JP2020082204A - Grinding device - Google Patents

Abstract

To provide a grinding device which prevents grinding dusts produced by grinding processing from attaching to a lateral plate or a top board of a processing chamber.SOLUTION: A grinding device 1 provided with a first processing chamber 30a in which a net N1 is arranged so as to be parallel to a lateral plate 37 at a predetermined interval from the lateral plate 37 is used. Thereby, upon rough grinding of a workpiece W, grinding water which passes through a grinding water path H from a grinding water supply means 80 and is supplied between a rough grinding grinding stone 201a and the workpiece W, when receiving a centrifugal force of the rotating rough grinding grinding stone 201a and being scattered in a direction of the lateral plate 37 together with grinding dusts produced by grinding, the grinding device receives the grinding water containing scattered grinding dusts with the net N1 to present the grinding dusts from attaching to the lateral plate 37.SELECTED DRAWING: Figure 2

Description

The present invention relates to a grinding device that grinds a workpiece.

In a grinding device, a grinding wheel in which a grinding wheel is annularly arranged is mounted on a spindle, the spindle is rotated by driving a motor, and the rotating grinding wheel is brought into contact with the workpiece to grind the workpiece. Is done. The contact between the grinding wheel and the workpiece is performed inside a processing chamber provided in the grinding device. At the time of grinding, grinding water is supplied between the grinding wheel and the work piece, but the supply of grinding water is for the purpose of removing the grinding heat generated during grinding and also for processing the grinding dust generated during grinding. It is carried out for the purpose of removing from things.

The grinding water supplied between the grinding wheel and the workpiece during grinding scatters together with grinding dust due to the centrifugal force of the rotating grinding wheel, and adheres to the side plate, top plate, etc. inside the processing chamber. In order to clean the grinding dust adhering to the side plate and top plate of the processing chamber, after finishing the grinding process, while supplying the grinding water to the rotating grinding wheel while separating the grinding wheel upward from the work piece, The grinding dust and the like adhering to the top plate of the chamber is washed away (see Patent Documents 1 and 2). The grinding water containing the flushed grinding dust is removed to the outside of the grinding device as a grinding waste liquid.

Patent No. 6353684 Patent No. 6129022

If the side plates or the top plate of the processing chamber to which the grinding dust adheres is insufficiently washed with running water, the processing waste liquid adhering to the side plate or the top plate will dry and the grinding chips will solidify over time. For example, when the top plate of the processing chamber is opened for maintenance work such as exchanging the grinding wheel, the vibration of the top plate causes the grinding dust solidified on the top plate of the processing chamber to become dust and scatter inside and outside the grinding machine. However, the grinding device becomes a pollution source that pollutes the clean room. In addition, the top plate cannot be opened due to the grinding waste solidified by the processing waste liquid that has entered the gaps between the top plate and the hinges that open and close the top plate, which may cause equipment failure and reduced processing efficiency. Invite. The problem to be solved by the present invention is to prevent the grinding water containing the grinding dust scattered by the centrifugal force of the grinding wheel rotating during grinding from adhering to the side plate, the top plate or the like in the processing chamber.

The present invention grounds a workpiece held by the holding means by holding a holding means for holding the workpiece and a grinding wheel in which a grinding wheel is annularly arranged on a spindle and rotating the grinding wheel. Grinding means, a grinding feed means for moving the grinding means toward and away from the holding means in a direction perpendicular to the holding means, a grinding water supply means for supplying grinding water to the grinding wheel, and a workpiece held by the holding means. What is claimed is: 1. A grinding apparatus, comprising: a processing chamber that accommodates an object and the grinding wheel; the processing chamber includes a bottom plate that surrounds the holding means from below, and a ceiling that faces the bottom plate and surrounds the grinding wheel from above. A side plate that surrounds the plate, the holding means and the grinding means from the side and connects the bottom plate and the top plate, and is provided inside the inner surface of the side plate with a predetermined gap from the side plate. A net for receiving the grinding water that has received the centrifugal force due to the high-speed rotation of the grinding wheel, and when the grinding wheel is grinding an object to be processed, the grinding water that scatters in the state that the grinding chips are included is scattered. A grinding device that receives the wastewater with the net and guides it to drainage, and when the grinding wheel is separated from the workpiece, cleans the net with grinding water that is supplied to the grinding wheel and scatters without containing grinding debris. Is.

