JP2019526738A - ドライ圧縮真空ポンプ - Google Patents

ドライ圧縮真空ポンプ Download PDF

Info

Publication number
JP2019526738A
JP2019526738A JP2019511755A JP2019511755A JP2019526738A JP 2019526738 A JP2019526738 A JP 2019526738A JP 2019511755 A JP2019511755 A JP 2019511755A JP 2019511755 A JP2019511755 A JP 2019511755A JP 2019526738 A JP2019526738 A JP 2019526738A
Authority
JP
Japan
Prior art keywords
toothed belt
vacuum pump
rotor
dry compression
compression vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019511755A
Other languages
English (en)
Japanese (ja)
Inventor
ドライフェルト，トーマス
シラー，ダーク
ギーマン，ウルフガング
ミュラー，ローランド
Original Assignee
レイボルド ゲーエムベーハー
レイボルド ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by レイボルド ゲーエムベーハー, レイボルド ゲーエムベーハー filed Critical レイボルド ゲーエムベーハー
Publication of JP2019526738A publication Critical patent/JP2019526738A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F04C29/0071—Couplings between rotors and input or output shafts acting by interengaging or mating parts, i.e. positive coupling of rotor and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/10—Fluid working
    • F04C2210/1005—Air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F04C2210/221—Air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/602—Gap; Clearance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/16—Air or water being indistinctly used as working fluid, i.e. the machine can work equally with air or water without any modification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00—Components
    • F05B2240/50—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00—Function
    • F05B2260/40—Transmission of power
    • F05B2260/402—Transmission of power through friction drives
    • F05B2260/4021—Transmission of power through friction drives through belt drives

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2019511755A 2016-08-30 2017-08-14 ドライ圧縮真空ポンプ Pending JP2019526738A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE202016005208.0 2016-08-30
DE202016005208.0U DE202016005208U1 (de) 2016-08-30 2016-08-30 Trockenverdichtende Vakuumpumpe
PCT/EP2017/070626 WO2018041620A1 (fr) 2016-08-30 2017-08-14 Pompe à vide à compression sèche

Publications (1)

Publication Number Publication Date
JP2019526738A true JP2019526738A (ja) 2019-09-19

Family

ID=59593115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019511755A Pending JP2019526738A (ja) 2016-08-30 2017-08-14 ドライ圧縮真空ポンプ

Country Status (9)

Country Link
US (1) US20190186493A1 (fr)
EP (1) EP3507496B1 (fr)
JP (1) JP2019526738A (fr)
KR (1) KR20190043139A (fr)
CN (1) CN109642574B (fr)
BR (1) BR112019002903A2 (fr)
CA (1) CA3034112A1 (fr)
DE (1) DE202016005208U1 (fr)
WO (1) WO2018041620A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202017003046U1 (de) * 2017-06-09 2018-09-14 Leybold Gmbh Trockenverdichtende Vakuumpumpe
EP3499041B1 (fr) * 2017-12-15 2020-07-01 Pfeiffer Vacuum Gmbh Pompe à vide à vis
DE202018000178U1 (de) * 2018-01-12 2019-04-15 Leybold Gmbh Kompressor
DE102018210922A1 (de) * 2018-07-03 2020-01-09 Leybold Gmbh Zwei- oder Mehrwellen-Vakuumpumpe
TW202040004A (zh) * 2019-04-19 2020-11-01 亞台富士精機股份有限公司 轉子及螺旋式幫浦
CN111120324A (zh) * 2019-12-30 2020-05-08 浙江思科瑞真空技术有限公司 一种具有多个吸入腔和排气口的螺杆真空泵

