JP2019135465A - センサ装置 - Google Patents
センサ装置 Download PDFInfo
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- JP2019135465A JP2019135465A JP2018018285A JP2018018285A JP2019135465A JP 2019135465 A JP2019135465 A JP 2019135465A JP 2018018285 A JP2018018285 A JP 2018018285A JP 2018018285 A JP2018018285 A JP 2018018285A JP 2019135465 A JP2019135465 A JP 2019135465A
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- Japan
- Prior art keywords
- temperature
- sensor
- circuit chip
- sensor element
- signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/01—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using semiconducting elements having PN junctions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/20—Compensating for effects of temperature changes other than those to be measured, e.g. changes in ambient temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
- G01L19/143—Two part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Volume Flow (AREA)
- Measuring Fluid Pressure (AREA)
- Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
Abstract
Description
以下、本発明の第1実施形態について図を参照して説明する。本実施形態に係るセンサ装置は、測定対象の温度を検出可能に構成されたものである。センサ装置は取付対象として例えば配管に固定され、配管内の測定対象の温度を検出する。測定対象は、例えばオイル等の媒体である。測定対象は冷媒等の液体やガス等の気体のように、他の媒体の場合もある。
本実施形態では、第1実施形態と異なる部分について説明する。本実施形態では、センサ素子151は、測定対象の圧力を検出する。このため、センサチップ150は図示しないダイヤフラムを有している。
上記各実施形態で示されたセンサ装置100の構成は一例であり、上記で示した構成に限定されることなく、本発明を実現できる他の構成とすることもできる。例えば、センサ装置100の取付対象は配管200に限られず、容器等の取付対象に固定されても構わない。この場合、センサ装置100は容器内の測定対象の温度を検出する。
151 センサ素子
152 ピエゾ抵抗素子
160 回路チップ
165 検出素子
Claims (6)
- 測定対象の温度を検出し、前記測定対象の温度に応じた温度信号を出力するセンサ素子(151)と、
前記検出信号を入力して信号処理を行う回路チップ(160)と、
を備え、
前記温度信号は、前記測定対象と前記センサ素子との温度差に起因するセンサ誤差を含み、
前記センサ誤差が前記温度信号に含まれる場合、前記センサ誤差に応じた前記センサ素子と前記回路チップとの温度差が発生し、
前記回路チップは、当該回路チップの温度を検出する検出素子(165)を有し、前記検出素子によって検出された当該回路チップの温度と、前記センサ素子によって検出された前記測定対象の温度と、の温度差に応じて前記温度信号を補正し、補正後の温度信号を外部に出力するセンサ装置。 - 前記センサ誤差は、前記回路チップと前記センサ素子との温度差に対して一定の増加率で増加し、
前記回路チップは、前記回路チップと前記センサ素子との温度差に対して前記一定の増加率と同じ割合の一定の減少率で減少する誤差補正値を生成し、前記誤差補正値を前記温度信号に加算することにより、前記センサ誤差を補正する請求項1に記載のセンサ装置。 - 前記センサ素子は、前記測定対象の温度とは異なる物理量として、前記測定対象の温度の他に、前記測定対象の圧力、流量、粘度、湿度、加速度のいずれかを検出する請求項1または2に記載のセンサ装置。
- 前記回路チップは、前記補正後の温度信号に基づいて、前記測定対象の温度とは異なる物理量を補正する請求項3に記載のセンサ装置。
- 前記センサ素子及び前記検出素子は、前記測定対象の温度に応じて抵抗値が変化するP型半導体からなる抵抗素子(152)によって構成されている請求項1ないし4のいずれか1つに記載のセンサ装置。
- 前記センサ素子及び前記検出素子は、正の抵抗温度係数を持ち、また、それぞれの前記抵抗温度係数の値が等しくなるように不純物濃度が調整されている請求項5に記載のセンサ装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018018285A JP2019135465A (ja) | 2018-02-05 | 2018-02-05 | センサ装置 |
DE112018007013.1T DE112018007013T5 (de) | 2018-02-05 | 2018-11-30 | Sensorvorrichtung |
PCT/JP2018/044245 WO2019150745A1 (ja) | 2018-02-05 | 2018-11-30 | センサ装置 |
CN201880088277.0A CN111670348A (zh) | 2018-02-05 | 2018-11-30 | 传感器装置 |
US16/936,927 US20200355560A1 (en) | 2018-02-05 | 2020-07-23 | Sensor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018018285A JP2019135465A (ja) | 2018-02-05 | 2018-02-05 | センサ装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2019135465A true JP2019135465A (ja) | 2019-08-15 |
