JP2019188349A - Inkjet coating device and inkjet coating method - Google Patents

Abstract

To provide an inkjet coating device and an inkjet coating method which can perform accurate coating even if a pitch of a recessed groove formed on a base material is narrow, without rotating the base material.SOLUTION: The inkjet coating device comprises a stage on which a base material is placed, a gantry part, provided across the stage, which can move in one direction or a main scanning direction together with the stage, and an inkjet head part, provided in the gantry part, which has a plurality of nozzles for discharging liquid droplets onto the base material. A coating film is formed on a substrate by discharging liquid droplets from the inkjet head part while moving the gantry part in the main scanning direction. The inkjet head part is provided to be movable in a sub-scanning direction orthogonal to the main scanning direction. When forming the coating film, the gantry part moves in the main scanning direction and at the same time the inkjet head part discharges liquid droplets while moving in the sub-scanning direction, to form the coating film on the substrate.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an ink jet coating apparatus and an ink jet coating method for forming a coating film having a predetermined pattern by discharging droplets on a substrate.

  Inkjet coating technology is used to form R, G, and B coating films by ejecting ink (droplets) to each pixel (film formation region) formed in a grid pattern on a substrate, such as a color filter. Has been applied. In recent years, it has been applied to the production of organic EL, alignment films, and circuit wiring patterns, and there has been a demand for higher precision in ejection positions.

  For example, a substrate used for a liquid crystal display panel has a groove 104 (see FIG. 7) extending in one direction formed by arranging electrodes extending in one direction in the active area. Then, a flat coating film is formed in the active area by applying an alignment film material to the concave groove 104 using an inkjet coating apparatus.

  As shown in FIG. 6, the inkjet coating apparatus includes a stage 100 on which the substrate W is placed, a gantry 101 that travels in one direction (main scanning direction) arranged across the stage 100, and the gantry The inkjet head unit 102 is provided in the nozzle 101, and droplets P are discharged from a large number of nozzles 103 (see FIG. 7) provided in the inkjet head unit 102 while moving the gantry unit 101 in the main scanning direction. Thus, a coating film is formed on the substrate W. That is, the gantry unit 101 discharges the droplets P from the nozzle 103 while traveling in the main scanning direction with the nozzle position of the inkjet head unit 102 positioned at the position of the concave groove 104 of the substrate W. Then, the coating liquid is applied not only to the concave groove 104 but also to the ridgeline (the convex portion 105 (see FIG. 7)), thereby forming a uniform coating film over the entire active area.

  In recent years, the pitch of the concave grooves 104 has become narrower as the display has higher precision and higher resolution, and has become narrower than the pitch of the nozzles 103 of the inkjet coating apparatus. That is, as shown in FIG. 7A, since the pitch of the nozzles 103 does not match the pitch of the concave grooves 104, while there are droplets P that enter the concave grooves 104, they are bounced by the convex portions 105 and intended concave. When there is a droplet P flowing in the concave groove 104 other than the groove 104, and as a result, as shown in FIG. 7B, there is a local 104a where the coating liquid is not sufficiently supplied (so-called coating omission). ) Occurs. Therefore, conventionally, the apparent pitch of the nozzles 103 relative to the substrate W is reduced by rotating the stage 100 and inclining the extending direction of the concave grooves 104 with respect to the nozzle arrangement direction of the inkjet head unit 102 by a predetermined angle. A droplet P is ejected. As a result, even when the pitch of the concave grooves 104 is narrow, a uniform application can be applied to the entire active area using the conventional inkjet head unit 102 as it is without forming the inkjet head unit 102 having the nozzle 103 with a new narrow pitch. A film can be formed (see, for example, Patent Document 1 below).

JP 2008-111994 A

  However, in the configuration in which the stage 100 is rotated as described above, there is a problem that a space for rotating the stage 100 is required and the inkjet coating apparatus is increased in size. In addition, since the distance over which the gantry unit 101 straddles the stage 100 becomes long, the straightness of the ink jet head unit 102 is affected, and the landing position accuracy of the droplet P ejected from the nozzle 103 may be affected. was there.

  The present invention has been made in view of the above-described problems, and an inkjet coating apparatus that can accurately coat even if the groove formed on the substrate has a narrow pitch without rotating the substrate. And an inkjet coating method.

