JP2019531125A - 電気刺激及び監視装置 - Google Patents
電気刺激及び監視装置 Download PDFInfo
- Publication number
- JP2019531125A JP2019531125A JP2019515256A JP2019515256A JP2019531125A JP 2019531125 A JP2019531125 A JP 2019531125A JP 2019515256 A JP2019515256 A JP 2019515256A JP 2019515256 A JP2019515256 A JP 2019515256A JP 2019531125 A JP2019531125 A JP 2019531125A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- capacitor
- substrate
- stimulation
- well
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000638 stimulation Effects 0.000 title claims abstract description 87
- 238000012806 monitoring device Methods 0.000 title claims abstract description 10
- 239000003990 capacitor Substances 0.000 claims abstract description 183
- 239000000758 substrate Substances 0.000 claims abstract description 153
- 239000004065 semiconductor Substances 0.000 claims abstract description 28
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 230000004044 response Effects 0.000 claims description 12
- 239000004020 conductor Substances 0.000 claims description 9
- 238000012544 monitoring process Methods 0.000 claims description 7
- 239000012777 electrically insulating material Substances 0.000 claims description 6
- 239000011810 insulating material Substances 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 abstract description 20
- 238000006880 cross-coupling reaction Methods 0.000 abstract description 11
- 238000010586 diagram Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 9
- 238000002955 isolation Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000004936 stimulating effect Effects 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 210000004556 brain Anatomy 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001537 neural effect Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000001225 therapeutic effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/4833—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures
- G01N33/4836—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures using multielectrode arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/228—Circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0611—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region
- H01L27/0641—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type
- H01L27/0676—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration integrated circuits having a two-dimensional layout of components without a common active region without components of the field effect type comprising combinations of diodes, or capacitors or resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/0805—Capacitors only
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biomedical Technology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Medicinal Chemistry (AREA)
- Urology & Nephrology (AREA)
- Molecular Biology (AREA)
- Hematology (AREA)
- Biophysics (AREA)
- Food Science & Technology (AREA)
