JP2019192647A5 - - Google Patents

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Publication number
JP2019192647A5
JP2019192647A5 JP2019125782A JP2019125782A JP2019192647A5 JP 2019192647 A5 JP2019192647 A5 JP 2019192647A5 JP 2019125782 A JP2019125782 A JP 2019125782A JP 2019125782 A JP2019125782 A JP 2019125782A JP 2019192647 A5 JP2019192647 A5 JP 2019192647A5
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JP
Japan
Prior art keywords
ignition
plasma
voltage
anode
operating
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Pending
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JP2019125782A
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English (en)
Japanese (ja)
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JP2019192647A (ja
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Publication of JP2019192647A publication Critical patent/JP2019192647A/ja
Publication of JP2019192647A5 publication Critical patent/JP2019192647A5/ja
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JP2019125782A 2012-12-04 2019-07-05 プラズマ発生装置を作動させる方法及び制御装置 Pending JP2019192647A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12195367 2012-12-04
EP12195367.3 2012-12-04

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2015544452A Division JP6807154B2 (ja) 2012-12-04 2013-11-27 プラズマ発生装置を作動させる方法及び制御装置

Publications (2)

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JP2019192647A JP2019192647A (ja) 2019-10-31
JP2019192647A5 true JP2019192647A5 (enExample) 2020-11-05

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JP2015544452A Expired - Fee Related JP6807154B2 (ja) 2012-12-04 2013-11-27 プラズマ発生装置を作動させる方法及び制御装置
JP2019125782A Pending JP2019192647A (ja) 2012-12-04 2019-07-05 プラズマ発生装置を作動させる方法及び制御装置

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JP2015544452A Expired - Fee Related JP6807154B2 (ja) 2012-12-04 2013-11-27 プラズマ発生装置を作動させる方法及び制御装置

Country Status (7)

Country Link
US (1) US9756713B2 (enExample)
EP (1) EP2929759B1 (enExample)
JP (2) JP6807154B2 (enExample)
CN (1) CN104969665B (enExample)
CA (1) CA2888299C (enExample)
ES (1) ES2647851T3 (enExample)
WO (1) WO2014086636A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2888299C (en) * 2012-12-04 2021-08-10 Oerlikon Metco Ag, Wohlen Method and control unit for operating a plasma generation apparatus
US10886104B2 (en) 2019-06-10 2021-01-05 Advanced Energy Industries, Inc. Adaptive plasma ignition
US11398369B2 (en) * 2019-06-25 2022-07-26 Applied Materials, Inc. Method and apparatus for actively tuning a plasma power source
US11688584B2 (en) 2020-04-29 2023-06-27 Advanced Energy Industries, Inc. Programmable ignition profiles for enhanced plasma ignition
JP7671680B2 (ja) * 2021-10-29 2025-05-02 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225658A (en) * 1988-03-24 1993-07-06 Kabushiki Kaisha Komatsu Seisakusho Stopping a plasma arc cutter upon completion of cutting
JPH0661628B2 (ja) 1988-05-24 1994-08-17 株式会社小松製作所 プラズマアーク切断機およびその制御方法
TW312890B (enExample) 1995-10-20 1997-08-11 Eni Inc
US5982099A (en) * 1996-03-29 1999-11-09 Lam Research Corporation Method of and apparatus for igniting a plasma in an r.f. plasma processor
CN1051490C (zh) * 1996-09-20 2000-04-19 株式会社三社电机制作所 电弧切割机
JP3469078B2 (ja) 1998-03-09 2003-11-25 日鐵溶接工業株式会社 プラズマ加工装置のアーク点火装置
GB9825452D0 (en) * 1998-11-21 1999-01-13 Arc Kinetics Ltd Improved welding apparatus and method
JP2004237321A (ja) 2003-02-06 2004-08-26 Komatsu Sanki Kk プラズマ加工装置
US20050109738A1 (en) * 2003-11-21 2005-05-26 Hewett Roger W. Color coding of plasma arc torch parts and part sets
JP2006202605A (ja) * 2005-01-20 2006-08-03 Kanken Techno Co Ltd プラズマ除害機用電源装置
EP1855833B1 (en) * 2005-03-11 2020-02-26 PerkinElmer, Inc. Plasma devices and method of using them
CN201217119Y (zh) * 2008-07-04 2009-04-08 华丰科技企业股份有限公司 新型氩焊起弧倍压装置
JP2011049103A (ja) 2009-08-28 2011-03-10 Nissan Motor Co Ltd プラズマ発生方法
CN201625832U (zh) 2009-11-23 2010-11-10 深圳市瑞凌实业股份有限公司 具有前导弧控制装置的逆变电源等离子切割机
JP4891384B2 (ja) * 2009-12-10 2012-03-07 株式会社新川 プラズマ発生装置
CN102350579A (zh) * 2011-04-11 2012-02-15 西安理工大学 一种空气等离子切割机切割网格状金属的防断弧切割方法
CN202271092U (zh) * 2011-10-17 2012-06-13 无锡市南方电器制造有限公司 数控等离子切割机非高频引弧电路
CA2888299C (en) * 2012-12-04 2021-08-10 Oerlikon Metco Ag, Wohlen Method and control unit for operating a plasma generation apparatus
DE102013109887A1 (de) * 2013-09-10 2015-03-12 Reinhausen Plasma Gmbh Handgerät und Verfahren zur Plasmabehandlung

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