JP5200905B2 - Method of drawing a straight line with a droplet discharge head - Google Patents

Description

  The present invention relates to a straight line drawing method using a droplet discharge head, and more particularly, to a straight line drawing method using a droplet discharge head capable of drawing each of two or more straight lines having different directions on a recording material with high definition. About.

  A drawing apparatus that performs drawing by landing droplets on a recording material using a droplet discharge head is also suitable for industrial applications such as drawing a wiring pattern of a semiconductor substrate and a pixel pattern of a color filter in a liquid crystal display device. Widely used. In the droplet discharge head, a number of nozzles each discharging droplets are arranged, the nozzle row direction being the sub-scanning direction, and a stage that supports the recording material facing the droplet discharge head and the nozzle surface Are ejected while relatively moving in the main scanning direction and the sub-scanning direction, thereby drawing a predetermined pattern.

  By the way, in such a drawing apparatus, for example, when drawing two straight lines orthogonal to each other on the same recording material, the droplet discharge head and the recording material are moved in the main scanning direction while discharging the droplet. A straight line in one direction is drawn along a direction perpendicular to the nozzle row by relatively moving along the straight line, and then the straight line in the direction perpendicular to the straight line is a direction along the nozzle row direction of the droplet discharge head. Is drawing.

  However, when a straight line is drawn along the nozzle row direction of the droplet discharge head, there is a problem that it is difficult to draw a high-definition straight line due to variations in nozzle processing accuracy and stage accuracy. In particular, when a large number of droplet discharge heads are arranged in a staggered manner to form a line head that is long in the nozzle row direction, variations in the mounting position between the droplet discharge heads are also greatly affected.

  In addition, the straight line along the main scanning direction can be drawn at a stroke by relatively moving the droplet discharge head and the recording material relatively, but when drawing the straight line along the nozzle row direction, Since it is necessary to fill the gap between the nozzle pitches of the droplet discharge head with the droplets, there is a place where a time lag can be generated after the droplet is discharged until an adjacent droplet comes. For this reason, there is a problem that the flatness of the straight drawing surface is deteriorated. The flatness of the drawing surface causes a problem of deterioration in electrical aptitude, particularly in applications where a semiconductor wiring pattern is drawn using a conductive ink as a droplet.

Furthermore, if a straight line along the nozzle row direction is drawn using all the nozzles of the droplet discharge head, the straightness of the straight line will deteriorate, and the joint of adjacent droplets will appear as irregularities at the edge of the straight line. In other words, there is a problem that a high-definition straight line is not obtained.
JP 2003-305832 A

  Accordingly, an object of the present invention is to provide a straight line drawing method using a droplet discharge head capable of drawing each of two or more straight lines having different directions on a recording material with high definition.

  Other problems of the present invention will become apparent from the following description.

  The above problems are solved by the following inventions.

The invention described in claim 1 uses a droplet discharge head in which a large number of nozzles are linearly arranged on the nozzle surface, and the liquid is ejected from the nozzle toward the recording material supported on the stage facing the nozzle surface. While discharging droplets, the droplet discharge head and the stage are scanned by linearly moving in a direction different from the direction in which the nozzles are arranged, whereby two or more directions different from each other on the recording material. A method of drawing a straight line,
A position confirmation mark for defining a predetermined drawing direction by the droplet discharge head is formed on the recording material, and the droplet discharge head and the stage are relatively linearly moved prior to drawing. Then, after forming a confirmation straight line along the drawing direction at a predetermined position on the recording material, the confirmation is performed by recognizing the position confirmation mark and the confirmation straight line using an image recognition means. The degree of parallelism of the straight line for drawing with respect to the drawing direction defined by the mark for position confirmation is confirmed. If the parallelism is not parallel, the droplet discharge head and the stage are relatively rotated in the θ direction, and Adjust the position so that is at a predetermined angle with respect to the drawing direction defined by the position confirmation mark,
Next, after drawing the one of the two or more straight lines by scanning the liquid droplet ejection head and the stage relatively linearly along the first direction of the recording material. The liquid droplet ejection head and the stage are rotated relative to each other in the θ direction to change the relative scanning direction, which is different from the first direction in the recording material with respect to the recording material. The straight line in the one direction is a direction with respect to the recording material by performing scanning by drawing the droplet discharge head and the stage relatively linearly along the second direction in the recording material. A method of drawing a straight line by a droplet discharge head, wherein another straight line having a different diameter is drawn.

According to a second aspect of the invention, the same straight line drawn along the one direction, a straight line by the liquid droplet ejection head according to claim 1, wherein the drawing by using the same nozzle in the droplet discharge head Drawing method.

According to a third aspect of the invention, the liquid droplet ejection head and immobile, the stage side of the straight line by the liquid droplet ejection head according to claim 1 or 2, wherein the moving relative to the liquid droplet ejection heads Drawing method.

  According to the present invention, it is possible to provide a straight line drawing method using a droplet discharge head capable of drawing each of two or more straight lines having different directions on a recording material with high definition.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic perspective view showing an example of a drawing apparatus to which the present invention can be applied. The drawing apparatus 1 includes a head module 3 for performing ink jet drawing on an apparatus base 2 and a recording material on an upper surface. The work stage 4 for placing and supporting the work W, the θ rotation mechanism 5 for rotating the work stage 4 in the θ direction, and the work stage 4 and the θ rotation mechanism 5 are both linearly moved along the Y direction. The Y moving mechanism 6, the work stage 4, and the θ rotation mechanism 5 are each provided with an X moving mechanism 7 that linearly moves along the X direction, and a camera 8 that is an image recognition means that can visually recognize the work stage 4.

  The X direction and the Y direction are directions orthogonal to each other on the horizontal plane.

  The head module 3 is attached to a gantry 9 laid in parallel along the X direction in the vicinity of the end on the apparatus base 2 via a slider 10 and a θ rotation mechanism 11, and the slider 10 is attached to the gantry 9. By reciprocating along the X direction by sliding along, the θ rotating mechanism 11 rotates and moves in the θ direction around the direction along the Z direction, which is the normal direction perpendicular to the X and Y directions. Furthermore, the Z moving mechanism 12 can move up and down in the Z direction together with the θ rotating mechanism 11.

  FIG. 2 is a bottom view of the head module 3 as viewed from the nozzle surface side. The head module 3 is a plurality of droplet discharge heads (hereinafter simply referred to as “heads”), each of which can perform an ink dropping process by an ink jet method. ) 31, and the nozzle surface of the head 31 faces downward, and is arranged so as to be able to face the surface of the workpiece W on the workpiece stage 4 arranged below the head 31.

  Each head 31 has a nozzle row in which a large number of nozzles 32 are linearly arranged along the X direction, and each head 31 is attached to an attachment frame portion 34 formed in an opening in the head fixture 33, and adjacent heads. The head module 3 composed of one long line head is configured by arranging the nozzles 32 between 31 and 31 in a staggered manner so that the pitches are the same. Each mounting frame portion 34 is provided with an actuator 35 between the heads 31, and finely adjusts the position along the X direction of each head 31 with respect to the head fixture 33 by driving. The relative position can be adjusted. The actuator 35 can be configured by, for example, a piezoelectric element that performs a mechanical expansion / contraction motion by applying a voltage, a screw mechanism that rotates and expands / contracts when driven by a motor, and the like.

  The work stage 4 is a surface plate having a rectangular shape in plan view provided on the X moving mechanism 7 extending along the X direction via the θ rotation mechanism 5, and the upper surface thereof is formed by an ink dropping process from the head module 3. A horizontal placement surface for placing the workpiece W to be drawn is placed, and the placement surface is disposed at a predetermined height with respect to the nozzle surface of the head module 3. . The work stage 4 moves linearly along the X direction by sliding along the X movement mechanism 7 together with the θ rotation mechanism 5, and the X movement mechanism 6 extends along the Y direction. , 6 can be moved linearly along the Y direction together with the θ rotation mechanism 5, and further can be rotated and moved in the θ direction about the direction along the Z direction by the θ rotation mechanism 5. It is like that.