- Ceramic Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Semiconductor Integrated Circuits (AREA)
- Electrotherapy Devices (AREA)
- Measurement And Recording Of Electrical Phenomena And Electrical Characteristics Of The Living Body (AREA)
Abstract
Description
第1導電型の半導体基板であって、全てが第2の導電型を有する、分離したウェルのセットを備え、第1導電型及び第2の導電型は互いに反対であるため、各ウェルは、このウェルと第1導電型である基板のバルク部との間の境界にそれぞれの埋め込みダイオードを形成する、半導体基板と、
それぞれが他のキャパシタ構造とは別に、ウェルのうちの1つに収容されたキャパシタ構造のセットであって、各キャパシタ構造は、第1の電極と、第2の電極と、電気絶縁材料の層部分とを有し、第1の電極は、このキャパシタ構造専用のウェルによって形成され、絶縁材料の層部分は、第1の電極と第2の電極との間に配置されている、キャパシタ構造のセットと、
それぞれがキャパシタ構造のうちの1つの第1の電極に接続された刺激又は検知電極のセットと、
それぞれがキャパシタ構造のうちの1つの第2の電極に接続された刺激又は検知チャネルのセットであって、それぞれが、刺激又は検知チャネルと刺激又は検知電極の間に直列接続されたキャパシタ構造のうちの1つを介して、刺激又は検知電極のうちの1つに刺激電流を注入するための電流源を備えるか、あるいは、刺激又は検知電極のうちの1つによって収集され、該刺激又は検知電極と刺激又は検知チャネルとの間に直列接続されたキャパシタ構造を介して検知回路によって検出される、電圧応答を監視することを可能にする検知回路を備えている、刺激又は検知チャネルのセットと、
を備える。
Claims (9)
- 第1導電型の半導体基板(100)であって、全てが第2の導電型を有する分離したウェル(10,20,30)のセットを備え、前記第1導電型及び前記第2の導電型は互いに反対であるため、前記各ウェルは、当該ウェルと前記第1導電型である前記基板のバルク部(110)との間の境界にそれぞれの埋め込みダイオードを形成する、半導体基板(100)と、
それぞれが他の前記キャパシタ構造とは別に、前記ウェル(10,20,30)のうちの1つに収容されたキャパシタ構造(C1,C2,C3)のセットであって、各キャパシタ構造は、第1の電極(11,21,31)と、第2の電極(12,22,32)と、電気絶縁材料の層部分とを有し、前記第1の電極は、前記キャパシタ構造専用の前記ウェルによって形成され、前記絶縁材料の層部分は、前記第1の電極と前記第2の電極との間に配置されている、キャパシタ構造(C1,C2,C3)のセットと、
それぞれが前記キャパシタ構造(C2,C3)のうちの1つの前記第1の電極(21,31)に接続された刺激又は検知電極(25,35)のセットと、
それぞれが前記キャパシタ構造(C2,C3)のうちの1つの前記第2の電極(22,32)に接続された刺激又は検知チャネル(26,36)のセットであって、それぞれが、前記刺激又は検知チャネルと前記刺激又は検知電極(25,35)との間に直列接続された前記キャパシタ構造のうちの1つを介して、前記刺激又は検知電極のうちの1つに刺激電流を注入するための電流源を備えるか、あるいは、前記刺激又は検知電極によって収集され、該刺激又は検知電極と前記刺激又は検知チャネルとの間に直列接続された前記キャパシタ構造を介して検知回路によって検出される電圧応答を監視することを可能にする前記検知回路を備えている、刺激又は検知チャネル(26,36)のセットと、を備える、電気刺激及び監視装置であって、
前記装置は、前記基板バルク部(110)に電気的に接続された第1の電極(11)と、前記刺激又は検知電極(25,35)が電気刺激及び監視を通して分析されるべき媒体(300)に適用されるときに、前記刺激又は検知チャネル(26,36)に共通であり、また、前記媒体(300)に適用することを意図した基準電極(1)にも共通である第1の端子(2a)に対して設定された基準DC電圧を受電するために電気的に接続された第2の電極(12)とを有する、基板保持キャパシタと称されるキャパシタをさらに備える電気刺激及び監視装置。 - 前記基板保持キャパシタの前記第1の電極(11)は、基板表面(S100)に位置し、全てのウェル(10,20,30)の外側の前記基板バルク部に設けられた、少なくとも1つのコンタクト領域(111)を介して前記基板バルク部(110)に接続され、前記各コンタクト領域は、前記基板バルク部の導電率より高いが、前記ウェルの導電率より低い導電率を有する前記第1導電型であり、
前記各コンタクト領域(111)は、前記基板表面への投影において、点状コンタクト設計、又は、前記コンタクト領域が平行で、前記ウェル(10,20,30)の少なくとも1つの縁部に近いが、当該ウェルの外側にある線状コンタクト設計、あるいは、前記コンタクト領域が少なくとも1つのウェルを前記ウェルの外側で囲むループ状コンタクト設計を有する、請求項1に記載の装置。 - 前記刺激又は検知電極(25,35)のうちの1つと、前記刺激又は検知チャネル(26,36)のうちの1つとの間に接続された前記キャパシタ構造(C2,C3)のうちの1つを収容している前記ウェル(20,30)それぞれは、前記ウェルの外側で1つのコンタクト領域(111)によって囲まれている、請求項2に記載の装置。
- 前記半導体基板(100)は、該基板の表面(S100)に浅いドーピングブランケット(101)をさらに備え、前記浅いドーピングブランケットは、前記第1導電型であり、前記基板バルク部(110)の導電率より高い別の導電率を有し、前記浅いドーピングブランケットは、前記基板表面から前記基板バルク部内に延在し、前記各ウェル(10,20,30)を当該ウェルに接近して囲み、随意には、各コンタクト領域(111)から前記基板バルク部内にも延在する、請求項1から3のいずれか一項に記載の装置。
- 前記第1導電型はp型であり、前記第2の導電型はn型であり、前記装置は、前記基板保持キャパシタの前記第2の電極(12)によって受電される前記基準DC電圧がゼロ又は負となるように適合されるか、
あるいは、前記第1導電型はn型であり、前記第2の導電型はp型であり、前記装置は、前記基板保持キャパシタの前記第2の電極(12)によって受電される前記基準DC電圧が正となるように適合され、
前記基準DC電圧は、−40Vから+40Vの範囲内である、請求項1から4のいずれか一項に記載の装置。 - 前記基板保持キャパシタは、前記半導体基板(100)とは別の電子構成要素からなる、請求項1から5のいずれか一項に記載の装置。
