JP2019192647A5 - - Google Patents
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- Publication number
- JP2019192647A5 JP2019192647A5 JP2019125782A JP2019125782A JP2019192647A5 JP 2019192647 A5 JP2019192647 A5 JP 2019192647A5 JP 2019125782 A JP2019125782 A JP 2019125782A JP 2019125782 A JP2019125782 A JP 2019125782A JP 2019192647 A5 JP2019192647 A5 JP 2019192647A5
- Authority
- JP
- Japan
- Prior art keywords
- ignition
- plasma
- voltage
- anode
- operating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 15
- 238000012423 maintenance Methods 0.000 claims 4
- 238000000926 separation method Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12195367 | 2012-12-04 | ||
| EP12195367.3 | 2012-12-04 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015544452A Division JP6807154B2 (ja) | 2012-12-04 | 2013-11-27 | プラズマ発生装置を作動させる方法及び制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019192647A JP2019192647A (ja) | 2019-10-31 |
| JP2019192647A5 true JP2019192647A5 (enExample) | 2020-11-05 |
Family
ID=47562993
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015544452A Expired - Fee Related JP6807154B2 (ja) | 2012-12-04 | 2013-11-27 | プラズマ発生装置を作動させる方法及び制御装置 |
| JP2019125782A Pending JP2019192647A (ja) | 2012-12-04 | 2019-07-05 | プラズマ発生装置を作動させる方法及び制御装置 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015544452A Expired - Fee Related JP6807154B2 (ja) | 2012-12-04 | 2013-11-27 | プラズマ発生装置を作動させる方法及び制御装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9756713B2 (enExample) |
| EP (1) | EP2929759B1 (enExample) |
| JP (2) | JP6807154B2 (enExample) |
| CN (1) | CN104969665B (enExample) |
| CA (1) | CA2888299C (enExample) |
| ES (1) | ES2647851T3 (enExample) |
| WO (1) | WO2014086636A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2888299C (en) * | 2012-12-04 | 2021-08-10 | Oerlikon Metco Ag, Wohlen | Method and control unit for operating a plasma generation apparatus |
| US10886104B2 (en) | 2019-06-10 | 2021-01-05 | Advanced Energy Industries, Inc. | Adaptive plasma ignition |
| US11398369B2 (en) * | 2019-06-25 | 2022-07-26 | Applied Materials, Inc. | Method and apparatus for actively tuning a plasma power source |
| US11688584B2 (en) | 2020-04-29 | 2023-06-27 | Advanced Energy Industries, Inc. | Programmable ignition profiles for enhanced plasma ignition |
| JP7671680B2 (ja) * | 2021-10-29 | 2025-05-02 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225658A (en) * | 1988-03-24 | 1993-07-06 | Kabushiki Kaisha Komatsu Seisakusho | Stopping a plasma arc cutter upon completion of cutting |
| JPH0661628B2 (ja) | 1988-05-24 | 1994-08-17 | 株式会社小松製作所 | プラズマアーク切断機およびその制御方法 |
| TW312890B (enExample) | 1995-10-20 | 1997-08-11 | Eni Inc | |
| US5982099A (en) * | 1996-03-29 | 1999-11-09 | Lam Research Corporation | Method of and apparatus for igniting a plasma in an r.f. plasma processor |
| CN1051490C (zh) * | 1996-09-20 | 2000-04-19 | 株式会社三社电机制作所 | 电弧切割机 |
| JP3469078B2 (ja) | 1998-03-09 | 2003-11-25 | 日鐵溶接工業株式会社 | プラズマ加工装置のアーク点火装置 |
| GB9825452D0 (en) * | 1998-11-21 | 1999-01-13 | Arc Kinetics Ltd | Improved welding apparatus and method |
| JP2004237321A (ja) | 2003-02-06 | 2004-08-26 | Komatsu Sanki Kk | プラズマ加工装置 |
| US20050109738A1 (en) * | 2003-11-21 | 2005-05-26 | Hewett Roger W. | Color coding of plasma arc torch parts and part sets |
| JP2006202605A (ja) * | 2005-01-20 | 2006-08-03 | Kanken Techno Co Ltd | プラズマ除害機用電源装置 |
| EP1855833B1 (en) * | 2005-03-11 | 2020-02-26 | PerkinElmer, Inc. | Plasma devices and method of using them |
| CN201217119Y (zh) * | 2008-07-04 | 2009-04-08 | 华丰科技企业股份有限公司 | 新型氩焊起弧倍压装置 |
| JP2011049103A (ja) | 2009-08-28 | 2011-03-10 | Nissan Motor Co Ltd | プラズマ発生方法 |
| CN201625832U (zh) | 2009-11-23 | 2010-11-10 | 深圳市瑞凌实业股份有限公司 | 具有前导弧控制装置的逆变电源等离子切割机 |
| JP4891384B2 (ja) * | 2009-12-10 | 2012-03-07 | 株式会社新川 | プラズマ発生装置 |
| CN102350579A (zh) * | 2011-04-11 | 2012-02-15 | 西安理工大学 | 一种空气等离子切割机切割网格状金属的防断弧切割方法 |
| CN202271092U (zh) * | 2011-10-17 | 2012-06-13 | 无锡市南方电器制造有限公司 | 数控等离子切割机非高频引弧电路 |
| CA2888299C (en) * | 2012-12-04 | 2021-08-10 | Oerlikon Metco Ag, Wohlen | Method and control unit for operating a plasma generation apparatus |
| DE102013109887A1 (de) * | 2013-09-10 | 2015-03-12 | Reinhausen Plasma Gmbh | Handgerät und Verfahren zur Plasmabehandlung |
-
2013
- 2013-11-27 CA CA2888299A patent/CA2888299C/en active Active
- 2013-11-27 CN CN201380060808.2A patent/CN104969665B/zh not_active Expired - Fee Related
- 2013-11-27 WO PCT/EP2013/074851 patent/WO2014086636A1/de not_active Ceased
- 2013-11-27 US US14/648,426 patent/US9756713B2/en not_active Expired - Fee Related
- 2013-11-27 EP EP13795530.8A patent/EP2929759B1/de active Active
- 2013-11-27 ES ES13795530.8T patent/ES2647851T3/es active Active
- 2013-11-27 JP JP2015544452A patent/JP6807154B2/ja not_active Expired - Fee Related
-
2019
- 2019-07-05 JP JP2019125782A patent/JP2019192647A/ja active Pending
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