  Each position of the work stage 4 in the X direction, Y direction, and θ direction and each position of the head module 3 in the X direction, Z direction, and θ direction are the X movement mechanism 7, the Y movement mechanisms 6, 6, and the θ movement mechanism. 5, the slider 10, the θ rotation mechanism 11, and the Z movement mechanism 12 are configured to be detectable with high accuracy in nm order by encoders (not shown).

  FIG. 3 is a block diagram showing a schematic configuration inside the drawing apparatus 1.

  Reference numeral 100 denotes a calculation unit (CPU) that controls the whole, and controls the stage controller 101, the image processing unit 102, the fine adjustment mechanism driver 103, and the discharge control unit 104, respectively.

  The stage controller 101 controls the driving of the stage drivers 105 to 107 based on the control signal from the arithmetic unit 100, and rotates the X-axis motor 108 for moving the slider 10 in the X direction and the head unit 3 in the θ direction. A θ-axis motor 109 for driving the θ-rotation mechanism 11 for driving and a Z-axis motor 110 for driving the Z-moving mechanism 12 for moving the head unit 3 up and down along the Z-axis direction are driven.

  Further, the stage controller 101 controls driving of the stage drivers 111 to 113 based on a control signal from the arithmetic unit 100 and drives an X-axis motor 114 that drives an X moving mechanism 7 for moving the work stage 4 in the X direction. The Y axis motor 115 for driving the Y moving mechanism 6 for moving in the Y direction and the θ axis motor 116 for driving the θ rotating mechanism 5 for rotating in the θ direction are driven.

  The image processing unit 102 controls driving of the camera controller 117 based on a control signal from the calculation unit 100, and performs an imaging operation of the camera 8 provided integrally with the head unit 3 and processing of the captured image.

  The fine adjustment mechanism driver 103 controls the drive of the actuator 35 provided in each head 31 of the head unit 3 based on a control signal from the arithmetic unit 100 and finely adjusts the attachment position of each head 31 in the X direction. .

  The ejection control unit 104 controls driving of each head 31 of the head unit 3 based on a control signal from the calculation unit 100, and performs an ink dropping process based on predetermined drawing data.

  The drawing apparatus 1 relatively moves the head module 3 and the work stage 4, and according to each position information at that time, droplets from each head 31 of the head module 3 based on predetermined ejection pattern data. Is controlled so as to be landed on the surface of the workpiece W on the workpiece stage 4 so as to perform desired drawing.

  Next, a method for drawing two or more straight lines having different directions from each other using the drawing apparatus 1 will be described. Various operations described below are executed under the control of the arithmetic unit 100 in accordance with a predetermined program stored in advance in a predetermined recording area in the arithmetic unit 100 or a storage device (not shown).

  4 is a flowchart of the drawing method according to the present invention, FIG. 5 is a plan view of the work W, and FIGS. 6A to 6D are plan views of the work W in each step of the drawing method according to the present invention. In FIG. 6, the upper side in the drawing corresponds to the back side (gantry 9 side) on the apparatus base 2 in the drawing apparatus 1.

  Here, a case where two straight lines perpendicular to each other are drawn on the workpiece W will be described.

  First, a work W, which is a recording material, is placed on the work stage 4 (S1), and the position of the work stage 4 in the θ direction is finely adjusted so that the work W becomes an appropriate position in the XY direction. Perform (S2).

  As the fine adjustment method of the work stage 4, a known method can be adopted as appropriate. For example, as shown in FIG. 5, position confirmation marks m1 and m2 are formed in advance on the surface of the workpiece W. Here, the position confirmation mark m1 is an L-shaped mark formed at each of the four corners of the workpiece W, and the position confirmation mark m2 is a linear mark formed on each of the four sides of the workpiece W. The position confirmation marks m1 and m2 when the work stage 4 is stationary at a certain position are image-recognized by the camera 8 provided integrally with the head module 3, for example, three position confirmation marks m1. Are obtained, and the angular deviation of the workpiece W with respect to the Y direction and the X direction is calculated from the three position coordinates, and the drive of the θ rotation mechanism 5 is adjusted so as to eliminate the angular deviation, Fine adjustment of the position of the work stage 4 in the θ direction is performed.

  In FIG. 5, a rectangular area w1 surrounded by a broken line is a drawing area, and is an area for performing a predetermined drawing work on the workpiece W. An area w2 at the peripheral edge is a test area, and is an area for trial-drawing a confirmation straight line to be described later for confirming the parallelism of the straight line drawn on the workpiece W.

  Next, using any head 31 of the head unit 3, the work stage 4 is linearly moved in the Y direction while discharging droplets toward the test region w2 extending along the Y direction on the work W, and FIG. As shown in (a), a confirmation straight line Lta along the Y direction is formed on the workpiece W (S3).

  This confirmation straight line Lta is used to confirm whether or not the straight line drawn by moving the work stage 4 in the Y direction is drawn properly at an angle parallel to the Y direction on the work W. It is a straight line and it is sufficient that at least one droplet is formed by droplets ejected from at least one nozzle of one head.

  When the verification straight line Lta is drawn on a trial basis, the camera 8 is used to image-recognize, for example, three position verification marks m1 and the verification straight line Lta on the workpiece W (S4).

  At this time, the workpiece W is already in an appropriate position with respect to the Y direction and the X direction, and the two position confirmation marks m1 adjacent to the Y direction and the X direction are parallel to the Y direction and the X direction, respectively. Therefore, it is determined whether the confirmation straight line Lta is drawn at an angle parallel to the Y direction by recognizing images of the three position confirmation marks m1 and the confirmation straight line Lta. be able to.

  If not parallel, the angle difference of the confirmation straight line Lta with respect to the Y direction is calculated, and the drive of the θ rotation mechanism 5 is adjusted so as to eliminate the angle difference, whereby the position of the work stage 4 in the θ direction. Is finely adjusted (S5). After this fine adjustment, the processing from step S2 is repeated until the confirmation straight line Lta to be drawn is parallel to the Y direction.

  If it is parallel, it is determined that an appropriate straight line parallel to the Y direction can be drawn on the workpiece W by linearly moving the work stage 4 in the Y direction, and the adjustment operation is completed ( S6) After that, the droplet discharge operation based on the predetermined drawing data from each head 31 of the head unit 3 and the linear movement operation in the Y direction of the work stage 4 are cooperated, as shown in FIG. 5B. Then, a straight line (first straight line) L1 along the Y direction is drawn on the drawing area w1 on the workpiece W (S7).

  When drawing a straight line in one direction, the same straight line L1 drawn along one direction is drawn using the same nozzle in the head 31 of the head unit 3. By drawing with the same nozzle, a straight line with good straightness can be obtained, and a high-definition straight line with few irregularities can be drawn on the edge of the straight line.

  After drawing the straight line L1 in one direction on the workpiece W, the θ rotation mechanism 5 is driven by a predetermined amount in order to draw another straight line (second straight line) L2 in a direction orthogonal to the straight line L1. 3, the work stage 4 is rotated by 90 ° with each head 31 and the work W on the work stage 4 facing each other (S 8), and the position of the work stage 4 in the θ direction is finely adjusted in the same manner as in step S 1. (S9). As a result, the Y direction on the workpiece W so far changes the angle by 90 ° to the X inspection direction, and the previous X direction on the workpiece W changes by 90 ° to the Y direction.

  Thereafter, in the same manner as in the above step S3, the work stage 4 is moved in the Y direction while discharging one of the heads 31 of the head unit 3 toward the test area w2 extending along the Y direction on the work W. As shown in FIG. 6C, a confirmation straight line Ltb along the Y direction is formed on the workpiece W (S10).

