JP2020009976A - 樹脂封止金型および半導体装置の製造方法 - Google Patents
樹脂封止金型および半導体装置の製造方法 Download PDFInfo
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- 239000011347 resin Substances 0.000 title claims abstract description 68
- 229920005989 resin Polymers 0.000 title claims abstract description 68
- 238000007789 sealing Methods 0.000 title claims abstract description 55
- 239000004065 semiconductor Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 title claims description 4
- 238000005520 cutting process Methods 0.000 claims description 12
- 238000003825 pressing Methods 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 6
- 238000005452 bending Methods 0.000 description 5
- 239000000725 suspension Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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- H01L23/495—Lead-frames or other flat leads
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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Abstract
Description
半導体素子を搭載したリードフレーム組立体を保持し、樹脂封止して半導体装置を形成するキャビティを備える樹脂封止金型において、
前記キャビティの周囲に設けられたタイバー押さえ部の外側に突起部を備えることを特徴とする樹脂封止金型とした。
複数のリードがタイバーで結合され、前記リードに電気的に接続された半導体素子をダイパッド上に搭載したリードフレーム組立体を準備する工程と、
タイバー押さえ部の外側に突起部を備える樹脂封止金型を準備する工程と、
前記リードフレーム組立体を前記樹脂封止金型に、前記タイバーの外側面と前記突起部の内側面を近接して載置する工程と、
前記樹脂封止金型の上型および下型で前記リードフレーム組立体を挟みこむ工程と、
前記リードフレーム組立体を樹脂封止して樹脂封止体とする工程と、
前記樹脂封止体から前記タイバーを切断する工程と、
前記樹脂封止体から露出する前記リードを成形する工程と、
を備えることを特徴とする半導体装置の製造方法を用いた。
また、この突起部23を設けることによりリードフレーム1の位置決めが容易に出来るので、従来必要であったゲートピンが本発明の実施形態においては不要になる。
図3は本発明の第1の実施形態にかかる樹脂封止金型を用いた半導体装置の製造工程を示す図である。
1a フレーム枠
2 タイバー
2a タイバーの外側面
3 ダイパッド
4 リード
5 吊りリード
6 薄板
7 金属細線
10 リードフレーム組立体
11 樹脂封止体
21 樹脂封止金型
21a 樹脂封止金型の下型
21b 樹脂封止金型の上型
22 キャビティ
23 突起部
23a 突起部の内側面
24a 下型のタイバー押さえ部
24b 上型のタイバー押さえ部
30 半導体素子
Claims (8)
- 半導体素子を搭載したリードフレーム組立体を保持し、樹脂封止して半導体装置を形成するキャビティを備える樹脂封止金型において、
前記キャビティの周囲に設けられたタイバー押さえ部の外側に突起部を備えることを特徴とする樹脂封止金型。 - 前記突起部の高さは前記リードフレーム組立体のタイバーの厚みよりも小さいことを特徴とする請求項1に記載の樹脂封止金型。
- 前記突起部を前記樹脂封止金型の下型、上型の少なくとも一方に設けることを特徴とする請求項1または請求項2に記載の樹脂封止金型。
- 前記突起部が前記キャビティ側に向う内側面は逆テーパー形状に傾斜していることを特徴とする請求項1乃至請求項3のいずれか1項に記載の樹脂封止金型。
- 半導体素子を搭載したリードフレーム組立体を樹脂封止して半導体装置を形成する製造方法であって、
複数のリードがタイバーで結合され、前記リードに電気的に接続された半導体素子をダイパッド上に搭載したリードフレーム組立体を準備する工程と、
タイバー押さえ部の外側に突起部を備える樹脂封止金型を準備する工程と、
前記リードフレーム組立体を前記樹脂封止金型に、前記タイバーの外側面と前記突起部の内側面を近接して載置する工程と、
前記樹脂封止金型の上型および下型で前記リードフレーム組立体を挟みこむ工程と、
前記リードフレーム組立体を樹脂封止して樹脂封止体とする工程と、
前記樹脂封止体から前記タイバーを切断する工程と、
前記樹脂封止体から露出する前記リードを成形する工程と、
を備えることを特徴とする半導体装置の製造方法。 - 前記樹脂封止金型を準備する工程において、前記樹脂封止金型の下型、上型の少なくとも一方に前記突起部を設けることを特徴とする請求項5に記載の半導体装置の製造方法。
- 前記リードフレーム組立体を挟みこむ工程において、前記突起部の表面が対向する前記樹脂封止金型の表面に接触しないことを特徴とする請求項5または請求項6に記載の半導体装置の製造方法。
- 前記タイバーを切断する工程において、さらに前記タイバーと前記樹脂封止体との間に充填された樹脂バリも除去することを特徴とする請求項5乃至請求項7のいずれか1項に記載の半導体装置の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018131928A JP2020009976A (ja) | 2018-07-12 | 2018-07-12 | 樹脂封止金型および半導体装置の製造方法 |