In the above grinding apparatus, it is desirable to include a top plate net which is arranged below the top plate with a predetermined gap therebetween and receives grinding water.

In the above grinding apparatus, a second top plate is provided below the top plate with a predetermined gap from the top plate and surrounds the grinding means. It is desirable to arrange the net so as to hang down and guide the grinding water to the net by the second top plate.

In the present invention, the scattered grinding water is received by the net provided inside the inner surface of the side plate of the processing chamber, so that the grinding water containing grinding dust hits the side plate and is scattered to adhere to the wall surface of the top plate or the like in the processing chamber. Can be prevented. In addition, by flushing the grinding dust attached to the net with the grinding water that does not contain the grinding dust, it is possible to wash the grinding dust more easily than washing the grinding dust attached to the side plate and the like.

Further, by disposing the top net under the top of the processing chamber at a predetermined distance from the top, it is possible to more reliably prevent grinding dust from adhering to the top. ..

Then, a second top plate surrounding the grinding means is arranged below the top plate at a predetermined interval, and a net is hung from the second top plate to arrange the second top plate. It is possible to receive the grinding water, prevent the grinding water from adhering to the top plate, and guide the received grinding water to the net.

It is a perspective view showing the whole grinding device. It is a sectional view showing a processing chamber at the time of grinding. It is a sectional view showing a processing room at the time of net cleaning. It is sectional drawing showing the processing chamber provided with the top plate net under the top plate of a processing chamber. FIG. 6 is a cross-sectional view showing a processing chamber in which a second top plate is provided below the top plate of the processing chamber, and a net is arranged on the second top plate.

1 Configuration of Grinding Device The grinding device 1 shown in FIG. 1 is, for example, a processing device that grinds a workpiece W such as a semiconductor wafer. The grinding device 1 includes a base 2 and a column 3, the base 2 is extended in the X-axis direction, and the column 3 is erected on the −X side above the base 2.

A loading/unloading means 40 is disposed on the front side (+X side) of the base 2 of the grinding device 1. In the vicinity of the carry-in/out means 40, there are provided a first cassette 41 in which the workpiece W before grinding is stored and a second cassette 46 in which the workpiece W after grinding is stored. .. The workpiece W before being ground is pulled out from the first cassette 41 by the loading/unloading means 40, and the workpiece W that has been cleaned after being ground is loaded into the second cassette 41 by the loading/unloading means 40. It will be stored in the cassette 46.

A positioning unit 43 is provided near the loading/unloading unit 40. The alignment means 43 includes a temporary placement area 430 on which the workpiece W is placed and an alignment pin 431. The workpiece W placed on the temporary placement area 430 has a plurality of alignment pins 431. After being properly aligned by, the temporary placement area 430 is held by the loading means 44 and moved to an area for grinding.

A rear side (−X side) of the base 2 of the grinding apparatus 1 is provided with a substantially disc-shaped turntable 103, and the turntable 103 rotatably supports a plurality of holding means 100. The turntable 103 is rotatable about a rotary shaft 105 in the Z-axis direction. When the turntable 103 is rotated, the holding means 100 is revolved, and the holding means is moved to a rough grinding area, a finish grinding area, and carrying in/out. Can be located in the area.

The holding unit 100 includes a suction unit 101 and a frame body 102 surrounding the suction unit 101. The holding unit 100 causes the holding surface 101a of the suction unit 101 to communicate with a suction source (not shown) and sucks and holds the workpiece W by the holding surface 101a. The holding means 100 can rotate about a Z-axis rotating shaft 104 as an axis by a rotating means (not shown).

Behind the base 2 (-X side) of the grinding device 1 is provided a first grinding means 20a for rough grinding. At the lower end of the grinding wheel 200 provided in the first grinding means 20a, a rough grinding wheel 201a shown in FIG. 2 is annularly arranged. Further, the first grinding means 20a is provided with a motor 21, a spindle 22 that is rotated by the drive of the motor 21, and a mount 24 attached to the spindle 22. The grinding wheel 200 is mounted on the mount 24, and the motor 21 is driven to rotate the spindle 22 so that the grinding wheel 200 can be rotated.

