JP2020192527A - 化学液体精製装置及びそれを用いた精製方法 - Google Patents
化学液体精製装置及びそれを用いた精製方法 Download PDFInfo
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
- B01D61/14—Ultrafiltration; Microfiltration
Abstract
Description
精製プロセスに供される前に、本開示の液体材料又は化学液体は、望ましくない量の不純物及び汚染物質を含み得る。ここでは、事前に精製された化学液体を「処理対象」又は「処理対象材料」とする。本開示の化学液体精製装置で処理対象を処理した後、処理対象から十分な量の汚染物質及び不純物を取り除き、不純物及び汚染物質を所定の範囲に管理・制限した液体材料/化学液体を生成する。
図1は、本発明の実施形態による化学液体精製装置の断面図である。例示的な実施形態では、化学液体精製装置100は、液体材料10又は化学液体を製造又は精製するために使用される。本開示において、液体材料10(化学液体)は、有機溶剤と所定量の不純物とを含む。例えば、液体材料10(化学液体)は、半導体チップの製造方法において、プレウェッティング液及び現像液の少なくとも一方として用いられる処理液であることができる。また、液体材料10は、リンス液、洗浄液、剥離液などのほか、処理液の合成に使用する原料として使用されることができ、又は、レジスト膜を形成するための複合体の溶剤として使用されることもできる。幾つかの他の実施形態では、液体材料10は、半導体処理の様々な段階で使用される他の任意の化学液体であり得る。本開示はこれについて限定するものではない。
本開示において、液体材料10(化学液体)は有機溶剤を含む。有機溶剤の種類は特に限定しないが、公知の有機溶剤が適用されることができる。液体材料10における有機溶剤の含有量は特に限定しないが、有機溶剤は、主成分として含まれる。具体的には、有機溶剤の含有量は、液体材料10の全質量に対して98質量%以上である。特定の実施形態では、有機溶剤の含有量は、液体材料10の全質量に対して99質量%以上である。他の実施形態では、有機溶剤の含有量は、液体材料10の全質量に対して99.5質量%以上である。更に別の実施形態では、有機溶剤の含有量は、液体材料10の全質量に対して99.8質量%以上である。その上限値は特に限定しないが、通常では、その上限値は、99.99質量%以下である。
処理対象物及び/又は液体材料10に含まれる不純物としては、金属不純物、粒子及びその他、有機不純物、水分などを含む。
最も一般的な金属不純物は、鉄(Fe)、アルミニウム(Al)、クロム(Cr)、ニッケル(Ni)などの重金属と、ナトリウム(Na)やカルシウム(Ca)などのイオン性金属がある。金属の種類に応じて、金属不純物は、酸化物の完全性を悪化させたり、MOSゲートスタックを低減させ、デバイスの寿命を短縮させたりする。本開示の化学液体精製装置によって調製された液体材料10(化学液体)では、総微量金属含有量が質量で0〜150pptの所定の範囲内であることが好ましい。
本開示では、0.03μm以上のサイズを有する計数対象を「粒子」と称する。液体媒体中の「粒子」の数は、光散乱式液中粒子カウンタでカウントするものであり、LPC(液体粒子数)と称する。
有機不純物とは、液体材料10(化学液体)に含まれる主成分である有機溶剤とは異なる化合物を意味し、液体材料10(化学液体)の全質量に対して5000質量ppm以下の含有量で含まれる有機物を指す。即ち、本明細書では、液体材料10の全質量に対して5000質量ppm以下の含有量の有機物は、有機不純物に該当し、有機溶剤には該当しないものとする。
水分は、半導体表面の化学的及び物理的状態を不安定にする作用を有する。水分は、周囲の空気又は湿式プロセスの残渣から発生する可能性がある。水分は、化学液体に含まれる原料に不可避的に含まれる水であってもよく、化学液体製造時に不可避的に含まれるか、又は意図的に導入される水であってもよい。
図1を参照し、幾つかの実施形態では、化学液体精製装置100は、タンク本体110、戻り管120、配管122、送液ポンプ124、濾過装置(126、130)、及び抽出管140を含む。
本開示の化学液体精製装置が高品質(低粒子)の化学液体を提供する上で有用であることを証明するために、評価のために以下の実験例を行った。
実施例及び比較例における液体材料又は化学液体は、それぞれ原料液に対して以下の精製処理を行うことにより調製した。純度99質量%以上の高純度グレードの原料液を使用した。
■第1金属イオン吸収フィルタ(15nmIEXPTFE(PTFEからなり、基材表面にスルホ基を有し、孔径15nmを有するフィルタ)インテグリス社製)
■粒子除去フィルタ(12nmPTFE(PTFEからなり、孔径12nmを有するフィルタ)インテグリス社製)
■第2金属イオン吸収フィルタ(15nmIEXPTFE(PTFEからなり、基材表面にスルホ基を有し、孔径15nmを有するフィルタ)インテグリス社製)
