JP6917992B2 - 傾斜吸収フィーチャを有するレーザ維持プラズマ光源 - Google Patents

傾斜吸収フィーチャを有するレーザ維持プラズマ光源 Download PDF

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Publication number
JP6917992B2
JP6917992B2 JP2018529104A JP2018529104A JP6917992B2 JP 6917992 B2 JP6917992 B2 JP 6917992B2 JP 2018529104 A JP2018529104 A JP 2018529104A JP 2018529104 A JP2018529104 A JP 2018529104A JP 6917992 B2 JP6917992 B2 JP 6917992B2
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plasma
plasma lamp
gas
absorption
radiation
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Japanese (ja)
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JP2019501494A (ja
JP2019501494A5 (cg-RX-API-DMAC7.html
Inventor
イリヤ ベゼル
イリヤ ベゼル
アナトリー シュメリニン
アナトリー シュメリニン
ケネス ピー グロス
ケネス ピー グロス
マシュー パンザー
マシュー パンザー
アナント チーマルギ
アナント チーマルギ
ローレン ウィルソン
ローレン ウィルソン
ジョシュア ウィッテンバーグ
ジョシュア ウィッテンバーグ
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KLA Corp
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KLA Corp
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Publication of JP2019501494A5 publication Critical patent/JP2019501494A5/ja
Priority to JP2021119800A priority Critical patent/JP7192056B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/302—Vessels; Containers characterised by the material of the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Plasma Technology (AREA)
  • Optics & Photonics (AREA)
JP2018529104A 2015-12-06 2016-12-05 傾斜吸収フィーチャを有するレーザ維持プラズマ光源 Active JP6917992B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021119800A JP7192056B2 (ja) 2015-12-06 2021-07-20 光学装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562263663P 2015-12-06 2015-12-06
US62/263,663 2015-12-06
US15/360,397 US10283342B2 (en) 2015-12-06 2016-11-23 Laser sustained plasma light source with graded absorption features
US15/360,397 2016-11-23
PCT/US2016/064980 WO2017100130A1 (en) 2015-12-06 2016-12-05 Laser sustained plasma light source with graded absorption features

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021119800A Division JP7192056B2 (ja) 2015-12-06 2021-07-20 光学装置

Publications (3)

Publication Number Publication Date
JP2019501494A JP2019501494A (ja) 2019-01-17
JP2019501494A5 JP2019501494A5 (cg-RX-API-DMAC7.html) 2019-12-26
JP6917992B2 true JP6917992B2 (ja) 2021-08-11

Family

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Family Applications (2)

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JP2018529104A Active JP6917992B2 (ja) 2015-12-06 2016-12-05 傾斜吸収フィーチャを有するレーザ維持プラズマ光源
JP2021119800A Active JP7192056B2 (ja) 2015-12-06 2021-07-20 光学装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021119800A Active JP7192056B2 (ja) 2015-12-06 2021-07-20 光学装置

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Country Link
US (1) US10283342B2 (cg-RX-API-DMAC7.html)
EP (1) EP3357081B1 (cg-RX-API-DMAC7.html)
JP (2) JP6917992B2 (cg-RX-API-DMAC7.html)
CN (1) CN108369891B (cg-RX-API-DMAC7.html)
WO (1) WO2017100130A1 (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10690589B2 (en) * 2017-07-28 2020-06-23 Kla-Tencor Corporation Laser sustained plasma light source with forced flow through natural convection
US10568195B2 (en) * 2018-05-30 2020-02-18 Kla-Tencor Corporation System and method for pumping laser sustained plasma with a frequency converted illumination source
US11596048B2 (en) * 2019-09-23 2023-02-28 Kla Corporation Rotating lamp for laser-sustained plasma illumination source
US10925146B1 (en) * 2019-12-17 2021-02-16 Applied Materials, Inc. Ion source chamber with embedded heater
US11690162B2 (en) * 2020-04-13 2023-06-27 Kla Corporation Laser-sustained plasma light source with gas vortex flow
US11887835B2 (en) * 2021-08-10 2024-01-30 Kla Corporation Laser-sustained plasma lamps with graded concentration of hydroxyl radical
US20240276625A1 (en) * 2023-02-14 2024-08-15 Kla Corporation Vuv laser-sustained plasma light source with long-pass filtering
US20250106973A1 (en) * 2023-09-21 2025-03-27 Kla Corporation Sapphire lamp for laser sustained plasma broadband light source

