JP7202152B2 - Grinding equipment - Google Patents

Description

The present invention relates to a grinding apparatus for grinding a workpiece.

In the grinding apparatus, a grinding wheel having a ring of grinding wheels is attached to a spindle, the spindle is rotated by driving a motor, and the workpiece is ground by bringing the rotating grinding wheel into contact with the workpiece. is done. The contact between the grinding wheel and the workpiece is performed inside a processing chamber provided in the grinding device. Grinding water is supplied between the grinding wheel and the work piece during grinding. done for the purpose of removing from things.

Grinding water supplied between the grinding wheel and the workpiece during grinding scatters together with grinding dust due to the centrifugal force of the rotating grinding wheel, and adheres to the side plate, top plate, etc. inside the machining chamber. In order to wash away the grinding debris adhering to the side plate and top plate of the processing chamber, after the grinding process is finished, the grinding water is supplied to the rotating grinding wheel while moving the grinding wheel away from the work piece. Grinding dust and the like adhering to the top plate of the chamber and the like are washed away (see Patent Documents 1 and 2). Grinding water containing the washed-out grinding dust is removed to the outside of the grinding apparatus as grinding waste liquid.

Patent No. 6353684 Patent No. 6129022

If the side plates, top plate, etc. of the processing chamber to which the grinding dust adheres are not sufficiently washed with running water, the processing waste liquid adhering to the side plate, top plate, etc. will dry over time, and the grinding dust will solidify. For example, when the top plate of the processing chamber is opened for maintenance work such as replacing the grinding wheel, the grinding dust solidified on the top plate of the processing chamber turns into dust and scatters inside and outside the grinding machine due to the vibration of the top plate. Then, the grinding equipment becomes a contamination source that contaminates the clean room. In addition, the top plate cannot be opened due to grinding waste that has dried and solidified in the gaps between the top plate and the hinges that open and close the top plate, which can lead to equipment failure and reduced processing efficiency. Invite. The problem to be solved by the present invention is to prevent the grinding water containing the grinding dust scattered by the centrifugal force of the grinding wheel rotating during grinding from adhering to the side plate, the top plate, etc. in the processing chamber.

The present invention grinds the workpiece held by the holding means by mounting a holding means for holding a workpiece and a grinding wheel having a grinding wheel arranged in an annular shape on a spindle and rotating the grinding wheel. grinding means for moving the grinding means toward and away from the holding means in a direction perpendicular to the holding means; grinding water supply means for supplying grinding water to the grinding wheel; and the workpiece held by the holding means. A grinding apparatus comprising a processing chamber for housing an object and the grinding wheel, the processing chamber comprising a bottom plate that surrounds the holding means from below, and a ceiling that faces the bottom plate and surrounds the grinding wheel from above. a plate, a second top plate disposed under the top plate with a predetermined gap from the top plate and surrounding the grinding wheel from above; a side plate that encloses the hollow and connects the bottom plate and the top plate ; and a net for receiving grinding water subjected to centrifugal force due to high-speed rotation, and when the grinding wheel is grinding a workpiece, the grinding waste is scattered in a state of being contained and is scattered onto the second top plate. Grinding water adhering to the net is received by the net and is led to the drainage. When the grinding wheel is separated from the workpiece, the net is drained by the grinding water supplied to the grinding wheel and scattered without grinding chips. It is a grinding device that cleans.

In the present invention, by catching the scattered grinding water with the net provided inside the inner surface of the side plate of the processing chamber, the grinding water containing the grinding waste hits the side plate and scatters and adheres to the wall surface such as the top plate in the processing chamber. can prevent you from doing it. In addition, by washing away the grinding dust adhering to the net with grinding water that does not contain grinding dust, it is possible to wash away the grinding dust adhering to the side plate or the like more easily than washing away the grinding dust adhering to the side plate or the like.
Then, a second top plate is provided below the top plate to surround the grinding means with a predetermined space therebetween, and a net is suspended from the second top plate. can receive the grinding water, prevent the grinding water from adhering to the top plate, and lead the received grinding water to the net.

