CA2888299C - Method and control unit for operating a plasma generation apparatus - Google Patents
Method and control unit for operating a plasma generation apparatus Download PDFInfo
- Publication number
- CA2888299C CA2888299C CA2888299A CA2888299A CA2888299C CA 2888299 C CA2888299 C CA 2888299C CA 2888299 A CA2888299 A CA 2888299A CA 2888299 A CA2888299 A CA 2888299A CA 2888299 C CA2888299 C CA 2888299C
- Authority
- CA
- Canada
- Prior art keywords
- ignition
- plasma
- voltage
- cathode
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000012423 maintenance Methods 0.000 claims abstract description 31
- 230000008569 process Effects 0.000 claims abstract description 13
- 238000001514 detection method Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- QHGVXILFMXYDRS-UHFFFAOYSA-N pyraclofos Chemical compound C1=C(OP(=O)(OCC)SCCC)C=NN1C1=CC=C(Cl)C=C1 QHGVXILFMXYDRS-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002844 continuous effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010285 flame spraying Methods 0.000 description 1
- -1 heli-urn Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
- Arc Welding Control (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12195367 | 2012-12-04 | ||
| EP12195367.3 | 2012-12-04 | ||
| PCT/EP2013/074851 WO2014086636A1 (de) | 2012-12-04 | 2013-11-27 | Verfahren und steuerungseinrichtung zum betrieb einer plasmaerzeugungseinrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2888299A1 CA2888299A1 (en) | 2014-06-12 |
| CA2888299C true CA2888299C (en) | 2021-08-10 |
Family
ID=47562993
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2888299A Active CA2888299C (en) | 2012-12-04 | 2013-11-27 | Method and control unit for operating a plasma generation apparatus |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9756713B2 (enExample) |
| EP (1) | EP2929759B1 (enExample) |
| JP (2) | JP6807154B2 (enExample) |
| CN (1) | CN104969665B (enExample) |
| CA (1) | CA2888299C (enExample) |
| ES (1) | ES2647851T3 (enExample) |
| WO (1) | WO2014086636A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2888299C (en) * | 2012-12-04 | 2021-08-10 | Oerlikon Metco Ag, Wohlen | Method and control unit for operating a plasma generation apparatus |
| US10886104B2 (en) | 2019-06-10 | 2021-01-05 | Advanced Energy Industries, Inc. | Adaptive plasma ignition |
| US11398369B2 (en) * | 2019-06-25 | 2022-07-26 | Applied Materials, Inc. | Method and apparatus for actively tuning a plasma power source |
| US11688584B2 (en) | 2020-04-29 | 2023-06-27 | Advanced Energy Industries, Inc. | Programmable ignition profiles for enhanced plasma ignition |
| JP7671680B2 (ja) * | 2021-10-29 | 2025-05-02 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5225658A (en) * | 1988-03-24 | 1993-07-06 | Kabushiki Kaisha Komatsu Seisakusho | Stopping a plasma arc cutter upon completion of cutting |
| JPH0661628B2 (ja) | 1988-05-24 | 1994-08-17 | 株式会社小松製作所 | プラズマアーク切断機およびその制御方法 |
| TW312890B (enExample) | 1995-10-20 | 1997-08-11 | Eni Inc | |
| US5982099A (en) * | 1996-03-29 | 1999-11-09 | Lam Research Corporation | Method of and apparatus for igniting a plasma in an r.f. plasma processor |
| CN1051490C (zh) * | 1996-09-20 | 2000-04-19 | 株式会社三社电机制作所 | 电弧切割机 |
| JP3469078B2 (ja) | 1998-03-09 | 2003-11-25 | 日鐵溶接工業株式会社 | プラズマ加工装置のアーク点火装置 |
| GB9825452D0 (en) * | 1998-11-21 | 1999-01-13 | Arc Kinetics Ltd | Improved welding apparatus and method |
| JP2004237321A (ja) | 2003-02-06 | 2004-08-26 | Komatsu Sanki Kk | プラズマ加工装置 |
| US20050109738A1 (en) * | 2003-11-21 | 2005-05-26 | Hewett Roger W. | Color coding of plasma arc torch parts and part sets |
| JP2006202605A (ja) * | 2005-01-20 | 2006-08-03 | Kanken Techno Co Ltd | プラズマ除害機用電源装置 |
| EP1855833B1 (en) * | 2005-03-11 | 2020-02-26 | PerkinElmer, Inc. | Plasma devices and method of using them |
| CN201217119Y (zh) * | 2008-07-04 | 2009-04-08 | 华丰科技企业股份有限公司 | 新型氩焊起弧倍压装置 |
| JP2011049103A (ja) | 2009-08-28 | 2011-03-10 | Nissan Motor Co Ltd | プラズマ発生方法 |
| CN201625832U (zh) | 2009-11-23 | 2010-11-10 | 深圳市瑞凌实业股份有限公司 | 具有前导弧控制装置的逆变电源等离子切割机 |
| JP4891384B2 (ja) * | 2009-12-10 | 2012-03-07 | 株式会社新川 | プラズマ発生装置 |
| CN102350579A (zh) * | 2011-04-11 | 2012-02-15 | 西安理工大学 | 一种空气等离子切割机切割网格状金属的防断弧切割方法 |
| CN202271092U (zh) * | 2011-10-17 | 2012-06-13 | 无锡市南方电器制造有限公司 | 数控等离子切割机非高频引弧电路 |
| CA2888299C (en) * | 2012-12-04 | 2021-08-10 | Oerlikon Metco Ag, Wohlen | Method and control unit for operating a plasma generation apparatus |
| DE102013109887A1 (de) * | 2013-09-10 | 2015-03-12 | Reinhausen Plasma Gmbh | Handgerät und Verfahren zur Plasmabehandlung |
-
2013
- 2013-11-27 CA CA2888299A patent/CA2888299C/en active Active
- 2013-11-27 CN CN201380060808.2A patent/CN104969665B/zh not_active Expired - Fee Related
- 2013-11-27 WO PCT/EP2013/074851 patent/WO2014086636A1/de not_active Ceased
- 2013-11-27 US US14/648,426 patent/US9756713B2/en not_active Expired - Fee Related
- 2013-11-27 EP EP13795530.8A patent/EP2929759B1/de active Active
- 2013-11-27 ES ES13795530.8T patent/ES2647851T3/es active Active
- 2013-11-27 JP JP2015544452A patent/JP6807154B2/ja not_active Expired - Fee Related
-
2019
- 2019-07-05 JP JP2019125782A patent/JP2019192647A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| ES2647851T3 (es) | 2017-12-26 |
| JP6807154B2 (ja) | 2021-01-06 |
| CN104969665B (zh) | 2018-04-13 |
| WO2014086636A1 (de) | 2014-06-12 |
| US9756713B2 (en) | 2017-09-05 |
| US20150319834A1 (en) | 2015-11-05 |
| EP2929759A1 (de) | 2015-10-14 |
| CN104969665A (zh) | 2015-10-07 |
| EP2929759B1 (de) | 2017-08-16 |
| JP2016506025A (ja) | 2016-02-25 |
| JP2019192647A (ja) | 2019-10-31 |
| CA2888299A1 (en) | 2014-06-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20181122 |