JP2020009745A - 遠隔モジュール型高周波源 - Google Patents
遠隔モジュール型高周波源 Download PDFInfo
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/32238—Windows
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32201—Generating means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32211—Means for coupling power to the plasma
- H01J37/3222—Antennas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
- H01J37/32311—Circuits specially adapted for controlling the microwave discharge
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Auxiliary Devices For Machine Tools (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
Abstract
Description
高周波放射システムの、プラズマ処理に使用するためのものを含む用途は、数多くの異なるテクノロジー(例えば半導体産業、ディスプレイテクノロジー、微小電気機械システム(MEMS)におけるものなど)の製造において、広範囲に使用されている。現在、単一アンテナによる無線周波数(RF)生成プラズマが、最もよく使用されている。しかし、より高い(マイクロ波周波数を含む)周波数でプラズマが生成される場合、プラズマ密度が高いプラズマ、及び/又は中性励起種の濃度が高いプラズマが、形成される。残念ながら、単一アンテナにより作り出される高周波放射システム(例えば、プラズマを形成するために使用されるもの)は、それらに固有の欠点に悩まされる。
Claims (15)
- 処理チャンバと、
前記処理チャンバ内で基板を支持するためのチャックと、
前記処理チャンバの一部分を形成している誘電体ウインドウと、
モジュール型高周波発出源とを備える、処理ツールであって、前記モジュール型高周波発出源が、
複数の高周波発出モジュールを備え、各高周波発出モジュールが、
発振モジュールと、
前記発振モジュールに連結されている増幅モジュールと、
前記増幅モジュールに連結されており、かつ前記誘電体ウインドウの近くに配置される、アプリケータとを備える、
処理ツール。 - 前記アプリケータが前記誘電体ウインドウの表面上に置かれる、請求項1に記載の処理ツール。
- 前記アプリケータが前記誘電体ウインドウ内に形成されたキャビティの中に設置される、請求項1に記載の処理ツール。
- 前記アプリケータが前記誘電体ウインドウを通過している、請求項1に記載の処理ツール。
- 前記誘電体ウインドウが非平面である、請求項1に記載の処理ツール。
- 前記誘電体ウインドウがドーム形状である、請求項5に記載の処理ツール。
- 前記誘電体ウインドウが、前記処理チャンバに流体連結されている前置チャンバの一部分を形成している、請求項1に記載の処理ツール。
- 前記処理チャンバのプラズマ部分を前記処理チャンバの主たる処理部分から分離させる、第1の物理的な仕切りを更に備える、請求項1に記載の処理ツール。
- 第2の物理的な仕切りを更に備える、請求項8に記載の処理ツール。
- 前記第1の物理的な仕切り若しくは前記第2の物理的な仕切り、又は、前記第1の物理的な仕切り及び前記第2の物理的な仕切りが、電源に接続される、請求項9に記載の処理ツール。
- 前記電源が、RF電源、パルス化されたRF電源、DC電源、又はパルス化されたDC電源のうちの一又は複数を含む、請求項10に記載の処理ツール。
- 第1ガスラインが、前記処理チャンバの前記プラズマ部分へと第1ガス又は混合ガスを供給し、第2ガスラインが、前記処理チャンバの前記主たる処理部分へと第2ガス又は混合ガスを供給する、請求項8に記載の処理ツール。
- 主たる処理チャンバと、
前記主たる処理チャンバ内で基板を支持するためのチャックと、
前記主たる処理チャンバに流体連結されている前置チャンバであって、誘電体ウインドウが前記前置チャンバの一部分を形成している、前置チャンバと、
モジュール型高周波発出源とを備える、処理ツールであって、前記モジュール型高周波発出源が、
複数の高周波発出モジュールを備え、各高周波発出モジュールが、
発振モジュールと、
前記発振モジュールに連結されている増幅モジュールと、
前記増幅モジュールに連結されており、かつ前記誘電体ウインドウの近くに配置される、アプリケータとを備える、
処理ツール。 - 前記誘電体ウインドウが非平面である、請求項13に記載の処理ツール。
- 前記誘電体ウインドウが円筒形である、請求項14に記載の処理ツール。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/958,478 US11393661B2 (en) | 2018-04-20 | 2018-04-20 | Remote modular high-frequency source |
US15/958,478 | 2018-04-20 |
Publications (2)
Publication Number | Publication Date |
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JP2020009745A true JP2020009745A (ja) | 2020-01-16 |
JP2020009745A5 JP2020009745A5 (ja) | 2022-04-21 |
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JP2019077528A Pending JP2020009745A (ja) | 2018-04-20 | 2019-04-16 | 遠隔モジュール型高周波源 |
Country Status (5)
Country | Link |
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US (2) | US11393661B2 (ja) |
JP (1) | JP2020009745A (ja) |
KR (1) | KR20190122584A (ja) |
CN (2) | CN118098922A (ja) |
TW (1) | TWI821275B (ja) |
Cited By (1)
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WO2024029388A1 (ja) * | 2022-08-03 | 2024-02-08 | 東京エレクトロン株式会社 | 基板処理装置、流体活性化装置、基板処理方法及び流体活性化方法 |
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KR20220051192A (ko) * | 2019-08-13 | 2022-04-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 다이렉트 마이크로파 플라즈마를 이용한 peald 티타늄 나이트라이드 |
US11049694B2 (en) * | 2019-09-27 | 2021-06-29 | Applied Materials, Inc. | Modular microwave source with embedded ground surface |
US20210391156A1 (en) * | 2020-06-10 | 2021-12-16 | Applied Materials, Inc. | Clean unit for chamber exhaust cleaning |
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US20220319812A1 (en) | 2022-10-06 |
TWI821275B (zh) | 2023-11-11 |
US11393661B2 (en) | 2022-07-19 |
KR20190122584A (ko) | 2019-10-30 |
CN110391128B (zh) | 2024-03-15 |
US20190326098A1 (en) | 2019-10-24 |
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