  In order to solve the above problems, an inkjet coating apparatus of the present invention is provided across a stage on which a substrate is placed and the stage, and is relatively movable in one main scanning direction with respect to the stage. A gantry unit, and an inkjet head unit that is provided in the gantry unit and has a plurality of nozzles that eject droplets onto a substrate, and the gantry unit and the stage move relatively in the main scanning direction. An inkjet coating apparatus that forms a coating film on a substrate by ejecting droplets from an inkjet head unit while the inkjet head unit is provided so as to be movable in a sub-scanning direction perpendicular to the main scanning direction. During film formation, the gantry moves in the main scanning direction, and at the same time, the inkjet head moves in the sub-scanning direction and discharges droplets. More, is characterized in that a coating film is formed on the substrate.

  According to the inkjet coating apparatus, when forming a coating film in which droplets are ejected from the inkjet head unit, the inkjet head unit moves in the sub-scanning direction simultaneously with the gantry unit and the stage relatively moving in the main scanning direction. A droplet is discharged. That is, in the state where the ink jet head portion is initially arranged, even when the nozzle position does not match the pitch with respect to the concave groove of the substrate, the nozzle is moved to the concave groove position by moving the ink jet head portion in the sub-scanning direction. Droplets can be ejected at the positioned timing. Therefore, compared to a conventional inkjet coating apparatus that discharges droplets while moving only in the main scanning direction, it is possible to reliably discharge droplets into the grooves even on a substrate having a narrow groove pitch. A uniform coating film can be accurately formed over the entire active area of the narrow pitch substrate.

  The nozzles of the inkjet head unit may be arranged in the sub-scanning direction, and the arrangement dimension of the nozzles in the sub-scanning direction may be at least larger than the dimension of the substrate on the stage in the sub-scanning direction.

  According to this configuration, the number of scans of the ink jet head unit with respect to the base material necessary for forming the coating film can be reduced.

  In order to solve the above problems, the inkjet coating method of the present invention is a method in which a coating film is formed on a substrate by discharging droplets while moving the inkjet head unit on the substrate placed on a stage. An inkjet coating method including a coating film forming step to be formed, wherein in the coating film forming step, the inkjet head portion is moved while moving in a direction intersecting with a direction in which a plurality of concave grooves formed on the substrate extend. A coating film is formed on a substrate by discharging droplets.

  According to the inkjet coating method, in the coating film forming step, the droplets are ejected while moving in a direction intersecting with the extending direction of the concave groove of the base material. Even if it is not appropriate, it is possible to eject liquid droplets at the timing when the inkjet head portion moves to an appropriate position with respect to the groove by moving in a direction intersecting the direction in which the groove extends. Therefore, compared to the conventional inkjet coating method in which droplets are ejected while moving only in the main scanning direction, the droplets can be reliably ejected into the grooves even on a substrate having a narrow groove pitch. A uniform coating film can be accurately formed over the entire active area of the narrow pitch substrate.

  According to the present invention, even if the groove formed on the substrate has a narrow pitch without rotating the substrate, it can be applied with high accuracy.

It is a side view which shows roughly the inkjet coating device of this invention. It is a top view of the said inkjet coating apparatus. It is a figure which shows arrangement | positioning of the nozzle of an inkjet head part. It is the figure which looked at the positional relationship of a base material and an inkjet head part from the X-axis direction, (a) is a figure which shows the state in a certain moment, (b) is an inkjet head part slightly from the state of (a). It is a figure which shows the state which 21 moved. It is a block diagram which shows the control system of an inkjet coating device. It is a figure which shows the conventional inkjet coating device schematically. It is the figure which looked at the positional relationship of a base material and an inkjet head part from the X-axis direction, (a) is a figure which shows the state in a certain moment, (b) is an enlarged view of the broken-line part of (a). is there.

  Embodiments according to the inkjet coating apparatus of the present invention will be described with reference to the drawings.

  FIG. 1 is a side view showing an embodiment of an inkjet coating apparatus, and FIG. 2 is a top view of the inkjet coating apparatus.

  As shown in FIGS. 1 and 2, the inkjet coating apparatus includes a stage 10 on which a substrate W is placed, and a droplet unit 2 that applies a droplet P (coating material) to the substrate W. The coating unit is formed on the substrate W by discharging the droplets P to a predetermined landing position while the droplet unit 2 moves on the substrate W placed on the stage 10.

  In the following description, the direction in which the droplet unit 2 moves is the X-axis direction (main scanning direction), the direction orthogonal to the horizontal plane is the Y-axis direction (sub-scanning direction), and the X-axis and Y-axis directions. The description will be made with the direction orthogonal to both directions as the Z-axis direction.

