JP2019500748A5 - - Google Patents

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Publication number
JP2019500748A5
JP2019500748A5 JP2018528345A JP2018528345A JP2019500748A5 JP 2019500748 A5 JP2019500748 A5 JP 2019500748A5 JP 2018528345 A JP2018528345 A JP 2018528345A JP 2018528345 A JP2018528345 A JP 2018528345A JP 2019500748 A5 JP2019500748 A5 JP 2019500748A5
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JP
Japan
Prior art keywords
component
substrate
voltage
contact
electrostatic charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018528345A
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English (en)
Japanese (ja)
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JP2019500748A (ja
JP6811777B2 (ja
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Application filed filed Critical
Priority claimed from PCT/US2016/064100 external-priority patent/WO2017095857A1/en
Publication of JP2019500748A publication Critical patent/JP2019500748A/ja
Publication of JP2019500748A5 publication Critical patent/JP2019500748A5/ja
Application granted granted Critical
Publication of JP6811777B2 publication Critical patent/JP6811777B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018528345A 2015-12-03 2016-11-30 基板の静電荷を測定する方法および装置 Expired - Fee Related JP6811777B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562262638P 2015-12-03 2015-12-03
US62/262,638 2015-12-03
PCT/US2016/064100 WO2017095857A1 (en) 2015-12-03 2016-11-30 Method and apparatus for measuring electrostatic charge of a substrate

Publications (3)

Publication Number Publication Date
JP2019500748A JP2019500748A (ja) 2019-01-10
JP2019500748A5 true JP2019500748A5 (https=) 2019-11-28
JP6811777B2 JP6811777B2 (ja) 2021-01-13

Family

ID=58798105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018528345A Expired - Fee Related JP6811777B2 (ja) 2015-12-03 2016-11-30 基板の静電荷を測定する方法および装置

Country Status (6)

Country Link
US (1) US10739394B2 (https=)
JP (1) JP6811777B2 (https=)
KR (1) KR20180081630A (https=)
CN (1) CN108291931B (https=)
TW (1) TWI712803B (https=)
WO (1) WO2017095857A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021034820A1 (en) * 2019-08-20 2021-02-25 Ascend Performance Materials Operations Llc Method for measuring static attraction propensity
US11881424B2 (en) * 2022-03-10 2024-01-23 Intel Corporation Electrostatic charge measurement tool

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