CN108291931B - 用于测量基材的静电荷的方法和设备 - Google Patents

用于测量基材的静电荷的方法和设备 Download PDF

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Publication number
CN108291931B
CN108291931B CN201680070941.XA CN201680070941A CN108291931B CN 108291931 B CN108291931 B CN 108291931B CN 201680070941 A CN201680070941 A CN 201680070941A CN 108291931 B CN108291931 B CN 108291931B
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China
Prior art keywords
substrate
voltage
contact
roller
roller member
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Expired - Fee Related
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English (en)
Chinese (zh)
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CN108291931A (zh
Inventor
G·P·阿格尼洛
P·诺尔斯
C·R·尤斯坦尼克
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Corning Inc
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Corning Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24—Arrangements for measuring quantities of charge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/16—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices
    • G01R15/165—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN201680070941.XA 2015-12-03 2016-11-30 用于测量基材的静电荷的方法和设备 Expired - Fee Related CN108291931B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562262638P 2015-12-03 2015-12-03
US62/262,638 2015-12-03
PCT/US2016/064100 WO2017095857A1 (en) 2015-12-03 2016-11-30 Method and apparatus for measuring electrostatic charge of a substrate

Publications (2)

Publication Number Publication Date
CN108291931A CN108291931A (zh) 2018-07-17
CN108291931B true CN108291931B (zh) 2020-08-07

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CN201680070941.XA Expired - Fee Related CN108291931B (zh) 2015-12-03 2016-11-30 用于测量基材的静电荷的方法和设备

Country Status (6)

Country Link
US (1) US10739394B2 (https=)
JP (1) JP6811777B2 (https=)
KR (1) KR20180081630A (https=)
CN (1) CN108291931B (https=)
TW (1) TWI712803B (https=)
WO (1) WO2017095857A1 (https=)

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WO2021034820A1 (en) * 2019-08-20 2021-02-25 Ascend Performance Materials Operations Llc Method for measuring static attraction propensity
US11881424B2 (en) * 2022-03-10 2024-01-23 Intel Corporation Electrostatic charge measurement tool

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US3935517A (en) * 1975-01-02 1976-01-27 Xerox Corporation Constant current charging device
JPH05273835A (ja) * 1992-03-26 1993-10-22 Ricoh Co Ltd 接触帯電装置
US5983043A (en) * 1997-12-24 1999-11-09 Canon Kabushiki Kaisha Potential measuring apparatus and potential measuring method
CN1516624A (zh) * 2001-04-24 2004-07-28 3M 静电喷涂装置及方法
CN1885197A (zh) * 2005-06-24 2006-12-27 大日本网目版制造株式会社 成像设备及成像方法
CN101533251A (zh) * 2008-03-10 2009-09-16 株式会社东芝 图像形成装置以及图像形成装置的转印带旋转方法
CN103513119A (zh) * 2013-10-18 2014-01-15 河北大学 静电分选机转辊表面电荷密度分布的测量方法及测量装置
CN103609203A (zh) * 2011-04-27 2014-02-26 道康宁法国公司 基材的等离子体处理
CN104428134A (zh) * 2012-07-02 2015-03-18 康宁股份有限公司 对玻璃基材进行加工的方法和玻璃设备

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JPH05333076A (ja) * 1992-06-02 1993-12-17 Kanegafuchi Chem Ind Co Ltd 摩擦帯電量測定装置
JP2961472B2 (ja) * 1992-10-22 1999-10-12 三田工業株式会社 トナー像転写手段を備えた画像生成機
US5461324A (en) 1994-08-08 1995-10-24 International Business Machines Corporation Split-fixture configuration and method for testing circuit traces on a flexible substrate
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KR100265285B1 (ko) * 1997-12-30 2000-09-15 윤종용 정전기 센서를 이용한 표면 정전기 분포상태 측정방법과 장치 및 표면 정전기 분포상태 측정 시스템
JP2001013185A (ja) * 1999-06-29 2001-01-19 Hugle Electronics Inc 帯電分布測定装置
US6806014B2 (en) * 2001-08-21 2004-10-19 Aetas Technology, Inc. Monocomponent developing arrangement for electrophotography
US7103301B2 (en) * 2003-02-18 2006-09-05 Ricoh Company, Ltd. Image forming apparatus using a contact or a proximity type of charging system including a protection substance on a moveable body to be charged
JP4439994B2 (ja) * 2003-05-14 2010-03-24 キヤノン株式会社 画像形成装置及びカートリッジ、カートリッジに搭載される記憶装置
JP2005173305A (ja) * 2003-12-12 2005-06-30 Konica Minolta Business Technologies Inc 画像形成装置及び画像形成方法
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JP2007180074A (ja) * 2005-12-27 2007-07-12 Olympus Corp 静電気検出装置および基板検査装置
US8339637B2 (en) * 2007-08-03 2012-12-25 Ricoh Company, Ltd. Management apparatus, management system, operation status determination method, and image forming apparatus
WO2009099175A1 (ja) * 2008-02-08 2009-08-13 Brother Kogyo Kabushiki Kaisha 現像剤供給装置及び画像形成装置
JP5535670B2 (ja) * 2010-01-28 2014-07-02 富士フイルム株式会社 放射線画像検出器の製造方法
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JP6106974B2 (ja) * 2011-11-14 2017-04-05 株式会社リコー 転写装置及び画像形成装置
EP2801835B1 (en) 2011-12-26 2019-07-24 The University of Tokyo Measurement method and measurement device
CN102608440B (zh) 2012-03-12 2014-05-07 南京航空航天大学 一种静电传感实验系统及颗粒摩擦带电量的测量方法
JP2014016178A (ja) 2012-07-06 2014-01-30 Canon Inc 帯電量測定方法及び測定装置
CN102879658B (zh) 2012-09-20 2015-04-22 兰州大学 一种球盘式摩擦电测量装置
US8897675B2 (en) 2013-03-26 2014-11-25 Xerox Corporation Semi-contact bias charge roller

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876917A (en) * 1973-03-26 1975-04-08 Bell & Howell Co Electrostatic charging apparatus
US3935517A (en) * 1975-01-02 1976-01-27 Xerox Corporation Constant current charging device
JPH05273835A (ja) * 1992-03-26 1993-10-22 Ricoh Co Ltd 接触帯電装置
US5983043A (en) * 1997-12-24 1999-11-09 Canon Kabushiki Kaisha Potential measuring apparatus and potential measuring method
CN1516624A (zh) * 2001-04-24 2004-07-28 3M 静电喷涂装置及方法
CN1885197A (zh) * 2005-06-24 2006-12-27 大日本网目版制造株式会社 成像设备及成像方法
CN101533251A (zh) * 2008-03-10 2009-09-16 株式会社东芝 图像形成装置以及图像形成装置的转印带旋转方法
CN103609203A (zh) * 2011-04-27 2014-02-26 道康宁法国公司 基材的等离子体处理
CN104428134A (zh) * 2012-07-02 2015-03-18 康宁股份有限公司 对玻璃基材进行加工的方法和玻璃设备
CN103513119A (zh) * 2013-10-18 2014-01-15 河北大学 静电分选机转辊表面电荷密度分布的测量方法及测量装置

Also Published As

Publication number Publication date
CN108291931A (zh) 2018-07-17
WO2017095857A1 (en) 2017-06-08
TW201730568A (zh) 2017-09-01
JP2019500748A (ja) 2019-01-10
TWI712803B (zh) 2020-12-11
KR20180081630A (ko) 2018-07-16
US20180356452A1 (en) 2018-12-13
JP6811777B2 (ja) 2021-01-13
US10739394B2 (en) 2020-08-11

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