JP2020098830A - SiCエピタキシャル成長装置 - Google Patents
SiCエピタキシャル成長装置 Download PDFInfo
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- 239000002994 raw material Substances 0.000 claims abstract description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 72
- 229910010271 silicon carbide Inorganic materials 0.000 description 70
- 235000012431 wafers Nutrition 0.000 description 42
- 239000007789 gas Substances 0.000 description 22
- 230000000052 comparative effect Effects 0.000 description 18
- 238000004088 simulation Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000005855 radiation Effects 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
すなわち、本発明は、上記課題を解決するため、以下の手段を提供する。
図1は、第1実施形態にかかるSiCエピタキシャル成長装置100の断面模式図である。図1は、SiCエピタキシャル膜を成膜するSiCウェハWを同時に図示している。SiCエピタキシャル成長装置100は、炉体10と載置台20とヒータ30とを有する。
炉体10は、天井部11とテーパー部12と側壁部13と底部14とを有する。炉体10は、内部に成膜空間Kを有する。
載置台20は、SiCウェハWが載置される載置面20aを有する。載置台20は、支持体21と支持軸22とを有する。支持体21は、SiCウェハWを支持する。支持軸22は、支持体21の中心から下方に延びる。支持軸22は、例えば、図示しない回転機構に連結される。支持体21は、回転機構によって支持軸22が回転することで回転可能となっている。支持体21の内部には、後述する第2ヒータ32が格納される。
ヒータ30は、第1ヒータ31と第2ヒータ32とを有する。第1ヒータ31は、側壁部13の外周を周方向に囲む。第1ヒータ31は、側壁部13に沿ってz方向に延びる。第1ヒータ31の上端31aは、天井部11及びテーパー部12より下方に位置する。第2ヒータ32は、支持体21の内部に格納される。第1ヒータ31及び第2ヒータ32は、公知の物を用いることができる。
図1と同様の構成のSiCエピタキシャル成長装置を用いてウェハ表面の温度を所定の温度にする際に、各部分における伝熱量をシミュレーションにより求めた。シミュレーションには、汎用FEM熱解析ソフトウエアANSYS Fluentを用いた。シミュレーションは、計算負荷を低減するために、中心軸を通る任意の断面の半分(径方向の半分)の構造のみで行った。図3は、実施例1のシミュレーション結果を示す図である。
側壁部13:0.8(SiCコート相当)
天井部11及びテーパー部12:0.2(TaCコート相当)
比較例1は、炉体の天井部11及びテーパー部12の放射率を0.8とした点のみが、実施例1と異なる。その他の条件は実施例1と同様とした。図4は、比較例1のシミュレーション結果を示す図である。比較例1における炉体の各部分の放射率は以下となる。
天井部11、テーパー部12および側壁部13:0.8(SiCコート相当)
比較例2は、炉体のテーパー部12の放射率を0.8とした点のみが、実施例1と異なる。その他の条件は実施例1と同様とした。図5は、比較例2のシミュレーション結果を示す図である。比較例2における炉体の各部分の放射率は以下となる。
側壁部13及びテーパー部12:0.8(SiCコート相当)
天井部11:0.2(TaCコート相当)
10A 供給口
10B 排気口
11 天井部
12 テーパー部
13 側壁部
13A 第1部分
13B 第2部分
13C 第3部分
14 底部
14A 孔部
11a、12a、13a 内面
11b、12b、13b 外面
20 載置台
21 支持体
22 支持軸
30 ヒータ
31 第1ヒータ
31a 上端
32 第2ヒータ
100 SiCエピタキシャル成長装置
W SiCウェハ
K 成膜空間
G 原料ガス
Claims (4)
- SiCウェハを載置する載置台と、
前記載置台を覆う炉体と、を備え、
前記炉体は、
側壁部と、
前記炉体内に原料ガスを供給する供給口を有し、前記供給口の周囲を覆い、前記載置台の上方に位置する天井部と、
前記天井部と前記側壁部とを繋ぐテーパー部と、を有し、
前記天井部及び前記テーパー部の内面の放射率は、前記側壁部の内面の放射率より低い、SiCエピタキシャル成長装置。 - 前記天井部及び前記テーパー部の内面は、TaCでコートされている、請求項1に記載のSiCエピタキシャル成長装置。
- 前記側壁部の内面は、SiCでコートされている、請求項1又は2に記載のSiCエピタキシャル成長装置。
- 前記載置台と前記天井部とを結ぶ仮想線を軸に、前記側壁部の外周を周方向に囲むヒータをさらに備え、
前記ヒータの上端は、前記天井部及び前記テーパー部より下方に位置する、請求項1から3のいずれか一項に記載のSiCエピタキシャル成長装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018235553A JP7242979B2 (ja) | 2018-12-17 | 2018-12-17 | SiCエピタキシャル成長装置 |
CN201911232930.9A CN111321464B (zh) | 2018-12-17 | 2019-12-05 | SiC外延生长装置 |
DE102019133899.9A DE102019133899A1 (de) | 2018-12-17 | 2019-12-11 | VORRICHTUNG ZUR CHEMISCHEN SiC-DAMPFPHASENABSCHEIDUNG |
US16/710,550 US20200190665A1 (en) | 2018-12-17 | 2019-12-11 | SiC CHEMICAL VAPOR DEPOSITION DEVICE |