TW108122308A TW202006839A (zh) | 2018-07-12 | 2019-06-26 | 樹脂密封模具以及半導體裝置的製造方法 |
CN201910609119.1A CN110718471A (zh) | 2018-07-12 | 2019-07-08 | 树脂密封模具和半导体装置的制造方法 |
US16/506,310 US20200020617A1 (en) | 2018-07-12 | 2019-07-09 | Resin encapsulating mold and manufacturing method for semiconductor device |
KR1020190083081A KR20200007688A (ko) | 2018-07-12 | 2019-07-10 | 수지 봉지 금형 및 반도체 장치의 제조 방법 |
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JP2018131928A JP2020009976A (ja) | 2018-07-12 | 2018-07-12 | 樹脂封止金型および半導体装置の製造方法 |
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JP (1) | JP2020009976A (ja) |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2022254772A1 (ja) * | 2021-05-31 | 2022-12-08 | Towa株式会社 | 成形型、樹脂成形装置及び樹脂成形品の製造方法 |
Citations (7)
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---|---|---|---|---|
JPS6197955A (ja) * | 1984-10-19 | 1986-05-16 | Hitachi Ltd | リ−ドフレ−ム |
JPS6276727A (ja) * | 1985-09-30 | 1987-04-08 | Nitto Electric Ind Co Ltd | 樹脂封止型半導体装置の製法およびそれに用いるトランスフア−成形金型 |
JPH01125963A (ja) * | 1987-11-11 | 1989-05-18 | Nec Corp | リードフレーム |
JPH03100413U (ja) * | 1990-01-31 | 1991-10-21 | ||
JPH06291234A (ja) * | 1993-04-01 | 1994-10-18 | Mitsubishi Electric Corp | 半導体装置用リードフレームおよびこれを使用した半導体装置の製造方法 |
JP2001168123A (ja) * | 1999-12-09 | 2001-06-22 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体装置の製造装置、回路基板並びに電子機器 |
JP2004103823A (ja) * | 2002-09-10 | 2004-04-02 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2542920B2 (ja) | 1988-12-20 | 1996-10-09 | 三洋電機株式会社 | 半導体装置の樹脂モ―ルド方法 |
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- 2019-06-26 TW TW108122308A patent/TW202006839A/zh unknown
- 2019-07-08 CN CN201910609119.1A patent/CN110718471A/zh active Pending
- 2019-07-09 US US16/506,310 patent/US20200020617A1/en not_active Abandoned
- 2019-07-10 KR KR1020190083081A patent/KR20200007688A/ko active Search and Examination
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6197955A (ja) * | 1984-10-19 | 1986-05-16 | Hitachi Ltd | リ−ドフレ−ム |
JPS6276727A (ja) * | 1985-09-30 | 1987-04-08 | Nitto Electric Ind Co Ltd | 樹脂封止型半導体装置の製法およびそれに用いるトランスフア−成形金型 |
JPH01125963A (ja) * | 1987-11-11 | 1989-05-18 | Nec Corp | リードフレーム |
JPH03100413U (ja) * | 1990-01-31 | 1991-10-21 | ||
JPH06291234A (ja) * | 1993-04-01 | 1994-10-18 | Mitsubishi Electric Corp | 半導体装置用リードフレームおよびこれを使用した半導体装置の製造方法 |
JP2001168123A (ja) * | 1999-12-09 | 2001-06-22 | Seiko Epson Corp | 半導体装置及びその製造方法、半導体装置の製造装置、回路基板並びに電子機器 |
JP2004103823A (ja) * | 2002-09-10 | 2004-04-02 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
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WO2022254772A1 (ja) * | 2021-05-31 | 2022-12-08 | Towa株式会社 | 成形型、樹脂成形装置及び樹脂成形品の製造方法 |
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