JP2020150053A - 基板処理装置及び半導体装置の製造方法、プログラム - Google Patents
基板処理装置及び半導体装置の製造方法、プログラム Download PDFInfo
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- JP2020150053A JP2020150053A JP2019044677A JP2019044677A JP2020150053A JP 2020150053 A JP2020150053 A JP 2020150053A JP 2019044677 A JP2019044677 A JP 2019044677A JP 2019044677 A JP2019044677 A JP 2019044677A JP 2020150053 A JP2020150053 A JP 2020150053A
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Classifications
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- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
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- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
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Abstract
Description
本実施形態に係る処理炉としてのリアクタの構成について、主に図1から図10を用いて説明する。図1は、本実施形態に係る基板処理装置としてのリアクタ200の横断面概略図である。図2は、本実施形態に係るリアクタ200の縦断面概略図であり、図1に示すリアクタのA−A’線断面図である。なお、A−A’線は、Aから容器203の中心を通ってA’に向かう線である。
図1および図2に示されているように、リアクタ200は、円筒状の気密容器である容器203を備えている。そのため、装置の容器を構成する材質としては、加工容易な金属が用いられる。また、300mm基板を周方向に配すると重量がかさむ為、それに耐えられるよう、回転トレーは金属で支持されている。例えば、ステンレス(SUS)やアルミ合金等で構成されている。容器203内には、基板Sを処理する処理室201が構成されている。容器203にはゲートバルブ205が接続されており、ゲートバルブ205を介して基板Sが搬入出される。
本実施形態では、コア部221の周囲に設けられた熱減衰部226、ヒータユニット281に設けられた熱減衰部293、295、296、窓285に設けられた熱減衰部297、石英カバー290に設けられた熱減衰部298が設けられる。
各熱減衰部は、石英部品に対して石英の微粒子を表面にコーティングしたカバーとして構成される。石英ガラスの微粒子をカバーとして付着させることで、微粒子間で散乱すると共に、それが乱反射するので、特に熱の反射性能が高い。
アルミ合金やステンレスは、多くの基板処理装置に用いられる材質であるが、これらの波長帯域では金属の吸収率が非常に高いことがわかる。
図2のEは図9のEと接続される。不活性ガス供給管275には、不活性ガス供給管271の下流端が接続されている。不活性ガス供給管271には、上流方向から順に、不活性ガス供給源272、MFC273、及びバルブ274が設けられている。不活性ガスは、MFC273、バルブ274、不活性ガス供給管275を介して、不活性ガス供給管271から空間284、容器204に供給される。
200:リアクタ、
206a:第1処理領域、
206b:第2処理領域、
217:基板載置プレート、
280:ヒータ、
226、293、295、296、297.298:熱減衰部、
300:コントローラ(制御部)
Claims (6)
- 基板を処理する処理室を有する金属製の容器と、
前記容器内で回転可能に設けられ、上面には複数の凹部が円周状に配される基板載置プレートと、
前記複数の凹部に載置された基板を加熱する加熱部と、
前記加熱部と前記容器との間に設けた熱減衰部と、
前記処理室にガスを供給するガス供給部と、
前記基板載置プレートを回転させる支持部と、
を有する基板処理装置。 - 前記容器の底部には、前記処理室と雰囲気が隔離され、金属壁と石英製の窓と前記加熱部とで構成されるヒータユニットが設けられ、
前記熱減衰部は、前記加熱部と前記金属壁との間に配される請求項1に記載の基板処理装置。 - 前記容器の底部には、金属製の排気構造と、前記排気構造に隣接する第一のカバーとが設けられ、
前記熱減衰部は前記第一のカバーのうち、前記排気構造と対向する側に設けられる請求項1または請求項2に記載の基板処理装置。 - 前記支持部は、
前記基板載置プレートを固定する金属製のコア部と、
前記コア部と前記処理室との間に配される第二のカバーとを有し、
前記熱減衰部は前記第二のカバーに設けられると共に、前記コア部と空間を介して隣接するよう構成される請求項1から請求項3のうち、いずれか一項に記載の基板処理装置。 - 基板を金属製の容器に設けられた処理室に搬送する工程と、
前記基板を、前記容器内で回転可能に設けられ、上面には複数の凹部が円周状に配される基板載置プレートに載置する工程と、
前記基板載置プレートを回転させつつ、ガス供給部が前記処理室にガスを供給すると共に、
加熱部から前記容器への熱エネルギーを前記容器と加熱部との間に設けた熱減衰部が減衰させつつ、前記加熱部が前記基板を加熱する工程と、
を有する半導体装置の製造方法。 - 基板を金属製の容器に設けられた処理室に搬送する手順と、
前記基板を、前記容器内で回転可能に設けられ、上面には複数の凹部が円周状に配される基板載置プレートに載置する手順と、
前記基板載置プレートを回転させつつ、ガス供給部が前記処理室にガスを供給すると共に、
加熱部から前記容器への熱エネルギーを前記容器と加熱部との間に設けた熱減衰部が減衰させつつ、前記加熱部が前記基板を加熱する手順と、
をコンピュータによって基板処理装置に実行させるプログラム。
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