JP5716129B2 - パルス式の不連続火花放電を作動させる方法、陰極火花蒸着を作動させる方法及び基板をコーティングする方法 - Google Patents
パルス式の不連続火花放電を作動させる方法、陰極火花蒸着を作動させる方法及び基板をコーティングする方法 Download PDFInfo
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- JP5716129B2 JP5716129B2 JP2014504194A JP2014504194A JP5716129B2 JP 5716129 B2 JP5716129 B2 JP 5716129B2 JP 2014504194 A JP2014504194 A JP 2014504194A JP 2014504194 A JP2014504194 A JP 2014504194A JP 5716129 B2 JP5716129 B2 JP 5716129B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
- H01J37/32064—Circuits specially adapted for controlling the arc discharge
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/02—Details
- H05B7/144—Power supplies specially adapted for heating by electric discharge; Automatic control of power, e.g. by positioning of electrodes
- H05B7/148—Automatic control of power
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B7/00—Heating by electric discharge
- H05B7/18—Heating by arc discharge
- H05B7/20—Direct heating by arc discharge, i.e. where at least one end of the arc directly acts on the material to be heated, including additional resistance heating by arc current flowing through the material to be heated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Plasma Technology (AREA)
- Ignition Installations For Internal Combustion Engines (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
この明細書の枠内では、少なくとも1つのコンデンサの放電により惹起され、相応の放電電流がコンデンサの周期的なスイッチオンとスイッチオフによって制御される、パルス式の不連続火花放電を作動させる方法が開示されており、コンデンサがスイッチオフされているとき、スイッチオフされた時間インターバル内では供給部から電流が供給されず、スイッチオンされた時間インターバル内では事前に設定された量に達したときに放電電流が一時的に中断されて、このことがパルス内部でサブパルスを生じさせる。
基板をコーティングする方法が記載されており、該方法は次の各ステップを含んでいる:
−基板を準備し、
−基板を真空室に入れ、
−真空室を排気し、
−上に説明した種類の陰極火花蒸着を実施する。
2 ターゲット(陰極)
3 陽極(好ましくは、ただし必ずではなく、ターゲットに対して中央)
4 基板保持部(回転式)
5 直流電流(火花)供給部
6 パルス電流(火花)供給部
7 IKDを切り換えるためのスイッチ
8 IKPを切り換えるためのスイッチ
9 陽極をアースまたは浮動電位に切り換えるためのスイッチ
10 保護ダイオード
11 機械式の点弧フィンガ
12 点弧フィンガと陽極の間の電流制限のための抵抗器
Claims (7)
- 少なくとも1つのコンデンサの放電により惹起され、火花放電の際に放電電極間に流れる相応の放電電流が前記コンデンサの周期的なスイッチオンとスイッチオフによって制御される、パルス式の不連続火花放電を作動させる方法であって、
コンデンサがスイッチオフされているとき、スイッチオフされた時間インターバル内では、前記コンデンサを含む供給部から陰極としての炭素ターゲットへと電流が供給されず、
スイッチオンされた時間インターバル内では、放電電流が事前に設定された量に達したときに当該放電電流が一時的に中断されることにより、電流のパルスを、電流の複数のサブパルスに配分することを特徴とする方法。 - 少なくとも、前記サブパルスの時間インターバルに対応する、第1の多数のスイッチオフされる時間インターバルは、それが経過するたびにコンデンサのスイッチオンが火花放電の新たな点弧を惹起する程度に短く選択されることを特徴とする、請求項1に記載のパルス式の不連続火花放電を作動させる方法。
- 火花放電の最初の点弧は点弧装置としてのDC直流電圧源によって惹起され、火花の点弧後にコンデンサが初めてスイッチオンされ、前記コンデンサは初回のスイッチオンの時点で充電をする手段によって第1の充電状態を有しており、次いでスイッチオフされたDC直流電圧源のまま火花放電が引き続き作動することを特徴とする、請求項1または2に記載のパルス式の不連続火花放電を作動させる方法。
- 前記パルスの時間インターバルに対応する、第2の多数のスイッチオフされた時間インターバルは、少なくとも1つのコンデンサを充電する手段に依存して、第2の多数のスイッチオフされる時間インターバルの経過後に前記コンデンサが実質的に前記第1の充電状態に達する程度の長さに選択されることを特徴とする、請求項3に記載のパルス式の不連続火花放電を作動させる方法。
- 請求項1〜4のうちいずれか1項に記載のパルス式の不連続火花放電を作動させる方法によって火花蒸着が作動することを特徴とする、陰極火花蒸着を作動させる方法。
- 基板をコーティングする方法において、該方法は次の各ステップを含んでおり、すなわち、
−基板を準備し、
−基板を真空室に入れ、
−前記真空室を排気し、
−請求項5に記載の陰極火花蒸着を作動させる方法。 - 水素フリーおよび/または水素含有および/または金属フリーおよび/または金属含有の炭素層が製作されることを特徴とする、請求項6に記載の基板をコーティングする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011016681A DE102011016681A1 (de) | 2011-04-11 | 2011-04-11 | Kohlenstofffunkenverdampfung |
DE102011016681.5 | 2011-04-11 | ||
PCT/EP2012/001322 WO2012139707A1 (de) | 2011-04-11 | 2012-03-26 | Kohlenstofffunkenverdampfung |
Publications (2)
Publication Number | Publication Date |
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JP2014517868A JP2014517868A (ja) | 2014-07-24 |
JP5716129B2 true JP5716129B2 (ja) | 2015-05-13 |
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JP2014504194A Active JP5716129B2 (ja) | 2011-04-11 | 2012-03-26 | パルス式の不連続火花放電を作動させる方法、陰極火花蒸着を作動させる方法及び基板をコーティングする方法 |
Country Status (15)
Country | Link |
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US (1) | US9905399B2 (ja) |
EP (1) | EP2697817B1 (ja) |
JP (1) | JP5716129B2 (ja) |
KR (1) | KR101879896B1 (ja) |