■有機不純物吸収フィルタ(特殊フィルタA(日本特開第2013‐150979号に開示され、且つ不織布に活性炭を貼り付けたフィルタ))
■MOLECULAR SIEVE 3A(ユニオン昭和株式会社製、脱水剤)を含む水分調整手段
実施例1〜16では、表1に記載されている異なる成分を有する化学液体精製装置を使用して、化学液体を精製した。精製された化学液体について、そのハンドリング特性を評価し、微量金属とオンラインウェット粒子(online wet particles)の存在を評価した。
微量金属の評価のために、各化学液体サンプルはICP‐MS(誘導結合プラズマ質量分析(ICP‐MS)を使用して、富士フイルム開発法を使用してテストし、各サンプルは26の金属種の存在についてテストされ、検出限界は金属特有であったが、一般的な検出限界は、0.00010‐0.030ppbの範囲であった。次に、各金属種の濃度を合計して、総微量金属(ppb)として示される値を生成した。評価結果を表2に示す。表2では、微量金属は次の基準に従ってスコアリングされている。
5点:非常に少量の微量金属(<10ppt)。
4点:少量の微量金属(10ppt<20ppt);
3点:十分な量の微量金属(20ppt<30ppt);
2点:多量の微量金属(30ppt<100ppt);
1点:非常に多量の微量金属(>100ppt)。
液体粒子カウンタは、精製プロセス中にオンラインウェット粒子の性能をチェックするために設備に接続されている。各サンプルは、液体粒子カウンタを使用してテストされ、機器は、レーザー光を使用して液体サンプル中の粒子を0.04μmまでの検出限界でカウントし、サイズを決定した。報告される値の単位は「粒子数/ml」である。
5点:非常に良好な硬質粒子と非常に良好な染み欠陥(LPC 0.04μm<10(粒子数/ml)、染み欠陥0%);
4点:良好な硬質粒子と良好な染み欠陥(LPC 0.04μm<30(粒子数/ml)、染み欠陥約10%);
3点:良好な硬質粒子と不良な染み欠陥、又は不良な硬質粒子と良好な染み欠陥(LPC 0.04μm<30(粒子数/ml)、50%を超える染み欠陥、又はLPC 0.04μm>100(粒子数/ml)、染み欠陥約10%);
2点:不良な硬質粒子と不良な染み欠陥(LPC 0.04μm>100(粒子数/ml)、染み欠陥が50%を超える);
1ポイント:非常に不良な硬質粒子と非常に不良な染み欠陥(LPC 0.04μm>1000(粒子数/ml)、染み欠陥100%。
比較例1及び2では、表1に記載された異なる成分を有する化学液体精製装置を使用して、化学液体が精製された。比較例1と実施例1の違いは、比較例1の化学液体精製装置には送液ポンプがないことである。更に、比較例2と実施例1との違いは、比較例2の化学液体精製装置には濾過装置がないことである。実施例1〜16と同様に、精製された化学液体のハンドリング特性を評価し、微量金属やオンラインウェット粒子の有無を評価した。評価結果を表2に示す。
100 化学液体精製装置
102 化学液体精製装置
110 タンク本体
112 マンホール
114 空気穴
116 液穴
118 循環ホール
120 戻り管
122 配管
124 送液ポンプ
126 第1フィルタ
130 第2フィルタ
140 抽出管
150 支持体
160 ホイールセット
50 トラック
52 ヘッド
60 トラック
62 ヘッド
V12 マンホール口
V14 空気穴口
V16 通液口
V18 循環口
L11 高さ
L12 長さ
Claims (20)
- 内部の貯蔵空間と連通する通液口及び循環口を有するタンク本体と、
前記循環口に接続される一端及び前記貯蔵空間に延伸する他端を有する戻り管と、
前記通液口と前記循環口との間において、タンク本体の外側に配置される送液ポンプ及び濾過装置と、
前記送液ポンプ及び前記濾過装置を前記通液口及び前記循環口に接続する配管と、
を含む化学液体精製装置。 - 前記通液口に接続される一端及び前記貯蔵空間の底に延伸する他端を有する抽出管を更に含む請求項1に記載の化学液体精製装置。
- 前記戻り管及び前記抽出管の接液面がフッ素樹脂で形成される請求項2に記載の化学液体精製装置。
- 前記濾過装置が少なくとも第1フィルタと第2フィルタを含み、前記第1フィルタが前記第2フィルタと前記通液口との間に配置され、前記第2フィルタが前記第1フィルタと前記循環口との間に配置される請求項1に記載の化学液体精製装置。
- 前記第1フィルタ及び前記第2フィルタは、100nm以下の孔径を有する請求項4に記載の化学液体精製装置。
- 前記第1フィルタの孔径がR1であり、前記第2フィルタの孔径がR2であり、且つR1≧R2である請求項5に記載の化学液体精製装置。
- 前記第1フィルタの孔径がR1であり、前記第2フィルタの孔径がR2であり、且つR1>R2である請求項5に記載の化学液体精製装置。
- 前記第1フィルタ及び前記第2フィルタがフッ素樹脂で形成される請求項4に記載の化学液体精製装置。
