JP2019501494A5 - - Google Patents
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- Publication number
- JP2019501494A5 JP2019501494A5 JP2018529104A JP2018529104A JP2019501494A5 JP 2019501494 A5 JP2019501494 A5 JP 2019501494A5 JP 2018529104 A JP2018529104 A JP 2018529104A JP 2018529104 A JP2018529104 A JP 2018529104A JP 2019501494 A5 JP2019501494 A5 JP 2019501494A5
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- transmissive
- plasma lamp
- optical device
- broadband radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010521 absorption reaction Methods 0.000 claims 21
- 230000005855 radiation Effects 0.000 claims 19
- 239000007789 gas Substances 0.000 claims 18
- 230000003287 optical effect Effects 0.000 claims 16
- 238000005286 illumination Methods 0.000 claims 6
- 239000011358 absorbing material Substances 0.000 claims 4
- 230000005540 biological transmission Effects 0.000 claims 4
- 239000011261 inert gas Substances 0.000 claims 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 3
- 229910052799 carbon Inorganic materials 0.000 claims 3
- 229910052735 hafnium Inorganic materials 0.000 claims 3
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 230000004308 accommodation Effects 0.000 claims 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 210000004180 plasmocyte Anatomy 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 230000002459 sustained effect Effects 0.000 claims 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000005350 fused silica glass Substances 0.000 claims 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
Images
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021119800A JP7192056B2 (ja) | 2015-12-06 | 2021-07-20 | 光学装置 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562263663P | 2015-12-06 | 2015-12-06 | |
| US62/263,663 | 2015-12-06 | ||
| US15/360,397 US10283342B2 (en) | 2015-12-06 | 2016-11-23 | Laser sustained plasma light source with graded absorption features |
| US15/360,397 | 2016-11-23 | ||
| PCT/US2016/064980 WO2017100130A1 (en) | 2015-12-06 | 2016-12-05 | Laser sustained plasma light source with graded absorption features |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021119800A Division JP7192056B2 (ja) | 2015-12-06 | 2021-07-20 | 光学装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019501494A JP2019501494A (ja) | 2019-01-17 |
| JP2019501494A5 true JP2019501494A5 (cg-RX-API-DMAC7.html) | 2019-12-26 |
| JP6917992B2 JP6917992B2 (ja) | 2021-08-11 |
Family
ID=58798714
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018529104A Active JP6917992B2 (ja) | 2015-12-06 | 2016-12-05 | 傾斜吸収フィーチャを有するレーザ維持プラズマ光源 |
| JP2021119800A Active JP7192056B2 (ja) | 2015-12-06 | 2021-07-20 | 光学装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021119800A Active JP7192056B2 (ja) | 2015-12-06 | 2021-07-20 | 光学装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10283342B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3357081B1 (cg-RX-API-DMAC7.html) |
| JP (2) | JP6917992B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN108369891B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2017100130A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10690589B2 (en) * | 2017-07-28 | 2020-06-23 | Kla-Tencor Corporation | Laser sustained plasma light source with forced flow through natural convection |
| US10568195B2 (en) * | 2018-05-30 | 2020-02-18 | Kla-Tencor Corporation | System and method for pumping laser sustained plasma with a frequency converted illumination source |
| US11596048B2 (en) * | 2019-09-23 | 2023-02-28 | Kla Corporation | Rotating lamp for laser-sustained plasma illumination source |
| US10925146B1 (en) * | 2019-12-17 | 2021-02-16 | Applied Materials, Inc. | Ion source chamber with embedded heater |
| US11690162B2 (en) * | 2020-04-13 | 2023-06-27 | Kla Corporation | Laser-sustained plasma light source with gas vortex flow |
| US11887835B2 (en) * | 2021-08-10 | 2024-01-30 | Kla Corporation | Laser-sustained plasma lamps with graded concentration of hydroxyl radical |