- 前記基板保持キャパシタは、前記半導体基板(100)に設けられた前記ウェルの1つ(10)に収容される1つの専用の前記キャパシタ構造(C1)で構成され、
前記基板保持キャパシタ専用である前記キャパシタ構造(C1)の前記第1の電極(11)は、前記基板保持キャパシタの前記第1の電極を形成し、前記半導体基板(100)上に配置された金属様導電要素(13)を介して、前記基板バルク部(110)に電気的に接続され、
前記基板保持キャパシタ専用の前記キャパシタ構造(C1)の前記第2の電極(12)は、前記基板保持キャパシタの前記第2の電極を形成する、請求項1から5のいずれか一項に記載の装置。 - 前記基板保持キャパシタの前記第2の電極(12)を、前記基準DC電圧を供給するために配置された第2の端子(2b)に接続するスイッチ(3)をさらに備え、前記スイッチは、刺激が前記媒体(300)に印加される刺激期間に適する開状態(3a)と、前記媒体から前記応答電圧が収集される検知期間に適する閉状態(3b)とを有する、請求項1から7のいずれか一項に記載の装置。
- 前記キャパシタ構造(C1,C2,C3)のうちの少なくとも1つは、トレンチキャパシタ型であり、このため、前記キャパシタ構造は、前記キャパシタ構造を収容する前記ウェル(10,20,30)内に配置された少なくとも1つのトレンチを含み、前記キャパシタ構造は、電気絶縁材料の層部分と、導電材料の部分とをさらに備え、前記トレンチの外側の前記ウェルは、前記キャパシタ構造の前記第1の電極(11,21,31)を形成し、前記導電材料の部分は、前記キャパシタ構造の前記第2の電極(12,22,32)を形成し、少なくとも前記トレンチ内で前記電気絶縁材料の層部分上に積層されている、請求項1から8のいずれか一項に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP16306195.5 | 2016-09-19 | ||
EP16306195.5A EP3296727B1 (en) | 2016-09-19 | 2016-09-19 | Electrical stimulation and monitoring device |
PCT/EP2017/073450 WO2018050887A1 (en) | 2016-09-19 | 2017-09-18 | Electrical stimulation and monitoring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019531125A true JP2019531125A (ja) | 2019-10-31 |
JP6696050B2 JP6696050B2 (ja) | 2020-05-20 |
Family
ID=57178375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019515256A Active JP6696050B2 (ja) | 2016-09-19 | 2017-09-18 | 電気刺激及び監視装置 |
Country Status (6)
Country | Link |
---|---|
US (2) | US10488392B2 (ja) |
EP (1) | EP3296727B1 (ja) |
JP (1) | JP6696050B2 (ja) |
CN (1) | CN109716117B (ja) |
TW (1) | TWI741029B (ja) |
WO (1) | WO2018050887A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3632504B1 (en) * | 2018-10-04 | 2022-11-30 | Murata Manufacturing Co., Ltd. | Implementable semiconductor device, comprising an electrode and capacitor, and corresponding manufacturing method |
US11276684B2 (en) * | 2019-05-31 | 2022-03-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Recessed composite capacitor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006094703A (ja) * | 2004-08-30 | 2006-04-13 | Onchip Cellomics Consortium | 心筋拍動細胞を用いた細胞バイオアッセイチップおよびこれを用いるバイオアッセイ |
US20100060349A1 (en) * | 2008-09-11 | 2010-03-11 | Etter Steven M | Method of forming an integrated semiconductor device and structure therefor |
US20140093881A1 (en) * | 2012-01-31 | 2014-04-03 | Life Technologies Corporation | Methods and Computer Program Products for Compression of Sequencing Data |
WO2014085727A1 (en) * | 2012-11-27 | 2014-06-05 | Acea Biosceinces, Inc | System and method for monitoring cardiomyocyte beating, viability, morphology and electrophysilogical properties |
WO2016124714A1 (en) * | 2015-02-04 | 2016-08-11 | Università Degli Studi Di Cagliari | An organic transistor-based system for electrophysiological monitoring of cells and method for the monitoring of the cells |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19641777C2 (de) * | 1996-10-10 | 2001-09-27 | Micronas Gmbh | Verfahren zum Herstellen eines Sensors mit einer Metallelektrode in einer MOS-Anordnung |