- 前記第1フィルタ及び前記第2フィルタが異なる材料で形成される請求項4に記載の化学液体精製装置。
- 前記タンク本体の接液面がフッ素樹脂で形成される請求項1に記載の化学液体精製装置。
- 前記送液ポンプが、遠心ポンプ、混合流ポンプ及び軸流ポンプからなる群から選択される非容積型ポンプである請求項1に記載の化学液体精製装置。
- 前記送液ポンプが遠心ポンプである請求項1に記載の化学液体精製装置。
- 前記配管の接液面が電解研磨されたステンレス鋼である請求項1に記載の化学液体精製装置。
- 前記タンク本体が可動型タンク本体である請求項1に記載の化学液体精製装置。
- 前記タンク本体がトラックのタンク本体である請求項14に記載の化学液体精製装置。
- 前記戻り管の長さと前記タンク本体の高さとの比が、1:10〜2:10の範囲である請求項1に記載の化学液体精製装置。
- 前記タンク本体が前記タンク本体の上部に配置されるマンホール及び空気穴を更に含む請求項1に記載の化学液体精製装置。
- 前記タンク本体の底部に取り付けられ、それぞれ前記タンク本体の前端及び後端に近接され、且つ地上で前記タンク本体を共同で支持するように構成される、支持体及びホイールセットを更に含む請求項1に記載の化学液体精製装置。
- 請求項1に記載の化学液体精製装置を使用する精製方法であって、
前記貯蔵空間の内部から前記通液口を経由して前記化学液体を抽出し、前記送液ポンプ及び前記濾過装置に前記配管を介して前記化学液体を通過させ、濾過された前記化学液体を、前記戻り管を介して前記貯蔵空間に戻すことによって、前記タンク本体の前記化学液体を精製することを含む精製方法。 - 前記タンク本体を、空気穴を介して窒素でパージし、正圧をかけながら前記化学液体を精製する請求項19に記載の精製方法。
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4390286A (en) * | 1981-07-29 | 1983-06-28 | Pietro Regaldo | Plant composed of multi-functional apparatus for delivering substances for treating roadways or the land, and which can be self-loaded from the ground on to the platform of a transporter vehicle, and vice versa |
JP2001205019A (ja) * | 2000-01-26 | 2001-07-31 | Sanetsu:Kk | 湿し水浄化システム用のバッグフィルター |
JP2002035517A (ja) * | 2000-07-28 | 2002-02-05 | Kawasaki Steel Corp | 金属粉除去方法 |
JP2002062667A (ja) * | 2000-08-23 | 2002-02-28 | Sumitomo Chem Co Ltd | 微粒子量の低減されたフォトレジスト組成物の製造方法 |
JP2016073922A (ja) * | 2014-10-07 | 2016-05-12 | 信越化学工業株式会社 | 有機溶剤の精製装置 |
JP2017013900A (ja) * | 2015-06-29 | 2017-01-19 | 台灣富士電子材料股▲ふん▼有限公司 | ローリーおよびローリータンク |
WO2017188209A1 (ja) * | 2016-04-28 | 2017-11-02 | 富士フイルム株式会社 | 精製装置、精製方法、製造装置、薬液の製造方法、容器、及び薬液収容体 |
WO2018043697A1 (ja) * | 2016-09-02 | 2018-03-08 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
WO2018051716A1 (ja) * | 2016-09-15 | 2018-03-22 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
WO2018142888A1 (ja) * | 2017-02-01 | 2018-08-09 | 富士フイルム株式会社 | 薬液の製造方法、及び、薬液の製造装置 |
WO2018180735A1 (ja) * | 2017-03-31 | 2018-10-04 | 富士フイルム株式会社 | 薬液の精製方法、薬液の製造方法、及び、薬液 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3080865B2 (ja) * | 1995-06-26 | 2000-08-28 | 神鋼パンテツク株式会社 | 水素・酸素発生装置 |
DE202006019301U1 (de) * | 2006-12-23 | 2008-04-30 | Mann+Hummel Gmbh | Kraftstofffilter |