  The ink jet coating apparatus has a base 1, and a stage 10 and a droplet unit 2 are provided on the base 1. Specifically, a stage 10 is provided on the base 1, and the droplet unit 2 is provided so as to straddle the stage 10 in the Y-axis direction.

  The stage 10 mounts the base material W, and can be mounted in a state where the mounted base material W maintains a horizontal posture. Specifically, the surface of the stage 10 is formed flat, and a plurality of suction holes are formed on the surface. A vacuum pump is connected to the suction hole. By operating the vacuum pump in a state where the substrate W is placed on the surface of the stage 10, a suction force is generated in the suction hole, and the substrate W is horizontal. It can be sucked and held on the surface of the stage 10 in a posture. In a state where the substrate W is held on the stage 10, the extending direction of the concave groove formed on the substrate W (also simply referred to as the concave groove S (see FIG. 4)) is directed to the X-axis direction. Be placed.

  In addition, the droplet unit 2 is applied by landing droplets P, which are coating materials, on the substrate W, and an inkjet head unit 21 that discharges the coating material, and a gantry that supports the inkjet head unit 21. Part 22.

  The gantry portion 22 is formed in a substantially portal shape having leg portions 22a disposed on both outer sides of the stage 10 in the Y-axis direction and beam members 22b that connect the leg portions 22a and extend in the Y-axis direction. Yes. An ink jet head portion 21 is attached to the beam member 22b, and the gantry portion 22 is attached so as to be movable in the X axis direction while straddling the stage 10 in the Y axis direction. In the present embodiment, rails (not shown) extending in the X-axis direction are installed at both ends of the base 1 in the Y-axis direction, and the leg portions 22a are slidably attached to the rails. A linear motor 81 (see FIG. 5) is attached to the leg portion 22a. By driving and controlling the linear motor 81, the gantry unit 22 moves in the X-axis direction and can be stopped at an arbitrary position. It has become.

  Further, the leg portion 22a is provided with an encoder 82 (see FIG. 5), and the position of the ink jet head portion 21 in the X-axis direction can be grasped from position information from the encoder 82. That is, the encoder 82 and a control device to be described later are connected, and the position on the X axis of the inkjet head unit 21 is detected by the control device that has received the output signal from the encoder 82.

  The beam member 22b is a columnar member that connects both the leg portions 22a. An ink jet head portion 21 is attached to the beam member 22b. Specifically, an ink jet head unit 21 is attached to a side surface on one side in the X-axis direction of the beam member 22b, and nozzles 31a and 41a (see FIG. 3) provided in the ink jet head unit 21 are provided on the stage 10. Installed in a posture facing the surface. Therefore, as the gantry unit 22 moves or stops in the X-axis direction, the inkjet head unit 21 can also be moved or stopped in the X-axis direction along with it, and by adjusting the movement amount of the gantry unit 22 The inkjet head unit 21 is positioned on the substrate W placed on the surface of the stage 10 so that the droplets P as the coating material can be discharged onto the substrate W.

  Moreover, the inkjet head part 21 integrates several nozzle 31a, 41a. In the present embodiment, the inkjet head unit 21 includes a first nozzle unit 30 having a plurality of nozzles 31a and a second nozzle unit 40 having a plurality of nozzles 41a. The nozzle unit 40 is fixed in a state of being arranged adjacent to each other in the X-axis direction. In the present embodiment, the same nozzle is used as the nozzle 31a and the nozzle 41a, and droplets P having the same particle size can be discharged. In addition, you may make it the structure which can discharge the droplet P from which a particle size differs by using a different shape nozzle with the nozzle 31a and the nozzle 41a.

  The inkjet head unit 21 is formed so that the first nozzle unit 30 and the second nozzle unit 40 can move together in the Y-axis direction along the beam member 22b. Specifically, the beam portion 22b is provided with a rail (not shown) extending in the Y-axis direction, and the inkjet head portion 21 is slidably attached to the rail. The linear motor 81 can be driven and controlled to be moved to an arbitrary position and stopped. The ink jet head unit 21 can move slightly in the Y-axis direction, and can accurately land the droplet P, which is a coating material, on the base material W at a predetermined position in the Y-axis direction. In other words, the beam member 22 b is provided with an encoder 82, and the position of the inkjet head unit 21 in the Y-axis direction can be grasped from position information from the encoder 82. The encoder 82 is connected to a control device to be described later, and the position on the Y axis of the inkjet head unit 21 is detected by the control device that has received the output signal from the encoder 82. Accordingly, when the inkjet head unit 21 moves in the Y-axis direction, the inkjet head unit 21 and the stage 10 move relatively, and the droplet P is landed on a predetermined position of the substrate W on the stage 10 with high accuracy. Be able to.