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JP2552507Y2 (ja) * 1991-04-26 1997-10-29 日本電気ホームエレクトロニクス株式会社 投射型表示装置
JPH0534672A (ja) * 1991-06-20 1993-02-12 Pioneer Electron Corp 投射型表示装置
CN1242103A (zh) * 1996-12-20 2000-01-19 熔化照明股份有限公司 反射陶瓷套管内装有发射光的等离子体的灯装置
US6200005B1 (en) * 1998-12-01 2001-03-13 Ilc Technology, Inc. Xenon ceramic lamp with integrated compound reflectors
DE19963588C2 (de) 1999-12-29 2002-01-10 Zeiss Carl Optische Anordnung
DE10040998A1 (de) 2000-08-22 2002-03-14 Zeiss Carl Projektionsbelichtungsanlage
JP3907041B2 (ja) 2001-10-11 2007-04-18 日本碍子株式会社 高圧放電灯用放電管および高圧放電灯
US6994453B2 (en) * 2003-03-21 2006-02-07 Blanchard Randall D Illumination device having a dichroic mirror
KR20070002092A (ko) * 2004-04-15 2007-01-04 마츠시타 덴끼 산교 가부시키가이샤 광원 장치, 조명 광학 장치 및 표시 장치
JP2007121505A (ja) 2005-10-26 2007-05-17 Victor Co Of Japan Ltd 反射型液晶表示装置
US7435982B2 (en) 2006-03-31 2008-10-14 Energetiq Technology, Inc. Laser-driven light source
US7989786B2 (en) 2006-03-31 2011-08-02 Energetiq Technology, Inc. Laser-driven light source
US7705331B1 (en) 2006-06-29 2010-04-27 Kla-Tencor Technologies Corp. Methods and systems for providing illumination of a specimen for a process performed on the specimen
TWI457715B (zh) 2008-12-27 2014-10-21 Ushio Electric Inc Light source device
US9099292B1 (en) 2009-05-28 2015-08-04 Kla-Tencor Corporation Laser-sustained plasma light source
US8035285B2 (en) 2009-07-08 2011-10-11 General Electric Company Hybrid interference coatings, lamps, and methods
KR101748461B1 (ko) 2010-02-09 2017-06-16 에너제틱 테크놀로지 아이엔씨. 레이저 구동 광원
US9579662B2 (en) 2010-08-27 2017-02-28 Aerosol Dynamics Inc. Condensation-evaporator nanoparticle charger
EP2612346B1 (en) * 2010-08-30 2017-01-25 Koninklijke Philips N.V. Automotive front lamp with graded absorption coating
US9318311B2 (en) 2011-10-11 2016-04-19 Kla-Tencor Corporation Plasma cell for laser-sustained plasma light source
US9927094B2 (en) 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source
SG11201407782QA (en) 2012-06-12 2015-01-29 Asml Netherlands Bv Photon source, metrology apparatus, lithographic system and device manufacturing method
US9232622B2 (en) * 2013-02-22 2016-01-05 Kla-Tencor Corporation Gas refraction compensation for laser-sustained plasma bulbs
US8853655B2 (en) * 2013-02-22 2014-10-07 Kla-Tencor Corporation Gas refraction compensation for laser-sustained plasma bulbs
US9390902B2 (en) 2013-03-29 2016-07-12 Kla-Tencor Corporation Method and system for controlling convective flow in a light-sustained plasma
US9185788B2 (en) 2013-05-29 2015-11-10 Kla-Tencor Corporation Method and system for controlling convection within a plasma cell
US9723703B2 (en) * 2014-04-01 2017-08-01 Kla-Tencor Corporation System and method for transverse pumping of laser-sustained plasma
US10887974B2 (en) 2015-06-22 2021-01-05 Kla Corporation High efficiency laser-sustained plasma light source

Also Published As

Publication number Publication date
EP3357081A1 (en) 2018-08-08
JP7192056B2 (ja) 2022-12-19
CN108369891A (zh) 2018-08-03
JP2019501494A (ja) 2019-01-17
CN108369891B (zh) 2021-06-18
JP2021170548A (ja) 2021-10-28
US10283342B2 (en) 2019-05-07
US20170164457A1 (en) 2017-06-08
EP3357081B1 (en) 2020-04-29
EP3357081A4 (en) 2019-06-12
WO2017100130A1 (en) 2017-06-15

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