JP6976914B2 - 光学検査装置 - Google Patents
光学検査装置 Download PDFInfo
- Publication number
- JP6976914B2 JP6976914B2 JP2018173038A JP2018173038A JP6976914B2 JP 6976914 B2 JP6976914 B2 JP 6976914B2 JP 2018173038 A JP2018173038 A JP 2018173038A JP 2018173038 A JP2018173038 A JP 2018173038A JP 6976914 B2 JP6976914 B2 JP 6976914B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- light guide
- light sources
- guide body
- optical inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims description 159
- 238000007689 inspection Methods 0.000 title claims description 139
- 230000005540 biological transmission Effects 0.000 claims description 51
- 238000003384 imaging method Methods 0.000 claims description 31
- 238000009826 distribution Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 21
- 210000001747 pupil Anatomy 0.000 claims description 7
- 239000003086 colorant Substances 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims 1
- 239000000463 material Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- 238000004381 surface treatment Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 210000000887 face Anatomy 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000005488 sandblasting Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0045—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it by shaping at least a portion of the light guide
- G02B6/0046—Tapered light guide, e.g. wedge-shaped light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/005—Means for improving the coupling-out of light from the light guide provided by one optical element, or plurality thereof, placed on the light output side of the light guide
- G02B6/0055—Reflecting element, sheet or layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0066—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form characterised by the light source being coupled to the light guide
- G02B6/0068—Arrangements of plural sources, e.g. multi-colour light sources
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0081—Mechanical or electrical aspects of the light guide and light source in the lighting device peculiar to the adaptation to planar light guides, e.g. concerning packaging
- G02B6/0085—Means for removing heat created by the light source from the package
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
- G02B6/0015—Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/002—Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it by shaping at least a portion of the light guide, e.g. with collimating, focussing or diverging surfaces
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D2205/00—Coin testing devices
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D2207/00—Paper-money testing devices
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D5/00—Testing specially adapted to determine the identity or genuineness of coins, e.g. for segregating coins which are unacceptable or alien to a currency
- G07D5/005—Testing the surface pattern, e.g. relief
-
- G—PHYSICS
- G07—CHECKING-DEVICES
- G07D—HANDLING OF COINS OR VALUABLE PAPERS, e.g. TESTING, SORTING BY DENOMINATIONS, COUNTING, DISPENSING, CHANGING OR DEPOSITING
- G07D7/00—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency
- G07D7/06—Testing specially adapted to determine the identity or genuineness of valuable papers or for segregating those which are unacceptable, e.g. banknotes that are alien to a currency using wave or particle radiation