US6953980B2 (en) * | 2002-06-11 | 2005-10-11 | Semiconductor Components Industries, Llc | Semiconductor filter circuit and method |
CN1610117A (zh) * | 2003-10-17 | 2005-04-27 | 松下电器产业株式会社 | 半导体装置及其制造方法 |
JP4748705B2 (ja) * | 2004-07-06 | 2011-08-17 | 三洋電機株式会社 | 半導体装置の製造方法 |
EP1898211A1 (en) * | 2006-09-08 | 2008-03-12 | Université Catholique de Louvain | Insulated substrate impedance transducer |
US7838383B2 (en) * | 2008-01-04 | 2010-11-23 | Freescale Semiconductor, Inc. | Methods for forming MOS capacitors |
US8021941B2 (en) * | 2009-07-21 | 2011-09-20 | International Business Machines Corporation | Bias-controlled deep trench substrate noise isolation integrated circuit device structures |
EP3466438A1 (en) * | 2009-08-03 | 2019-04-10 | Incube Labs, Llc | Swallowable capsule and method for stimulating incretin production within the intestinal tract |
CN103168341B (zh) * | 2010-07-03 | 2016-10-05 | 生命科技公司 | 具有轻度掺杂的排出装置的化学敏感的传感器 |
EP2713877B1 (de) * | 2011-05-23 | 2019-07-31 | Roche Diabetes Care GmbH | Sensorvorrichtung zum nachweis eines analyten |
US9958443B2 (en) * | 2011-10-31 | 2018-05-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Signal enhancement mechanism for dual-gate ion sensitive field effect transistor in on-chip disease diagnostic platform |
FR2994335A1 (fr) * | 2012-08-01 | 2014-02-07 | St Microelectronics Tours Sas | Dispositif de protection d'un circuit integre contre des surtensions |
US8823081B2 (en) * | 2012-09-21 | 2014-09-02 | Infineon Technologies Austria Ag | Transistor device with field electrode |
US8728844B1 (en) * | 2012-12-05 | 2014-05-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Backside CMOS compatible bioFET with no plasma induced damage |
US20140264468A1 (en) * | 2013-03-14 | 2014-09-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Biofet with increased sensing area |
FR3012664B1 (fr) * | 2013-10-29 | 2016-01-01 | Ipdia | Structure a capacite amelioree |
DE102014001155A1 (de) * | 2014-01-31 | 2015-08-06 | Hochschule Kaiserslautern | Vorrichtung und Verfahren zur Herstellung biologischer und/oder elektronischer Eigenschaften einer Probe sowie Verwendungen derselben |
CN106226509B (zh) * | 2016-08-12 | 2019-09-06 | 中国人民解放军第四军医大学 | 一种在小鼠前扣带回皮层诱发dse现象的方法 |
-
2016
- 2016-09-19 EP EP16306195.5A patent/EP3296727B1/en active Active
-
2017
- 2017-09-18 JP JP2019515256A patent/JP6696050B2/ja active Active
- 2017-09-18 CN CN201780057011.5A patent/CN109716117B/zh active Active
- 2017-09-18 WO PCT/EP2017/073450 patent/WO2018050887A1/en active Application Filing
- 2017-09-19 TW TW106132107A patent/TWI741029B/zh active
-
2019
- 2019-03-14 US US16/353,359 patent/US10488392B2/en active Active
- 2019-11-04 US US16/672,881 patent/US10969376B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006094703A (ja) * | 2004-08-30 | 2006-04-13 | Onchip Cellomics Consortium | 心筋拍動細胞を用いた細胞バイオアッセイチップおよびこれを用いるバイオアッセイ |
US20100060349A1 (en) * | 2008-09-11 | 2010-03-11 | Etter Steven M | Method of forming an integrated semiconductor device and structure therefor |