| US20240276625A1 (en) * | 2023-02-14 | 2024-08-15 | Kla Corporation | Vuv laser-sustained plasma light source with long-pass filtering |
| US20250106973A1 (en) * | 2023-09-21 | 2025-03-27 | Kla Corporation | Sapphire lamp for laser sustained plasma broadband light source |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2552507Y2 (ja) * | 1991-04-26 | 1997-10-29 | 日本電気ホームエレクトロニクス株式会社 | 投射型表示装置 |
| JPH0534672A (ja) * | 1991-06-20 | 1993-02-12 | Pioneer Electron Corp | 投射型表示装置 |
| CN1242103A (zh) * | 1996-12-20 | 2000-01-19 | 熔化照明股份有限公司 | 反射陶瓷套管内装有发射光的等离子体的灯装置 |
| US6200005B1 (en) * | 1998-12-01 | 2001-03-13 | Ilc Technology, Inc. | Xenon ceramic lamp with integrated compound reflectors |
| DE19963588C2 (de) | 1999-12-29 | 2002-01-10 | Zeiss Carl | Optische Anordnung |
| DE10040998A1 (de) | 2000-08-22 | 2002-03-14 | Zeiss Carl | Projektionsbelichtungsanlage |
| JP3907041B2 (ja) | 2001-10-11 | 2007-04-18 | 日本碍子株式会社 | 高圧放電灯用放電管および高圧放電灯 |
| US6994453B2 (en) * | 2003-03-21 | 2006-02-07 | Blanchard Randall D | Illumination device having a dichroic mirror |
| KR20070002092A (ko) * | 2004-04-15 | 2007-01-04 | 마츠시타 덴끼 산교 가부시키가이샤 | 광원 장치, 조명 광학 장치 및 표시 장치 |
| JP2007121505A (ja) | 2005-10-26 | 2007-05-17 | Victor Co Of Japan Ltd | 反射型液晶表示装置 |
| US7435982B2 (en) | 2006-03-31 | 2008-10-14 | Energetiq Technology, Inc. | Laser-driven light source |
| US7989786B2 (en) | 2006-03-31 | 2011-08-02 | Energetiq Technology, Inc. | Laser-driven light source |
| US7705331B1 (en) | 2006-06-29 | 2010-04-27 | Kla-Tencor Technologies Corp. | Methods and systems for providing illumination of a specimen for a process performed on the specimen |
| TWI457715B (zh) | 2008-12-27 | 2014-10-21 | Ushio Electric Inc | Light source device |
| US9099292B1 (en) | 2009-05-28 | 2015-08-04 | Kla-Tencor Corporation | Laser-sustained plasma light source |
| US8035285B2 (en) | 2009-07-08 | 2011-10-11 | General Electric Company | Hybrid interference coatings, lamps, and methods |
| KR101748461B1 (ko) | 2010-02-09 | 2017-06-16 | 에너제틱 테크놀로지 아이엔씨. | 레이저 구동 광원 |
| US9579662B2 (en) | 2010-08-27 | 2017-02-28 | Aerosol Dynamics Inc. | Condensation-evaporator nanoparticle charger |
| EP2612346B1 (en) * | 2010-08-30 | 2017-01-25 | Koninklijke Philips N.V. | Automotive front lamp with graded absorption coating |
| US9318311B2 (en) | 2011-10-11 | 2016-04-19 | Kla-Tencor Corporation | Plasma cell for laser-sustained plasma light source |
| US9927094B2 (en) | 2012-01-17 | 2018-03-27 | Kla-Tencor Corporation | Plasma cell for providing VUV filtering in a laser-sustained plasma light source |
| SG11201407782QA (en) | 2012-06-12 | 2015-01-29 | Asml Netherlands Bv | Photon source, metrology apparatus, lithographic system and device manufacturing method |
| US9232622B2 (en) * | 2013-02-22 | 2016-01-05 | Kla-Tencor Corporation | Gas refraction compensation for laser-sustained plasma bulbs |
| US8853655B2 (en) * | 2013-02-22 | 2014-10-07 | Kla-Tencor Corporation | Gas refraction compensation for laser-sustained plasma bulbs |
| US9390902B2 (en) | 2013-03-29 | 2016-07-12 | Kla-Tencor Corporation | Method and system for controlling convective flow in a light-sustained plasma |
| US9185788B2 (en) | 2013-05-29 | 2015-11-10 | Kla-Tencor Corporation | Method and system for controlling convection within a plasma cell |
| US9723703B2 (en) * | 2014-04-01 | 2017-08-01 | Kla-Tencor Corporation | System and method for transverse pumping of laser-sustained plasma |
| US10887974B2 (en) | 2015-06-22 | 2021-01-05 | Kla Corporation | High efficiency laser-sustained plasma light source |
-
2016
- 2016-11-23 US US15/360,397 patent/US10283342B2/en active Active
- 2016-12-05 WO PCT/US2016/064980 patent/WO2017100130A1/en not_active Ceased
- 2016-12-05 EP EP16873646.0A patent/EP3357081B1/en active Active
- 2016-12-05 CN CN201680071090.0A patent/CN108369891B/zh active Active
- 2016-12-05 JP JP2018529104A patent/JP6917992B2/ja active Active
-
2021
- 2021-07-20 JP JP2021119800A patent/JP7192056B2/ja active Active
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