It is a perspective view showing the whole grinding device. FIG. 4 is a cross-sectional view showing a processing chamber during grinding; It is a sectional view showing a processing chamber at the time of net washing. FIG. 4 is a cross-sectional view showing a processing chamber provided with a top plate net below the top plate of the processing chamber; It is sectional drawing which shows the processing chamber which equipped the lower part of the top plate of a processing chamber with the 2nd top plate, and the net|net is arrange|positioned at the 2nd top plate.

1 Configuration of Grinding Apparatus A grinding apparatus 1 shown in FIG. 1 is, for example, a processing apparatus for grinding a workpiece W such as a semiconductor wafer. The grinding machine 1 has a base 2 and a column 3. The base 2 extends in the X-axis direction, and the column 3 stands on the -X side of the base 2. As shown in FIG.

A loading/unloading means 40 is arranged on the front (+X side) of the base 2 of the grinding apparatus 1 . In the vicinity of the carry-in/out means 40, there are provided a first cassette 41 storing the workpiece W before grinding and a second cassette 46 storing the ground workpiece W. . The workpiece W before being ground is pulled out from the first cassette 41 by the loading/unloading means 40, and the workpiece W cleaned after being ground is loaded into the second cassette 41 by the loading/unloading means 40. It will be stored in the cassette 46 .

Positioning means 43 is provided in the vicinity of the carry-in/out means 40 . The positioning means 43 includes a temporary placement area 430 on which the workpiece W is placed and positioning pins 431 . After being properly aligned by the temporary placement area 430, it is held by the loading means 44 and moved to the area for grinding.

A substantially disc-shaped turntable 103 is provided on the rear (-X side) of the base 2 of the grinding apparatus 1, and the turntable 103 supports a plurality of holding means 100 in a rotatable manner. The turntable 103 is rotatable about a rotation axis 105 in the Z-axis direction, and the rotation of the turntable 103 causes the holding means 100 to revolve, and the holding means moves into a rough grinding area, a finish grinding area, and loading/unloading. It can be positioned in a region.

The holding means 100 includes a suction portion 101 and a frame 102 surrounding the suction portion 101 . The holding means 100 causes the holding surface 101a of the suction unit 101 to communicate with a suction source (not shown) to suck and hold the workpiece W on the holding surface 101a. The holding means 100 can be rotated around a rotating shaft 104 in the Z-axis direction by rotating means (not shown).

A first grinding means 20a for rough grinding is arranged behind the base 2 of the grinding device 1 (on the -X side). A rough grinding wheel 201a shown in FIG. 2 is annularly arranged at the lower end of the grinding wheel 200 provided in the first grinding means 20a. Further, the first grinding means 20 a is provided with a motor 21 , a spindle 22 rotated by driving the motor 21 , and a mount 24 attached to the spindle 22 . A grinding wheel 200 is attached to the mount 24, and the grinding wheel 200 can be rotated by driving the motor 21 and rotating the spindle 22. FIG.

As shown in FIG. 1, behind the base 2 of the grinding device 1 (-X side), a second grinding means 20b for finish grinding is arranged. A substantially rectangular parallelepiped finish grinding wheel 201b shown in FIG. 2 is fixed to the lower end of the grinding wheel 200 provided in the second grinding means 20b. The configuration of the second grinding means 20b is the same as that of the first grinding means 20a except for the type of grinding wheel provided at the lower end of the grinding wheel 200, and likewise configured parts are denoted by common reference numerals. omitted. In FIG. 1, the second grinding means 20b is arranged on the left side of the first grinding means 20a, but the first grinding means 20a and the second grinding means 20b have the positional relationship shown in FIG. For example, by exchanging the respective grinding wheels 200 provided in the first grinding means 20a and the second grinding means 20b, the positions of the first grinding means 20a and the second grinding means 20b can also be replaced.

As shown in FIG. 1, the grinding device 1 has two grinding feeding means 60. As shown in FIG. The two grinding feeding means 60 are arranged side by side on the side of the column 3 respectively. The grinding feed means 60 includes a ball screw 63 having an axis in the Z-axis direction, a pair of guide rails 64 arranged parallel to the ball screw 63, a motor 61 connected to the upper end of the ball screw 63, and the guide rails. A lift plate 65 is in sliding contact with 64 and has an internal nut structure screwed onto the ball screw 63 , and a holder 66 connected to the lift plate 65 . Holders 66 provided in the two grinding feed means 60 respectively support the first grinding means 20a and the second grinding means 20b, and the two grinding feed means 60 respectively support the first grinding means 20a and the second grinding means 20b. The grinding means 20b can be moved closer to and away from the workpiece W.

For example, the grinding feeding means 60 for grinding and feeding the first grinding means 20a has a lift plate 65 and a holder 66 which are guided by a guide rail 64 and lifted by a motor 61 rotating a ball screw 63. When the holder 66 moves up and down, the first grinding means 20a supported by the holder 66 also moves up and down, whereby the first grinding means 20a approaches and separates from the holding means 100. As shown in FIG.

The grinding feed means 60 for grinding and feeding the second grinding means 20b has the same configuration.

A cleaning means 90 is arranged in front of the base 2 of the grinding device 1 (on the +X side). The ground workpiece W is held by the unloading means 45 , moved from above the holding means 100 to the cleaning area 900 , and cleaned by the cleaning means 90 .

The grinding machine 1 has a control means 70 . The control means 70 plays a role of controlling the device mechanism in each step of the grinding process.

A first processing chamber 30a and a second processing chamber 30b are provided behind the base 2 of the grinding device 1 (on the -X side). The first machining chamber 30a is a region for performing rough grinding by bringing the first grinding means 20a into contact with the workpiece W during rough grinding. 2 This is an area for finishing grinding by bringing the grinding means 20b and the workpiece W into contact with each other. A partition plate 32 separates the first processing chamber 30a and the second processing chamber 30b. Below the partition plate 32, there is a gap for allowing the holding means 100 and the workpiece W held by the holding means 100 to pass from the first processing chamber 30a to the second processing chamber 30b by the rotation of the turntable 103. is open

The first processing chamber 30a shown in FIG. 2 has a bottom plate 38 surrounding the holding means 10 from below. Grinding waste liquid containing grinding water and grinding dust generated by rough grinding is guided from the bottom plate 38 to the drain port 39 by the slope provided on the bottom plate 38, and flows out of the grinding apparatus 1 from the drain port 39. .

Furthermore, the first processing chamber 30a has a top plate 33 that faces the bottom plate 38 and surrounds the first grinding means 20a from above. The fixing portion 331 is connected to the holder 66 via the bellows 36 , and the opening/closing portion 330 is connected to the side plate 37 by the hinge 35 . The side plate 37 surrounds the holding means 10 and the first grinding means 20a from the sides and connects the bottom plate 38 and the top plate 33 together.

For example, when performing maintenance of the inside of the first processing chamber 30a, for example, an operator or the like grips and pulls up a handle 332 attached to the opening/closing portion 330 of the top plate 33, thereby opening the opening/closing portion 330 of the top plate 33. rotates around the hinge 35 and lifts to release the upper surface of the first processing chamber 30a.

Inside the first processing chamber 30a, a net N1 is arranged parallel to the side plate 37 at a predetermined distance from the side plate 37. As shown in FIG. The net N1 can receive the grinding water scattered toward the side plate 37 due to the centrifugal force of the rough grinding wheel 201a rotating at high speed. The received grinding water flows down to the bottom plate 38 , is guided to the drain port 39 by the inclination of the bottom plate 38 , and flows out of the grinding apparatus 1 from the drain port 39 .

The configuration of the second processing chamber 30b is the same as that of the first processing chamber 30a, so the same reference numerals are given and the description thereof is omitted.

The grinding apparatus 1 has two grinding water supply means 80 . Two grinding water supply means 80 are provided in the first grinding means 20a and the second grinding means 20b, respectively. Inside the mount 24, a mount water channel 24H is formed that communicates with the water channel H and that is open on the bottom surface. Further, the grinding wheel 200 is formed with a wheel water channel 20H that communicates with the mount water channel 24H and has an open bottom.

2 Grinding device operation (alignment)
The operation of the grinding device 1 when the workpiece W is ground using the grinding device 1 having the above configuration will be described. First, the work W to be ground, which is stored in advance in the first cassette 41 shown in FIG. Alignment is performed using a plurality of alignment pins 431 .

(Retention)
After the alignment is completed, the workpiece W placed in the temporary placement area 430 is held by the loading means 44 and placed on the holding surface 101 a of the suction portion 101 of the holding means 100 . The workpiece W placed on the holding surface 100 a is sucked and held by, for example, suction means (not shown) below the holding means 100 .

(rough grinding)
After the workpiece W is placed on the holding surface 101a of the suction portion 101 of the holding means 100, the turntable 103 is rotated at a predetermined angle counterclockwise as viewed from the +Z direction around the rotation axis 105 in the Z-axis direction. only rotate. As a result, the holding means 100 holding the workpiece W is revolved by a predetermined angle, moved into the first processing chamber 30a, and positioned below the grinding wheel 200 of the first grinding means 20a. .

Next, by driving the motor 21 of the first grinding means 20a, the spindle 22 is rotated around the rotating shaft 23 in the Z-axis direction. As the spindle 22 rotates, the grinding wheel 200 rotates. Further, the workpiece W is rotated around the rotation axis 104 by rotating the holding means 100 around the rotation axis 104 in the Z-axis direction by a rotating means (not shown) arranged below the holding means 100 .

While supplying grinding water between the rough grinding wheel 201a and the workpiece W by the grinding water supply means 80 shown in FIG. By lowering the grinding wheel 200 of the first grinding means 20a supported by the holder 66 in the -Z direction, the coarse grinding wheel 201a provided at the lower end of the rotating grinding wheel 200 is ground to the workpiece W which is also rotating. , and the workpiece W is roughly ground.

During rough grinding, the grinding water supplied from the grinding water supply means 80 enters the inside of the first grinding means 20a from above the motor 21 of the first grinding means 20a, and flows through the grinding water passage H inside the first grinding means 20a. , through the mount channel 24H and the wheel channel 20H, and is supplied between the rough grinding wheel 201a and the workpiece W. The grinding water supplied between the rough grinding wheel 201a and the workpiece W causes the centrifugal force of the rotating rough grinding wheel 201a together with grinding dust generated between the rough grinding wheel 201a and the workpiece W due to rough grinding. , for example, toward the side plate 37 of the first processing chamber 30a. The droplets La of the grinding water containing the scattered grinding dust are received by the net N1 arranged near the side plate 37 of the first processing chamber 30a. After that, the grinding water containing the grinding wastes received by the net N1 flows down to the bottom plate 38 of the first processing chamber 30a, is guided toward the drain port 39 along the slope of the bottom plate 38, and flows from the drain port 39 to the grinder 1. flows out of the

(net cleaning)
After completion of rough grinding, as shown in FIG. 3, the lifting plate 65 of the grinding feeding means 60 is lifted in the +Z direction to lift the rotating rough grinding wheel 201a in the +Z direction, thereby moving the rough grinding wheel 201a to the holding means. It is separated from the workpiece W placed on 100 . While the rough grinding wheel 201a is separated from the workpiece W, the grinding water continuously supplied from the grinding water supply means 80 to the rough grinding wheel 201a is removed by the centrifugal force of the rotating rough grinding wheel 201a. Grinding dust and the like that scatter and adhere to the net N1 inside the first processing chamber 30a are washed away. Even after the rough grinding wheel 201a has returned to a predetermined height position and the upward movement of the grinding feeding means 60 has been stopped, the rough grinding wheel 201a continues to be supplied from the grinding water supply means 80 until the grinding dust adhering to the net N1 is sufficiently removed. Grinding water is continuously supplied between 201a and workpiece W, and droplets L of grinding water are scattered toward net N1 by centrifugal force of rotating rough grinding wheel 201a to clean net N1 with running water.

