ215および外部レッジ219に受け止められるまで挿入領域218に挿入される。本明細書中で開示されたいくつかの例に従うと、挿入領域218は格子層(例えば、図2A中の122を参照)としての機能を果たす透明層(例えば、ガラスから形成され、従ってガラス層とも呼ばれるもの)を受け入れる。格子層は、組み立てが完了した後、汚染物質がポケット214に入り込むのを防ぐために、挿入領域218の中に密封される。例えば、エンドユーザは、清掃のために、定期的に検査装置をクリーナー(例えば、アルコール)で拭きとることができる。本明細書中の例は、格子層を本体202に接着するためにチャネル216に注入された耐アルコール性接着剤を用いており、接着剤はアルコール暴露に十分に耐えることとなる。例えば、接着剤はアルコール中で非常に安定なシリコーンであり得るが、UV硬化接着剤はアルコールで化学変化する傾向がある。シリコーンはチャネル116が満たされるまで注入される。しかしながら、シリコーンは硬化の際に「ガス放出」を示すことができる。
検査装置を用いたシーケンサ装置の試験において、いくつかの例を以下に説明する。異なる検査装置を使用する他の分析システムについても同様の試験を実施できることが理解されるであろう。さらに、以下に例示する原理を代替の分析システムおよび検査装置に適用する場合、当業者には明らかであるように、各試験の詳細は、すべての用途において必須である必要はない。
Claims (22)
- 固体ホスト材料と、該固体ホスト材料に埋設された蛍光材料と、を含む光学ターゲットを備える検査装置であって、
該固体ホスト材料は所定のフォノンエネルギHOSTPEを有し、
該蛍光材料は、選択基底エネルギ準位と、関心蛍光発光波長(FEWI)と一致する第1エネルギギャップによって基底エネルギ準位から分離されるターゲット励起(TE)エネルギ準位とを示し、
該蛍光材料は該TEエネルギ準位に対して次に低い(NLL)エネルギ準位を有し、
該NLLエネルギ準位は該TEエネルギ準位の下にある第2エネルギギャップFMEG2を介して離間し、
FMEG2/HOSTPEの比が3以上である、検査装置。 - 前記FMEG2/HOSTPEの比は、4以上10以下である、請求項1に記載の検査装置。
- 前記固体ホスト材料は、ガラス、非晶性ポリマー、結晶性材料、半結晶性ポリマー、金属ガラス、またはセラミックのうちの少なくとも一つを含む、請求項1に記載の検査装置。
- 前記蛍光材料は、希土類元素または遷移金属元素のうちの少なくとも一つのイオンを表す、請求項1に記載の検査装置。
- 前記固体ホスト材料は、最大フォノンエネルギが580cm−1以下である、請求項1に記載の検査装置。
- 前記関心蛍光発光波長の中心波長は、約1000nm以下である、請求項1に記載の検査装置。
- 前記光学ターゲットを受け入れるポケットを有する本体であって、
上面に該ポケットを包囲する挿入領域を設けた本体と、
挿入領域に搭載され、該光学ターゲットの上方に位置する透明層と、
をさらに備える、請求項1に記載の検査装置。 - 前記本体は、少なくとも部分的に該ポケットを包囲するチャネルを備え、該チャネルに接着剤を入れて格子層を接着し、
該チャネルは、チャネルに沿って配置された一連の圧力解放ポケットを備え、該圧力解放ポケットは、格子層にかかる圧力を、硬化工程の間に接着剤によって解放する、請求項7に記載の検査装置。 - 前記本体は、該ポケットの下方に位置する拡散ウェルをさらに備え、該拡散ウェルは、該光学ターゲットを通過する励起光を受光し、
該拡散ウェルは、反射率が約20.0%以下の表面仕上げを有するウェルボトムを含む、請求項8に記載の検査装置。 - 前記透明層または該光学ターゲットのうちの少なくとも一つの表面に形成された微細構造をさらに備え、該微細構造が格子層を形成する、請求項7に記載の検査装置。
- 前記透明層または該光学ターゲットのうちの少なくとも一つの表面上に形成した反射防止コーティングをさらに備える、請求項7に記載の検査装置。
- 蛍光材料を包囲する固体本体を備える光学ターゲットと、
励起光を光学ターゲットへ向かって誘導し、該光学ターゲットからの蛍光発光を受光する対物レンズと、
該光学ターゲットに近位の関心領域へ該対物レンズを動かすドライバと、
プログラム命令を格納するメモリと、
機器の光学的アライメントまたは光学的キャリブレーションの少なくとも一つに関連して、該光学ターゲットからの蛍光発光を検出するプログラム命令を実行するプロセッサと、
を備える光学検出装置。 - 前記対物レンズは、励起光を該光学ターゲット上へ誘導し、
該プロセッサは、該蛍光発光から参照情報を引き出し、
該プロセッサは、該機器の光学的配列または光学的キャリブレーションの少なくとも一つに関連して、参照情報を用いる、請求項12に記載の光学検出装置。 - 前記光学ターゲットは、該対物レンズに近位のキャリブレーション位置に永久的に装着されており、
該キャリブレーション位置は、機器内のフローセルチャネルと離れている、請求項12に記載の光学検出装置。 - 前記光学ターゲットは、固体ホスト材料と、該固体ホスト材料に埋設した該蛍光材料と、を含み、
該固体ホスト材料は、所定のフォノンエネルギHOSTPEを有し、
該蛍光材料は、選択基底エネルギ準位と、ターゲット励起(TE)エネルギ準位と、次に低い(NLL)エネルギ準位とを示し、
次に低い(NLL)エネルギ準位は、該TEエネルギ準位下のエネルギギャップFMEG2を介して離間し、
FMEG2/HOSTPEの比が3以上である、請求項12に記載の光学検出装置。 - 前記固体本体は、該蛍光材料を形成する一つ以上のイオンをドープした固体ホスト材料を備える基板を表す、請求項12に記載の光学検出装置。
- 前記固体本体は、励起光が照射されると一つ以上の所定の関心発光バンドで蛍光発光する量子ドットを包囲する、エポキシまたはポリマーの少なくとも一つを表す、請求項12に記載の光学検出装置。
- 前記光学ターゲットの上に形成した反射防止コーティングをさらに備える、請求項12に記載の光学検出装置。
- 蛍光材料を包囲する固体本体を備える光学ターゲットと、機器の対物レンズとを整列させるステップと、励起光を該光学ターゲットに誘導するステップと、
該光学ターゲットからの蛍光発光を参照情報として検出するステップと、
機器の光学的アライメントまたは光学的キャリブレーションの少なくとも一つに関連して該参照情報を用いるステップと、
とを含む方法。 - 前記励起光を該光学ターゲットの上面の下方にある焦点に合わせるステップをさらに含む、請求項19に記載の方法。
- 前記整列は、
前記光学ターゲットの上方に位置する微細構造を含む格子領域に該対物レンズを整列させて、該微細構造における第1の焦点に該励起光を合わせるステップと、
該微細構造の空隙(ボイド)である非格子領域に該対物レンズを整列(アライメント)させるステップと、
該光学ターゲットの上面の下方にある第2の焦点に該励起光を合焦するステップと、
を含む、請求項19に記載の方法。 - 前記蛍光材料は、エルビウム、ホルミウムまたはプラセオジムのうちの少なくとも1種のイオンを含む化学元素を含み、
前記固体ホスト材料は、ケイ酸塩、ゲルマニウム酸塩、InF3、またはZBLANの少なくとも1種を含む、請求項21に記載の方法。
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