CN113557587B - 离子检测装置 - Google Patents

离子检测装置 Download PDF

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Publication number
CN113557587B
CN113557587B CN202080019870.7A CN202080019870A CN113557587B CN 113557587 B CN113557587 B CN 113557587B CN 202080019870 A CN202080019870 A CN 202080019870A CN 113557587 B CN113557587 B CN 113557587B
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CN
China
Prior art keywords
ion
positive
scintillator
negative
conversion dynode
Prior art date
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Active
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CN202080019870.7A
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English (en)
Chinese (zh)
Other versions
CN113557587A (zh
Inventor
吉成清美
杉山益之
桥本雄一郎
今村伸
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Publication of CN113557587A publication Critical patent/CN113557587A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0095—Particular arrangements for generating, introducing or analyzing both positive and negative analyte ions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2018—Scintillation-photodiode combinations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/28—Measuring radiation intensity with secondary-emission detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electrochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN202080019870.7A 2019-03-28 2020-01-22 离子检测装置 Active CN113557587B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019062915A JP7217189B2 (ja) 2019-03-28 2019-03-28 イオン検出装置
JP2019-062915 2019-03-28
PCT/JP2020/002073 WO2020195062A1 (ja) 2019-03-28 2020-01-22 イオン検出装置

Publications (2)

Publication Number Publication Date
CN113557587A CN113557587A (zh) 2021-10-26
CN113557587B true CN113557587B (zh) 2024-06-11

Family

ID=72611760

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080019870.7A Active CN113557587B (zh) 2019-03-28 2020-01-22 离子检测装置

Country Status (5)

Country Link
US (1) US11955327B2 (enExample)
EP (1) EP3951833B1 (enExample)
JP (1) JP7217189B2 (enExample)
CN (1) CN113557587B (enExample)
WO (1) WO2020195062A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201817145D0 (en) * 2018-10-22 2018-12-05 Micromass Ltd ION Detector

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579270A (en) * 1967-10-31 1971-05-18 Atomic Energy Authority Uk Energy selective ion beam intensity measuring apparatus and method utilizing a scintillator to detect electrons generated by the beam
JPH0580157A (ja) * 1991-09-19 1993-04-02 Murata Mfg Co Ltd イオン検出装置
CN1305638A (zh) * 1998-06-15 2001-07-25 滨松光子学株式会社 电子管
JP2001351566A (ja) * 2000-06-08 2001-12-21 Hamamatsu Photonics Kk イオン検出器
CN102385064A (zh) * 2010-07-29 2012-03-21 浜松光子学株式会社 离子检测装置
CN103177928A (zh) * 2011-12-26 2013-06-26 株式会社日立高新技术 质量分析装置及质量分析方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818542B2 (ja) 1975-04-16 1983-04-13 トキコ株式会社 ユアツカンシヨウキ
JPH061260B2 (ja) * 1983-12-30 1994-01-05 株式会社島津製作所 質量分析計
GB8705289D0 (en) 1987-03-06 1987-04-08 Vg Instr Group Mass spectrometer
JP2735222B2 (ja) * 1988-06-01 1998-04-02 株式会社日立製作所 質量分析計
FR2658361A1 (fr) * 1990-02-14 1991-08-16 Nermag Ste Nouvelle Dispositif de detection et d'amplification de faibles courants ioniques positifs et negatifs.
JPH10154483A (ja) * 1996-11-22 1998-06-09 Shimadzu Corp イオン検出器
JP3721833B2 (ja) * 1999-03-12 2005-11-30 株式会社日立製作所 質量分析装置
CN1307432C (zh) * 2001-01-31 2007-03-28 滨松光子学株式会社 电子束检测器、扫描型电子显微镜、质量分析装置及离子检测器
US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons
US7728292B2 (en) 2006-08-28 2010-06-01 Ionics Mass Spectrometry Group Inc. Method and apparatus for detecting positively charged and negatively charged ionized particles
US7855361B2 (en) 2008-05-30 2010-12-21 Varian, Inc. Detection of positive and negative ions

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579270A (en) * 1967-10-31 1971-05-18 Atomic Energy Authority Uk Energy selective ion beam intensity measuring apparatus and method utilizing a scintillator to detect electrons generated by the beam
JPH0580157A (ja) * 1991-09-19 1993-04-02 Murata Mfg Co Ltd イオン検出装置
CN1305638A (zh) * 1998-06-15 2001-07-25 滨松光子学株式会社 电子管
JP2001351566A (ja) * 2000-06-08 2001-12-21 Hamamatsu Photonics Kk イオン検出器
CN102385064A (zh) * 2010-07-29 2012-03-21 浜松光子学株式会社 离子检测装置
CN103177928A (zh) * 2011-12-26 2013-06-26 株式会社日立高新技术 质量分析装置及质量分析方法

Also Published As

Publication number Publication date
US11955327B2 (en) 2024-04-09
WO2020195062A1 (ja) 2020-10-01
US20220181138A1 (en) 2022-06-09
EP3951833A1 (en) 2022-02-09
JP7217189B2 (ja) 2023-02-02
EP3951833A4 (en) 2023-01-04
JP2020161451A (ja) 2020-10-01
EP3951833B1 (en) 2024-03-13
CN113557587A (zh) 2021-10-26

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