As shown in FIG. 1, a second grinding means 20b for finish grinding is arranged behind (on the -X side) the base 2 of the grinding device 1. A substantially rectangular parallelepiped finish grinding wheel 201b shown in FIG. 2 is fixed to the lower end of the grinding wheel 200 included in the second grinding means 20b. The configuration of the second grinding means 20b is the same as that of the first grinding means 20a except for the type of grinding wheel provided at the lower end of the grinding wheel 200, and the same components are denoted by common reference numerals and the description thereof is omitted. Is omitted. In FIG. 1, the second grinding means 20b is arranged to the left of the first grinding means 20a, but the first grinding means 20a and the second grinding means 20b are in the positional relationship shown in FIG. However, the positions of the first grinding means 20a and the second grinding means 20b are not limited to the above, but the positions of the first grinding means 20a and the second grinding means 20b are changed by replacing the respective grinding wheels 200 provided in the first grinding means 20a and the second grinding means 20b. Can be replaced.

As shown in FIG. 1, the grinding device 1 includes two grinding feed means 60. The two grinding feed means 60 are arranged in parallel on the side surface of the column 3, respectively. The grinding feed means 60 includes a ball screw 63 having an axis in the Z-axis direction, a pair of guide rails 64 arranged in parallel with the ball screw 63, a motor 61 connected to the upper end of the ball screw 63, and a guide rail. An elevating plate 65, which is in sliding contact with 64 and has an internal nut structure screwed into the ball screw 63, and a holder 66 connected to the elevating plate 65. The holders 66 included in the two grinding feed means 60 respectively support the first grinding means 20a and the second grinding means 20b, and the two grinding feed means 60 respectively include the first grinding means 20a and the second grinding means 20a. The grinding means 20b can be moved toward and away from the workpiece W.

For example, in the grinding feed unit 60 that feeds the first grinding unit 20a by grinding, the motor 61 rotates the ball screw 63, and the lift plate 65 and the holder 66 are guided by the guide rails 64 to move up and down, and then the lift plate 65. Also, as the holder 66 moves up and down, the first grinding means 20a supported by the holder 66 also moves up and down, so that the first grinding means 20a moves toward and away from the holding means 100.

The grinding feed means 60 for feeding the second grinding means 20b by grinding has the same structure.

A cleaning unit 90 is disposed in front of the base 2 of the grinding device 1 (on the +X side). The workpiece W that has undergone the grinding process is held by the unloading means 45, moved from the holding means 100 to the cleaning region 900, and cleaned by the cleaning means 90.

The grinding device 1 includes a control unit 70. The control means 70 has a role of controlling the device mechanism in each step of the grinding process.

A first processing chamber 30a and a second processing chamber 30b are provided behind (on the -X side of) the base 2 of the grinding device 1. The first processing chamber 30a is a region for performing the rough grinding by bringing the first grinding means 20a and the workpiece W into contact with each other at the time of rough grinding, and similarly, the second processing chamber 30b is provided at the time of finish grinding. 2 This is an area for finishing grinding by bringing the grinding means 20b and the workpiece W into contact with each other. The first processing chamber 30a and the second processing chamber 30b are separated by a partition plate 32. Below the partition plate 32, there is a gap for passing the holding means 100 and the workpiece W held by the holding means 100 from the first processing chamber 30a to the second processing chamber 30b by the rotation of the turntable 103. I am open.

The first processing chamber 30a shown in FIG. 2 includes a bottom plate 38 that surrounds the holding means 10 from below. A grinding waste liquid containing grinding water and grinding dust generated by rough grinding is guided from the bottom plate 38 to the drain port 39 by the inclination provided on the bottom plate 38, and flows out of the grinding device 1 from the drain port 39. ..

Further, the first processing chamber 30a includes a top plate 33 that faces the bottom plate 38 and surrounds the first grinding means 20a from above, and the top plate 33 includes an opening/closing part 330 and a fixing part 331. The fixing portion 331 is connected to the holder 66 via the bellows 36, and the opening/closing portion 330 is connected to the side plate 37 by the hinge 35. The side plate 37 surrounds the holding means 10 and the first grinding means 20a from the side, and connects the bottom plate 38 and the top plate 33.

For example, when performing maintenance or the like inside the first processing chamber 30a, for example, an operator or the like holds and pulls up the handle 332 attached to the opening/closing portion 330 of the top plate 33, so that the opening/closing portion 330 of the top plate 33. Lifts while rotating around the hinge 35, and the upper surface of the first processing chamber 30a can be released.

