SG11202012875XA - Solid immersion lens unit and semiconductor inspection device - Google Patents
Solid immersion lens unit and semiconductor inspection deviceInfo
- Publication number
- SG11202012875XA SG11202012875XA SG11202012875XA SG11202012875XA SG11202012875XA SG 11202012875X A SG11202012875X A SG 11202012875XA SG 11202012875X A SG11202012875X A SG 11202012875XA SG 11202012875X A SG11202012875X A SG 11202012875XA SG 11202012875X A SG11202012875X A SG 11202012875XA
- Authority
- SG
- Singapore
- Prior art keywords
- lens unit
- inspection device
- immersion lens
- solid immersion
- semiconductor inspection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/02—Objectives
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/021—Mountings, adjusting means, or light-tight connections, for optical elements for lenses for more than one lens
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B2003/0093—Simple or compound lenses characterised by the shape
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Manufacturing & Machinery (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Computer Hardware Design (AREA)
- Crystallography & Structural Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Microscoopes, Condenser (AREA)
- Lens Barrels (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Lenses (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018145977A JP2020020994A (en) | 2018-08-02 | 2018-08-02 | Solid immersion lens unit and semiconductor inspection device |
| PCT/JP2019/015510 WO2020026531A1 (en) | 2018-08-02 | 2019-04-09 | Solid immersion lens unit and semiconductor inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202012875XA true SG11202012875XA (en) | 2021-01-28 |
Family
ID=69230604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202012875XA SG11202012875XA (en) | 2018-08-02 | 2019-04-09 | Solid immersion lens unit and semiconductor inspection device |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US11913888B2 (en) |
| EP (1) | EP3832371A4 (en) |
| JP (2) | JP2020020994A (en) |
| KR (1) | KR20210040056A (en) |
| CN (1) | CN112543884B (en) |
| SG (1) | SG11202012875XA (en) |
| TW (1) | TWI826440B (en) |
| WO (1) | WO2020026531A1 (en) |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB691530A (en) | 1948-10-20 | 1953-05-13 | Polaroid Corp | Improvements in or relating to optical systems |
| AU2001294248A1 (en) * | 2000-10-16 | 2002-04-29 | Konica Corporation | Objective lens, coupling lens, light converging optical system, and optical pick-up apparatus |
| JP2003066300A (en) * | 2001-08-29 | 2003-03-05 | Sony Corp | Device for manufacturing objective lens and method for manufacturing objective lens |
| JPWO2004088386A1 (en) | 2003-03-20 | 2006-07-06 | 浜松ホトニクス株式会社 | Solid immersion lens and sample observation method using the same |
| US7110172B2 (en) | 2004-02-27 | 2006-09-19 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| US7312921B2 (en) * | 2004-02-27 | 2007-12-25 | Hamamatsu Photonics K.K. | Microscope and sample observation method |
| JP2005317170A (en) * | 2004-03-31 | 2005-11-10 | Konica Minolta Opto Inc | Refraction objective optical system |
| JP4772394B2 (en) * | 2005-01-19 | 2011-09-14 | 浜松ホトニクス株式会社 | Objective lens socket |
| EP2003680B1 (en) | 2006-02-21 | 2013-05-29 | Nikon Corporation | Exposure apparatus, exposure method and device manufacturing method |
| JP5189321B2 (en) | 2007-06-20 | 2013-04-24 | 浜松ホトニクス株式会社 | Solid immersion lens holder |
| JP2009070467A (en) * | 2007-09-12 | 2009-04-02 | Sony Corp | Optical pickup device, optical recording/reproducing device, and gap control method |
| US10048480B2 (en) | 2011-01-07 | 2018-08-14 | Zeta Instruments, Inc. | 3D microscope including insertable components to provide multiple imaging and measurement capabilities |
| DE102013112596B4 (en) | 2013-11-15 | 2023-12-28 | Carl Zeiss Microscopy Gmbh | Arrangement for light sheet microscopy |
| DE102013112595A1 (en) | 2013-11-15 | 2015-05-21 | Carl Zeiss Microscopy Gmbh | Arrangement for light-sheet microscopy |
| CN107076966B (en) * | 2014-09-29 | 2022-05-24 | Asml控股股份有限公司 | High numerical aperture objective system |
-
2018
- 2018-08-02 JP JP2018145977A patent/JP2020020994A/en active Pending
-
2019
- 2019-04-09 KR KR1020217002899A patent/KR20210040056A/en not_active Application Discontinuation
- 2019-04-09 SG SG11202012875XA patent/SG11202012875XA/en unknown
- 2019-04-09 WO PCT/JP2019/015510 patent/WO2020026531A1/en unknown
- 2019-04-09 EP EP19845351.6A patent/EP3832371A4/en active Pending
- 2019-04-09 CN CN201980051171.8A patent/CN112543884B/en active Active
- 2019-04-09 US US17/264,588 patent/US11913888B2/en active Active
- 2019-04-24 TW TW108114250A patent/TWI826440B/en active
-
2023
- 2023-01-13 JP JP2023003654A patent/JP7465376B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN112543884A (en) | 2021-03-23 |
| JP2023038269A (en) | 2023-03-16 |
| US11913888B2 (en) | 2024-02-27 |
| EP3832371A4 (en) | 2022-04-13 |
| JP7465376B2 (en) | 2024-04-10 |
| TWI826440B (en) | 2023-12-21 |
| US20210333216A1 (en) | 2021-10-28 |
| JP2020020994A (en) | 2020-02-06 |
| EP3832371A1 (en) | 2021-06-09 |
| WO2020026531A1 (en) | 2020-02-06 |
| KR20210040056A (en) | 2021-04-12 |
| CN112543884B (en) | 2024-02-09 |
| TW202008009A (en) | 2020-02-16 |
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