FR2945080B1 (fr) | 2009-04-30 | 2016-05-06 | Filtrauto | Filtre a diffusion d'eau |
CN102908888B (zh) | 2012-10-18 | 2014-08-20 | 中国石油化工股份有限公司 | 硫化亚铁及含硫化氢气体清洗钝化装置、方法及应用 |
CN203469662U (zh) | 2013-09-30 | 2014-03-12 | 张家港浦项不锈钢有限公司 | 循环过滤系统 |
EP2883844B1 (de) * | 2013-12-12 | 2017-07-12 | EXERGENE Technologie GmbH | Verfahren zur energiesparung in einem system zur wasserbereitstellung |
WO2015168801A1 (en) * | 2014-05-08 | 2015-11-12 | Thetis Environmental Inc. | Closed loop membrane filtration system and filtration device |
TW201823879A (zh) * | 2016-11-07 | 2018-07-01 | 日商富士軟片股份有限公司 | 處理液及圖案形成方法 |
-
2019
- 2019-05-29 TW TW108118567A patent/TW202043179A/zh unknown
-
2020
- 2020-05-26 KR KR1020200063258A patent/KR102450525B1/ko active IP Right Grant
- 2020-05-27 US US16/885,245 patent/US11541335B2/en active Active
- 2020-05-27 JP JP2020091973A patent/JP2020192527A/ja active Pending
- 2020-05-27 CN CN202010460285.2A patent/CN112007418A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4390286A (en) * | 1981-07-29 | 1983-06-28 | Pietro Regaldo | Plant composed of multi-functional apparatus for delivering substances for treating roadways or the land, and which can be self-loaded from the ground on to the platform of a transporter vehicle, and vice versa |
JP2001205019A (ja) * | 2000-01-26 | 2001-07-31 | Sanetsu:Kk | 湿し水浄化システム用のバッグフィルター |
JP2002035517A (ja) * | 2000-07-28 | 2002-02-05 | Kawasaki Steel Corp | 金属粉除去方法 |
JP2002062667A (ja) * | 2000-08-23 | 2002-02-28 | Sumitomo Chem Co Ltd | 微粒子量の低減されたフォトレジスト組成物の製造方法 |
JP2016073922A (ja) * | 2014-10-07 | 2016-05-12 | 信越化学工業株式会社 | 有機溶剤の精製装置 |
JP2017013900A (ja) * | 2015-06-29 | 2017-01-19 | 台灣富士電子材料股▲ふん▼有限公司 | ローリーおよびローリータンク |
WO2017188209A1 (ja) * | 2016-04-28 | 2017-11-02 | 富士フイルム株式会社 | 精製装置、精製方法、製造装置、薬液の製造方法、容器、及び薬液収容体 |
WO2018043697A1 (ja) * | 2016-09-02 | 2018-03-08 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
WO2018051716A1 (ja) * | 2016-09-15 | 2018-03-22 | 富士フイルム株式会社 | 有機溶剤の精製方法および有機溶剤の精製装置 |
WO2018142888A1 (ja) * | 2017-02-01 | 2018-08-09 | 富士フイルム株式会社 | 薬液の製造方法、及び、薬液の製造装置 |
WO2018180735A1 (ja) * | 2017-03-31 | 2018-10-04 | 富士フイルム株式会社 | 薬液の精製方法、薬液の製造方法、及び、薬液 |
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