Inside the first processing chamber 30a, a net N1 is arranged so as to be parallel to the side plate 37 at a predetermined distance from the side plate 37. The net N1 can receive the grinding water scattered in the direction of the side plate 37 by receiving the centrifugal force of the rough grinding wheel 201a rotating at a high speed. The received grinding water flows down to the bottom plate 38, is guided to the drain port 39 by the inclination of the bottom plate 38, and flows out of the grinding device 1 from the drain port 39.

The second processing chamber 30b also has the same configuration as the first processing chamber 30a described above, and thus is denoted by the same reference numeral and description thereof will be omitted.

The grinding device 1 includes two grinding water supply means 80. The two grinding water supply means 80 are provided in the first grinding means 20a and the second grinding means 20b, respectively. Inside the mount 24, a mount water channel 24H that communicates with the water channel H and opens at the lower surface is formed. Further, the grinding wheel 200 is formed with a wheel water passage 20H which is in communication with the mount water passage 24H and whose lower portion is opened.

2 Grinding machine operation (positioning)
The operation of the grinding device 1 when the workpiece W is ground by using the grinding device 1 having the above configuration will be described. First, the workpiece W before grinding, which is stored in advance in the first cassette 41 shown in FIG. 1, is carried out by the carry-in/carry-out means 40 and placed in the temporary placement area 430 of the alignment means 43. Then, the alignment is performed by the plurality of alignment pins 431.

(Retention)
After the alignment is completed, the workpiece W placed on the temporary placement area 430 is held by the loading unit 44 and placed on the holding surface 101a of the suction unit 101 of the holding unit 100. The workpiece W placed on the holding surface 100a is suction-held, for example, by suction means (not shown) below the holding means 100.

(Rough grinding)
After the workpiece W is placed on the holding surface 101a of the suction unit 101 of the holding means 100, the turntable 103 is rotated counterclockwise by a predetermined angle when viewed from the +Z direction with the Z-axis rotating shaft 105 as an axis. Just rotate. As a result, the holding means 100 holding the workpiece W is revolved by a predetermined angle to move into the inside of the first processing chamber 30a, and is positioned below the grinding wheel 200 of the first grinding means 20a. ..

Then, by driving the motor 21 of the first grinding means 20a, the spindle 22 is rotated about the rotary shaft 23 in the Z-axis direction. The grinding wheel 200 rotates as the spindle 22 rotates. Further, the workpiece W is rotated around the rotation axis 104 by rotating the holding means 100 around the rotation axis 104 in the Z-axis direction by a rotation means (not shown) arranged below the holding means 100.

While supplying the grinding water between the rough grinding wheel 201a and the workpiece W by the grinding water supply means 80 shown in FIG. 2, the lifting plate 65 was lowered in the −Z direction and connected to the lifting plate 65. By lowering the grinding wheel 200 of the first grinding means 20a supported by the holder 66 in the −Z direction, the rough grinding wheel 201a provided at the lower end of the rotating grinding wheel 200 is moved to the workpiece W that also rotates. And the workpiece W is roughly ground.

During the rough grinding, the grinding water supplied from the grinding water supply means 80 enters the inside of the first grinding means 20a from above the motor 21 of the first grinding means 20a, and the grinding water channel H inside the first grinding means 20a. , Is ejected through the mount water passage 24H and the wheel water passage 20H, and is supplied between the rough grinding wheel 201a and the workpiece W. The grinding water supplied between the rough grinding wheel 201a and the workpiece W is the centrifugal force of the rotating rough grinding wheel 201a together with the grinding dust generated between the rough grinding wheel 201a and the workpiece W by the rough grinding. Thus, for example, the particles are scattered toward the side plate 37 of the first processing chamber 30a. The water droplet La of the grinding water containing the scattered grinding dust is received by the net N1 arranged near the side plate 37 of the first processing chamber 30a. After that, the grinding water containing the grinding dust received by the net N1 flows down to the bottom plate 38 of the first processing chamber 30a, is guided toward the drainage port 39 according to the inclination of the bottom plate 38, and is discharged from the drainage port 39 to the grinding device 1. Flows out of.