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104992A (ja) * 1987-07-18 1989-04-21 Boc Group Plc:The 改良真空ポンプ
JPH0599174A (ja) * 1991-10-08 1993-04-20 Matsushita Electric Ind Co Ltd 流体回転装置
WO1995011385A1 (fr) * 1993-10-18 1995-04-27 Opcon Autorotor Ab Dispositif de raccordement d'une machine a rotors en forme de vis a une poulie motrice ou commandee
JP2000161277A (ja) * 1998-11-27 2000-06-13 Toyota Autom Loom Works Ltd ポンプ装置
DE10334481A1 (de) * 2003-07-29 2005-03-17 Steffens, Ralf, Dr. Antrieb einer Spindelvakuumpumpe
JP2014043789A (ja) * 2012-08-24 2014-03-13 Shimadzu Corp 真空ポンプ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248801A (ja) * 1986-04-23 1987-10-29 Hitachi Ltd 無給油式スクリユ−流体機械
DE3706588C2 (de) * 1987-02-26 1993-12-02 Mannesmann Ag Antriebseinrichtung für Rotationskolbenverdichter
DE69132867T2 (de) * 1990-08-01 2002-09-12 Matsushita Electric Industrial Co., Ltd. Drehkolbenanlage für flüssige Medien
DE4318707A1 (de) * 1993-06-04 1994-12-08 Sihi Gmbh & Co Kg Verdrängermaschine mit elektronischer Motorsynchronisation
CN2363091Y (zh) * 1998-03-19 2000-02-09 机械工业部郑州机械研究所 圆弧及修正渐开线齿形高粘度齿轮泵
CN2397284Y (zh) * 1999-07-16 2000-09-20 大连理工大学 双螺杆压缩机螺杆转子新齿形
JP2003336656A (ja) * 2002-05-20 2003-11-28 Teijin Seiki Co Ltd 回転軸固定機構
DE202009003981U1 (de) * 2009-03-24 2010-08-19 Vacuubrand Gmbh + Co Kg Antrieb für eine Vakuumpumpe
US20100322806A1 (en) * 2009-06-18 2010-12-23 Aregger Markus Arrangement including a gear pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104992A (ja) * 1987-07-18 1989-04-21 Boc Group Plc:The 改良真空ポンプ
JPH0599174A (ja) * 1991-10-08 1993-04-20 Matsushita Electric Ind Co Ltd 流体回転装置
WO1995011385A1 (fr) * 1993-10-18 1995-04-27 Opcon Autorotor Ab Dispositif de raccordement d'une machine a rotors en forme de vis a une poulie motrice ou commandee
JP2000161277A (ja) * 1998-11-27 2000-06-13 Toyota Autom Loom Works Ltd ポンプ装置
DE10334481A1 (de) * 2003-07-29 2005-03-17 Steffens, Ralf, Dr. Antrieb einer Spindelvakuumpumpe
JP2014043789A (ja) * 2012-08-24 2014-03-13 Shimadzu Corp 真空ポンプ

Also Published As

Publication number Publication date
CN109642574A (zh) 2019-04-16
CA3034112A1 (fr) 2018-03-08
DE202016005208U1 (de) 2017-12-01
CN109642574B (zh) 2020-08-04
WO2018041620A1 (fr) 2018-03-08
EP3507496B1 (fr) 2020-07-15
KR20190043139A (ko) 2019-04-25
EP3507496A1 (fr) 2019-07-10
US20190186493A1 (en) 2019-06-20
BR112019002903A2 (pt) 2019-05-21

Similar Documents

Publication Publication Date Title
JP2019526738A (ja) ドライ圧縮真空ポンプ
JP4243498B2 (ja) リング歯車マシンクリアランス
JP6983872B2 (ja) 真空ポンプのスクリューロータ
JP7132909B2 (ja) スクリュー式真空ポンプ
JP4732833B2 (ja) スクリューロータおよび真空ポンプ
JP2924997B2 (ja) スクリュー機械
JP2021510404A (ja) 圧縮機
KR102451435B1 (ko) 펌프 밀봉
US7192262B2 (en) Twin-shaft vacuum pump and method of forming same
JP5108809B2 (ja) スクリューロータの製造方法及びスクリューロータ
JPH0658041B2 (ja) スクリユ−式回転機のスラスト力つり合い方法
JPH10266974A (ja) 歯先へ挿入されたシール部材を有する非クレセント型シールの内歯車ポンプ
JP2021102960A (ja) スクリュー式真空ポンプ
RU76994U1 (ru) Вакуумный пластинчато-роторный насос
JP2003254268A (ja) スクリューロータ及びスクリュー機械

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200715

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210706

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210917

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220208

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220427

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20220809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20221101

C60 Trial request (containing other claim documents, opposition documents)

Free format text: JAPANESE INTERMEDIATE CODE: C60

Effective date: 20221101

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20221110

C21 Notice of transfer of a case for reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C21

Effective date: 20221115

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20221228

C211 Notice of termination of reconsideration by examiners before appeal proceedings

Free format text: JAPANESE INTERMEDIATE CODE: C211

Effective date: 20230110