JP2020020994A - 固浸レンズユニット、半導体検査装置 - Google Patents
固浸レンズユニット、半導体検査装置 Download PDFInfo
- Publication number
- JP2020020994A JP2020020994A JP2018145977A JP2018145977A JP2020020994A JP 2020020994 A JP2020020994 A JP 2020020994A JP 2018145977 A JP2018145977 A JP 2018145977A JP 2018145977 A JP2018145977 A JP 2018145977A JP 2020020994 A JP2020020994 A JP 2020020994A
- Authority
- JP
- Japan
- Prior art keywords
- solid immersion
- immersion lens
- semiconductor device
- lens
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B2003/0093—Simple or compound lenses characterised by the shape
Abstract
Description
[半導体検査装置の構成]
[固浸レンズユニットの構成]
[半導体検査装置における画像取得方法の一例]
[作用及び効果]
[変形例]
Claims (7)
- シリコン基板によって構成された半導体デバイスに当接するための当接面、及び、対物レンズと向かい合うように配置される球面を有し、200nm以上1100nm以下の範囲の少なくとも一部の波長を有する光を透過させる固浸レンズと、
前記固浸レンズを保持するホルダと、
前記対物レンズと前記固浸レンズとの間に位置するように前記ホルダによって保持され、前記シリコン基板と前記固浸レンズとの間の屈折率差に起因する収差を補正する光学素子と、を備える、固浸レンズユニット。 - 前記固浸レンズは、GaAs、GaP、SiC又はダイヤモンドによって構成されている、請求項1に記載の固浸レンズユニット。
- 前記ホルダは、前記対物レンズに対して着脱自在な取付部を有する、請求項1又は2に記載の固浸レンズユニット。
- 前記光学素子は、ガラスによって構成されている、請求項1〜3のいずれか一項に記載の固浸レンズユニット。
- 前記光学素子は、メニスカスレンズである、請求項1〜4のいずれか一項に記載の固浸レンズユニット。
- 前記半導体デバイスが載置されるステージと、
前記ステージ上の前記半導体デバイスと向かい合うように配置された対物レンズと、
前記対物レンズと前記半導体デバイスとの間に前記固浸レンズを保持する請求項1〜5のいずれか一項に記載の固浸レンズユニットと、
前記半導体デバイスからの光を前記固浸レンズ及び前記対物レンズを介して検出する光検出器と、を備える、半導体検査装置。 - 前記固浸レンズユニットを複数備え、
前記複数の固浸レンズユニットは、それぞれ、異なる観察深さに対応するように構成されている、請求項6に記載の半導体検査装置。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018145977A JP2020020994A (ja) | 2018-08-02 | 2018-08-02 | 固浸レンズユニット、半導体検査装置 |
EP19845351.6A EP3832371A4 (en) | 2018-08-02 | 2019-04-09 | SOLID STATE IMMERSION LENS UNIT AND SEMICONDUCTOR INSPECTION DEVICE |
US17/264,588 US11913888B2 (en) | 2018-08-02 | 2019-04-09 | Solid immersion lens unit and semiconductor inspection device |
CN201980051171.8A CN112543884B (zh) | 2018-08-02 | 2019-04-09 | 固体浸没式透镜单元、半导体检查装置 |
PCT/JP2019/015510 WO2020026531A1 (ja) | 2018-08-02 | 2019-04-09 | 固浸レンズユニット、半導体検査装置 |
KR1020217002899A KR20210040056A (ko) | 2018-08-02 | 2019-04-09 | 고침 렌즈 유닛, 반도체 검사 장치 |
SG11202012875XA SG11202012875XA (en) | 2018-08-02 | 2019-04-09 | Solid immersion lens unit and semiconductor inspection device |
TW108114250A TWI826440B (zh) | 2018-08-02 | 2019-04-24 | 半導體檢查裝置 |
JP2023003654A JP7465376B2 (ja) | 2018-08-02 | 2023-01-13 | 固浸レンズユニット、半導体検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018145977A JP2020020994A (ja) | 2018-08-02 | 2018-08-02 | 固浸レンズユニット、半導体検査装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023003654A Division JP7465376B2 (ja) | 2018-08-02 | 2023-01-13 | 固浸レンズユニット、半導体検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2020020994A true JP2020020994A (ja) | 2020-02-06 |
Family
ID=69230604
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018145977A Pending JP2020020994A (ja) | 2018-08-02 | 2018-08-02 | 固浸レンズユニット、半導体検査装置 |
JP2023003654A Active JP7465376B2 (ja) | 2018-08-02 | 2023-01-13 | 固浸レンズユニット、半導体検査装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023003654A Active JP7465376B2 (ja) | 2018-08-02 | 2023-01-13 | 固浸レンズユニット、半導体検査装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US11913888B2 (ja) |
EP (1) | EP3832371A4 (ja) |
JP (2) | JP2020020994A (ja) |
KR (1) | KR20210040056A (ja) |
CN (1) | CN112543884B (ja) |
SG (1) | SG11202012875XA (ja) |
TW (1) | TWI826440B (ja) |
WO (1) | WO2020026531A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005317170A (ja) * | 2004-03-31 | 2005-11-10 | Konica Minolta Opto Inc | 屈折対物光学系 |
JP2006227565A (ja) * | 2005-01-19 | 2006-08-31 | Hamamatsu Photonics Kk | 対物レンズソケット |
JP2009070467A (ja) * | 2007-09-12 | 2009-04-02 | Sony Corp | 光学ピックアップ装置、光記録再生装置及びギャップの制御方法 |
JP2016537670A (ja) * | 2013-11-15 | 2016-12-01 | カール ツァイス マイクロスコピー ゲーエムベーハーCarl Zeiss Microscopy Gmbh | 光シート顕微鏡検査のための装置 |
JP2017501429A (ja) * | 2013-11-15 | 2017-01-12 | カール ツァイス マイクロスコピー ゲーエムベーハーCarl Zeiss Microscopy Gmbh | 光シート顕微鏡検査用の装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB691530A (en) | 1948-10-20 | 1953-05-13 | Polaroid Corp | Improvements in or relating to optical systems |
HUP0303190A2 (hu) * | 2000-10-16 | 2003-12-29 | Konica Corporation | Tárgylencse, kapcsoló lencse, fénykonvergáló optikai rendszer és optikai felvevő-lejátszó eszköz |
JP2003066300A (ja) * | 2001-08-29 | 2003-03-05 | Sony Corp | 対物レンズ製造装置及び対物レンズ製造方法 |
TWI336777B (en) | 2003-03-20 | 2011-02-01 | Hamamatsu Photonics Kk | Solid immersion lens (sil) and specimen observation method by sil |
US7110172B2 (en) * | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
US7312921B2 (en) * | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
WO2007097380A1 (ja) | 2006-02-21 | 2007-08-30 | Nikon Corporation | パターン形成装置及びパターン形成方法、移動体駆動システム及び移動体駆動方法、露光装置及び露光方法、並びにデバイス製造方法 |
JP5189321B2 (ja) | 2007-06-20 | 2013-04-24 | 浜松ホトニクス株式会社 | 固浸レンズホルダ |
US10048480B2 (en) | 2011-01-07 | 2018-08-14 | Zeta Instruments, Inc. | 3D microscope including insertable components to provide multiple imaging and measurement capabilities |
JP2017530394A (ja) * | 2014-09-29 | 2017-10-12 | エーエスエムエル ホールディング エヌ.ブイ. | 高開口数対物レンズシステム |
-
2018
- 2018-08-02 JP JP2018145977A patent/JP2020020994A/ja active Pending
-
2019
- 2019-04-09 SG SG11202012875XA patent/SG11202012875XA/en unknown
- 2019-04-09 EP EP19845351.6A patent/EP3832371A4/en active Pending
- 2019-04-09 CN CN201980051171.8A patent/CN112543884B/zh active Active
- 2019-04-09 WO PCT/JP2019/015510 patent/WO2020026531A1/ja unknown
- 2019-04-09 KR KR1020217002899A patent/KR20210040056A/ko active Search and Examination
- 2019-04-09 US US17/264,588 patent/US11913888B2/en active Active
- 2019-04-24 TW TW108114250A patent/TWI826440B/zh active
-
2023
- 2023-01-13 JP JP2023003654A patent/JP7465376B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005317170A (ja) * | 2004-03-31 | 2005-11-10 | Konica Minolta Opto Inc | 屈折対物光学系 |
JP2006227565A (ja) * | 2005-01-19 | 2006-08-31 | Hamamatsu Photonics Kk | 対物レンズソケット |
JP2009070467A (ja) * | 2007-09-12 | 2009-04-02 | Sony Corp | 光学ピックアップ装置、光記録再生装置及びギャップの制御方法 |
JP2016537670A (ja) * | 2013-11-15 | 2016-12-01 | カール ツァイス マイクロスコピー ゲーエムベーハーCarl Zeiss Microscopy Gmbh | 光シート顕微鏡検査のための装置 |
JP2017501429A (ja) * | 2013-11-15 | 2017-01-12 | カール ツァイス マイクロスコピー ゲーエムベーハーCarl Zeiss Microscopy Gmbh | 光シート顕微鏡検査用の装置 |
Also Published As
Publication number | Publication date |
---|---|
TW202008009A (zh) | 2020-02-16 |
JP2023038269A (ja) | 2023-03-16 |
EP3832371A4 (en) | 2022-04-13 |
US20210333216A1 (en) | 2021-10-28 |
CN112543884A (zh) | 2021-03-23 |
JP7465376B2 (ja) | 2024-04-10 |
CN112543884B (zh) | 2024-02-09 |
SG11202012875XA (en) | 2021-01-28 |
EP3832371A1 (en) | 2021-06-09 |
US11913888B2 (en) | 2024-02-27 |
KR20210040056A (ko) | 2021-04-12 |
TWI826440B (zh) | 2023-12-21 |
WO2020026531A1 (ja) | 2020-02-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11402200B2 (en) | Measuring device, observing device and measuring method | |
WO2018110221A1 (ja) | 固浸レンズユニット及び半導体検査装置 | |
JP6652492B2 (ja) | 固浸レンズホルダ及び画像取得装置 | |
KR102562196B1 (ko) | 반도체 검사 장치 | |
US11913888B2 (en) | Solid immersion lens unit and semiconductor inspection device | |
US11256079B2 (en) | Solid immersion lens unit and semiconductor detector device | |
WO2021079574A1 (ja) | 固浸レンズユニット及び半導体検査装置 | |
JP2019007985A (ja) | 半導体検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210421 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220426 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20221018 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230113 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20230113 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230126 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20230131 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20230331 |
|
C211 | Notice of termination of reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C211 Effective date: 20230404 |