JP2020119936A - コンデンサ - Google Patents
コンデンサ Download PDFInfo
- Publication number
- JP2020119936A JP2020119936A JP2019007776A JP2019007776A JP2020119936A JP 2020119936 A JP2020119936 A JP 2020119936A JP 2019007776 A JP2019007776 A JP 2019007776A JP 2019007776 A JP2019007776 A JP 2019007776A JP 2020119936 A JP2020119936 A JP 2020119936A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- main surface
- capacitor
- conductive
- conductive substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000003990 capacitor Substances 0.000 title claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 82
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 200
- 239000003054 catalyst Substances 0.000 description 39
- 238000000034 method Methods 0.000 description 28
- 238000005530 etching Methods 0.000 description 27
- 238000007747 plating Methods 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 16
- 229910000510 noble metal Inorganic materials 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 239000002245 particle Substances 0.000 description 15
- 230000008569 process Effects 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 229910010272 inorganic material Inorganic materials 0.000 description 5
- 239000011147 inorganic material Substances 0.000 description 5
- 150000003839 salts Chemical class 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000000693 micelle Substances 0.000 description 4
- 239000007800 oxidant agent Substances 0.000 description 4
- 230000001590 oxidative effect Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000004094 surface-active agent Substances 0.000 description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 3
- 239000006172 buffering agent Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 238000005121 nitriding Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- -1 HfSiON Inorganic materials 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 101710134784 Agnoprotein Proteins 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- JZCCFEFSEZPSOG-UHFFFAOYSA-L copper(II) sulfate pentahydrate Chemical compound O.O.O.O.O.[Cu+2].[O-]S([O-])(=O)=O JZCCFEFSEZPSOG-UHFFFAOYSA-L 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/92—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by patterning layers, e.g. by etching conductive layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/373—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate the capacitor extending under or around the transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Weting (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
図1は、第1実施形態に係るコンデンサを概略的に示す断面図である。図2は、図1に示すコンデンサの一部を拡大して示す断面図である。
第1主面S1には、図1及び図2に示すように、複数の凹部Rが設けられている。ここでは、これら凹部Rは、第1方向であるX方向に各々が延びた形状を有しているトレンチである。凹部Rは、図1に示すように、第2方向であるY方向に配列している。
第1電極70aは、第1主面S1と向き合い、導電層20bと電気的に接続されている。ここでは、第1電極70aは、導電層20b上に設けられている。また、第2電極70bは、第2主面S2上に設けられている。
図3は、図1に示すコンデンサの製造における一工程を概略的に示す断面図である。図4は、図1に示すコンデンサの製造における他の工程を概略的に示す断面図である。図5は、図4の工程によって得られる構造の一例を概略的に示す断面図である。図6は、図1に示すコンデンサの製造における更に他の工程を概略的に示す断面図である。図7は、図1に示すコンデンサの製造における更に他の工程を概略的に示す断面図である。図8は、図7の工程によって得られる構造の一例を概略的に示す断面図である。図9は、図1に示すコンデンサの製造における更に他の工程を概略的に示す断面図である。
即ち、先ず、図3に示すように、導電基板10の第1主面S1上に、第1貴金属を含んだ第1触媒層80aを形成する。第1触媒層80aは、それぞれ、第1主面S1を部分的に覆うように形成する。
第1マスク層90aは、凹部Rに対応した位置で開口している。第1マスク層90aは、第1主面S1のうち第1マスク層90aによって覆われた部分が、後述する第1貴金属と接触するのを防止する。
第1エッチング剤100aにおける弗化水素の濃度は、1mol/L乃至20mol/Lの範囲内にあることが好ましく、5mol/L乃至10mol/Lの範囲内にあることがより好ましい。弗化水素濃度が低い場合、高いエッチングレートを達成することが難しい。弗化水素濃度が高い場合、過剰なサイドエッチングを生じる可能性がある。
第1エッチング剤100aは、水などの他の成分を更に含んでいてもよい。
第1電極70a及び第2電極70bは、例えば、スパッタリング又はめっきにより形成することができる。
以上のようにして、図1に示すコンデンサ1を得る。
図11は、第2実施形態に係るコンデンサの一部を拡大して示す断面図である。第2実施形態に係るコンデンサは、以下の点を除き、第1実施形態に係るコンデンサ1と同様である。
Claims (8)
- 第1主面と第2主面とを有し、前記第1主面に複数の凹部が設けられ、前記複数の凹部の隣り合った2つによって各々が挟まれた1以上の部分に、前記第1主面側の領域が前記第2主面側の領域と比較してより大きな多孔度を有するように複数の孔が更に設けられた導電基板と、
前記第1主面と前記複数の凹部の側壁及び底面と前記複数の孔の壁面とを覆った導電層と、
前記導電基板と前記導電層との間に介在した誘電体層と
を備えたコンデンサ。 - 前記1以上の部分の各々には、前記第1主面側の領域にのみ前記孔が設けられている請求項1に記載のコンデンサ。
- 前記複数の凹部の各々はトレンチである請求項1又は2に記載のコンデンサ。
- 前記第1主面と向き合い、前記導電層と電気的に接続された第1電極と、
前記第2主面上に設けられた第2電極と
を更に備えた請求項1乃至3の何れか1項に記載のコンデンサ。 - 前記導電基板は、不純物がドープされたシリコン基板である請求項1乃至4の何れか1項に記載のコンデンサ。
- 前記誘電体層はシリコン酸化物層を含んだ請求項1乃至5の何れか1項に記載のコンデンサ。
- 前記導電層は、不純物がドープされたポリシリコン層を含んだ請求項1乃至6の何れか1項に記載のコンデンサ。
- 前記複数の孔の各々は、前記誘電体層と前記導電層とによって埋め込まれている請求項1乃至7の何れか1項に記載のコンデンサ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019007776A JP7027352B2 (ja) | 2019-01-21 | 2019-01-21 | コンデンサ |
US16/747,675 US11862667B2 (en) | 2019-01-21 | 2020-01-21 | Capacitor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019007776A JP7027352B2 (ja) | 2019-01-21 | 2019-01-21 | コンデンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020119936A true JP2020119936A (ja) | 2020-08-06 |
JP7027352B2 JP7027352B2 (ja) | 2022-03-01 |
Family
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Family Applications (1)
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JP2019007776A Active JP7027352B2 (ja) | 2019-01-21 | 2019-01-21 | コンデンサ |
Country Status (2)
Country | Link |
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US (1) | US11862667B2 (ja) |
JP (1) | JP7027352B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11901185B2 (en) | 2021-03-18 | 2024-02-13 | Kabushiki Kaisha Toshiba | Etching method |
Citations (5)
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US6020234A (en) * | 1998-03-05 | 2000-02-01 | Taiwan Semiconductor Manufacturing Company | Increasing capacitance for high density DRAM by microlithography patterning |
JP2001523050A (ja) * | 1997-11-12 | 2001-11-20 | エプコス アクチエンゲゼルシャフト | 少なくとも1つのコンデンサを有する回路構造およびその製造方法 |
US20030201479A1 (en) * | 2000-11-10 | 2003-10-30 | Albert Birner | Method for fabricating trench capacitors and semiconductor device with trench capacitors |
US20050269617A1 (en) * | 2002-09-16 | 2005-12-08 | Franz Hofmann | Semi-conductor component with condensators buried in the substrate and insulated component layer thereof |
JP2007095950A (ja) * | 2005-09-28 | 2007-04-12 | Denso Corp | 半導体装置及びその製造方法 |
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JPH05160342A (ja) | 1991-12-02 | 1993-06-25 | Canon Inc | 半導体装置及びその製造方法 |
JP2738256B2 (ja) | 1992-01-31 | 1998-04-08 | 日本電気株式会社 | 半導体装置およびその製造方法 |
US5508542A (en) * | 1994-10-28 | 1996-04-16 | International Business Machines Corporation | Porous silicon trench and capacitor structures |
KR20130042975A (ko) * | 2011-10-19 | 2013-04-29 | 삼성전자주식회사 | 작은 콘택을 갖는 비-휘발성 메모리소자 형성 방법 및 관련된 소자 |
KR102329363B1 (ko) | 2015-04-20 | 2021-11-19 | 보드 오브 레젼츠, 더 유니버시티 오브 텍사스 시스템 | 대면적 다단 나노구조의 제조 |
WO2019171470A1 (ja) | 2018-03-06 | 2019-09-12 | 株式会社 東芝 | コンデンサ及びその製造方法 |
US10461148B1 (en) * | 2018-05-31 | 2019-10-29 | International Business Machines Corporation | Multilayer buried metal-insultor-metal capacitor structures |
-
2019
- 2019-01-21 JP JP2019007776A patent/JP7027352B2/ja active Active
-
2020
- 2020-01-21 US US16/747,675 patent/US11862667B2/en active Active
Patent Citations (5)
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JP2001523050A (ja) * | 1997-11-12 | 2001-11-20 | エプコス アクチエンゲゼルシャフト | 少なくとも1つのコンデンサを有する回路構造およびその製造方法 |
US6020234A (en) * | 1998-03-05 | 2000-02-01 | Taiwan Semiconductor Manufacturing Company | Increasing capacitance for high density DRAM by microlithography patterning |
US20030201479A1 (en) * | 2000-11-10 | 2003-10-30 | Albert Birner | Method for fabricating trench capacitors and semiconductor device with trench capacitors |
US20050269617A1 (en) * | 2002-09-16 | 2005-12-08 | Franz Hofmann | Semi-conductor component with condensators buried in the substrate and insulated component layer thereof |
JP2007095950A (ja) * | 2005-09-28 | 2007-04-12 | Denso Corp | 半導体装置及びその製造方法 |
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US11901185B2 (en) | 2021-03-18 | 2024-02-13 | Kabushiki Kaisha Toshiba | Etching method |
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