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JP2018235553A JP7242979B2 (ja) | 2018-12-17 | 2018-12-17 | SiCエピタキシャル成長装置 |
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Publication Number | Publication Date |
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JP2020098830A true JP2020098830A (ja) | 2020-06-25 |
JP7242979B2 JP7242979B2 (ja) | 2023-03-22 |
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US (1) | US20200190665A1 (ja) |
JP (1) | JP7242979B2 (ja) |
CN (1) | CN111321464B (ja) |
DE (1) | DE102019133899A1 (ja) |
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CN116240519A (zh) * | 2022-12-28 | 2023-06-09 | 楚赟精工科技(上海)有限公司 | 气体喷淋头及气相反应装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004031846A (ja) * | 2002-06-28 | 2004-01-29 | Shin Etsu Handotai Co Ltd | 縦型熱処理装置 |
JP2006523777A (ja) * | 2003-04-16 | 2006-10-19 | クリー インコーポレイテッド | 堆積システムにおける堆積物の形成を制御するための方法および装置、ならびにそれらを含む堆積システムおよび方法 |
JP2007335604A (ja) * | 2006-06-14 | 2007-12-27 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2016117609A (ja) * | 2014-12-19 | 2016-06-30 | 昭和電工株式会社 | SiCエピタキシャルウェハの製造方法及びSiCエピタキシャル成長装置 |
Family Cites Families (6)
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GB2415707A (en) * | 2004-06-30 | 2006-01-04 | Arima Optoelectronic | Vertical hydride vapour phase epitaxy deposition using a homogenising diaphragm |
JP5238688B2 (ja) * | 2007-03-28 | 2013-07-17 | 東京エレクトロン株式会社 | Cvd成膜装置 |
US20080308036A1 (en) * | 2007-06-15 | 2008-12-18 | Hideki Ito | Vapor-phase growth apparatus and vapor-phase growth method |
KR20130044326A (ko) * | 2010-07-19 | 2013-05-02 | 알이씨 실리콘 인코포레이티드 | 다결정 실리콘 제조 |
CN104313682A (zh) * | 2014-11-17 | 2015-01-28 | 天津市环欧半导体材料技术有限公司 | 一种快速提高直拉硅单晶生长速度的热场结构 |
CN106894082B (zh) * | 2015-12-17 | 2019-04-19 | 上海超硅半导体有限公司 | 单晶硅生长炉 |
-
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- 2018-12-17 JP JP2018235553A patent/JP7242979B2/ja active Active
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- 2019-12-05 CN CN201911232930.9A patent/CN111321464B/zh active Active
- 2019-12-11 DE DE102019133899.9A patent/DE102019133899A1/de active Pending
- 2019-12-11 US US16/710,550 patent/US20200190665A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004031846A (ja) * | 2002-06-28 | 2004-01-29 | Shin Etsu Handotai Co Ltd | 縦型熱処理装置 |
JP2006523777A (ja) * | 2003-04-16 | 2006-10-19 | クリー インコーポレイテッド | 堆積システムにおける堆積物の形成を制御するための方法および装置、ならびにそれらを含む堆積システムおよび方法 |
JP2007335604A (ja) * | 2006-06-14 | 2007-12-27 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2016117609A (ja) * | 2014-12-19 | 2016-06-30 | 昭和電工株式会社 | SiCエピタキシャルウェハの製造方法及びSiCエピタキシャル成長装置 |
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DE102019133899A1 (de) | 2020-06-18 |
CN111321464A (zh) | 2020-06-23 |
JP7242979B2 (ja) | 2023-03-22 |
CN111321464B (zh) | 2022-09-13 |
US20200190665A1 (en) | 2020-06-18 |
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