(Net cleaning)
After the completion of the rough grinding, as shown in FIG. 3, the lifting plate 65 of the grinding feed means 60 is raised in the +Z direction to raise the rotating rough grinding wheel 201a in the +Z direction and hold the rough grinding wheel 201a. The workpiece W placed on 100 is separated from the workpiece W. While the rough grinding wheel 201a is separated from the workpiece W, the grinding water continuously supplied from the grinding water supply means 80 to the rough grinding wheel 201a does not include grinding debris due to the centrifugal force of the rotating rough grinding wheel 201a. Grinding dust and the like scattered and attached to the net N1 inside the first processing chamber 30a are washed away. Even after the rough grinding wheel 201a returns to the predetermined height position and the ascending movement of the grinding feed means 60 is stopped, the grinding water supply means 80 causes the rough grinding wheel to be sufficiently removed until the grinding dust adhering to the net N1 is sufficiently removed. While continuing to appropriately feed the grinding water between 201a and the workpiece W, the centrifugal force of the rotating rough grinding wheel 201a scatters the water droplet L of the grinding water toward the net N1 to wash the net N1 with running water.

(Finish grinding)
After the net cleaning, the turntable 103 is rotated counterclockwise by a predetermined angle when viewed from the +Z direction around the rotary shaft 105 as an axis, and the holding means 100 is revolved to hold the workpiece W. Is moved to the inside of the second processing chamber 30b and is positioned below the grinding wheel 200 of the second grinding means 20b.

After positioning the holding means 100 below the grinding wheel 200 of the second grinding means 20b, the same grinding as the rough grinding is performed. However, the grindstone used in the finish grinding is the finish grinding grindstone 201b having finer abrasive grains than the coarse grinding grindstone 201a used in the rough grinding. Further, since the finish grinding has the purpose of shaping the ground surface formed during the rough grinding, for example, the grinding feed speed (-Z There is a feature that the descent speed in the direction) is slow.

The water droplet La containing the grinding dust scattered by the finishing grinding wheel 201b rotating during the finishing grinding is received by the net N1 as in the rough grinding. After finishing grinding is finished, the lifting plate 65 of the grinding feed means 60 is raised in the +Z direction to separate the finishing grinding wheel 201b from the workpiece W. Then, the same net cleaning as the above-described net cleaning performed after the rough grinding is performed.

At the time of rough grinding, finish grinding, or net cleaning after the grinding, the grinding water scattered from the rotating grinding wheel may be scattered not only toward the side plate 37 but also toward the top plate 33. Further, there is a possibility that the grinding water, which has been scattered in the direction of the side plate 37 but not received by the net N1, hits the net N1 and is scattered in the direction of the top plate 33.

Therefore, as shown in FIG. 4, for example, in the first processing chamber 30a and the second processing chamber 30b, the top plate net N2 is disposed below the top plate 33 with a predetermined gap from the top plate 33. May be. A water droplet La of grinding water containing grinding dust and a water droplet L of grinding water containing no grinding dust that is scattered during net cleaning are scattered not only in the direction of the side plate 37 but also in the direction of the top plate 33. However, since the grinding water scattered from the rotating rough grinding wheel 201a toward the top plate 33 can be received by the top plate net N2, the scattered grinding water is more reliably prevented from adhering to the top plate 33. be able to. Similarly, if the top plate net N2 is arranged below the top plate 33 of the second processing chamber 30b at a predetermined interval, the grinding water adheres to the top plate 33 of the second processing chamber 30b. Can be prevented.

As shown in FIG. 5, a second top plate 34 is arranged below the top plate 33 of the first processing chamber 30a with a predetermined space, and the net N1 is provided from the second top plate 34 to the side plate. Alternatively, the net N1 may be arranged in parallel with 37. In this case, the grinding water scattered by the centrifugal force of the rotating rough grinding wheel 201a and attached to the second top plate 34 is transmitted to the net N1 and flows from the net N1 to the bottom plate 38. Next, the grinding water carried to the bottom plate 38 is guided by the inclination of the bottom plate 38 and flows out of the grinding device 1 through the drainage port 39. By disposing the second top plate 34, it is possible to prevent grinding dust from adhering to the top plate 33 and the side plates 37.

At this time, if the second top plate 34 is provided with an inclination so as to be lowered toward the net N1, the grinding water attached to the second top plate 34 will flow toward the net N1 more efficiently. .. Even when the second top plate 34 is arranged below the top plate 33 of the second processing chamber 30b, it is possible to prevent the grinding water from adhering to the top plate 33 by the same configuration as described above.