  As shown in FIG. 3, the first nozzle unit 30 includes a plurality of head modules 31 having nozzles 31a. In the present embodiment, the plurality of head modules 31 are arranged along the Y-axis direction (sub-scanning direction) and are arranged in a direction orthogonal to the application direction. The head module 31 has a plurality of nozzles 31a, and the nozzles 31a are provided in a state in which the nozzles 31a are aligned at a predetermined arrangement pitch in one direction. In the present embodiment, the arrangement direction dimension of the nozzles 31 a in the sub-scanning direction is configured to be larger than the dimension of the base material W in the sub-scanning direction. As a result, as shown in FIG. 2, when the gantry unit 22 moves in the X-axis direction, the inkjet head unit 21 moves in the Y-axis direction, and the so-called inkjet head unit 21 travels obliquely. All the application areas (active areas) on the substrate W can be made the landing area of the droplet P by one scan.

  The nozzle 31a is a general-purpose nozzle. When a driving voltage is applied to the head module 31, a common driving voltage is applied to each nozzle 31a, and a predetermined amount of liquid is supplied from each nozzle 31a. Liquid droplets P are discharged.

  Further, the head modules 31 are arranged so as to be shifted so as to have overlapping portions. In the example of FIG. 3, adjacent head modules 31 are alternately shifted in the X-axis direction. That is, these head modules 31 have different dimensions at the arrangement interval of the nozzles 31a and at both end portions of the head module 31, so that they are shifted in the X-axis direction while offsetting the dimensions of these both end portions. Arranged. That is, in the first nozzle unit 30, the normal nozzles 31a are arranged at equal intervals in the Y-axis direction when viewed in the X-axis direction, and all the normal nozzles 31a are viewed as the first nozzle unit 30 as a whole in the X-axis direction. Are arranged at a constant arrangement pitch along the Y-axis direction, and are arranged at equal intervals in the Y-axis direction when viewed from the X-axis direction.

  Note that the second nozzle unit 40 has the same configuration as the first nozzle unit 30, and thus the description thereof is omitted.

  Next, the configuration of the control system of the inkjet coating apparatus will be described with reference to the block diagram shown in FIG.

  FIG. 5 is a block diagram showing a control system of the control device 90 provided in the mounting apparatus. As shown in FIG. 5, this coating apparatus is provided with a control device 90 that controls driving of the various units described above. The control device 90 includes a main control unit 91, a storage unit 91a, a drive control unit 92, a position detection unit 93, a discharge control unit 94, and an input / output device control unit 95.

  The main control unit 91 drives and controls a drive device such as the linear motor 81 of each unit via the drive control unit 92 so as to execute a series of coating operations in accordance with a program stored in advance, and various types necessary for the coating operation. Performs computation. Specifically, the calculation of the ejection position and the creation and correction of the drive voltage for causing the head modules 31 and 41 to eject the droplets P can be performed. In the present embodiment, the landing position where the droplet P should land on the substrate W and the nozzles 31a and 41a to be ejected with respect to the landing position are selected. That is, while the landing position is determined so that the discharged droplets P are not biased to some of the concave grooves S of the base material W, the droplet amounts of the nozzles 31a and 41a stored in the storage unit 91a described later. Therefore, the nozzles 31a and 41a for the respective landing positions are selected so that a uniform coating film can be formed on the substrate W. Selection of the nozzles 31a and 41a with respect to the landing positions is stored in the storage unit 91a as mapping data, and when the actual application operation is started, operation control of each driving device and nozzles 31a and 41a is performed based on the mapping data. Is done.

  In addition, the main control unit has a storage unit 91a, and data input by an input / output device control unit 95, which will be described later, and calculation results calculated by the main control unit, for example, calculated mapping data are temporarily stored. Memorized.

  The drive control unit 92 controls the drive of the linear motor 81 and the like based on a control signal from the control main body unit 91. Specifically, by controlling the linear motor 81, the movement of the gantry unit 22 in the X-axis direction, the movement of the inkjet head unit 21 in the Y-axis direction, and the like are driven and controlled. In the present embodiment, the inkjet head unit 21 is controlled to move in the Y-axis direction while the gantry unit 22 moves in the X-axis direction, and the inkjet head unit 21 extends in the direction in which the concave groove S of the substrate W extends (this embodiment). It is controlled so that it can move in the direction crossing (in the X-axis direction in the form) (slope running).

  The position detection unit 93 detects the position of the gantry unit 22 and the position of the inkjet head unit 21 based on the signal from the encoder 82. Then, by detecting the position of the inkjet head unit 21, the position of each nozzle 31a, 41a is calculated and grasped.

  The discharge controller 94 controls the timing at which the droplets P are discharged from the nozzles 31a and 41a. That is, based on the mapping data described above, when each nozzle 31a, 41a is positioned at a predetermined position, the drive voltage is controlled to cause the droplet P to be ejected from the nozzle 31a, 41a. Thereby, the droplet P can be landed at a predetermined position. In the present embodiment, based on the mapping data, the predetermined nozzles 31a and 41a have reached the landing positions in the mapping data depending on the position of the gantry 22 detected by the position detector 93 and the position of the inkjet head 21. Sometimes, a driving voltage is applied and the droplet P is ejected.

  The input / output device controller 95 controls each input / output device such as the keyboard 83 and the touch panel 84. Specifically, the type of the substrate W and the initial discharge amount of the droplets P discharged from the nozzles 31 a and 41 a are stored, and can be changed from the keyboard 83 and the touch panel 84 through the input / output device controller 95. It has become.

  Next, the application | coating operation | movement of the inkjet coating apparatus of this embodiment is demonstrated.

  First, when the base material W is supplied onto the stage 10, the base material W is positioned on the stage 10 so that the extending direction of the concave grooves S of the base material W is along the X-axis direction, and is attracted and fixed onto the stage 10. Then, based on the base material W data inputted in advance, the main control unit 91 of the control device calculates the mapping data of the base material W and stores it in the storage unit 91a. That is, the landing position and the nozzles 31a and 41a are selected for the landing position so that a uniform coating film can be formed on the substrate W.

  Next, a droplet P is discharged to form a coating film on the substrate W. Specifically, based on the mapping data, while moving the gantry unit 22 in the X-axis direction, the inkjet head unit 21 is simultaneously moved in the Y-axis direction to discharge the droplets P from the nozzles 31a and 41a. That is, while moving in a direction intersecting with the direction in which the groove S of the substrate W extends, the droplets P are discharged when the nozzles 31a and 41a are located at predetermined positions, that is, at the landing positions of the nozzles 31a and 41a. To do.

  Here, FIG. 4 is a view of the positional relationship between the substrate W and the inkjet head unit 21 as viewed from the X-axis direction, FIG. 4A is a state at a certain moment, and FIG. 4B is FIG. It is a figure which shows the state which the inkjet head part 21 moved slightly from the state of a). For example, when the droplets P are ejected from the nozzles 31a and 41a, the droplets P landed directly on the concave grooves S remain in the concave grooves S as they are, but if they land on the convex portions T that form the concave grooves S, It is assumed that the droplet P that has landed at the center of the portion T flows into the concave grooves S on both sides of the convex portion T and flows to the convex portion T on the shifted side when landing on a position shifted from the center of the convex portion T. . Of the concave grooves S, specific concave grooves S are referred to as concave grooves S1 to S4, and specific nozzles 31a and 41a are also referred to as nozzles N1 to N3.

  Assuming that the inkjet head unit 21 and the groove S are in the positional relationship shown in FIG. 4A at the start of application, all of the liquid droplets P discharged from the nozzle N1 are in the groove S1. The amount of droplets is 1 for landing. Similarly, the amount of liquid droplets in the concave groove S2 is 1 for the nozzle N2. Further, since the droplet P ejected from the nozzle N3 lands on the right side of the convex portion T, the droplet P flows into the concave groove S4, and the amount of liquid droplet in the concave groove S4 becomes 1. On the other hand, since the droplet P is not supplied to the concave groove S3, the droplet amount is zero. However, since the inkjet head unit 21 also moves in the Y-axis direction, the liquid droplet P is also supplied to the concave groove S3 by discharging when the nozzle N2 is positioned on the concave groove S3. That is, conventionally, since application is performed by scanning only in the X-axis direction, there is a high possibility that a phenomenon of liquid leakage will occur in the concave groove S3. However, in the present invention, although there is a time difference, the concave groove S3 is also affected. The same droplet amount as that of the concave grooves S1 and S2 can be supplied. In this way, the droplets P are sequentially supplied to all the concave grooves S of the substrate W, and a uniform coating film is formed on the substrate W.

