JP2020122702A - 光学検査装置 - Google Patents
光学検査装置 Download PDFInfo
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- JP2020122702A JP2020122702A JP2019014268A JP2019014268A JP2020122702A JP 2020122702 A JP2020122702 A JP 2020122702A JP 2019014268 A JP2019014268 A JP 2019014268A JP 2019014268 A JP2019014268 A JP 2019014268A JP 2020122702 A JP2020122702 A JP 2020122702A
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- light guide
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- 238000007689 inspection Methods 0.000 title claims abstract description 200
- 230000003287 optical effect Effects 0.000 title claims abstract description 178
- 238000003384 imaging method Methods 0.000 claims abstract description 50
- 230000005540 biological transmission Effects 0.000 claims description 16
- 238000013459 approach Methods 0.000 claims description 4
- 238000009826 distribution Methods 0.000 description 66
- 238000004088 simulation Methods 0.000 description 27
- 239000000463 material Substances 0.000 description 26
- 239000000758 substrate Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
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- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
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- 238000001746 injection moulding Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
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- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 239000004065 semiconductor Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0096—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the lights guides being of the hollow type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
[第1実施形態]
導光体15の形状としては、長方形、正方形に限定されるものでなく、平行四辺形、その他、互いに辺の長さが異なる四角形であってもよい。
[第2の実施形態]
[第3の実施形態]
[第4の実施形態]
[比較例]
Claims (11)
- 検査対象と対向する撮像光学系と、
前記撮像光学系の光軸に沿って延びるとともに、複数の角部を有する多角形の筒状をなした導光体と、
前記複数の角部に対応する位置で前記導光体の端面に対向した複数の光源と、
前記導光体の前記端面に対向する第2端面に前記光軸に対して斜めに設けられ、前記光源から前記導光体内に入射された光を前記検査対象に向けて反射可能なミラー面と、
を備える光学検査装置。 - 前記ミラー面は、前記端面から遠ざかるにつれて、前記導光体の内面に近づくように斜めである請求項1に記載の光学検査装置。
- 前記導光体の内面で前記ミラー面と対向する位置に設けられる透過面と、
前記透過面から外れた位置で前記導光体の内面を覆った遮光板と、
を備える請求項1に記載の光学検査装置。 - 前記ミラー面は、前記導光体の前記検査対象側の端部と、前記導光体の外面と、が交差する位置にある稜線を除去するように面取りした面取り面で構成される請求項1に記載の光学検査装置。
- 前記ミラー面と前記光軸とがなす角度は、30〜70°である請求項1に記載の光学検査装置。
- 前記導光体から前記検査対象に向けて射出される光の前記検査対象の表面における入射角は、60〜80°である請求項1に記載の光学検査装置。
- 前記導光体の外側を覆うカバーを備える請求項1に記載の光学検査装置。
- 前記撮像光学系の光軸は、前記導光体の内側の中空領域内を通る請求項1に記載の光学検査装置。
- 前記導光体は、四角以上、八角以下の多角形である請求項1に記載の光学検査装置。
- 前記複数の光源は、前記撮像光学系の周囲に設けられる請求項1に記載の光学検査装置。
- 前記複数の光源と熱的に接続されたヒートシンクを備える請求項1に記載の光学検査装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014268A JP7224937B2 (ja) | 2019-01-30 | 2019-01-30 | 光学検査装置 |
US16/556,303 US10620389B1 (en) | 2019-01-30 | 2019-08-30 | Optical inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019014268A JP7224937B2 (ja) | 2019-01-30 | 2019-01-30 | 光学検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020122702A true JP2020122702A (ja) | 2020-08-13 |
JP7224937B2 JP7224937B2 (ja) | 2023-02-20 |
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JP2019014268A Active JP7224937B2 (ja) | 2019-01-30 | 2019-01-30 | 光学検査装置 |
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US (1) | US10620389B1 (ja) |
JP (1) | JP7224937B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6976914B2 (ja) * | 2018-09-14 | 2021-12-08 | 株式会社東芝 | 光学検査装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08235925A (ja) * | 1995-02-23 | 1996-09-13 | Techno Kapura:Kk | 照明装置およびそれを用いた電子部品等の組立・検査装置 |
JP2002214143A (ja) * | 2001-01-12 | 2002-07-31 | Ccs Inc | 検査用照明装置 |
JP2002310626A (ja) * | 2001-04-18 | 2002-10-23 | Omron Corp | 照明装置 |
JP2006047290A (ja) * | 2004-06-30 | 2006-02-16 | Omron Corp | 基板検査用の画像生成方法、基板検査装置、および基板検査用の照明装置 |
JP2008026854A (ja) * | 2006-03-02 | 2008-02-07 | Denso Corp | 表示装置 |
JP2018081134A (ja) * | 2016-11-14 | 2018-05-24 | オリンパス株式会社 | 顕微鏡装置、暗視野照明装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6219442B1 (en) * | 1996-10-08 | 2001-04-17 | International Business Machines Corporation | Apparatus and method for measuring distortion of a visible pattern on a substrate by viewing predetermined portions thereof |
FR2791819B1 (fr) * | 1999-03-30 | 2001-08-31 | Commissariat Energie Atomique | Module de pompage optique d'un laser, comprenant un reflecteur cylindrique a base polygonale |
JP2002328094A (ja) | 2001-05-02 | 2002-11-15 | Nidec Tosok Corp | Ledリング照明及びそれを備えた画像検査装置 |
JP2008209726A (ja) | 2007-02-27 | 2008-09-11 | Olympus Corp | 照明装置 |
US20100027293A1 (en) * | 2008-07-30 | 2010-02-04 | Intematix Corporation | Light Emitting Panel |
JP5394805B2 (ja) | 2009-04-17 | 2014-01-22 | 株式会社ミツトヨ | リング照明装置 |
JP2018048895A (ja) | 2016-09-21 | 2018-03-29 | キヤノン株式会社 | 画像検出装置及び造形装置 |
JP2018058667A (ja) | 2016-10-04 | 2018-04-12 | キヤノン・コンポーネンツ株式会社 | 搬送装置および記録装置 |
JP2018088613A (ja) | 2016-11-28 | 2018-06-07 | キヤノン株式会社 | 照明装置及びそれを備える画像読取装置 |
-
2019
- 2019-01-30 JP JP2019014268A patent/JP7224937B2/ja active Active
- 2019-08-30 US US16/556,303 patent/US10620389B1/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08235925A (ja) * | 1995-02-23 | 1996-09-13 | Techno Kapura:Kk | 照明装置およびそれを用いた電子部品等の組立・検査装置 |
JP2002214143A (ja) * | 2001-01-12 | 2002-07-31 | Ccs Inc | 検査用照明装置 |
JP2002310626A (ja) * | 2001-04-18 | 2002-10-23 | Omron Corp | 照明装置 |
JP2006047290A (ja) * | 2004-06-30 | 2006-02-16 | Omron Corp | 基板検査用の画像生成方法、基板検査装置、および基板検査用の照明装置 |
JP2008026854A (ja) * | 2006-03-02 | 2008-02-07 | Denso Corp | 表示装置 |
JP2018081134A (ja) * | 2016-11-14 | 2018-05-24 | オリンパス株式会社 | 顕微鏡装置、暗視野照明装置 |
Also Published As
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JP7224937B2 (ja) | 2023-02-20 |
US10620389B1 (en) | 2020-04-14 |
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