According to the present invention, for example, regarding the first processing chamber 30a, if it is possible to prevent the grinding dust from solidifying on the wall surfaces of the top plate 33, the side plate 37, etc. of the first processing chamber 30a, for example, the first processing chamber by an operator or the like. During maintenance of the inside of 30a, when an operator or the like holds the handle 332 of the top plate 33 of the processing chamber 30 and lifts the opening/closing portion 330 to release the upper surface of the first processing chamber 30a, dust of grinding dust causes the first processing. It is possible to prevent scattering inside and outside the chamber 30a. Also in the second processing chamber 30b, it is possible to prevent the grinding dust from solidifying on the wall surfaces of the top plate 33, the side plate 37, and the like.

Further, by preventing the grinding dust from solidifying on the top plate 33, it is possible to prevent the top plate 33 from being opened/closed poorly and to improve the efficiency of the maintenance work.

The grinding apparatus 1 according to the present invention may be a so-called twin-screw machine including the first grinding means 20a and the second grinding means 20b for performing the two grinding steps of the above-described rough grinding and finish grinding. Alternatively, for example, a uniaxial machine that grinds to a finished thickness with one kind of grinding wheel may be used.

Further, the grinding apparatus 1 according to the present invention may be, for example, a processing apparatus that includes a polishing means (not shown) on the base 2 and can perform grinding and polishing continuously in the same apparatus.
In addition, when the scattered water droplet La may pass through the net N1, the water droplet La that has passed through the net N1 hits the side plate and is further scattered and decelerated, and the net N1 can catch the scattered and decelerated water droplet La. Also, a plurality of nets N1 may be arranged with a gap.
Further, the top plate net N2 arranged with a gap on the top plate does not have to be arranged in parallel to the top plate, but is inclined and the grinding water La, L adhering to the top plate net N2 is lifted by its own weight. You may make it drain from the board net N2.

1: Grinding device 2: Base 3: Column 10: Holding means 100: Holding means 101: Suction part 101a: Holding surface Frame body: 102 103: Turntable 104: Rotating shaft of holding means 105: Rotating shaft of turntable 20a: 1st grinding means 20b: 2nd grinding means 200: Grinding wheel 201a: Coarse grinding wheel 201b: Finishing grinding wheel 21: Motor 22: Spindle 23: Rotating shaft 30a: 1st processing chamber 30b: 2nd processing chamber
33: Top plate 330: Opening/closing part 331: Fixed part 332: Handle 34: Second top plate 35: Hinges 36: Bellows 37: Side plate 38: Bottom plate 39: Drainage port 40: Carrying in/out means 41: First cassette 43: Positioning Means 430: Temporary Placement Area 431: Positioning Pins 44: Loading Arms 45: Unloading Arms 46: Second Cassette 60: Grinding Feeding Means 61: Motors 63: Ball Screws 64: Guide Rails 65: Elevating Plates 66 : Holder 70: Control means 80: Grinding water supply means 90: Cleaning means 900: Cleaning area W: Workpiece Wa: Back surface Wb: Surface H: Grinding water channel L: Grinding water not containing grinding debris La: Grinding debris included Grinding water
N1: Net N2: Top plate net

Claims (3)

Holding means for holding the workpiece,
Grinding means for mounting a grinding wheel in which a grinding wheel is annularly arranged on a spindle and rotating the grinding wheel to grind the workpiece held by the holding means,
Grinding feed means for moving the grinding means toward and away from each other in a direction perpendicular to the holding means,
Grinding water supply means for supplying grinding water to the grinding wheel,
A grinding device comprising: a workpiece held by the holding means; and a processing chamber that accommodates the grinding wheel.
The processing chamber includes a bottom plate that surrounds the holding means from below,
A top plate that faces the bottom plate and surrounds the grinding wheel from above;
A side plate that surrounds the holding means and the grinding wheel from the side and connects the bottom plate and the top plate;
A net for receiving the grinding water that has been subjected to the centrifugal force generated by the high-speed rotation of the grinding wheel and is disposed inside the inner surface of the side plate with a predetermined gap with respect to the side plate;
When the grinding wheel is grinding the work piece, the grinding water scattered in a state where grinding dust is contained is received by the net and guided to drainage, and when the grinding wheel is separated from the work piece. A grinding device that cleans the net with grinding water that is supplied to the grinding wheel and scatters in a state where grinding dust is not included. The grinding device according to claim 1, further comprising a top plate net which is arranged below the top plate with a predetermined gap and receives the grinding water. A second top plate is provided below the top plate with a predetermined gap from the top plate and surrounds the grinding wheel from above, and the net is hung from the second top plate. The grinding device according to claim 1, wherein grinding water is guided to the net by the second top plate.

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