(finish grinding)
After the net cleaning, the turntable 103 is rotated by a predetermined angle counterclockwise when viewed from the +Z direction about the rotating shaft 105, and the holding means 100 is revolved. is moved into the second processing chamber 30b and positioned below the grinding wheel 200 of the second grinding means 20b.

After the holding means 100 is positioned below the grinding wheel 200 of the second grinding means 20b, grinding similar to rough grinding is performed. However, the whetstone used in the finish grinding is the finish grinding whetstone 201b having finer grains than the rough grinding whetstone 201a used in the rough grinding. In addition, since the purpose of finish grinding is to shape the ground surface formed during rough grinding, for example, the grinding feed speed (-Z It has the characteristic that the descent speed in the direction) is slow.

During finish grinding, droplets La of grinding water containing grinding dust scattered by the rotating finish grinding wheel 201b are received by the net N1, as in the case of rough grinding. After finishing the finish grinding, the elevating plate 65 of the grinding feeding means 60 is raised in the +Z direction to separate the finish grinding wheel 201b from the workpiece W. As shown in FIG. Then, the same net cleaning as the above-described net cleaning performed after rough grinding is performed.

During rough grinding, finish grinding, or net cleaning after grinding, the grinding water that scatters from the rotating grinding wheel may scatter not only toward the side plate 37 but also toward the top plate 33 . Further, there is a possibility that the grinding water that is splashed in the direction of the side plate 37 but is not received by the net N1 hits the net N1 and is splashed in the direction of the top plate 33.

Therefore, as shown in FIG. 4, for example, in the first processing chamber 30a and the second processing chamber 30b, a top plate net N2 is arranged below the top plate 33 with a predetermined gap therebetween. may The water droplets La of the grinding water containing grinding dust scattered during grinding and the water droplets L of the grinding water containing no grinding dust scattered during net washing scatter not only in the direction of the side plate 37 but also in the direction of the top plate 33. However, since the top plate net N2 can catch the grinding water splashed from the rotating rough grinding wheel 201a toward the top plate 33, the splashed grinding water is more reliably prevented from adhering to the top plate 33. be able to. Similarly, if the top plate net N2 is arranged under the top plate 33 of the second processing chamber 30b at a predetermined interval, grinding water will not adhere to the top plate 33 of the second processing chamber 30b. can be prevented.

As shown in FIG. 5, a second top plate 34 is arranged below the top plate 33 of the first processing chamber 30a with a predetermined gap therebetween, and a net N1 extends from the second top plate 34 to the side plate. A configuration in which the net N1 is suspended parallel to 37 may also be used. In this case, the grinding water scattered by the centrifugal force of the rotating rough grinding wheel 201a and adhering to the second top plate 34 is transmitted to the net N1 and flows from the net N1 to the bottom plate . Next, the grinding water carried to the bottom plate 38 is guided along the slope of the bottom plate 38 and flows out of the grinding apparatus 1 through the drain port 39 . By arranging the second top plate 34 , it is possible to prevent grinding wastes from adhering to the top plate 33 and the side plates 37 .

At this time, if the second top plate 34 is inclined downward in the direction of the net N1, the grinding water adhering to the second top plate 34 flows more efficiently in the direction of the net N1. . Even when the second top plate 34 is arranged below the top plate 33 of the second processing chamber 30b, it is possible to prevent grinding water from adhering to the top plate 33 by the same configuration as described above.

According to the present invention, for example, with respect to the first processing chamber 30a, if it is possible to prevent solidification of grinding dust on the walls such as the top plate 33 and the side plates 37 of the first processing chamber 30a, for example, an operator or the like can 30a, when an operator or the like holds the handle 332 of the top plate 33 of the processing chamber 30 and lifts the opening/closing portion 330 to release the upper surface of the first processing chamber 30a, the dust of the grinding waste is generated by the first processing. It is possible to prevent scattering inside and outside the chamber 30a. As for the second processing chamber 30b as well, it is possible to prevent solidification of grinding dust on the walls of the top plate 33, the side plates 37, and the like.

In addition, by preventing solidification of grinding dust on the top plate 33, it is possible to prevent opening and closing failure of the top plate 33, and to improve the efficiency of maintenance work.

The grinding apparatus 1 according to the present invention may be a so-called twin-screw machine including a first grinding means 20a and a second grinding means 20b for carrying out the two grinding steps of rough grinding and finish grinding described above. Alternatively, for example, it may be a uniaxial machine that grinds to the finish thickness with one type of grinding wheel.

Further, the grinding apparatus 1 according to the present invention may be, for example, a processing apparatus having polishing means (not shown) on the base 2 and capable of continuously performing grinding and polishing in the same apparatus.
In addition, when the scattering water droplets La pass through the net N1, the water droplets La that have passed through the net N1 hit the side plate and are further scattered and decelerated, and the net N1 can receive the scattered and decelerated water droplets La. Also, a plurality of nets N1 may be arranged with a gap therebetween.
Furthermore, the top plate net N2, which is arranged with a gap on the top plate, does not have to be arranged parallel to the top plate. The water may be drained from the plate net N2.

1: Grinding Device 2: Base 3: Column 10: Holding Means 100: Holding Means 101: Suction Part 101a: Holding Surface Frame: 102 103: Turntable 104: Rotational Axis of Holding Means 105: Rotational Axis of Turntable 20a: First Grinding Means 20b: Second Grinding Means 200: Grinding Wheel 201a: Rough Grinding Wheel 201b: Finish Grinding Wheel 21: Motor 22: Spindle 23: Rotary Shaft 30a: First Processing Chamber 30b: Second Processing Chamber 33: Top Plate 330: Opening/closing portion 331: Fixed portion 332: Handle 34: Second top plate 35: Hinge 36: Accordion 37: Side plate 38: Bottom plate 39: Drain port 40: Loading/unloading means 41: First cassette 43: Alignment Means 430: Temporary Placement Area 431: Positioning Pin 44: Loading Arm 45: Unloading Arm 46: Second Cassette 60: Grinding Feeding Means 61: Motor 63: Ball Screw 64: Guide Rail 65: Elevating Plate 66: Holder 70: Control means 80: Grinding water supply means 90: Washing means 900: Washing area W: Workpiece Wa: Back surface Wb: Front surface H: Grinding water channel L: Grinding water not containing grinding waste La: Grinding water containing grinding waste N1: Net N2: Top plate net

Claims (1)

holding means for holding the workpiece;
Grinding means for grinding a workpiece held by said holding means by mounting a grinding wheel having grinding wheels arranged in an annular shape on a spindle and rotating said grinding wheels;
grinding feed means for moving the grinding means toward and away from the holding means in a direction perpendicular to the holding means;
Grinding water supply means for supplying grinding water to the grinding wheel;
A grinding apparatus comprising a processing chamber for accommodating the workpiece held by the holding means and the grinding wheel,
The processing chamber includes a bottom plate surrounding the holding means from below;
a top plate facing the bottom plate and surrounding the grinding wheel from above;
a second top plate disposed under the top plate with a predetermined gap from the top plate and surrounding the grinding wheel from above;
a side plate surrounding the holding means and the grinding wheel from the sides and connecting the bottom plate and the top plate;
a net that hangs from the second top plate and is arranged inside the inner surface of the side plate with a predetermined gap from the side plate to receive the grinding water subjected to centrifugal force due to the high-speed rotation of the grinding wheel; with
When the grinding wheel is grinding an object to be processed, the grinding water that is scattered with the grinding dust and adheres to the second top plate is received by the net and guided to the drainage, so that the grinding wheel is covered with the grinding water. A grinding apparatus that cleans the net with grinding water that is supplied to the grinding wheel and that scatters in a state free of grinding dust when the net is separated from the workpiece.

Images