- G07D7/12—Visible light, infrared or ultraviolet radiation
- G07D7/121—Apparatus characterised by sensor details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
図1に本実施形態の光学検査装置11の斜視図を示し、図2に図1の光学検査装置11の光軸14を含む面で光学検査装置11を切断した断面図を示す。図1、図2に示すように、光学検査装置11は、検査対象23と対向する撮像光学系12と、撮像光学系12の周囲に設けられた1以上の光源13と、撮像光学系12の光軸14に沿って設けられた筒状の導光体15と、1以上の光源13が実装された基板16と、基板16に取り付けられたヒートシンク17と、を備える。
本変形例では、光学検査装置11において、複数の光源13の色が互いに異なっている。それ以外の点は、上記実施形態と共通している。
図6〜図8を参照して、第2実施形態の光学検査装置11について説明する。本実施形態では、導光体15の構成が異なっているが、他の部分は第1実施形態と共通している。
Claims (18)
- 検査対象と対向する撮像光学系と、
前記撮像光学系の周囲に設けられた1以上の光源と、
前記撮像光学系の光軸に沿って筒状に延びるとともに、その端面が前記1以上の光源と対向した導光体と、
前記導光体の内面に設けられ、前記端面から前記導光体内に入射された光を内部全反射させる全反射面と、
前記導光体の外面に設けられ、前記光源から前記導光体内に入射された光を前記検査対象に向けて反射するミラー面と、
前記導光体の内面に設けられ、前記ミラー面で反射された光を前記検査対象に向けて透過させる透過面と、
を備える光学検査装置。 - 前記全反射面は、前記透過面よりも前記光源に近い領域が存在する請求項1に記載の光学検査装置。
- 前記導光体の前記内面は、前記撮像光学系の視野範囲よりも外側に位置する請求項1〜3のいずれか1項に記載の光学検査装置。
- 前記導光体の前記内面と前記外面との間の厚み寸法は、前記撮像光学系から遠ざかるにつれて小さくなる請求項1〜4のいずれか1項に記載の光学検査装置。
- 前記1以上の光源は、前記光軸を中心とする1つの円周上に配置される請求項1〜5のいずれか1項に記載の光学検査装置。
- 前記導光体は、円筒形である請求項1〜6のいずれか1項に記載の光学検査装置。
- 前記導光体の前記内面の直径は、前記光源から遠ざかるにつれて大きくなる請求項1〜7のいずれか1項に記載の光学検査装置。
- 前記導光体の前記内面に沿うように、前記端面から前記1以上の光源に向けて突出するとともに、前記導光体と連続して設けられた筒状の導光凸部を備え、
前記導光凸部の厚み寸法は、前記内面と前記外面との間の厚み寸法よりも小さい請求項1〜8のいずれか1項に記載の光学検査装置。 - 前記導光体の前記ミラー面は、前記光軸から遠ざかる方向に凸になった円弧面である請求項1〜9のいずれか1項に記載の光学検査装置。
- 前記導光体の前記内面は、前記光軸に近づく方向に凸になった円弧面である請求項1〜10のいずれか1項に記載の光学検査装置。
- 前記導光体は、方形の筒状である請求項1〜6のいずれか1項に記載の光学検査装置。
- 前記ミラー面は、前記導光体の前記検査対象側の端部の外側に設けられた面取り部に設けられる請求項1〜6、請求項12のいずれか1項に記載の光学検査装置。
- 前記1以上の光源は、方形の筒状の前記導光体の角部に対応する位置に設けられる請求項12に記載の光学検査装置。
- 前記1以上の光源と熱的に接続されたヒートシンクを備える請求項1〜14のいずれか1項に記載の光学検査装置。
- 前記1以上の光源を実装した基板であって、前記撮像光学系を通すための貫通孔部を有する基板を備える請求項1〜15のいずれか1項に記載の光学検査装置。
- 前記1以上の光源は、互いに間隔を空けた複数であり、
前記複数の光源に含まれる光源同士は、互いに色が異なる請求項1〜16のいずれか1項に記載の光学検査装置。 - 前記1以上の光源は、互いに間隔を空けた複数であり、
前記複数の光源に含まれる光源は、互いに独立に点灯可能である請求項1〜17のいずれか1項に記載の光学検査装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018173038A JP6976914B2 (ja) | 2018-09-14 | 2018-09-14 | 光学検査装置 |
US16/288,301 US10901134B2 (en) | 2018-09-14 | 2019-02-28 | Optical inspection apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018173038A JP6976914B2 (ja) | 2018-09-14 | 2018-09-14 | 光学検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020046232A JP2020046232A (ja) | 2020-03-26 |
JP6976914B2 true JP6976914B2 (ja) | 2021-12-08 |
Family
ID=69773916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018173038A Active JP6976914B2 (ja) | 2018-09-14 | 2018-09-14 | 光学検査装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US10901134B2 (ja) |
JP (1) | JP6976914B2 (ja) |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4617619A (en) * | 1985-10-02 | 1986-10-14 | American Sterilizer Company | Reflector for multiple source lighting fixture |
US4706168A (en) * | 1985-11-15 | 1987-11-10 | View Engineering, Inc. | Systems and methods for illuminating objects for vision systems |
US4731649A (en) * | 1986-09-11 | 1988-03-15 | Vistech Corp. | Oblique illumination for video rim inspection |
EP0657732A1 (de) * | 1993-12-06 | 1995-06-14 | Elpatronic Ag | Verfahren und Vorrichtung zur optischen Prüfung eines durchsichtigen Behälterbereichs, insbesondere des Mündungsbereichs |
US5923419A (en) * | 1997-06-16 | 1999-07-13 | Insight Control Systems International | System and method for optical inspection of recessed surfaces |
