JP2020013790A - 高性能検査走査電子顕微鏡装置およびその動作方法 - Google Patents
高性能検査走査電子顕微鏡装置およびその動作方法 Download PDFInfo
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Abstract
Description
101 荷電粒子源、線源
102 タングステン単結晶
104 コンデンサレンズ
105 エミッタ先端部、鋭い先端部
106 光軸
107 ビーム制限開孔
200 ビーム伝搬経路、ビーム経路
201 加速区間
202 減速区間
203 電子エネルギープロファイル
300 試料
301 対物レンズ
302 ウエハ表面、表面
303 試料ホルダ
307 抽出電極
308 加速電極
309 電極
401 内側磁極片
402 外側磁極片
403 内側磁極片
404 外側磁極片
500 走査偏向器ユニット
600 内径、直径
601 第1の軸方向距離
602 第3の軸方向距離
603 第2の軸方向距離
604 直径
605 第4の軸方向距離
Claims (17)
- タングステン先端部を有する冷電界エミッタを含む荷電粒子源と、
前記荷電粒子源から荷電粒子ビームを抽出するように構成された抽出電極アセンブリと、
前記荷電粒子源と磁気コンデンサレンズとの間のビーム制限開孔と、
前記荷電粒子ビームを平行にするように適合され、第1の内側磁極片および第1の外側磁極片を含む前記磁気コンデンサレンズであって、前記荷電粒子源と前記第1の内側磁極片との間の第1の軸方向距離が約20mm以下であり、前記第1の軸方向距離が前記荷電粒子源と前記第1の外側磁極片との間の第2の軸方向距離よりも大きい、前記磁気コンデンサレンズと、
前記荷電粒子ビームを10keV以上のエネルギーに加速するための加速区間であって、前記磁気コンデンサレンズの場が前記加速区間と少なくとも部分的に重なり合う、加速区間と、
第2の内側磁極片および第2の外側磁極片を含む磁気対物レンズであって、前記第2の内側磁極片と試料の表面との間の第3の軸方向距離が約20mm以下であり、前記第3の軸方向距離が前記第2の外側磁極片と前記試料の前記表面との間の第4の軸方向距離よりも大きく、前記磁気コンデンサレンズと前記磁気対物レンズとの組合せ作用が前記荷電粒子ビームを前記試料の前記表面上に集束させる、磁気対物レンズと、
前記荷電粒子ビームを10keV以上の前記エネルギーから2keV以下のランディングエネルギーに減速させるための減速区間であって、前記磁気対物レンズの場が前記減速区間と少なくとも部分的に重なり合う、減速区間と、
を備える、荷電粒子ビーム装置。 - 前記第1の内側磁極片が第1の内径を有し、前記第1の内径が前記第1の軸方向距離以上である、請求項1に記載の荷電粒子ビーム装置。
- 前記第2の内側磁極片が第2の内径を有し、前記第2の内径が前記第3の軸方向距離以上である、請求項1または2に記載の荷電粒子ビーム装置。
- 前記ビーム制限開孔が前記抽出電極アセンブリに含まれている、請求項1から3までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記磁気対物レンズが軸方向間隙レンズである、請求項1から4までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記荷電粒子源と前記磁気コンデンサレンズの前記第1の内側磁極片との間の前記第1の軸方向距離が約10mm以下である、請求項1から5までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記磁気コンデンサレンズおよび前記磁気対物レンズが前記荷電粒子ビームの軸に沿って互いにほぼ対称に配置されている、請求項1から6までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記磁気対物レンズの前記第2の内側磁極片と前記試料の前記表面との間の前記第3の軸方向距離が約10mm未満である、請求項1から7までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記ビーム制限開孔が、前記荷電粒子ビームを軸方向に前記ビーム制限開孔を通過させて、前記荷電粒子ビームの前記ビーム電流を低減させるように構成されている、請求項1から8までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記タングステン先端部が(3、1、0)配向を有するタングステン単結晶である、請求項1から9までのいずれか1項に記載の荷電粒子ビーム装置。
- 前記荷電粒子ビームを前記試料の前記表面を横切って走査するように適合された走査偏向器ユニットであって、前記抽出電極と前記磁気対物レンズとの間に配置され、特に、前記磁気対物レンズの場の近傍に配置されている、走査偏向器ユニット
をさらに備える、請求項1から10までのいずれか1項に記載の荷電粒子ビーム装置。 - タングステン先端部を有する冷電界エミッタを用いて荷電粒子ビームを形成する荷電粒子を生成するステップと、
加速区間において前記荷電粒子を加速するステップと、
磁気コンデンサレンズによって前記荷電粒子ビームを平行にするステップと、
前記磁気コンデンサレンズと、内側磁極片および外側磁極片を有する磁気対物レンズとの組合せ作用によって前記荷電粒子ビームを試料の表面上に集束させるステップであって、前記磁気対物レンズの前記内側磁極片と前記試料の前記表面との間の軸方向距離が約20mm未満であり、前記軸方向距離が前記外側磁極片と前記試料の前記表面との間のさらなる軸方向距離よりも大きい、ステップと、
減速区間において、前記荷電粒子を前記試料の前記表面のランディングエネルギーに減速させるステップと、
を含む、荷電粒子ビーム装置を動作させる方法。 - 前記磁気対物レンズが軸方向間隙レンズである、請求項12に記載の方法。
- 前記磁気コンデンサレンズの場が前記加速区間と少なくとも部分的に重なり合う、請求項12または13に記載の方法。
- 前記磁気対物レンズの場が前記減速区間と少なくとも部分的に重なり合う、請求項12から14までのいずれか1項に記載の方法。
- 前記加速区間において、前記荷電粒子が、少なくとも10keV、特に少なくとも15keVのエネルギーに、特に少なくとも30keVのエネルギーに加速され、および/または前記減速区間において、前記荷電粒子が、約3keV以下、特に約1keV以下のランディングエネルギーに減速される、請求項12から15までのいずれか1項に記載の方法。
- 請求項1から11までのいずれか1項に記載の荷電粒子ビーム装置
を備える走査電子装置。
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EP3594988A1 (en) | 2020-01-15 |
JP7098766B2 (ja) | 2022-07-11 |
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CN110718433B (zh) | 2021-02-26 |
JP2021064621A (ja) | 2021-04-22 |
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TWI712069B (zh) | 2020-12-01 |
KR20200007726A (ko) | 2020-01-22 |
JP6826637B2 (ja) | 2021-02-03 |
US10504684B1 (en) | 2019-12-10 |
CN110718433A (zh) | 2020-01-21 |
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