  When the coating film is formed on the base material W, the suction of the base material W is released and transported to a subsequent process by a transport device such as a robot hand.

  Thus, according to the ink jet coating apparatus of the above embodiment, when forming the coating film in which the droplets P are discharged from the ink jet head unit 21, the ink jet head unit 21 is moved simultaneously with the movement of the gantry unit 22 in the main scanning direction. The droplet P is ejected while moving in the sub-scanning direction. That is, in a state where the ink jet head portion is initially arranged, the nozzles 31a and 41a move in the sub-scanning direction even when the positions of the nozzles 31a and 41a are not aligned with the concave grooves S of the base material W. The droplet P can be ejected at the timing when 31a and 41a are positioned at the position of the groove S. Therefore, compared with the conventional inkjet coating apparatus that discharges the droplets P while moving only in the main scanning direction, the droplets P are reliably discharged into the grooves S even on the substrate W having a narrow pitch of the grooves S. Therefore, a uniform coating film can be accurately formed over the entire active area of the narrow pitch substrate W.

  Moreover, although the said embodiment demonstrated the example which forms a uniform coating film on the base material W by one driving | running | working operation | movement of the gantry part 22, the gantry part 22 was made to drive | work on the base material W in multiple times. A coating film may be formed. That is, the coating film is formed on the substrate W by causing the inkjet head unit 21 to run obliquely a plurality of times. By adopting such a configuration of traveling a plurality of times, the inkjet unit 21 can be reduced in size, and the arrangement dimension of the nozzles 31a and 41a in the sub-scanning direction can be made smaller than the sub-scanning direction dimension of the substrate W. it can. In this case, the vehicle may run multiple times in the same direction, or may run diagonally in one direction, and then run obliquely in a direction that intersects with the next. You may make it run.

  Moreover, although the said embodiment demonstrated the example which detects the position of the nozzles 31a and 41a from the information of the X-axis direction position of the gantry part 22, and the Y-axis direction position of the inkjet head part 21, and controls the position, the inkjet head The position control may be performed only with the position information in the X-axis direction while keeping the moving speed of the unit 21 in the Y-axis direction constant.

  In the above embodiment, the example in which the droplet unit 2 moves in the main scanning direction (X-axis direction) with respect to the stage 10 has been described. However, the droplet unit 2 is fixed and the stage 10 moves in the main scanning direction. However, the inkjet head unit 21 of the droplet unit 2 may move in the sub-scanning direction (Y-axis direction). For example, when a long substrate by so-called roll-to-roll is transported in the X-axis direction, or when the substrate W is transported in the X-axis direction by the levitation transport device (stage 10), the substrate transported in the X-axis direction By causing the droplet P to land while the inkjet head unit 21 moves in the Y-axis direction with respect to W, the inkjet head unit 21 travels obliquely relative to the substrate W to form a coating film. Can do.

2 Droplet unit 10 Stage 21 Inkjet head part 22 Gantry part S Concave groove W Base material

Claims (3)

A stage on which the substrate is placed;
A gantry section provided across the stage and movable relative to the stage in one main scanning direction;
An inkjet head unit provided in the gantry unit and having a plurality of nozzles for discharging droplets on a substrate;
An inkjet coating apparatus that forms a coating film on a substrate by ejecting droplets from an inkjet head unit while the gantry unit and the stage move relatively in the main scanning direction,
The inkjet head unit is provided so as to be movable in a sub-scanning direction orthogonal to the main scanning direction, and at the same time as the gantry unit moves in the main scanning direction when the coating film is formed, the inkjet head unit moves in the sub-scanning direction. An inkjet coating apparatus, wherein a coating film is formed on a substrate by discharging droplets while discharging.   The nozzles of the inkjet head unit are arranged in the sub-scanning direction, and the arrangement dimension of the nozzles in the sub-scanning direction is at least larger than the dimension of the substrate on the stage in the sub-scanning direction. The inkjet coating apparatus as described. An inkjet coating method including a coating film forming step of forming a coating film on a substrate by discharging droplets while moving the inkjet head unit on the substrate placed on the stage,
In the coating film forming step, the inkjet head unit forms a coating film on the substrate by discharging droplets while moving in a direction intersecting with a direction in which the plurality of concave grooves formed on the substrate extend. An ink jet coating method characterized by the above.

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