US6788411B1 (en) * | 1999-07-08 | 2004-09-07 | Ppt Vision, Inc. | Method and apparatus for adjusting illumination angle |
JP2002328094A (ja) | 2001-05-02 | 2002-11-15 | Nidec Tosok Corp | Ledリング照明及びそれを備えた画像検査装置 |
US6614596B2 (en) * | 2001-07-25 | 2003-09-02 | Mitutoyo Corporation | Systems and methods for increasing illumination density within a field of view of an imaging system |
US20080024794A1 (en) * | 2004-06-04 | 2008-01-31 | Yoko Miyazaki | Semiconductor Surface Inspection Apparatus and Method of Illumination |
JP4468857B2 (ja) * | 2005-05-17 | 2010-05-26 | 株式会社小糸製作所 | 車両用照明灯具 |
JP2007263787A (ja) * | 2006-03-29 | 2007-10-11 | Nix Inc | リング状集中照射器具、および照射角度の調節装置 |
JP2008203093A (ja) * | 2007-02-20 | 2008-09-04 | Mitsutoyo Corp | 照明装置、画像測定装置 |
JP2008209726A (ja) | 2007-02-27 | 2008-09-11 | Olympus Corp | 照明装置 |
JP5394805B2 (ja) | 2009-04-17 | 2014-01-22 | 株式会社ミツトヨ | リング照明装置 |
IT1395546B1 (it) * | 2009-08-04 | 2012-09-28 | Sacmi | Apparato e metodo di ispezione di elementi concavi, come contenitori, tappi o simili. |
JP5565775B2 (ja) * | 2011-10-25 | 2014-08-06 | 株式会社栗原工業 | Led照明装置 |
JP5786068B2 (ja) * | 2014-06-10 | 2015-09-30 | スタンレー電気株式会社 | 車両用灯具ユニット |
ITUB20155377A1 (it) * | 2015-11-09 | 2017-05-09 | Rimsa P Longoni S R L | Lampada scialitica a led, particolarmente per sale operatorie e simili. |
JP7224937B2 (ja) * | 2019-01-30 | 2023-02-20 | 株式会社東芝 | 光学検査装置 |
-
2018
- 2018-09-14 JP JP2018173038A patent/JP6976914B2/ja active Active
-
2019
- 2019-02-28 US US16/288,301 patent/US10901134B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20200088933A1 (en) | 2020-03-19 |
JP2020046232A (ja) | 2020-03-26 |
US10901134B2 (en) | 2021-01-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10732102B2 (en) | Optical test apparatus and optical test method | |
KR101857539B1 (ko) | 검사용 조명 장치 및 검사 시스템 | |
JP5181321B2 (ja) | 光照射装置 | |
US11415510B2 (en) | Optical inspection apparatus | |
WO2019111426A1 (ja) | 検査システム及び検査方式 | |
JP5471477B2 (ja) | ネジ山の検査装置 | |
US20200182801A1 (en) | Lighting device and inspection apparatus | |
US20080062424A1 (en) | Compact Ringlight | |
TWI647465B (zh) | 光學檢測系統 | |
KR20140060946A (ko) | 전자재료 가공부위 측정용 조명장치 및 이를 적용한 검사 장치 | |
JP6976914B2 (ja) | 光学検査装置 | |
JP7224937B2 (ja) | 光学検査装置 | |
TWI400441B (zh) | 照明系統及用於提供一列光線之方法 | |
TWI825682B (zh) | 整合型光源裝置及其光學檢測系統 | |
JP2017003412A (ja) | レンズ検査装置及びレンズ検査方法 | |
JP6749084B2 (ja) | Led照明装置 | |
JP2006202665A (ja) | 光源装置 | |
TW202125034A (zh) | 光源裝置及光學檢測系統 | |
US20180329190A1 (en) | Multi-Stop Illuminator for Video Inspection System with Stepped Aperture Settings | |
JP7086780B2 (ja) | 光学素子、照明装置 | |
Dubovikov et al. | Features of the use of LEDs in artificial-vision systems | |
US11249028B2 (en) | Apparatus for inspecting object surface | |
JP6766825B2 (ja) | 測色装置 | |
JP4628256B2 (ja) | 透明体の内面検査方法 | |
CN117111319A (zh) | 一种平行光源装置及暗场检测系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200625 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210421 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210511 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210708 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211012 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211110 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 6976914 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |