JP2019198227A5 - - Google Patents

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Publication number
JP2019198227A5
JP2019198227A5 JP2019147952A JP2019147952A JP2019198227A5 JP 2019198227 A5 JP2019198227 A5 JP 2019198227A5 JP 2019147952 A JP2019147952 A JP 2019147952A JP 2019147952 A JP2019147952 A JP 2019147952A JP 2019198227 A5 JP2019198227 A5 JP 2019198227A5
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Japan
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actuator according
displacement
contact
protrusion
transmission member
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JP2019147952A
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English (en)
Japanese (ja)
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JP6949905B2 (ja
JP2019198227A (ja
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Priority claimed from JP2018036744A external-priority patent/JP2018088821A/ja
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Priority claimed from JP2019147952A external-priority patent/JP6949905B2/ja
Publication of JP2019198227A publication Critical patent/JP2019198227A/ja
Publication of JP2019198227A5 publication Critical patent/JP2019198227A5/ja
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JP2019147952A 2018-03-01 2019-08-09 アクチュエータ、装置 Active JP6949905B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019147952A JP6949905B2 (ja) 2018-03-01 2019-08-09 アクチュエータ、装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018036744A JP2018088821A (ja) 2018-03-01 2018-03-01 振動型アクチュエータ、装置および光学機器
JP2019147952A JP6949905B2 (ja) 2018-03-01 2019-08-09 アクチュエータ、装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2018036744A Division JP2018088821A (ja) 2018-03-01 2018-03-01 振動型アクチュエータ、装置および光学機器

Publications (3)

Publication Number Publication Date
JP2019198227A JP2019198227A (ja) 2019-11-14
JP2019198227A5 true JP2019198227A5 (enExample) 2019-12-26
JP6949905B2 JP6949905B2 (ja) 2021-10-13

Family

ID=68538550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019147952A Active JP6949905B2 (ja) 2018-03-01 2019-08-09 アクチュエータ、装置

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JP (1) JP6949905B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7547173B2 (ja) * 2020-11-02 2024-09-09 キヤノン株式会社 振動型アクチュエータ、多軸ステージ、多関節ロボット及び装置

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