ES2647851T3 - Método y dispositivo de control para hacer funcionar un aparato de generación de plasma - Google Patents

Método y dispositivo de control para hacer funcionar un aparato de generación de plasma Download PDF

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Publication number
ES2647851T3
ES2647851T3 ES13795530.8T ES13795530T ES2647851T3 ES 2647851 T3 ES2647851 T3 ES 2647851T3 ES 13795530 T ES13795530 T ES 13795530T ES 2647851 T3 ES2647851 T3 ES 2647851T3
Authority
ES
Spain
Prior art keywords
ignition
plasma
voltage
anode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES13795530.8T
Other languages
English (en)
Spanish (es)
Inventor
Florian LIECHTI
Albert FRIEDERY
Hartmut KOSCHNITZKE
René GRÖBER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Metco AG
Original Assignee
Oerlikon Metco AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Metco AG filed Critical Oerlikon Metco AG
Application granted granted Critical
Publication of ES2647851T3 publication Critical patent/ES2647851T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Plasma Technology (AREA)
  • Arc Welding Control (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
ES13795530.8T 2012-12-04 2013-11-27 Método y dispositivo de control para hacer funcionar un aparato de generación de plasma Active ES2647851T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12195367 2012-12-04
EP12195367 2012-12-04
PCT/EP2013/074851 WO2014086636A1 (de) 2012-12-04 2013-11-27 Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung

Publications (1)

Publication Number Publication Date
ES2647851T3 true ES2647851T3 (es) 2017-12-26

Family

ID=47562993

Family Applications (1)

Application Number Title Priority Date Filing Date
ES13795530.8T Active ES2647851T3 (es) 2012-12-04 2013-11-27 Método y dispositivo de control para hacer funcionar un aparato de generación de plasma

Country Status (7)

Country Link
US (1) US9756713B2 (enExample)
EP (1) EP2929759B1 (enExample)
JP (2) JP6807154B2 (enExample)
CN (1) CN104969665B (enExample)
CA (1) CA2888299C (enExample)
ES (1) ES2647851T3 (enExample)
WO (1) WO2014086636A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2888299C (en) * 2012-12-04 2021-08-10 Oerlikon Metco Ag, Wohlen Method and control unit for operating a plasma generation apparatus
US10886104B2 (en) 2019-06-10 2021-01-05 Advanced Energy Industries, Inc. Adaptive plasma ignition
US11398369B2 (en) * 2019-06-25 2022-07-26 Applied Materials, Inc. Method and apparatus for actively tuning a plasma power source
US11688584B2 (en) 2020-04-29 2023-06-27 Advanced Energy Industries, Inc. Programmable ignition profiles for enhanced plasma ignition
JP7671680B2 (ja) * 2021-10-29 2025-05-02 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225658A (en) * 1988-03-24 1993-07-06 Kabushiki Kaisha Komatsu Seisakusho Stopping a plasma arc cutter upon completion of cutting
JPH0661628B2 (ja) 1988-05-24 1994-08-17 株式会社小松製作所 プラズマアーク切断機およびその制御方法
TW312890B (enExample) 1995-10-20 1997-08-11 Eni Inc
US5982099A (en) * 1996-03-29 1999-11-09 Lam Research Corporation Method of and apparatus for igniting a plasma in an r.f. plasma processor
CN1051490C (zh) * 1996-09-20 2000-04-19 株式会社三社电机制作所 电弧切割机
JP3469078B2 (ja) 1998-03-09 2003-11-25 日鐵溶接工業株式会社 プラズマ加工装置のアーク点火装置
GB9825452D0 (en) * 1998-11-21 1999-01-13 Arc Kinetics Ltd Improved welding apparatus and method
JP2004237321A (ja) 2003-02-06 2004-08-26 Komatsu Sanki Kk プラズマ加工装置
US20050109738A1 (en) * 2003-11-21 2005-05-26 Hewett Roger W. Color coding of plasma arc torch parts and part sets
JP2006202605A (ja) * 2005-01-20 2006-08-03 Kanken Techno Co Ltd プラズマ除害機用電源装置
EP1855833B1 (en) * 2005-03-11 2020-02-26 PerkinElmer, Inc. Plasma devices and method of using them
CN201217119Y (zh) * 2008-07-04 2009-04-08 华丰科技企业股份有限公司 新型氩焊起弧倍压装置
JP2011049103A (ja) 2009-08-28 2011-03-10 Nissan Motor Co Ltd プラズマ発生方法
CN201625832U (zh) 2009-11-23 2010-11-10 深圳市瑞凌实业股份有限公司 具有前导弧控制装置的逆变电源等离子切割机
JP4891384B2 (ja) * 2009-12-10 2012-03-07 株式会社新川 プラズマ発生装置
CN102350579A (zh) * 2011-04-11 2012-02-15 西安理工大学 一种空气等离子切割机切割网格状金属的防断弧切割方法
CN202271092U (zh) * 2011-10-17 2012-06-13 无锡市南方电器制造有限公司 数控等离子切割机非高频引弧电路
CA2888299C (en) * 2012-12-04 2021-08-10 Oerlikon Metco Ag, Wohlen Method and control unit for operating a plasma generation apparatus
DE102013109887A1 (de) * 2013-09-10 2015-03-12 Reinhausen Plasma Gmbh Handgerät und Verfahren zur Plasmabehandlung

Also Published As

Publication number Publication date
JP6807154B2 (ja) 2021-01-06
CN104969665B (zh) 2018-04-13
WO2014086636A1 (de) 2014-06-12
CA2888299C (en) 2021-08-10
US9756713B2 (en) 2017-09-05
US20150319834A1 (en) 2015-11-05
EP2929759A1 (de) 2015-10-14
CN104969665A (zh) 2015-10-07
EP2929759B1 (de) 2017-08-16
JP2016506025A (ja) 2016-02-25
JP2019192647A (ja) 2019-10-31
CA2888299A1 (en) 2014-06-12

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