JP2020167405A - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP2020167405A
JP2020167405A JP2020051447A JP2020051447A JP2020167405A JP 2020167405 A JP2020167405 A JP 2020167405A JP 2020051447 A JP2020051447 A JP 2020051447A JP 2020051447 A JP2020051447 A JP 2020051447A JP 2020167405 A JP2020167405 A JP 2020167405A
Authority
JP
Japan
Prior art keywords
dielectric substrate
ceramic dielectric
bonding layer
base plate
electrostatic chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020051447A
Other languages
English (en)
Japanese (ja)
Inventor
大 籾山
Dai Momiyama
大 籾山
佐々木　均
Hitoshi Sasaki
均 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toto Ltd
Original Assignee
Toto Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=72717508&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2020167405(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toto Ltd filed Critical Toto Ltd
Publication of JP2020167405A publication Critical patent/JP2020167405A/ja
Priority to JP2021200294A priority Critical patent/JP7133766B2/ja
Priority to JP2022100807A priority patent/JP7140297B2/ja
Pending legal-status Critical Current

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ceramic Products (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Drying Of Semiconductors (AREA)
JP2020051447A 2019-03-28 2020-03-23 静電チャック Pending JP2020167405A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021200294A JP7133766B2 (ja) 2019-03-28 2021-12-09 静電チャック
JP2022100807A JP7140297B2 (ja) 2019-03-28 2022-06-23 静電チャック

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019062371 2019-03-28
JP2019062371 2019-03-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021200294A Division JP7133766B2 (ja) 2019-03-28 2021-12-09 静電チャック

Publications (1)

Publication Number Publication Date
JP2020167405A true JP2020167405A (ja) 2020-10-08

Family

ID=72717508

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2020051447A Pending JP2020167405A (ja) 2019-03-28 2020-03-23 静電チャック
JP2021200294A Active JP7133766B2 (ja) 2019-03-28 2021-12-09 静電チャック
JP2022100807A Active JP7140297B2 (ja) 2019-03-28 2022-06-23 静電チャック

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2021200294A Active JP7133766B2 (ja) 2019-03-28 2021-12-09 静電チャック
JP2022100807A Active JP7140297B2 (ja) 2019-03-28 2022-06-23 静電チャック

Country Status (1)

Country Link
JP (3) JP2020167405A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022115112A (ja) * 2021-01-28 2022-08-09 日本特殊陶業株式会社 接着用構造体および複合部材

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119585899A (zh) 2022-08-04 2025-03-07 住友电气工业株式会社 氧化还原液流电池

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04287344A (ja) * 1991-03-15 1992-10-12 Kyocera Corp 静電チャックの接合構造
JPH0786381A (ja) * 1993-06-28 1995-03-31 Tokyo Electron Ltd 静電チャック
JPH07183279A (ja) * 1993-12-24 1995-07-21 Tokyo Electron Ltd 処理装置
JP2012142413A (ja) * 2010-12-28 2012-07-26 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2014207374A (ja) * 2013-04-15 2014-10-30 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP2020023088A (ja) * 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4003932B2 (ja) 2002-03-07 2007-11-07 日本碍子株式会社 セラミックス−金属接合体
JP2017174853A (ja) * 2016-03-18 2017-09-28 日本特殊陶業株式会社 保持装置の製造方法
KR102427974B1 (ko) 2018-03-13 2022-08-02 엔지케이 인슐레이터 엘티디 웨이퍼 유지대

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04287344A (ja) * 1991-03-15 1992-10-12 Kyocera Corp 静電チャックの接合構造
JPH0786381A (ja) * 1993-06-28 1995-03-31 Tokyo Electron Ltd 静電チャック
JPH07183279A (ja) * 1993-12-24 1995-07-21 Tokyo Electron Ltd 処理装置
JP2012142413A (ja) * 2010-12-28 2012-07-26 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2014207374A (ja) * 2013-04-15 2014-10-30 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP2020023088A (ja) * 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022115112A (ja) * 2021-01-28 2022-08-09 日本特殊陶業株式会社 接着用構造体および複合部材
JP7441187B2 (ja) 2021-01-28 2024-02-29 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JP2022125091A (ja) 2022-08-26
JP2022036105A (ja) 2022-03-04
JP7133766B2 (ja) 2022-09-09
JP7140297B2 (ja) 2022-09-21

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