US20140093881A1 (en) * | 2012-01-31 | 2014-04-03 | Life Technologies Corporation | Methods and Computer Program Products for Compression of Sequencing Data |
WO2014085727A1 (en) * | 2012-11-27 | 2014-06-05 | Acea Biosceinces, Inc | System and method for monitoring cardiomyocyte beating, viability, morphology and electrophysilogical properties |
WO2016124714A1 (en) * | 2015-02-04 | 2016-08-11 | Università Degli Studi Di Cagliari | An organic transistor-based system for electrophysiological monitoring of cells and method for the monitoring of the cells |
Also Published As
Publication number | Publication date |
---|---|
CN109716117B (zh) | 2020-04-17 |
JP6696050B2 (ja) | 2020-05-20 |
WO2018050887A1 (en) | 2018-03-22 |
TW201814284A (zh) | 2018-04-16 |
US20200064327A1 (en) | 2020-02-27 |
TWI741029B (zh) | 2021-10-01 |
EP3296727A1 (en) | 2018-03-21 |
US10488392B2 (en) | 2019-11-26 |
CN109716117A (zh) | 2019-05-03 |
EP3296727B1 (en) | 2019-04-17 |
US20190212319A1 (en) | 2019-07-11 |
US10969376B2 (en) | 2021-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2850801B2 (ja) | 半導体素子 | |
CN100389495C (zh) | 静电放电引导组件及应用此组件的混合式电源的集成电路 | |
CN107636689B (zh) | 具有感测参考电位提供电路的指纹感测系统 | |
FR2728799A1 (fr) | Dispositif implantable actif, notamment stimulateur ou defibrillateur cardiaque, comportant des moyens de protection contre les perturbations electromagnetiques d'origine externe | |
JP2004207477A (ja) | ホール素子を有する半導体装置 | |
CN107394587B (zh) | Esd保护装置 | |
JP6696050B2 (ja) | 電気刺激及び監視装置 | |
ITMI992667A1 (it) | Struttura resistiva integrata su un substrato semiconduttore | |
JPH02280621A (ja) | トランジスタ回路 | |
KR100210554B1 (ko) | 반도체 장치의 입력 보호 회로 | |
US9984275B2 (en) | Fingerprint sensor having electrostatic discharge protection | |
CN105103284A (zh) | 半导体装置 | |
CN108573970A (zh) | 保护装置 | |
US6894881B1 (en) | ESD protection methods and devices using additional terminal in the diode structures | |
CN103794599A (zh) | 半导体装置 | |
US4190778A (en) | A.C. supplied integrated semi-conductor logic circuit | |
CN106605128B (zh) | 传感器装置 | |
CN209087832U (zh) | 电容器和系统 | |
CN108511420B (zh) | 半导体结构和芯片 | |
TWI648840B (zh) | 具有良好單脈衝雪崩能量之高壓半導體元件與相關之製作方法 | |
JP2004342995A (ja) | 半導体放射線検出器 | |
KR101050456B1 (ko) | 정전기 보호소자 | |
JPH0422163A (ja) | 半導体回路の保護装置 | |
JP2670437B2 (ja) | 電荷検出回路 | |
JP4248203B2 (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190423 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20190423 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20190925 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191001 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20191218 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200121 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200331 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200422 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6696050 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |