JP2020161451A5 - - Google Patents
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- Publication number
- JP2020161451A5 JP2020161451A5 JP2019062915A JP2019062915A JP2020161451A5 JP 2020161451 A5 JP2020161451 A5 JP 2020161451A5 JP 2019062915 A JP2019062915 A JP 2019062915A JP 2019062915 A JP2019062915 A JP 2019062915A JP 2020161451 A5 JP2020161451 A5 JP 2020161451A5
- Authority
- JP
- Japan
- Prior art keywords
- ion
- detection device
- negative
- conversion dynode
- ions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims 84
- 238000006243 chemical reaction Methods 0.000 claims 32
- 238000001514 detection method Methods 0.000 claims 27
- 238000005036 potential barrier Methods 0.000 claims 9
- 230000005596 ionic collisions Effects 0.000 claims 3
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 229910002601 GaN Inorganic materials 0.000 claims 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019062915A JP7217189B2 (ja) | 2019-03-28 | 2019-03-28 | イオン検出装置 |
| US17/433,133 US11955327B2 (en) | 2019-03-28 | 2020-01-22 | Ion detector |
| CN202080019870.7A CN113557587B (zh) | 2019-03-28 | 2020-01-22 | 离子检测装置 |
| PCT/JP2020/002073 WO2020195062A1 (ja) | 2019-03-28 | 2020-01-22 | イオン検出装置 |
| EP20778417.4A EP3951833B1 (en) | 2019-03-28 | 2020-01-22 | Ion detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019062915A JP7217189B2 (ja) | 2019-03-28 | 2019-03-28 | イオン検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020161451A JP2020161451A (ja) | 2020-10-01 |
| JP2020161451A5 true JP2020161451A5 (enExample) | 2021-12-09 |
| JP7217189B2 JP7217189B2 (ja) | 2023-02-02 |
Family
ID=72611760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019062915A Active JP7217189B2 (ja) | 2019-03-28 | 2019-03-28 | イオン検出装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11955327B2 (enExample) |
| EP (1) | EP3951833B1 (enExample) |
| JP (1) | JP7217189B2 (enExample) |
| CN (1) | CN113557587B (enExample) |
| WO (1) | WO2020195062A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201817145D0 (en) * | 2018-10-22 | 2018-12-05 | Micromass Ltd | ION Detector |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1171700A (en) * | 1967-10-31 | 1969-11-26 | Atomic Energy Authority Uk | Improvements in or relating to Ion Beam Intensity Measuring Apparatus and Methods |
| JPS5818542B2 (ja) | 1975-04-16 | 1983-04-13 | トキコ株式会社 | ユアツカンシヨウキ |
| JPH061260B2 (ja) * | 1983-12-30 | 1994-01-05 | 株式会社島津製作所 | 質量分析計 |
| GB8705289D0 (en) | 1987-03-06 | 1987-04-08 | Vg Instr Group | Mass spectrometer |
| JP2735222B2 (ja) * | 1988-06-01 | 1998-04-02 | 株式会社日立製作所 | 質量分析計 |
| FR2658361A1 (fr) * | 1990-02-14 | 1991-08-16 | Nermag Ste Nouvelle | Dispositif de detection et d'amplification de faibles courants ioniques positifs et negatifs. |
| JPH0580157A (ja) * | 1991-09-19 | 1993-04-02 | Murata Mfg Co Ltd | イオン検出装置 |
| JPH10154483A (ja) * | 1996-11-22 | 1998-06-09 | Shimadzu Corp | イオン検出器 |
| JP4231123B2 (ja) * | 1998-06-15 | 2009-02-25 | 浜松ホトニクス株式会社 | 電子管及び光電子増倍管 |
| JP3721833B2 (ja) * | 1999-03-12 | 2005-11-30 | 株式会社日立製作所 | 質量分析装置 |
| JP2001351566A (ja) * | 2000-06-08 | 2001-12-21 | Hamamatsu Photonics Kk | イオン検出器 |
| CN1307432C (zh) * | 2001-01-31 | 2007-03-28 | 滨松光子学株式会社 | 电子束检测器、扫描型电子显微镜、质量分析装置及离子检测器 |
| US7009187B2 (en) * | 2002-08-08 | 2006-03-07 | Fei Company | Particle detector suitable for detecting ions and electrons |
| US7728292B2 (en) | 2006-08-28 | 2010-06-01 | Ionics Mass Spectrometry Group Inc. | Method and apparatus for detecting positively charged and negatively charged ionized particles |
| US7855361B2 (en) | 2008-05-30 | 2010-12-21 | Varian, Inc. | Detection of positive and negative ions |
| JP5818542B2 (ja) | 2010-07-29 | 2015-11-18 | 浜松ホトニクス株式会社 | イオン検出装置 |
| JP5948053B2 (ja) * | 2011-12-26 | 2016-07-06 | 株式会社日立ハイテクノロジーズ | 質量分析装置及び質量分析方法 |
-
2019
- 2019-03-28 JP JP2019062915A patent/JP7217189B2/ja active Active
-
2020
- 2020-01-22 US US17/433,133 patent/US11955327B2/en active Active
- 2020-01-22 EP EP20778417.4A patent/EP3951833B1/en active Active
- 2020-01-22 WO PCT/JP2020/002073 patent/WO2020195062A1/ja not_active Ceased
- 2020-01-22 CN CN202080019870.7A patent/CN113557587B/zh active Active
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