JP2020160466A5 - - Google Patents
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- Publication number
- JP2020160466A5 JP2020160466A5 JP2020102605A JP2020102605A JP2020160466A5 JP 2020160466 A5 JP2020160466 A5 JP 2020160466A5 JP 2020102605 A JP2020102605 A JP 2020102605A JP 2020102605 A JP2020102605 A JP 2020102605A JP 2020160466 A5 JP2020160466 A5 JP 2020160466A5
- Authority
- JP
- Japan
- Prior art keywords
- sensitive adhesive
- pressure
- pellicle
- acrylic acid
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims 7
- 239000010410 layer Substances 0.000 claims 4
- 229920001577 copolymer Polymers 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 239000000178 monomer Substances 0.000 claims 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 125000000217 alkyl group Chemical group 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 150000001735 carboxylic acids Chemical class 0.000 claims 1
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 125000000524 functional group Chemical group 0.000 claims 1
- 230000009257 reactivity Effects 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020102605A JP2020160466A (ja) | 2020-06-12 | 2020-06-12 | ペリクル |
| JP2022035429A JP7274636B2 (ja) | 2020-06-12 | 2022-03-08 | ペリクル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020102605A JP2020160466A (ja) | 2020-06-12 | 2020-06-12 | ペリクル |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015221593A Division JP2017090719A (ja) | 2015-11-11 | 2015-11-11 | ペリクル |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022035429A Division JP7274636B2 (ja) | 2020-06-12 | 2022-03-08 | ペリクル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020160466A JP2020160466A (ja) | 2020-10-01 |
| JP2020160466A5 true JP2020160466A5 (enrdf_load_stackoverflow) | 2021-04-22 |
Family
ID=72643293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020102605A Pending JP2020160466A (ja) | 2020-06-12 | 2020-06-12 | ペリクル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2020160466A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI855515B (zh) | 2022-01-26 | 2024-09-11 | 日商三井化學股份有限公司 | 護膜 |
| WO2023149343A1 (ja) * | 2022-02-04 | 2023-08-10 | 三井化学株式会社 | ペリクル、露光原版、及び露光装置、並びにペリクルの作製方法、及びマスク用粘着剤層の試験方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008065258A (ja) * | 2006-09-11 | 2008-03-21 | Shin Etsu Chem Co Ltd | リソグラフィー用ペリクル |
| JP2008256925A (ja) * | 2007-04-04 | 2008-10-23 | Shin Etsu Chem Co Ltd | ペリクル |
| JP5101919B2 (ja) * | 2007-04-09 | 2012-12-19 | 日東電工株式会社 | 配線回路基板用両面粘着テープ又はシートおよび両面粘着テープ付き配線回路基板 |
| JP4931717B2 (ja) * | 2007-07-19 | 2012-05-16 | 信越化学工業株式会社 | リソグラフィー用ペリクルの製造方法 |
| WO2010026938A1 (ja) * | 2008-09-08 | 2010-03-11 | 電気化学工業株式会社 | 半導体製品の製造方法 |
| JP5570738B2 (ja) * | 2009-02-20 | 2014-08-13 | 積水化学工業株式会社 | 表面保護用粘着シート |
| JP2012093518A (ja) * | 2010-10-26 | 2012-05-17 | Asahi Kasei E-Materials Corp | ペリクル |
| JP5478463B2 (ja) * | 2010-11-17 | 2014-04-23 | 信越化学工業株式会社 | リソグラフィー用ペリクル |
| JP5411200B2 (ja) * | 2011-04-26 | 2014-02-12 | 信越化学工業株式会社 | リソグラフィ用ペリクル |
| JP6048203B2 (ja) * | 2013-02-19 | 2016-12-21 | 大日本印刷株式会社 | 粘着剤組成物 |
| JP5984187B2 (ja) * | 2013-04-22 | 2016-09-06 | 信越化学工業株式会社 | ペリクルとフォトマスクのアセンブリ |
| JP5999843B2 (ja) * | 2013-06-18 | 2016-09-28 | 信越化学工業株式会社 | リソグラフィ用ペリクルとその製造方法及び管理方法 |
| JP6430118B2 (ja) * | 2013-12-12 | 2018-11-28 | 旭化成株式会社 | ペリクル、ペリクル付フォトマスク及び半導体素子の製造方法 |
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2020
- 2020-06-12 JP JP2020102605A patent/JP2020160466A/ja active Pending