  When the confirmation straight line Ltb is drawn on a trial basis, the image recognition operation (S11) of, for example, the three position confirmation marks m1 and the confirmation straight line Ltb on the work W, as in steps S4 to S6, the work in the case where they are not parallel. It is determined that an appropriate straight line parallel to the Y direction can be drawn on the work W by performing a fine adjustment operation (S12) of the position of the stage 4 in the θ direction and moving the work stage 4 in the Y direction. If so, the adjustment work is completed (S13).

  Thereafter, the droplet discharge operation based on the predetermined drawing data from each head 31 of the head unit 3 and the linear movement operation of the work stage 4 in the Y direction are cooperated, and as shown in FIG. With respect to the upper drawing area w1, another straight line (second straight line) L2 along the Y direction perpendicular to the straight line L1 is drawn (S14), and drawing is ended.

  According to such a method, even when the straight lines L1 and L2 in the directions orthogonal to each other are drawn on the same workpiece W, each of the straight lines L1 and L2 is a direction orthogonal to the nozzle row direction of each head 31 of the head unit 3. Since the drawing is performed along a certain Y direction, the drawing conditions of the straight lines L1 and L2 can be made the same, and the straight lines L1 and L2 can vary in nozzle processing accuracy, stage accuracy, and attachment of each head 31. It is possible to eliminate the influence of position variations and the like. In addition, since both the straight lines L1 and L2 can be drawn at once along the Y direction, there is no possibility that the flatness of the drawing surface is deteriorated or the straightness is deteriorated and unevenness appears in the edge portion. Accordingly, the straight lines L1 and L2 can be drawn on the workpiece W with high definition.

  Here, after drawing the straight line L1 in one direction and then rotating the work stage 4 by 90 ° in order to draw the straight line L2 in the other direction, the confirmation straight line Ltb is again formed in steps S10 to S13. Although the angle is confirmed after being formed, the processing in steps S10 to S13 may be omitted if sufficient reliability can be set for the angle adjustment operation of the work stage 4.

  In the embodiment described above, the straight lines L1 and L2 in the direction orthogonal to each other are drawn on the workpiece W. However, in the present invention, the directions of the straight lines to be drawn may be different from each other, and they are orthogonal to each other. The present invention is not limited, and the present invention can be similarly applied when drawing straight lines in directions that are oblique to each other. Also in this case, when the work stage 4 is rotated by a predetermined angle in order to draw the straight line L2 in the other direction after drawing the straight line L1 in one direction, the rotation angle is set to the position on the work W in step S8. What is necessary is just to confirm by recognizing an image using the confirmation mark m1 or m2.

  In addition, the straight lines having different directions can be two or more straight lines, and are not limited to the two-direction straight lines L1 and L2 described above, and can be similarly applied to drawing straight lines having three or more different directions. is there.

  When the angle of the drawing direction is changed in order to draw two or more straight lines in different directions along the Y direction on the workpiece W, the rotational movement between the head unit 3 and the workpiece W (work stage 4) side is relative. As described above, in addition to the mode in which the head unit 3 is fixed and only the workpiece W (work stage 4) side is rotated by the θ rotation mechanism 5, the workpiece W (work stage 4) side is fixed. Thus, only the head unit 3 can be rotated and moved by the θ rotation mechanism 11 or both can be rotated and moved in opposite directions. However, the accuracy of the head unit 3 that requires high accuracy can be maintained. From the viewpoint of achieving this, it is preferable that the head unit 3 is fixed and only the workpiece W (work stage 4) side is rotated.

  Similarly, the linear movement between the head unit 3 and the workpiece W (work stage 4) may be relative, and as described above, the head unit 3 is not moved and only the workpiece W (work stage 4) side is moved. In addition to a mode in which the head is moved linearly in the Y direction, a mode in which only the head unit 3 is linearly moved in the Y direction without moving the workpiece W (work stage 4) side, or both are mutually opposite along the Y direction. Although it is possible to adopt a mode of linearly moving in the direction, it is preferable from the same viewpoint as described above that the head unit 3 is not moved and only the workpiece W (work stage 4) side is linearly moved.

  The head unit 3 is not limited to a line head that is long in the X direction in which a large number of heads 31 are arranged, and may be a single head 31. In this case, when drawing a plurality of straight lines over a width exceeding the width of the nozzle row along the X direction, once drawing a straight line over the width of the nozzle row of the head 31 along the Y direction, An operation of moving the work W (work stage 4) by a predetermined distance corresponding to the width of the nozzle row along the X direction is performed.

  In the embodiment described above, two or more straight lines having different directions are drawn by using only one head unit 3 having a plurality of heads 31 in which nozzles are linearly arranged along the X direction. However, two or more straight lines having different directions can be drawn by using different heads or head units.

  FIG. 7 is a conceptual diagram of such a drawing method. In this embodiment, the first head 3A and the second head 3B are different in the arrangement direction of the nozzle rows with respect to the work W placed on the work stage 4. There is a feature in using. Here, it is assumed that the nozzle rows of the first head 3A are arranged along the X direction, and the nozzle rows of the second head 3B are arranged along the Y direction. Each of the first head 3A and the second head 3B is not limited to a single head structure, and may be a head unit including a plurality of heads.

  Here, when drawing straight lines in directions orthogonal to each other, first, the first head 3A is used, and the first head 3A and the work stage 4 are relatively moved along the Y direction (first direction). A straight line L1 is drawn by moving the line and scanning (FIG. 7A), and then using the second head 3B, the second head 3B and the work stage along the X direction (second direction). 4 is relatively moved linearly and scanned to draw a straight line L2 (FIG. 7B). Thereby, two straight lines L1 and L2 in a direction orthogonal to each other can be drawn on the workpiece W. Since both straight lines L1 and L2 are drawn along a direction orthogonal to the nozzle row direction of each head 3A and 3B, the drawing conditions of the straight lines L1 and L2 can be made the same, and the same as above. A high-definition straight line can be drawn.

  The different directions of the two straight lines L1 and L2 are the angles formed by the first head 3A and the second head 3B and the relative relationship between the first head 3A, the second head 3B, and the work stage 4. By appropriately setting the linear movement direction, it is possible to draw straight lines not only in the orthogonal direction but also in various directions.

  Further, when drawing three or more straight lines different from each other, the first head 3A or the second head 3B and the work stage 4 are relatively rotated in the θ direction, and then relative to each other as described above. The drawing may be performed by moving the line to a straight line, or the number of heads or head units may be further increased depending on the number of directions of the straight line to be drawn. May be.

  By installing the first head 3A and the second head 3B on the same apparatus, drawing can be performed on the same apparatus.

  For example, FIG. 8 is a plan view of a drawing apparatus 1A in a mode in which the first head 3A and the second head 3B are installed on the same apparatus, and the same reference numerals as those in FIG. Yes.

  A gantry 91 along the X direction and a gantry 92 along the Y direction are provided on the apparatus base 2. The first head 3 </ b> A is disposed on the gantry 91, and the second head 3 </ b> B is disposed on the gantry 92. ing. In the first head 3A, nozzle rows are arranged along the X direction, and in the second head 3B, nozzle rows are arranged along the Y direction. When drawing two straight lines L1 and L2 perpendicular to the workpiece W on the work stage 4, the work stage 4 is moved linearly along the Y direction and the straight line L1 is drawn by the first head 3A. Then, the work stage 4 is linearly moved along the X direction, and the straight line L2 is drawn by the second head 3B.

  In this aspect, after drawing the straight line L1, the straight line L2 can be drawn without having to rotate the workpiece W (work stage 4) in the θ direction.

  FIG. 9 is a plan view of another embodiment of the drawing apparatus 1B in which the first head 3A and the second head 3B are installed on the same apparatus, and parts having the same reference numerals as those in FIG. Show.

  The apparatus base 2 is formed long in the Y direction, and gantry 91, 92 along the X direction is positioned at an interval. The gantry 91 is provided with the first head 3A, and the gantry 92 is provided with the second head 3B. In both the first head 3A and the second head 3B, nozzle rows are arranged along the X direction. When drawing two straight lines L1 and L2 orthogonal to the workpiece W on the stage 4, the stage 4 is linearly moved along the Y direction, and the straight line L1 is drawn by the first head 3A. 4 is rotated by 90 ° in the θ direction, and the stage 4 is linearly moved along the Y direction, and a straight line L2 is drawn by the second head 3B.

  In this aspect, two straight lines with different directions can be continuously drawn on the workpiece W.

  Further, the first head 3A and the second head 3B are not limited to those installed on the same apparatus as described above, and may be drawn separately at different stations corresponding to the direction of the straight line to be drawn.

The schematic perspective view which shows an example of the drawing apparatus which can apply this invention Bottom view of head unit Block diagram showing a schematic internal configuration of the drawing apparatus Flowchart of drawing method according to the present invention Work plan (A)-(d) is a top view of the workpiece | work in each process of the drawing method which concerns on this invention. (A) and (b) are conceptual diagrams of a method of drawing two or more straight lines having different directions using different heads. The top view of the drawing apparatus of the aspect which installed the 1st head and the 2nd head on the same apparatus The top view of the drawing apparatus of another aspect which installed the 1st head and the 2nd head on the same apparatus

Explanation of symbols

1: Drawing device 2: Device base 3: Head unit 31: Head 32: Nozzle 33: Head fixture 34: Mounting frame 35: Head position fine adjustment mechanism 4: Work stage 5: θ rotation mechanism 6: Y movement mechanism 7: X movement mechanism 8: Camera 9: Gantry 10: Slider 11: θ rotation mechanism 12: Z movement mechanism W: Workpiece L1, L2: Straight line

Claims (3)

Using a droplet discharge head in which a large number of nozzles are linearly arranged on the nozzle surface, the droplet is discharged while discharging droplets from the nozzle toward a recording material supported on a stage facing the nozzle surface. A method of drawing two or more straight lines having different directions on the recording material by scanning the ejection head and the stage while linearly moving in a direction different from the nozzle arrangement direction. ,
A position confirmation mark for defining a predetermined drawing direction by the droplet discharge head is formed on the recording material, and the droplet discharge head and the stage are relatively linearly moved prior to drawing. Then, after forming a confirmation straight line along the drawing direction at a predetermined position on the recording material, the confirmation is performed by recognizing the position confirmation mark and the confirmation straight line using an image recognition means. The degree of parallelism of the straight line for drawing with respect to the drawing direction defined by the mark for position confirmation is confirmed. If the parallelism is not parallel, the droplet discharge head and the stage are relatively rotated in the θ direction, and Adjust the position so that is at a predetermined angle with respect to the drawing direction defined by the position confirmation mark,
Next, after drawing the one of the two or more straight lines by scanning the liquid droplet ejection head and the stage relatively linearly along the first direction of the recording material. The liquid droplet ejection head and the stage are rotated relative to each other in the θ direction to change the relative scanning direction, which is different from the first direction in the recording material with respect to the recording material. The straight line in the one direction is a direction with respect to the recording material by performing scanning by drawing the droplet discharge head and the stage relatively linearly along the second direction in the recording material. A method of drawing a straight line by a droplet discharge head, wherein another straight line having a different diameter is drawn. Same straight line drawn along the one direction, the linear method of drawing using a liquid droplet ejecting head according to claim 1, wherein the drawing by using the same nozzle in the droplet discharge head. 3. The method of drawing a straight line by the droplet discharge head according to claim 1, wherein the droplet discharge head is fixed and the stage side is moved with respect to the droplet discharge head.

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