JP2020505786A - シングル型、タンデム型ならびにヘテロ接合型太陽電池装置およびその形成方法 - Google Patents
シングル型、タンデム型ならびにヘテロ接合型太陽電池装置およびその形成方法 Download PDFInfo
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- JP2020505786A JP2020505786A JP2019559394A JP2019559394A JP2020505786A JP 2020505786 A JP2020505786 A JP 2020505786A JP 2019559394 A JP2019559394 A JP 2019559394A JP 2019559394 A JP2019559394 A JP 2019559394A JP 2020505786 A JP2020505786 A JP 2020505786A
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- 238000000034 method Methods 0.000 title claims abstract description 39
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 22
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- 229910020776 SixNy Inorganic materials 0.000 description 1
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- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
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- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000004050 hot filament vapor deposition Methods 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
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- 238000010884 ion-beam technique Methods 0.000 description 1
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- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- LALRXNPLTWZJIJ-UHFFFAOYSA-N triethylborane Chemical compound CCB(CC)CC LALRXNPLTWZJIJ-UHFFFAOYSA-N 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical group CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
- H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
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- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H01L31/02—Details
- H01L31/0236—Special surface textures
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- H01L31/03682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table
- H01L31/03685—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table including microcrystalline silicon, uc-Si
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- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
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- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/076—Multiple junction or tandem solar cells
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/075—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
- H01L31/077—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells the devices comprising monocrystalline or polycrystalline materials
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
- H01L31/1824—Special manufacturing methods for microcrystalline Si, uc-Si
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- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- Y02E10/545—Microcrystalline silicon PV cells
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- Y02E10/547—Monocrystalline silicon PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
吸収層に反射されて、太陽電池の電極として機能する金属バッキング層106における光管理が最適化される。
・ CVD法を用いて、基板101(またはタンデム型太陽電池装置200を作製する場合は201)の上に、n型透明導電酸化物(TCO)102(またはタンデム型太陽電池装置200を作製する場合は202)を堆積するステップと、
・ p−i−n構造120(またはタンデム型太陽電池装置200を作製する場合は220)を形成するステップであって、
− CVD法を用いて、n型透明導電酸化物(TCO)102(またはタンデム型太陽電池装置200を作製する場合は202)の上に、p型層103(またはタンデム型太陽電池装置200を作製する場合は203)を堆積するステップ、
− CVD法を用いて、p型層103(またはタンデム型太陽電池装置200を作製する場合は203)の上に、i型層104(またはタンデム型太陽電池装置200を作製する場合は204)を堆積するステップ、および
− CVD法を用いて、i型層104(またはタンデム型太陽電池装置200を作製する場合は204)の上に、n型層105(またはタンデム型太陽電池装置200を作製する場合は205)を堆積するステップ
を含むp−i−n構造120(220)を形成するステップと、
を備え、
p−i−n構造120(またはタンデム型太陽電池装置200を作製する場合は220)内のn型層105(またはタンデム型太陽電池装置200を作製する場合は205)を堆積するステップは、CVD法を用いて、リンおよび酸素原子を含むn型ドナー115(またはタンデム型太陽電池装置200を作製する場合は215)を堆積するステップを含む。
・ n型透明導電酸化物(TCO)102と、n型層105を備えるp−i−n構造120/220との間に、さらなるp−i−n構造221を堆積してタンデム型太陽電池装置200を作製するステップをさらに含む。
・ n型タンデム透明導電酸化物(TCO)層202の上に、アモルファスp型層223を堆積するステップ403aと、
・ アモルファスp型層223の上に、アモルファスi型層224を堆積するステップ404aと、
・ アモルファスi型層224の上に、アモルファスn型層225を堆積するステップ405aと
を含む。
Claims (13)
- 太陽電池装置(100)であって、
・ 基板(101)と、
・ p−i−n構造(120)であって、
− p型層(103)、
− i型層(104)、および
− n型層(105)
を含むp−i−n構造(120)と、
を備え、
前記n型層(105)は、リン原子を含むn型ドナー(115)を備え、
前記n型ドナー(115)は、前記n型層(105)の全原子組成に対して5%〜25%の範囲の原子濃度を有する酸素原子を含むことを特徴とする、
太陽電池装置(100)。 - 前記n型層(105)は、微結晶またはナノ結晶構造を有する、
請求項1に記載の太陽電池装置(100)。 - 前記p−i−n構造(120)は、微結晶またはナノ結晶構造を有する、
請求項1に記載の太陽電池装置(100)。 - 前記n型ドナー(115)は、前記n型層(105)の全原子組成に対して1%〜4%の範囲の原子濃度を有するリン原子を含む、
請求項1〜3のいずれか1項に記載の太陽電池装置(100)。 - 前記n型ドナー(115)は、前記n型層(105)の全原子組成に対して7%〜12%の範囲の原子濃度を有する酸素原子を含む、
請求項1〜4のいずれか1項に記載の太陽電池装置(100)。 - 前記n型層(105)は、水素原子を含む、
請求項1〜5のいずれか1項に記載の太陽電池装置(100)。 - 前記n型層(105)は、20nm〜60nmの範囲の厚さを有する、
請求項1〜6のいずれか1項に記載の太陽電池装置(100)。 - 前記n型層(105)は、40nmの厚さを有する、
請求項5に記載の太陽電池装置(100)。 - 前記p−i−n構造(120)の上または下に配置されたアモルファスp−i−n構造(201)を備える、
請求項1〜8のいずれか1項に記載の太陽電池装置(100)。 - 前記i型層(104)またはヘテロ接合i型層(304)と、前記n型層(105)、またはヘテロ接合n型ドナー(315)を備えるヘテロ接合n型層(305)との間に、ヘテロ接合n型結晶層(304a)およびヘテロ接合i型アモルファス層(304b)を備え、これにより、ヘテロ接合型太陽電池装置(300)が作製される、
請求項1〜9のいずれか1項に記載の太陽電池装置(100)。 - 太陽電池装置(100)の形成方法であって、
・ 基板(101)の上に、n型透明導電酸化物(102)を堆積するステップと、
・ p−i−n構造(120)を形成するステップであって、
− 前記n型透明導電酸化物(102)の上に、p型層(103)を堆積するステップ、
− 前記p型層(103)の上に、i型層(104)を堆積するステップ、および
− 前記i型層(104)の上に、n型層(105)を堆積するステップ
を含むp−i−n構造(120)を形成するステップと、
を備え、
前記p−i−n構造(120)内の前記n型層(105)を堆積するステップは、リンおよび酸素原子を含むn型ドナー(115)を堆積するステップを含み、前記n型ドナー(115)は、前記n型層(105)の全原子組成に対して5%〜25%の範囲の原子濃度を有する酸素原子を含む、
方法。 - 前記n型透明導電酸化物(102)と、前記n型層(105)を備える前記p−i−n構造(120)との間に、さらなるp−i−n構造(221)を堆積して、タンデム型太陽電池装置(200)を作製するステップをさらに備え、前記p−i−n構造(120)は、微結晶またはナノ結晶構造を有する、
請求項11に記載の方法。 - 前記i型層(104)またはヘテロ接合i型層(304)と、前記n型層(105)、またはヘテロ接合n型ドナー(315)を備えるヘテロ接合n型層(305)との間に、ヘテロ接合n型結晶層(304a)およびヘテロ接合i型アモルファス層(304b)を堆積して、ヘテロ接合型太陽電池装置(300)を作製するステップをさらに備える、
請求項11に記載の方法。
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