Family
ID=67478010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018018285A Pending JP2019135465A (ja) | 2018-02-05 | 2018-02-05 | センサ装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200355560A1 (ja) |
JP (1) | JP2019135465A (ja) |
CN (1) | CN111670348A (ja) |
DE (1) | DE112018007013T5 (ja) |
WO (1) | WO2019150745A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220291055A1 (en) * | 2021-03-12 | 2022-09-15 | Allegro Microsystems, Llc | Sensor interface with temperature signal processing |
US11703399B2 (en) * | 2021-03-25 | 2023-07-18 | Rosemount Aerospace Inc. | Surface mount temperature measurement |
DE102021205378A1 (de) | 2021-05-27 | 2022-12-01 | Robert Bosch Gesellschaft mit beschränkter Haftung | Sensorstruktur und Drucksensor |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003344181A (ja) * | 2002-05-22 | 2003-12-03 | Mitsumi Electric Co Ltd | 温度センサ回路 |
JP2012159314A (ja) * | 2011-01-31 | 2012-08-23 | Hitachi Automotive Systems Ltd | 吸気温度センサおよびそれを有する熱式空気流量計 |
JP2016523368A (ja) * | 2013-06-25 | 2016-08-08 | ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 測定センサを通過する気体の温度を決定するための方法及び装置 |
JP2016170135A (ja) * | 2015-03-16 | 2016-09-23 | 三菱電機株式会社 | 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5820262A (en) * | 1996-12-05 | 1998-10-13 | Johnson Service Company | Smart refrigerant sensor |
US7734440B2 (en) * | 2007-10-31 | 2010-06-08 | Agere Systems Inc. | On-chip over-temperature detection |
WO2010025728A1 (en) * | 2008-09-05 | 2010-03-11 | Danfoss A/S | A method for calibrating a superheat sensor |
JP5981319B2 (ja) * | 2012-11-22 | 2016-08-31 | 日立オートモティブシステムズ株式会社 | 吸気温度センサ装置および流量測定装置 |
EP2930340B1 (en) * | 2012-12-10 | 2019-02-27 | Volvo Truck Corporation | Fuel temperature estimation device |
-
2018
- 2018-02-05 JP JP2018018285A patent/JP2019135465A/ja active Pending
- 2018-11-30 CN CN201880088277.0A patent/CN111670348A/zh active Pending
- 2018-11-30 DE DE112018007013.1T patent/DE112018007013T5/de not_active Withdrawn
- 2018-11-30 WO PCT/JP2018/044245 patent/WO2019150745A1/ja active Application Filing
-
2020
- 2020-07-23 US US16/936,927 patent/US20200355560A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003344181A (ja) * | 2002-05-22 | 2003-12-03 | Mitsumi Electric Co Ltd | 温度センサ回路 |
JP2012159314A (ja) * | 2011-01-31 | 2012-08-23 | Hitachi Automotive Systems Ltd | 吸気温度センサおよびそれを有する熱式空気流量計 |
JP2016523368A (ja) * | 2013-06-25 | 2016-08-08 | ローベルト ボッシュ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 測定センサを通過する気体の温度を決定するための方法及び装置 |
JP2016170135A (ja) * | 2015-03-16 | 2016-09-23 | 三菱電機株式会社 | 流量測定装置に一体に設けられた物理量測定装置および物理量測定方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2019150745A1 (ja) | 2019-08-08 |
US20200355560A1 (en) | 2020-11-12 |
DE112018007013T5 (de) | 2020-11-05 |
CN111670348A (zh) | 2020-09-15 |
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