CN (1) | CN103748655B (ja) |
AR (1) | AR085985A1 (ja) |
BR (1) | BR112013026134B1 (ja) |
CA (1) | CA2833048C (ja) |
DE (1) | DE102011016681A1 (ja) |
MX (1) | MX2013011828A (ja) |
MY (1) | MY161798A (ja) |
RU (1) | RU2594022C2 (ja) |
SG (1) | SG194178A1 (ja) |
TW (1) | TW201300561A (ja) |
WO (1) | WO2012139707A1 (ja) |
Families Citing this family (2)
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EP3690079B1 (en) * | 2017-09-25 | 2023-06-07 | Sumitomo Electric Industries, Ltd. | Method for manufacturing hard carbon-based coating, and member provided with coating |
CN113543446A (zh) * | 2020-04-13 | 2021-10-22 | 台达电子工业股份有限公司 | 电源产生器的点火方法 |
Family Cites Families (9)
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IL71530A (en) | 1984-04-12 | 1987-09-16 | Univ Ramot | Method and apparatus for surface-treating workpieces |
DE4401986A1 (de) | 1994-01-25 | 1995-07-27 | Dresden Vakuumtech Gmbh | Verfahren zum Betreiben eines Vakuumlichtbogenverdampfers und Stromversorgungseinrichtung dafür |
SE0402644D0 (sv) * | 2004-11-02 | 2004-11-02 | Biocell Ab | Method and apparatus for producing electric discharges |
HUE026952T2 (en) * | 2005-03-24 | 2016-08-29 | Oerlikon Surface Solutions Ag Truebbach | Hard Coating Materials |
US9997338B2 (en) * | 2005-03-24 | 2018-06-12 | Oerlikon Surface Solutions Ag, Pfäffikon | Method for operating a pulsed arc source |
US9605338B2 (en) * | 2006-10-11 | 2017-03-28 | Oerlikon Surface Solutions Ag, Pfaffikon | Method for depositing electrically insulating layers |
KR101499272B1 (ko) * | 2007-05-25 | 2015-03-05 | 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 | 진공 처리 장치 및 진공 처리 방법 |
US9613784B2 (en) * | 2008-07-17 | 2017-04-04 | Mks Instruments, Inc. | Sputtering system and method including an arc detection |
ES2374864T3 (es) * | 2009-03-30 | 2012-02-22 | Oerlikon Trading Ag, Trübbach | Método para pretratar sustratos para métodos pvd. |
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2011
- 2011-04-11 DE DE102011016681A patent/DE102011016681A1/de not_active Withdrawn
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- 2012-03-26 MX MX2013011828A patent/MX2013011828A/es active IP Right Grant
- 2012-03-26 CA CA2833048A patent/CA2833048C/en active Active
- 2012-03-26 RU RU2013150078/07A patent/RU2594022C2/ru active
- 2012-03-26 JP JP2014504194A patent/JP5716129B2/ja active Active
- 2012-03-26 SG SG2013076211A patent/SG194178A1/en unknown
- 2012-03-26 WO PCT/EP2012/001322 patent/WO2012139707A1/de active Application Filing
- 2012-03-26 EP EP12718058.6A patent/EP2697817B1/de active Active
- 2012-03-26 KR KR1020137026795A patent/KR101879896B1/ko active IP Right Grant
- 2012-03-26 MY MYPI2013003720A patent/MY161798A/en unknown
- 2012-03-26 US US14/110,982 patent/US9905399B2/en active Active
- 2012-03-26 CN CN201280018132.6A patent/CN103748655B/zh active Active
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Also Published As
Publication number | Publication date |
---|---|
MX2013011828A (es) | 2014-06-04 |
WO2012139707A8 (de) | 2013-11-28 |
RU2013150078A (ru) | 2015-05-20 |
CN103748655B (zh) | 2016-05-18 |
CA2833048C (en) | 2019-08-06 |
EP2697817A1 (de) | 2014-02-19 |
BR112013026134B1 (pt) | 2021-06-01 |
KR101879896B1 (ko) | 2018-07-18 |
JP2014517868A (ja) | 2014-07-24 |
MY161798A (en) | 2017-05-15 |
KR20140019796A (ko) | 2014-02-17 |
BR112013026134A2 (pt) | 2020-10-27 |
EP2697817B1 (de) | 2015-03-11 |
SG194178A1 (en) | 2013-12-30 |
AR085985A1 (es) | 2013-11-13 |
CN103748655A (zh) | 2014-04-23 |
RU2594022C2 (ru) | 2016-08-10 |
WO2012139707A1 (de) | 2012-10-18 |
US20140054165A1 (en) | 2014-02-27 |
CA2833048A1 (en) | 2012-10-18 |
DE102011016681A1 (de) | 2012-10-11 |
US9905399B2 (en) | 2018-02-27 |
TW201300561A (zh) | 2013-01-01 |
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